KR100928476B1 - Method for manufacturing precision pole pole workpiece using uniform growth phenomenon of pole pole workpiece and pole pole workpiece by the method - Google Patents

Abstract

The present invention relates to a method for manufacturing a precision pole pole workpiece using the uniform growth phenomenon of pole pole workpiece and to a pole pole fabricated by the method, the base electrode base and the base electrode base as a non-conductor as a basic insulation A basic master configured to be constructed, wherein the basic insulating portion is set to a size larger than a target width; Electroforming the foundation master to form a precipitated metal layer on a surface portion of the foundation electrode base; Gradually reducing the exposed upper surface of the basic insulating portion through horizontal growth of the precipitated metal layer; When the exposed surface width of the basic insulating portion is reduced to the target width (b) to immediately stop the electric pole machining; to constitute the first electric pole workpiece through, characterized in that the pole pole is processed in the basic master By controlling the vertical and horizontal growth conditions of the pole pole product, the ultra-precise object with the desired target width is formed.The adjustment factor uses all factors such as the pole pole processing time, the pole bath environment, the magnitude of the electric current, and the stirring environment. Can be adjusted as a whole.

Basic Electrode Base, Basic Insulation, Primary Pole Workpiece, Secondary Pole Workpiece, Target Width

Description

Manufacturing method of precision pole pole workpiece using uniform growth phenomenon of pole pole workpiece and the pole pole processed material by the method {The Method of Manufacturing Precise Electro-formed Material}

1 is an explanatory diagram of a basic master having a basic insulating portion of a desired size formed on a basic electrode base as a conductor.

2 is an explanatory diagram of a method of manufacturing a first order pole workpiece of precise dimensions using the uniform growth phenomenon of the pole pole workpiece.

3 is an explanatory diagram of a method of manufacturing a second pole pole workpiece of precise dimensions using the uniform growth phenomenon of the pole pole workpiece.

4 illustrates an embodiment in which a recessed base insulating part is formed in a base electrode base that is a conductor.

<Brief description of the symbols in the drawings shown>

One; A base electrode base 2; Basic insulation part

3; Precipitated metal layer 4; Primary Pole Work

5; Secondary pole work 6; projection part

7; Depression

The present invention relates to a manufacturing method for manufacturing a pole pole processed article that requires super precise dimensional management and a pole pole manufactured by the method.

The ultra-precise electroformed workpiece is composed of metal, and these articles are often used in semiconductors and electronic devices as metal fine patterns.

Metal micropatterns can be used not only as circuits for current flow but also in various forms and applications. For example, it may be used as a metal filter, and may be used as an electromagnetic shielding device for shielding electromagnetic waves. As such, the metal micropattern is a display component of an imaging device, and its use is gradually increasing.

Such metal patterns develop into finer and finer patterns as the industry develops. In addition, the finer the pattern, the more precise dimension management is required.

The present invention can make such an ultrafine pattern into a desired shape and size.

Conventionally, an etching method has been mainly used to form a fine pattern. In the conventional etching method, a photosensitive material is applied to a metal thin film, and then a photosensitive portion is formed on the photosensitive material by a film, and then immersed in an etching solution to form a fine metal pattern through an etching process.

In general, micropatterns of several tens of microns or more in size can be easily processed by conventional etching methods. However, there is a limit to the conventional etching method in the case where the spacing between the metal part and the metal part in the fine pattern must be managed in the size of several microns.

The production of the fine metal pattern by the conventional etching method has a limit of its precision due to the method of corrosion of the metal.

The reason is that when etching, the material to be processed is subjected to both side corrosion as well as vertical corrosion. Because of this, the etching method clearly has a limit of the width that can be processed.

Another conventional technique for producing a fine pattern of another form is to configure a fine pattern by the electric pole master. However, the electrode part of the conventional Jeonju master had only a few microns in size and had a definite limit in making a large area. Therefore, the conventional ultra-fine pattern by Jeonju Master also had a limit.

However, the present invention provides a technique that can be produced in the order of a few microns of the electroplated workpiece, thereby making it very easy to manufacture a pole master having a micron electrode portion using the present invention.

The present invention has a large feature that can not only configure the size of the target width is extremely precise, but also increase the size of the workpiece.

The conventional general electric pole workpiece can be obtained by subjecting the electric pole master consisting of the insulating part and the electrode part to the electric pole machining. The width of the electrode portion of the pole master is configured by the target width.

However, when electroforming is performed using the electro-pole master whose width of the conventional electrode part is comprised of the target width, when the target width is minute, extreme limit is exposed. In other words, how to process the electrode portion to obtain the electroplated workpiece having a target width of only a few microns.

In some cases, even if such an electrode portion is manufactured for a small area, it is impossible to make such an electrode portion over a large area, and it is a problem that is difficult to solve in manufacturing technology as well as in terms of cost and efficiency.

In the present invention, in order to solve the problems of the conventional machining method, it discloses a method for manufacturing a full-length workpiece capable of ultra-precision dimension control. Through the present invention, it is possible to manufacture a first pole pole workpiece or a second pole pole workpiece having a desired size and shape of several microns.

 The present invention is characterized in that the ultra-precision workpiece is manufactured by using the vertical and horizontal growth of the pole pole, the vertical growth of the pole pole determines the thickness of the first pole pole, the horizontal growth of the pole pole Determine the size of the gap width of the space for the blank post work piece.

In the present invention, the size and shape of the base insulation portion formed in the foundation master of the present invention, the molten metal state, the state of the electric bath, the processing time of the electric pole, the strength of the current, the state of stirring, etc., by appropriately precisely controlling the electric pole of the electric pole workpiece It is characterized by extremely easy size control up to several microns.

The present invention relates to a method for producing a precision pole pole workpiece by using the uniform growth phenomenon of the pole pole workpiece and the pole pole workpiece produced by the method.

The present invention makes it possible to manufacture precision pole pole workpiece by using the uniform growth phenomenon of pole pole workpiece.

In the present invention, the uniform growth phenomenon of the electroformed workpiece means that the electroplated workpiece grows accurately and uniformly in the uniform environment and the environment of the uniform dimensions when the electroplating is performed on the basic master having the basic insulation formed on the basic electrode base as the conductor. Means a phenomenon.

This is of course the case where all the conditions, such as the size and shape and state of the base insulation part composed of the foundation master, the state of the base electrode base, the state in the electric bath, the uniform supply state of electric current, and the uniform stirring state, are ideally provided. to be.

The present invention provides a method for manufacturing a precision pole pole workpiece using the uniform growth phenomenon of the pole pole, comprising a base master consisting of a base electrode base which is a conductor and a base insulating portion which is a non-conductor in the base electrode base, A process of manufacturing a basic master, wherein the basic insulating portion is set to a size larger than the target width; Electroplating the foundation master to form a precipitate deposit layer on a surface of the foundation electrode base; Gradually reducing the exposed upper surface of the basic insulating portion through horizontal growth of the precipitated metal layer; When the exposed surface width of the basic insulating portion is reduced to the target width (b) to stop the electric pole processing immediately; characterized in that to configure the first primary pole workpiece through.

In another aspect, the present invention is the step of applying the release material to the first pole-casting workpiece having the target width, and then again pole-processing on the first pole-casting workpiece to the second pole pole workpiece; And demolding the second pole pole processed product of the pole pole processed from the first pole pole processed material. The second pole pole formed workpiece having a protrusion and a depression may be manufactured.

In the present invention, the second pole pole workpiece may be composed of the first pole pole workpiece and a heterogeneous metal. In addition, the method may further include applying an extremely thin conductive material to the exposed surface of the basic insulating portion and the surface of the first electric cast workpiece immediately before applying the release material. As an example of this, vacuum deposition of a metal may be mentioned.

In the present invention, the basic insulating portion can be manufactured in various forms. As an example, after the photosensitive material is applied to the base electrode base through which current flows, the photosensitive material may be realized by constructing an exposed part having a desired pattern through a film, or applying an insulating material to the base electrode base and insulating the same. The material may be processed by machining or ion beam or laser to form the basic insulation.

Of course, the width of the base insulation portion is set to a size larger than the target width, the size of the target width is set by accurately calculating all the environment and processing conditions.                     

In the present invention, the basic insulating portion is determined by the shape of the precision electroplating (the present invention may be expressed as a fine pattern of a metal material) which is a result to be processed.

That is, it is composed of a shape proportional to the metal micropattern and the size must be drawn with an accurate design considering the target width.

The shape of the basic insulating portion or the shape of the fine pattern is usually a pattern of a horizontal line or a vertical line, and in some cases, it is also a lattice pattern composed of a horizontal line and a vertical line.

The shape of the basic insulating part to be used in the present invention is also a pattern of a horizontal line or a vertical line in many cases, and in many cases it is also a grid pattern consisting of a horizontal line and a vertical line. However, of course, it can be configured in a variety of forms.

Hereinafter will be described in detail based on the accompanying drawings.

FIG. 1 is an explanatory diagram of a basic master having a basic insulating portion formed in a desired shape and size on a basic electrode base as a conductor.

Sectional drawing of the basic master which comprised the basic insulation part 2 of width a and pitch p is shown on the flat plate 1 which is an electrical conductor. The basic insulation part is designed in proper size in consideration of the target width of the pole work piece. Of course, the width of the base insulation portion is set to a size larger than the target width, the size of the target width is set by accurately calculating all the environment and processing conditions.

The basic insulation portion is configured in a form proportional to the shape of the target pole-shaped workpiece (metal micropattern). The basic insulation portion may be configured in the form of a horizontal line or a vertical line, or in the form of a lattice in which horizontal and vertical lines are formed at the same time. In addition, the basic insulation portion may be configured in various curved patterns.

The basic insulation 2 is manufactured in various ways. A photoresist layer is formed on the basic electrode base 1 by using a photosensitive material, and the basic insulation portion may be configured by an exposure layer configured by exposing the photosensitive layer. After forming the insulating layer in 1), the insulating layer may be processed by laser or machining to form a basic insulating portion.

2 is an explanatory diagram of a method of manufacturing a first order pole workpiece of precise dimensions using the uniform growth phenomenon of the pole pole workpiece. In order to construct the first electric pole workpiece, electric pole machining is started in the basic master of the present invention. In the initial time of electric pole machining, the dissolved molten metal of the electric pole machining bath starts to precipitate only on the exposed surface portion where the base insulating portion 2 does not exist on the base electrode base.

The molten metal is soon formed into the precipitated metal layer (3). At this time, all the surfaces of the base electrode base except for the base insulating portion is composed of the electrode metal layer.

The thickness of the deposited metal layer 3 is gradually increased. Before the thickness of the precipitated metal layer grows by the height of the basic insulating portion 2, the molten metal is formed on the upper portion of the basic insulating portion 2; It does not precipitate. Therefore, in this case, the precipitated metal layer is only grown vertically.

When the pole processing continues and the thickness of the precipitated metal layer 3 is equal to the height of the base insulation portion 2, the precipitated metal layer starts not only vertical growth but also horizontal growth growing in the horizontal direction.

By this horizontal growth, the deposited metal layer starts to cover the upper portion of the basic insulating portion. At this time, the horizontal growth starts to penetrate from the edge of the base insulation and gradually penetrates toward the center of the base insulation.

In the horizontal growth state, the horizontal growth is exactly uniform, and the deposited metal layer penetrates the basic insulation in a uniform form.

Vertical growth of the deposited metal layer increases the height of the deposited metal layer. Horizontal growth of the deposited metal layer gradually widens the metal width of the electroformed workpiece being formed. Increasing the width of the metal of the electroformed workpiece means that the exposed portion of the basic insulation gradually decreases, and this also means that the spacing between the metal portion and the metal portion of the electroformed workpiece being formed gradually decreases.

In the present invention, the terms target width and target thickness are defined as follows.

In the space interval between the metal portion and the metal portion of the electroformed workpiece (or the metal micropattern), which is the result of the electroforming, the space interval equal to the target value to be processed is referred to as the target width. In addition, the thickness of the electroformed workpiece at this time is defined as the target thickness.

Also, in the present invention, when the deposited metal layer grows horizontally on the upper surface of the base insulating portion, the electroplated workpiece whose space between the metal portion and the metal portion of the horizontally grown electroformed workpiece has a target width is used as the first electric pole workpiece (4). define.

In addition, in the present invention, after forming a release layer on the first pole pole processed material, the pole pole formed by performing pole pole processing again is defined as a second pole pole workpiece.

In Jeonju processing, the Jeonju processed material grows homogeneously at a very constant speed and at a constant rate with all homogeneity of Jeonju processing such as homogeneity of molten metal in the Jeonju bath, homogeneity of current density and homogeneity of stirring. The present invention utilizes this property of electric pole machining.

As the electric pole machining progresses on the foundation master gradually, the exposed width of the foundation insulation gradually decreases. When the width of the basic insulation decreases and finally decreases to the size of the target width b, that is, when the space gap between the metal part and the metal part of the electroformed workpiece becomes the target width b, the electroplating is immediately performed. Stop immediately.

In other words, a base master having a base insulating portion formed on the base electrode base, which is a conductor, is subjected to electric pole machining on the base master to cause horizontal growth and vertical growth of the electric pole workpiece, and as a result of the horizontal growth, the electric pole workpiece is formed. When the target width is reached, the pole pole processing is stopped to make the first pole pole workpiece. When the first pole pole workpiece is demolded from the basic master, it is possible to obtain a precise pole pole workpiece (metal fine pattern) having an accurate value.

Figure 3 is an explanatory diagram of a method for producing a second pole pole workpiece of precise dimensions using the uniform growth phenomenon of the pole pole workpiece.

After the first pole pole work is formed in the basic master, the pole pole processing is once stopped, and then immersed in the release material to form a release layer. That is, a release layer is formed on the surface of the first electric pole workpiece and the exposed surface of the basic insulating portion. After forming the release layer, electroforming is again performed.

In the present invention, after forming a release layer on the first pole pole processed product, the pole pole formed by performing pole pole processing again is defined as a second pole pole workpiece.

The metal forming the second pole pole workpiece may be formed differently from the metal of the first pole pole workpiece. In other words, it can be pole-cast with dissimilar metals.

For example, the first pole pole workpiece may be copper, and the second pole pole workpiece may be nickel, nickel alloy, or the like. Jeonju processing is determined by the type of molten metal contained in the Jeonju bath.

If the production target is the second pole pole workpiece, and the second pole pole workpiece is to be used as a mold, the second pole pole workpiece is made of strong metal. At this time, the second pole pole work is made of metal with high hardness at the beginning of the formation of the second pole pole work, and after the formation of the pole pole by applying a soft metal, the second pole pole work not only prevents the fragile shape of the mold, Surface hardness can be enhanced.

It is easy to change the electrolytic bath after obtaining the first pole pole workpiece to the target width b to obtain the second pole pole workpiece.

It is preferable that the second pole pole workpiece 5 is thick enough to cover all the surfaces of the first pole pole workpiece 4 and all the surfaces of the base insulation portion.

When forming the second pole column workpiece, in order to be in close contact with the surface of the base insulation portion 2, which is a non-conductor, so that the second pole column workpiece 5 can be well constructed, Metal may be vacuum-deposited thinly for the purpose of imparting conductivity to ensure good electroforming.

When the second pole pole workpiece 5 has grown to the required thickness, the pole pole machining of the second pole pole workpiece 5 is stopped. Then, the second electric pole workpiece is demolded from the first electric pole workpiece and the basic insulating portion.

The recessed part 7 is formed in the secondary electric pole workpiece 5 which was demoulded in this way. In addition, the protrusion 6 is configured between the depression and the depression.

In the present invention, the protruded surface between the depression and the depression of the second electric pole workpiece is defined as a projection. The width of the protrusion 6 becomes the target width b.

The depth measured from the surface of the protrusion is defined as the depth of depression (d).

The depression depth d and the width of the depression are, of course, determined by the shape of the first electric pole cast workpiece.

FIG. 4 illustrates an embodiment in which a basic insulating portion having a desired size is formed on a base electrode base as a conductor, but the base insulating portion is recessed.

The base insulating part formed on the base electrode base may be configured to protrude beyond the surface of the base electrode base, but the surface of the base insulating part 2 and the surface of the base electrode base 1 are present on the same plane. You may. That is, after the groove is formed by etching or laser processing at the position where the base insulating portion of the base electrode base is to be formed, the base insulating portion may be formed by filling the groove with an insulating material.

In this case, from the initial pole processing of the foundation master, the precipitated metal layer starts horizontal growth at the same time as the vertical growth. As a result, the lower surface of the first pole casting can be obtained in a flat plane.

When comparing the electric pole workpiece manufactured by the electric pole workpiece using the present invention and the conventional general pole pole processing, both have a big difference in the processing process. As a result of the differences in the process, the work pole fabricated by using the present invention has a large feature that can not only configure a very precise size of the target width, but also increase the size of the workpiece.

The conventional general electric pole workpiece can be obtained by subjecting the electric pole master consisting of the insulating part and the electrode part to the electric pole machining.

The width of the electrode part of the conventional electric pole master is comprised by the target width.

However, when the electric pole processing is performed by using the electric pole master composed of the width of the electrode portion of the conventional electrode, when the target width is minute, there is an extreme limitation in constructing the electric pole master.

In other words, in the case where the target width is only a few microns, the most serious problem is how to process the electrode part in order to obtain an electroformed workpiece having a target width of only a few microns. In some cases, even if the insulating part and the electrode part having a narrow area are manufactured, it would be impossible if the insulating part and the electrode part had to be made precise over a large area. In other words, it was a difficult problem to solve not only in terms of cost and efficiency, but also in production technology.

In the present invention, the basic insulating portion is not set to the target width, and the predetermined ratio is set larger than the target width. In the present invention, after the size of the basic insulating portion is formed to be larger than the target width, the target width is obtained by using the horizontal growth phenomenon of the pole pole workpiece. That is, in the present invention, the basic insulation part is designed to have a certain ratio larger than the target width by precisely analyzing and calculating all the elements necessary for electric pole machining.

When the target width is made through the method of controlling the horizontal growth of the precipitated metal layer as in the present invention, even if the target width is fine and small, it can be manufactured.

The present invention was established through the experiment. As a result, it was possible to process the width of the projected portion of the second pole cast to 1 micron or 2 microns.

Actual experimental values of the present invention are as follows. The base pole base was made of copper plate, and a photosensitive material was applied to the copper plate. Thereafter, the photosensitive material was exposed to light through a film on which graphics were exposed to form an exposed portion, and a width of 50 microns was used to produce a basic insulating portion.

The target width was set to 2 microns.

The pitch of the base insulation was fabricated to a size of 300 microns.

After that, a voltage of 3 volts was applied in the copper electrostatic bath, and the time was 95, 96, 97, 98, 99, 100, 101, 102, 103, 104 and 105 minutes, respectively. Jeonju processing was conducted in various time zones through Jeonju processing.                     

When the first pole pole workpiece formed of copper was 105 minutes, the metal width of the pole pole workpiece grew to 288 microns. In this case, it was possible to obtain a workpiece of 2 microns of target width.

Thereafter, the release material was applied to the first electroformed workpiece formed of copper having a target width of 2 microns, and then subjected to electroplating for 15 hours in a nickel electroplating bath to construct a second electroforming article.

Through this process, a second pole cast workpiece having a width of 2 microns and a recess of 288 microns in width was manufactured.

The present invention has the great advantage that it can be produced in a large size over a large area of such a fine pole electroworking.

In general, ultra-precision processing is possible up to nano size. However, it was impossible to process large-area products efficiently and economically.

In this regard, the present invention is a very innovative invention.

The first pole pole workpiece or the second pole pole workpiece to be manufactured through the present invention is characterized in that it can be extremely fine in precision and numerical value. Moreover, this invention has the big feature that it can economically process the ultra-fine pattern of the large area which cannot be obtained by the conventional etching method or the conventional electroplating process.

In the present invention, the first pole cast workpiece can be used as a metal fine pattern by demolding from the basic master. The metal micropattern is made of metal and is defined as having various shapes of patterns.                     

The metal micropattern may be configured as a pattern of horizontal lines or vertical lines, and may also be configured as a grid pattern consisting of horizontal lines and vertical lines. In addition, the fine pattern may be configured in a specific shape by a variety of curves, all of these shapes can be produced in any shape by film or graphics, of course. Of course, the first electric pole workpiece can be used by demolding in the basic master of the present invention.

The present invention has a large feature that can be manufactured by precisely controlling the size of the electroformed workpiece to several microns.

It is not difficult to implement such a fine metal pattern with a large size by a conventional etching technique or a conventional electroforming method.

The small size of the master can be made precisely at cost, but it was not difficult to produce uniform and ultra-precision workpieces for large areas.

However, the present invention can solve this problem.

That is, the present invention makes it possible to easily produce a metal ultrafine pattern having a large size of the electroformed workpiece and having a very fine width and pitch of the metal pattern.

Claims (11)

In the method for manufacturing a precision pole pole workpiece by using the uniform growth phenomenon of the pole pole workpiece, the base electrode consisting of a base electrode base which is a conductor and a base insulation portion which is a non-conductor in the base electrode base, wherein the base insulation portion Manufacturing a basic master, characterized in that the size is set larger than the target width; Electroforming the foundation master to form a precipitated metal layer on a surface portion of the foundation electrode base; Gradually reducing the exposed upper surface of the basic insulating portion through horizontal growth of the precipitated metal layer; When the exposed surface width of the basic insulating portion is reduced to the target width (b), immediately stopping the electric pole machining; thereby forming the first electric pole workpiece through the uniform growth phenomenon of the electric pole workpiece. How to make precision pole pole work. After forming the first pole pole workpiece of claim 1, applying a release material to the first pole pole workpiece and performing pole pole machining on the first pole pole workpiece again to pole pole secondary workpiece; Precision dimension using the uniform growth phenomenon of the pole pole processed workpiece, characterized in that for producing the second pole pole workpiece formed with a protrusion and a depression through the process of demolding the second pole pole processed product of the pole pole processed from the first pole pole processed product; To make electric pole workpieces. The method of claim 1 or 2, wherein the second pole pole workpiece is made of the first pole pole workpiece and the heterogeneous metal, characterized in that to produce a precision pole pole workpiece using the uniform growth phenomenon of the pole pole workpiece Way. The method of claim 1 or claim 2, comprising the step of vacuum depositing a metal on the exposed surface of the primary insulating portion and the surface of the first electroformed workpiece immediately before applying the release material. Method of manufacturing precision pole pole workpiece using phenomenon. The method of claim 1 or 2, wherein the basic insulating portion is formed through an exposure process of applying a photosensitive material to the base electrode base and then exposing the photosensitive material. To make electric pole workpieces. According to claim 1 or claim 2, wherein the basic insulating portion is applied to the base electrode base by the machining or laser processing after the coating material, characterized in that the precision electroplating workpiece using the uniform growth phenomenon of the electroformed workpiece How to make it. The method of claim 1 or 2, wherein the basic insulating portion has a horizontal or vertical pattern. The method according to claim 1 or 2, wherein the basic insulating portion is a lattice pattern consisting of horizontal lines and vertical lines. The method according to claim 1 or 2, wherein the basic insulating portion is formed to protrude from the base electrode base as a conductor. The method of claim 1 or 2, wherein the basic insulating portion is recessed in the base electrode base, which is a conductor, and the surface of the base insulating portion and the surface of the base electrode base are formed in the same plane. Method of manufacturing precision pole electroplated workpiece using. An electroplated workpiece according to claim 1, which is produced by a method for producing a precision electroplated workpiece using the uniform growth phenomenon of the electroplated workpiece of claim 10.

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