KR100910349B1 - Multi-articulated robot and transportation method thereof - Google Patents

Multi-articulated robot and transportation method thereof Download PDF

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Publication number
KR100910349B1
KR100910349B1 KR1020090014322A KR20090014322A KR100910349B1 KR 100910349 B1 KR100910349 B1 KR 100910349B1 KR 1020090014322 A KR1020090014322 A KR 1020090014322A KR 20090014322 A KR20090014322 A KR 20090014322A KR 100910349 B1 KR100910349 B1 KR 100910349B1
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KR
South Korea
Prior art keywords
column
articulated robot
hydraulic
rotating
hinge shaft
Prior art date
Application number
KR1020090014322A
Other languages
Korean (ko)
Inventor
김원경
최현수
Original Assignee
주식회사 나온테크
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Priority to KR1020090014322A priority Critical patent/KR100910349B1/en
Application granted granted Critical
Publication of KR100910349B1 publication Critical patent/KR100910349B1/en

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J11/00—Manipulators not otherwise provided for
    • B25J11/0095—Manipulators transporting wafers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • B25J9/04—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
    • B25J9/041—Cylindrical coordinate type
    • B25J9/042—Cylindrical coordinate type comprising an articulated arm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/06—Programme-controlled manipulators characterised by multi-articulated arms
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements
    • B25J9/106—Programme-controlled manipulators characterised by positioning means for manipulator elements with articulated links
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67742—Mechanical parts of transfer devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68707—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a robot blade, or gripped by a gripper for conveyance
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S414/00—Material or article handling
    • Y10S414/135—Associated with semiconductor wafer handling
    • Y10S414/141—Associated with semiconductor wafer handling includes means for gripping wafer

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  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Manipulator (AREA)

Abstract

The present invention relates to a multi-joint robot and a transportation method thereof, and more particularly, by configuring the column to be rotatable as necessary, even if the height of the column is increased, the transportation is convenient and installation workability and maintenance can be improved. It relates to a joint robot and its transportation method.

The articulated robot of the present invention includes a hand part on which a conveyed object is placed, an articulated arm for driving the hand part, a column to which the articulated arm is connected and lifted up, a column driving part connected to the lower end thereof so as to pivot the column, and In the articulated robot having a base in which the column driving unit is movably installed, a joint means for rotatably coupling the column to the column driving unit side such that the column is erected as necessary or folded into the base. It is characterized by including.

The transport method of the articulated robot of the present invention, the articulated arm is folded in the direction orthogonal to the column, the hand portion is upright in the longitudinal direction and positioned in a direction parallel to the column and Articulated arm alignment step; A column exact position step of driving the column driving part so that the column is located at one side of the base; And a column rotating step of rotating the column to the expected side, characterized in that performed after minimizing the volume and size of the articulated robot.

As a result, the column can be folded to the expectation or upright with respect to the necessity, so that even if the length of the column is formed very long, the transportation is convenient and the installation workability and maintenance can be improved.

Description

Articulated robot and its transportation method {MULTI-ARTICULATED ROBOT AND TRANSPORTATION METHOD THEREOF}

The present invention relates to a multi-joint robot and a transportation method thereof, and more particularly, by configuring the column to be rotatable as needed, even if the height of the column is increased, the transportation is convenient and installation workability and maintenance can be improved. It relates to a joint robot and its transportation method.

In general, a double arm articulated robot is used in a flat panel display (FPD) line for manufacturing a product such as a liquid crystal substrate or a semiconductor wafer.

For example, the double-armed articulated robot is a pair of rotatably connected by the joints (3, 4, 5) as shown in the Republic of Korea Patent Publication No. 10-0425364 to move the workpiece (9) An arm 2 is provided so that one arm is used for supplying the workpiece and the other arm is used for taking out the workpiece.

In addition, the upper and lower positions of the arm 2 can be adjusted by including a shankdong mechanism 11 including a column 12 for moving the support member 10 on which the arm 2 is installed up and down. In addition, the shanghai copper mechanism is pivotally installed on the pedestal 13 so as to rotate the double arm type articulated robot to change its direction.

On the other hand, in recent years, in order to efficiently use a narrow space of a flat panel display (FPD) line and improve productivity, many manufacturing methods of stacking cassettes are used. Accordingly, the demand for double-armed articulated robots having long vertical lengths of columns to supply substrates or wafers to cassettes stacked in multiple stages is gradually increasing. However, the double-armed articulated robot shown in the aforementioned Patent No. 10-0425364 has a limited length of the column 12, and thus cannot satisfy such a requirement.

In order to solve the above-mentioned problem, Korean Patent Laid-Open Publication No. 10-2008-0081196 proposes a double arm articulated robot having a form in which an overall height is increased by connecting columns to a plurality of blocks. However, this Patent Publication No. 10-2008-0081196 has the advantage of improving the productivity through the height operation by increasing the height of the column, but the increased column height and volume of the double-armed articulated robot Transportation from the equipment manufacturer to the FPD line is very difficult, and due to space limitations on the line is difficult to install.

In addition, the double-armed articulated robot is difficult to maintain due to its high height when a failure or a failure occurs in the height of the column, and it takes a lot of work time such as dismantling the blocks in sequence and a high risk of a safety accident. Have

In recent years, a double arm type articulated robot has been developed in which the column has a telescopic structure so that the length of the column can be adjusted up and down, but the structure of the column is very complicated, the cost is increased, and the overall weight is increased. Due to the slow drive speed has a problem that the productivity is lowered.

SUMMARY OF THE INVENTION The present invention has been proposed in view of the above, and has an object to provide a multi-joint robot that can be easily transported and improve installation workability and maintainability even if the height of the column is increased by configuring the column to be rotatable. .

Another object of the present invention is to provide a method for transporting a jointed-arm robot to improve the convenience, workability and safety of the transport by minimizing the volume and size when carrying the articulated robot.

In order to achieve the above object, the articulated robot according to the present invention includes a hand part on which a conveyed object is placed, a multi articulated arm for driving the hand part, a column to which the articulated arm is connected to and lifted up, and to pivot the column. A multi-joint robot having a column driver connected to a lower end, and a base on which the column driver is movable, wherein the column is rotated on the column driver side such that the column is erected as necessary or folded onto the base. It is characterized in that it further comprises a connection means for coupling possible.

The connecting means may include a hinge shaft having one end coupled to the column driving unit; And a connection block formed at a lower end of the column to be rotatably coupled to the hinge axis.

A pair of bushings fitted between the inner and outer circumferential surfaces of the hinge shaft and the inner hole of the connecting block such that the connecting block is rotatably coupled to the hinge shaft; And a fixing nut fastened to an outer threaded portion of the hinge shaft such that the connection block is not separated from the hinge shaft.

The column may be composed of a plurality of pillars that can be separated and assembled.

It may include a locking means for maintaining the upright state of the column.

Here, the locking means includes a first fixing member formed in the column driving portion and a fastening hole therein; A second fixing member protruding on the column corresponding to the first fixing member and having an insertion hole corresponding to the fastening hole; And a fastening member inserted through the insertion hole of the second fixing member and fastened to the fastening hole of the first fixing member.

It may include a column rotating means for applying a rotational force to rotate the column.

The column rotating means may include a rotating device including a connecting member connected to the column and configured to rotate the connecting member by an external force applied to the handle.

The column rotating means may include a motor, a reducer for reducing the rotational force output from the motor, and an electric rotating device including a connecting member having one end connected to the output shaft of the reducer and the other end connected to the column.

The column rotating means includes a hydraulic pump for sucking and pumping hydraulic oil from an oil tank, a hydraulic cylinder for rotating the column while the rod side is connected to the column side and advanced back and forth by the hydraulic pressure fed from the hydraulic pump. It may be composed of a hydraulic drive unit having a hydraulic unit for controlling the flow of the hydraulic fluid pumped from the pump.

It may further include a drive shaft installed in the connecting means is connected to the rod side of the hydraulic cylinder.

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The articulated robot of the present invention is configured to be rotatable, so that if necessary, the column can be folded in the expected state or upright with respect to the expectation, so that the transport is convenient and the installation workability is maintained even when the length of the column is very long. There is an effect that can improve the water retention.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings.

Figure 1a and Figure 1b is a view showing the external structure of the articulated robot according to an embodiment of the present invention, Figure 1a is a perspective view showing an upright state of the column, Figure 1b is a perspective view showing a folded state of the column .

1A and 1B, the articulated robot according to an embodiment of the present invention is pivoted on a base 10, a column driving unit 20 and a column driving unit 20 which are installed to be movable on the base 10. A column 30 to be installed, a moving mechanism (not shown) installed on the column 30, a support member 50 installed on the moving mechanism, an articulated arm 60 installed on the support member 50, and It is provided with the hand part 70 provided in the articulated arm 60, and placing product (henceforth a conveyed thing), such as a liquid crystal substrate and a semiconductor wafer.

The base 10 is a configuration seated on the installation surface to support the various devices constituting the articulated robot so as not to fall, can be formed in various forms, but in this embodiment the column in the center of the body having a rectangular block shape The movement path 11 for the movement of the drive part 20 is comprised by the structure concaved.

The column driving unit 20 is provided on the moving path 11 of the base 10 to be moved back and forth, and is configured to be rotatable on the upper side of the moving body 21 to pivot the column 30. It consists of a rotating body (22).

The column 30 is configured such that the lower end portion is installed on the rotary body 22 of the column driving unit 20. The support member 50 having the articulated arm 60 and the hand unit 70 is connected to the moving mechanism. It is comprised so that it may move to a vertical axis | shaft (Z-axis) direction.

The column 30 is a long rod-shaped member formed to have a predetermined length according to the working conditions of the FPD line. In this embodiment, the column 30 is formed in a rectangular rod shape, and a lower end thereof is erected or folded onto the base 10 as necessary. It is characterized in that it is rotatably mounted to the column driving unit 20 as much as possible.

And, the column 30 may be composed of a plurality of pillars that can be separated and assembled. This separation structure is useful when a column must be constructed very long in the Z-axis direction. In other words, each column can be separated and transported during transportation, and each column can be assembled in sequence in the FPD line to be installed in such a way that the column can be rotated upright so that a very long column can be easily installed even in a narrow space. .

The articulated arm (60) is configured to drive the hand part (70), the first link (61) of which one end is rotatably coupled to the end of the support member (50) by the joint part, and the first link (61). The second end 62 is rotatably coupled to one end of the joint by a joint part.

The hand unit 70 is configured to directly carry out a supply and take-out process of the conveyed material, and a plurality of hands 72 are connected to the hand joint 71 which is connected to the other end of the second link 62.

Figure 2a is a front view for explaining the connection means of the articulated robot according to an embodiment of the present invention, Figure 2b is an enlarged cross-sectional view of the portion A of Figure 2a, Figure 3 is an enlarged exploded perspective view of the portion A of Figure 2a.

2A to 3, the articulated robot according to the present invention includes a connecting means 80 which rotatably couples the column 30 to the column driver 20. The connecting means 80 may be configured in various ways such as a structure that is built in the lower end of the column 30, or a structure to be mounted to the lower end of the column 30 by making a separate block.

For example, as shown in FIGS. 2B and 3, the connecting means 80 includes a hinge shaft 81 having one end coupled to the column driving unit 20, and a lower end of the column 30 to the hinge shaft 81. It is provided with a connecting block 82 is rotatably coupled.

In addition, the connecting means 80 is a pair of bushings 83 to easily rotate the connecting block 82 on the hinge shaft 81, and the connection block 82 is fixed so as not to be separated from the hinge shaft 81 A fixing nut 84 is provided.

The hinge shaft 81 is composed of a flange portion 81a coupled to the column driving portion 20 side and a hinge portion 81b integrally extending to the flange portion 81a, and the hinge portion 81b has an outer end thereof. The fastening part 81c formed in this and the locking step 81d which contact | connect this fastening part 81c and make the bushing 83 mentioned later fixedly without rocking | sway are formed. In addition, at the end of the rotating body 22 of the column driving unit 20 to which the flange portion 81a of the hinge shaft 81 is fastened, a fastening groove 22a having a fastening hole for fastening the fixing bolt 85 is formed.

The connecting block 82 has a through hole 82a for inserting the hinge shaft 81 in front and rear of the body having a substantially hexahedral shape, and is formed at a rear portion corresponding to the flange portion 81a of the hinge shaft 81. Groove portion 82b for accommodating the fixed bolt head portion fastened to the column driving portion 20 is formed.

 The bushing 83 is inserted into the front and rear sides of the hinge shaft 81, the inner circumferential surface is rotatably fitted to the outer circumferential surface of the hinge shaft, the outer circumferential surface is pressed into the through hole 82a of the connecting block 82. In addition, the bushing 83 is configured as an oilless bushing capable of sliding rotation even without a separate lubricant.

The fixing nut 84 is fastened to the fastening portion 81c of the hinge shaft 81, and various types of nuts can be fastened if the connecting block 82 can be configured so as not to be separated from the hinge shaft. In the example, a conventional bearing locking nut is used.

2C is a view showing a modified example of the connecting means applied to the articulated robot according to an embodiment of the present invention, as shown in the articulated robot according to the present invention in the upright state of the column 30. It is provided with a locking means 90 for maintaining a stable.

The locking means 90 may be applied without limitation as long as it is a device or structure capable of maintaining the fixed position of the column 30, but in the present embodiment, the locking means 90 is formed on the rotating body 22 side of the column driving part 20 and is inside. A first fixing member 91 having a fastening hole formed therein, a second fixing member 92 protruding on the column 30 corresponding to the first fixing member 91, and having an insertion hole corresponding to the fastening hole; 2 is composed of a fastening member 93 is inserted through the insertion hole of the fixing member 92 is fastened to the fastening hole of the first fixing member 91. At this time, the fastening member 93 is preferably composed of a high-tensile bolt excellent in rigidity.

4A and 4B are views showing a first example of the column rotating means mounted to the articulated robot according to an embodiment of the present invention. FIG. 4A is a perspective view and FIG. 4B is a front view.

4A and 4B, the articulated robot according to the present invention further includes column rotating means 100 for applying a rotational force for rotating the column 30.

The column rotating means 100 includes a rotating device 110 having a connecting member 111 connected to the column 30 and configured to rotate the connecting member 111 by an external force applied to the handle 112.

Rotating device 110 may be applied to a variety of conventional manual winch to rotate the connection member 111 by reducing the rotational force applied by the user. For example, the winch is installed in the winch main body 113, the winch main body 113, the reduction gear unit (not shown) having an output gear and an input gear to perform a deceleration action and is connected to the connecting member 111, and A handle 112 is connected to the input gear.

5A and 5B are views showing a second example of the column rotating means mounted to the articulated robot according to an embodiment of the present invention. FIG. 5A is a perspective view and FIG. 5B is a front view.

5A and 5B, the column rotating means 100 is to increase the convenience in transportation and installation by rotating the column 30 by using power, and is output from the motor 121 and the motor 121. It consists of an electric rotary device 120 having a reduction gear 122 for decelerating the rotating force, and a connecting member 123 having one end connected to the output shaft of the reducer 122 and the other end connected to the column 30.

6A to 6C are views showing a third example of the column pivot means mounted to the articulated robot according to an embodiment of the present invention. FIG. 5A is a perspective view, FIG. 6B is a front view, and FIG. 6C is a view. It is an enlarged sectional view of part B of 6b.

6A to 6C, the column rotating means 100 is composed of a hydraulic pump (not shown), a hydraulic cylinder 131, and a hydraulic drive device 130 having a hydraulic unit (not shown).

The hydraulic pump is a device that sucks hydraulic fluid from an oil tank (not shown) and pumps the hydraulic fluid to the hydraulic cylinder 131 through a hydraulic hose (not shown). The hydraulic cylinder 131 is connected to the column 30 by the rod side. The column is rotated while being advanced back and forth by the hydraulic pressure fed from the hydraulic pump.

The hydraulic cylinder 131 can be applied without limitation as long as it has a forward and backward force to the extent that the column 30 can be stably rotated. In this embodiment, the hydraulic cylinder 131 is composed of two double-acting hydraulic cylinders. The hydraulic cylinder 131 is rotatably coupled to the lower end of the cylinder to the fixing jig 132.

The hydraulic unit is configured to control the flow of hydraulic oil pumped from the hydraulic pump, and includes a solenoid valve, a relief valve, and the like for performing a predetermined control operation according to an input signal applied from an operation switch.

On the other hand, in the case of rotating the column 30 in a hydraulic manner as described above, the connecting means 80 is configured in a structure as shown in Figure 6c for more effective operation. That is, the connecting means 80 is a hinge shaft 81, one end of which is coupled to the column driving unit 20, a connecting block 82 rotatably coupled to the hinge shaft 81, and the connecting block 82 on the hinge axis And a pair of bushings 83 to be pivotally coupled to the fixing block 84, and a fixing nut 84 for fixing the connecting block 82 so as not to be detached from the hinge shaft 81, the inside of the connecting block 82. It is further provided with a drive shaft 88 which is installed and connected to the rod (131a) side of the hydraulic cylinder (131).

The drive shaft 88 is formed in the shape of a round bar, is inserted through the outer through hole 82c of the connection block 82 to be fastened to the inner fastening hole 82d, and the hydraulic cylinder ( The connector 131b coupled to the rod 131a of the 131 is connected, and rotates in the direction in which the column 30 stands up via the drive shaft 88 during the forward movement of the rod, and during the backward movement of the rod 131a. The column 30 is rotated to the base 10 side.

Hereinafter will be described the operation and transport method of the articulated robot according to an embodiment of the present invention.

As shown in FIG. 1A, the base 10, the column driving unit 20, the column 30, the moving mechanism, the supporting member 50, the articulated arm 60, the hand portion 70, and the like are arranged in a predetermined order. Assemble to complete the articulated robot.

In order to transport the assembled and completed articulated robot in the FPD line as described above, the articulated arm 60 is folded in a direction orthogonal to the column 30 by manipulating the articulated robot and the hand part 70. The hand portion and the articulated arm alignment step is performed such that the uprights are positioned in a direction parallel to the column 30. In this state, the column driving unit 20 is driven so that the column 30 may be positioned on one side of the base 10, and the column rotating step of rotating the column to the base may be performed in FIG. In the form shown.

The above-described process will be described in more detail. The articulated arm 60 is folded so that the hand portion 70 is located in a direction in which the hand portion 70 is in close contact with the surface of the base 10, and shown in FIGS. 4A, 5A, and 6A. As described above, the column 30 is rotated toward the base 10 in a state in which the rotary body 22 of the column driving unit 20 is rotated in the width direction of the base 10 (the direction perpendicular to the longitudinal direction of the base). When operated in parallel to each other, the articulated robot is to minimize the volume and size as shown in Figure 1b.

That is, as the hand part 70 including the articulated arm 60 is in close contact with the upper surface of the base 10, and the column 30 having a high height is in close contact with the base 10, the overall appearance of the articulated robot. The size of is small enough to slightly exceed the volume of the base 10.

As such, when the volume of the articulated robot becomes small, it is easy to load the carrying vehicle, and the transportation operation can be conveniently performed since the problem of falling or falling during transportation can be prevented in advance. In addition, since the volume is small and the column 30 is moved in a folded state parallel to the base, it is easy to enter a narrow FPD line, and can be conveniently installed on a limited line.

On the other hand, when the articulated robot is positioned in the FPD line, as shown in Figs. 4A and 4B, the column rotating means 100 is installed at the column 30 side of the connecting means 80, and the handle 112 is moved. When the column 30 is rotated in the upright direction, the rotation force is applied to the column 30 coupled to the connection member 111 so that the column 30 is gradually raised and stood up.

As shown in FIG. 2B, when the rotational force is transmitted from the connecting member 111 to the column 30, the connecting block 82 is connected to the hinge shaft 81 via the bushing 83. Since it is rotatably coupled to, the column 30 including the connection block 82 is rotated about the hinge axis (81).

In addition, when the articulated robot installed as described above is installed in the FPD line and a failure or an obstacle occurs at the height of the robot in the process of performing a predetermined transfer operation, the handle 112 of the column rotating means 100 is reversed (column). By rotating in the direction of folding), faults and obstacles located in the height of the site can be moved to a lower position, so that the operator can quickly and conveniently repair and maintain the faults and areas of failure.

Accordingly, it is possible to reduce the downtime of the articulated robot, which can significantly improve productivity, reduce maintenance costs, and prevent the risk of safety accidents caused by aerial work.

Further, if the column rotating means 100 for rotating the column 30 is applied to the electric rotating device 120 shown in FIG. 5A or the hydraulic driving device 130 shown in FIG. 6A, it is more convenient and quicker. It is possible to perform the rotating operation of the column can improve the workability and productivity more.

What has been described above is just one embodiment for carrying out the articulated robot and its transportation method according to the present invention, the present invention is not limited to the above-described embodiment, as claimed in the following claims Those skilled in the art to which the present invention pertains without departing from the gist of the present invention will have the technical idea of the present invention to the extent that various changes can be made.

1a and 1b is a view showing the external structure of the articulated robot according to an embodiment of the present invention,

Figure 2a is a front view for explaining the connection means of the articulated robot according to an embodiment of the present invention,

2B is an enlarged cross-sectional view of portion A of FIG. 2A;
Figure 2c is a view showing a modification of the connecting means applied to the articulated robot according to an embodiment of the present invention,

3 is an enlarged exploded perspective view of portion A of FIG. 2A;

4a and 4b are views showing a first example of the column rotating means mounted to the articulated robot according to the embodiment of the present invention;

5a and 5b are views showing a second example of the column rotating means mounted to the articulated robot according to the embodiment of the present invention;

6a to 6c are views showing a third example of the column rotating means mounted to the articulated robot according to the embodiment of the present invention.

<Explanation of symbols for main parts of drawing>

10: expectation 20: column drive part

30: column 50: support member

60: Articulated arm 70: Hand part

80: connecting means 81: hinge shaft

82: connecting block 83: bushing

84: fixing nut 88: drive shaft

90: locking means 100: column turning means

Claims (13)

A hand portion for placing the conveyed object, a multi-joint arm for driving the hand part, a column to which the multi-joint arm is connected to and lifted up, a column drive part connected to the lower end to pivot the column, and the column drive part to be movable In the articulated robot with the expectation, And articulating means for rotatably coupling the column to the column drive side such that the column is erected or folded onto the base as needed. The method of claim 1, The connecting means, A hinge shaft having one end coupled to the column driving unit; And And a connection block formed at a lower end of the column and rotatably coupled to the hinge axis. The method of claim 2, A pair of bushings fitted between the inner and outer circumferential surfaces of the hinge shaft and the inner hole of the connecting block such that the connecting block is rotatably coupled to the hinge shaft; And And a fixing nut fastened to an outer threaded portion of the hinge shaft so that the connection block is not separated from the hinge shaft. The method of claim 1, The column is a multi-joint robot, characterized in that consisting of a plurality of columns that can be separated and assembled. The method of claim 1, And a locking means for maintaining the upright state of the column. The method of claim 5, The locking means includes: a first fixing member formed in the column driving part and having a fastening hole formed therein; A second fixing member protruding on the column corresponding to the first fixing member and having an insertion hole corresponding to the fastening hole; And And a fastening member inserted through the insertion hole of the second fixing member and configured to be fastened to the fastening hole of the first fixing member. The method according to any one of claims 1 to 6, And a column rotating means for applying a rotational force to rotate the column. The method of claim 7, wherein And said column rotating means comprises a rotating device having a connecting member connected to said column and configured to rotate said connecting member by an external force applied by a handle. The method of claim 7, wherein The column rotating means comprises a motor, a reduction gear for reducing the rotational force output from the motor, and an electric rotating device including a connecting member having one end connected to the output shaft of the reducer and the other end connected to the column. Articulated robot. The method of claim 7, wherein The column rotating means includes a hydraulic pump for sucking and pumping hydraulic oil from an oil tank, a hydraulic cylinder for rotating the column while the rod side is connected to the column side and advanced back and forth by the hydraulic pressure fed from the hydraulic pump. An articulated robot, comprising: a hydraulic drive unit having a hydraulic unit for controlling a flow of hydraulic oil fed from a pump. The method of claim 10, And a drive shaft installed in the connecting means and connected to the rod side of the hydraulic cylinder. delete delete
KR1020090014322A 2009-02-20 2009-02-20 Multi-articulated robot and transportation method thereof KR100910349B1 (en)

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Publication number Priority date Publication date Assignee Title
WO2017138705A1 (en) * 2016-02-12 2017-08-17 현대로보틱스 주식회사 Substrate transferring robot

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JPH06114302A (en) * 1992-10-07 1994-04-26 Fujita Corp Arm supporting method of spraying robot
JPH1058360A (en) 1996-08-09 1998-03-03 Honda Motor Co Ltd Industrial robot
US6758843B2 (en) 1993-05-14 2004-07-06 Sri International, Inc. Remote center positioner
JP3638676B2 (en) 1995-06-30 2005-04-13 株式会社アマダ 6-axis vertical articulated robot for bending

Patent Citations (4)

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Publication number Priority date Publication date Assignee Title
JPH06114302A (en) * 1992-10-07 1994-04-26 Fujita Corp Arm supporting method of spraying robot
US6758843B2 (en) 1993-05-14 2004-07-06 Sri International, Inc. Remote center positioner
JP3638676B2 (en) 1995-06-30 2005-04-13 株式会社アマダ 6-axis vertical articulated robot for bending
JPH1058360A (en) 1996-08-09 1998-03-03 Honda Motor Co Ltd Industrial robot

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2017138705A1 (en) * 2016-02-12 2017-08-17 현대로보틱스 주식회사 Substrate transferring robot
CN108698773A (en) * 2016-02-12 2018-10-23 现代重工集团股份有限公司 Board carrying robot

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