KR100880546B1 - Vision inspection apparatus - Google Patents

Vision inspection apparatus Download PDF

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Publication number
KR100880546B1
KR100880546B1 KR1020080028155A KR20080028155A KR100880546B1 KR 100880546 B1 KR100880546 B1 KR 100880546B1 KR 1020080028155 A KR1020080028155 A KR 1020080028155A KR 20080028155 A KR20080028155 A KR 20080028155A KR 100880546 B1 KR100880546 B1 KR 100880546B1
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KR
South Korea
Prior art keywords
light source
camera
light
coaxial
support
Prior art date
Application number
KR1020080028155A
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Korean (ko)
Inventor
이대희
Original Assignee
비스(주)
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Publication date
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Priority to KR1020080028155A priority Critical patent/KR100880546B1/en
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Publication of KR100880546B1 publication Critical patent/KR100880546B1/en

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/9501—Semiconductor wafers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G01N2021/95638—Inspecting patterns on the surface of objects for PCB's

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  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

A vision inspection apparatus with line scan camera capable of accurately scanning desired region is provided to improve detection efficiency of inferior goods by irradiating total light quantity of illumination to a camera without use of half mirror. A stage(4) mounting an object is installed in a frame(100). A supporting stand(3) is installed on a top of the stage. An coaxial illumination(6) is mounted in the supporting stand, and is installed in order to diagonally irradiate a light source into the object. A reflector is positioned corresponded to a reflection angle of the light source, and is installed in one side of the supporting stand in order to vertically re-reflect a reflection light source. A camera(8) is positioned a top of the reflector, and is installed in a top of the frame in order to take a picture of a vertically reflected image.

Description

Vision Inspection Device {VISION INSPECTION APPARATUS}

The present invention relates to a vision inspection apparatus, and more particularly, to a vision inspection apparatus that detects and detects the surface of the inspection object by a camera, and determines whether the inspection object is defective.

In general, the vision inspection apparatus is for inspecting defects of an inspection object such as PCB and a semiconductor wafer. In general, the vision inspection apparatus photographs the reflected light and the reflection image generated from the substrate of the inspection object and inspects the defect of the pattern or the burnout of the surface. .

1 is a view showing the prior art.

As shown in FIG. 1, in the prior art, after the subject 200 is fixed to the stage 4a, the coaxial illumination 6a is horizontally installed on one side of the stage 4a, and the upper portion of the subject 200 is provided. The half mirror 7a is installed to be inclined at the upper side, and the camera 8a is installed in the upper part of the half mirror 7a.

In addition, side lights 9a are further provided on the left and right sides of the camera 8a and the half mirror 7a.

The half mirror 7a reflects the excitation light flashed by the coaxial illumination 6a to pass the fluorescence excited by the substrate of the test object 200.

However, the conventional technology has a problem of low inspection performance because the image is darkly captured because the amount of light irradiated from the coaxial illumination 6a is incident on the camera 8a by only about 50-50% of the initial amount of light due to the half mirror 7a. there was.

Therefore, in order to compensate for such a problem, since a brighter light is required, the device becomes complicated and bulky.

The present invention has been made to solve the above problems of the prior art, a vision that can be imaged brightly by allowing the amount of light to be irradiated with the camera without using a half mirror, enabling accurate inspection Its purpose is to provide an inspection apparatus.

The object of the present invention,

A base provided with a stage for mounting a test object; A support installed on an upper portion of the stage; A coaxial illuminator mounted on the support and inclined to irradiate a light source obliquely with respect to the inspected object; A reflection plate installed to correspond to the reflection angle of the light source and installed on one side of the support to receive the reflection light source and reflect the light vertically; It is achieved by a vision inspection device, which is installed on top of the reflector and consists of a camera mounted on top of the base to take a vertically reflected image.

According to the present invention, the light source irradiated from the illumination device is reflected on the object to be inspected and then incident to the camera through the total amount reflector to scan a bright image, thereby increasing the detection efficiency of defective products.

In addition, by applying a line scan camera, it is possible to scan a desired area more quickly and accurately, thereby improving work efficiency.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings.

2 is a perspective view showing an embodiment of a vision inspection apparatus according to the present invention, Figure 3 is a front view showing an embodiment of the vision inspection apparatus according to the present invention.

As shown in FIG. 2 and FIG. 3, the vision inspection apparatus A according to the present invention includes: a base 100 provided with a stage 4 on which the object 200 is mounted; A support (3) installed on the stage (4); Coaxial illumination (6) mounted to the support (3) and inclined to irradiate the light source obliquely with respect to the inspected object (200); A reflection plate 7 installed corresponding to the reflection angle of the light source and installed on one side of the support 3 to receive the reflected light source and reflect the light vertically; It is composed of a camera (8) installed on the upper portion of the base (100) so as to take a vertically reflected image installed on the upper portion of the reflecting plate (7).

In the periphery of the coaxial light 6, a plurality of auxiliary lights 9 are further provided to form a reflective light source toward the reflector 7.

The reflecting plate 7 is a mirror and is installed to enable angle adjustment.

The coaxial light 6 and the auxiliary light 9 are installed to be detachably attached to the long holes 31 to 33 formed in the support 3, and the upper and lower positions of the coaxial light 6 and the auxiliary light 9 may be adjusted to allow angle adjustment.

The support 3 is a rectangular plate shape installed on the upper part of the stage 4, and is formed with a plurality of long holes 31 to 33 having different angles.

In the present exemplary embodiment, the plurality of long holes are limited to the first to third long holes 31 to 33, but the number and inclination angle of the long holes may be variously modified.

As shown, the first long hole 31 to which the coaxial illumination 6 is mounted is formed to be inclined at 130 ° to 150 °.

The second long hole 32 on which the auxiliary light 9 is mounted is formed at a position of 90 °, and the third long hole 33 on which the auxiliary light 9 is mounted is inclined at 160 ° to 170 °.

Accordingly, the coaxial light 6 and the auxiliary light 9 are movable in the first to third long holes 31 to 33, so that position adjustment is possible, and rotation is possible, so that angle adjustment is possible. .

Mounting of the coaxial light 6 and the auxiliary light 9 is combined in a conventional bolted structure.

That is, the screw shaft (not shown) formed on the side of the coaxial light (6) and the auxiliary light (9) is inserted into the first to third long holes (31 to 33) and then fixed by tightening a nut to the protruding screw shaft. Is the way.

The position adjustment and angle adjustment functions of the coaxial illumination 6 and the auxiliary illumination 9 are to allow the light source irradiated to the object 200 to be accurately incident on the reflector 7.

In particular, as shown in FIG. 4, the irradiated light source of the coaxial illumination 6 should be set to reach the reflector 7 by being acute after being reflected by the object 200.

The reflecting plate 7 is installed on the other side of the support 3, preferably is installed directly below the camera 8, in particular the hinge can be rotated by the angle can be adjusted.

Therefore, the angle can be adjusted so that the incident light source and the image can be accurately reflected to the lens of the camera (8).

The same bolt fastening structure as described above is employed for the installation of the reflector 7, and detailed description thereof will be omitted.

The camera 8 is one capable of scanning, preferably a line scan camera.

Line scan cameras have high resolution and can scan large volumes, enabling faster and more accurate inspections.

The operation of the present invention configured as described above will be described.

4 is a view conceptually illustrating an operation relationship of a vision inspection apparatus according to the present invention.

As shown in FIG. 4, when the coaxial illumination 6 and the auxiliary illumination 9 are set at appropriate angles, the irradiated light source is reflected on the test subject 200 and then enters the reflecting plate 7.

The light source and the image incident on the reflector 7 are re-reflected and incident on the camera 8, and the incident image is scanned to determine whether there is an error.

Although the present invention has been described in connection with the above-mentioned preferred embodiments, it will be readily apparent to those skilled in the art that various modifications and variations can be made without departing from the spirit and scope of the invention, all such modifications and modifications being attached It is obvious that the claims belong to the claims.

1 shows a prior art.

2 is a perspective view showing an embodiment of a vision inspection apparatus according to the present invention.

Figure 3 is a front view showing an embodiment of a vision inspection apparatus according to the present invention.

<Description of Symbols for Main Parts of Drawings>

3: support 4: stage

6: coaxial lighting 7: reflector

8: camera 9: auxiliary lighting

31-33: 1st to 3rd chapter

Claims (6)

A base provided with a stage for mounting a test object; A support installed on an upper portion of the stage; A coaxial illuminator mounted on the support and inclined to irradiate a light source obliquely with respect to the inspected object; A reflection plate installed to correspond to the reflection angle of the light source and installed on one side of the support to receive the reflection light source and reflect the light vertically; It is composed of a camera installed on the upper portion of the base to take a vertically reflected image installed on the upper portion of the reflecting plate, The camera is a line scan camera, In the periphery of the coaxial illumination is further provided a plurality of auxiliary lights to form a reflective light source toward the reflector, The reflector is a mirror, it is installed so that the angle can be adjusted The coaxial light and the auxiliary light is installed to be detachable to the long hole formed in the support, the vision inspection device, characterized in that the position can be adjusted up and down, the angle can be adjusted. delete delete delete delete The method of claim 1, The coaxial illumination (6) is a vision inspection device, characterized in that the irradiated light source is set to reach the reflecting plate (7) to be acute angle after being reflected by the test object (200).
KR1020080028155A 2008-03-27 2008-03-27 Vision inspection apparatus KR100880546B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1020080028155A KR100880546B1 (en) 2008-03-27 2008-03-27 Vision inspection apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020080028155A KR100880546B1 (en) 2008-03-27 2008-03-27 Vision inspection apparatus

Publications (1)

Publication Number Publication Date
KR100880546B1 true KR100880546B1 (en) 2009-01-30

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101550263B1 (en) 2014-02-27 2015-09-15 뉴인텍 주식회사 Optical inspection apparatus
KR20160068228A (en) * 2014-12-05 2016-06-15 세메스 주식회사 Apparatus for inspecting defects of a substrate

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05235132A (en) * 1992-02-26 1993-09-10 Kobe Steel Ltd Bend inspection apparatus of lead of ic
JP2005214978A (en) * 2004-01-30 2005-08-11 Leica Microsystems Semiconductor Gmbh Apparatus and method for inspecting wafer

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05235132A (en) * 1992-02-26 1993-09-10 Kobe Steel Ltd Bend inspection apparatus of lead of ic
JP2005214978A (en) * 2004-01-30 2005-08-11 Leica Microsystems Semiconductor Gmbh Apparatus and method for inspecting wafer

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101550263B1 (en) 2014-02-27 2015-09-15 뉴인텍 주식회사 Optical inspection apparatus
KR20160068228A (en) * 2014-12-05 2016-06-15 세메스 주식회사 Apparatus for inspecting defects of a substrate
KR102350549B1 (en) * 2014-12-05 2022-01-14 세메스 주식회사 Apparatus for inspecting defects of a substrate

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