Hereinafter, with reference to the accompanying drawings will be described in detail a substrate structure and an inspection apparatus having the same according to an embodiment of the present invention. As the inventive concept allows for various changes and numerous embodiments, particular embodiments will be illustrated in the drawings and described in detail in the text. However, this is not intended to limit the present invention to the specific disclosed form, it should be understood to include all modifications, equivalents, and substitutes included in the spirit and scope of the present invention. In describing the drawings, similar reference numerals are used for similar elements. In the accompanying drawings, the dimensions of the structures are shown in an enlarged scale than actual for clarity of the invention.
Terms such as first and second may be used to describe various components, but the components should not be limited by the terms. The terms are used only for the purpose of distinguishing one component from another. For example, without departing from the scope of the present invention, the first component may be referred to as the second component, and similarly, the second component may also be referred to as the first component.
The terminology used herein is for the purpose of describing particular example embodiments only and is not intended to be limiting of the present invention. Singular expressions include plural expressions unless the context clearly indicates otherwise. In this application, the terms "comprise" or "have" are intended to indicate that there is a feature, number, step, action, component, part, or combination thereof described in the specification, and one or more other It should be understood that it does not exclude in advance the possibility of the presence or addition of features or numbers, steps, actions, components, parts or combinations thereof.
Unless defined otherwise, all terms used herein, including technical or scientific terms, have the same meaning as commonly understood by one of ordinary skill in the art. Terms such as those defined in the commonly used dictionaries should be construed as having meanings consistent with the meanings in the context of the related art and shall not be construed in ideal or excessively formal meanings unless expressly defined in this application. Do not.
1 is a plan view illustrating a substrate structure 100 according to an embodiment of the present invention, and FIG. 2 is a cross-sectional view of the substrate structure 100 illustrated in FIG. 1 based on a line II-II. 3 and 4 are perspective views for explaining the engraving substrate shown in FIG.
1 to 4, the substrate structure 100 includes a plurality of piece substrates 110, a frame 120, a first alignment plate 130, and a second alignment plate 140.
The engraving substrates 110 have a flat plate shape. A plurality of contact pads 112 are provided on the top surfaces of the piece substrates 110, respectively. The contact pads 112 include a conductive material. The plurality of probes 114 are provided to protrude from the lower surfaces of the engraving substrates 110, respectively. The probes 114 may be manufactured separately from the engraving substrate 110 and attached to the engraving substrate 110 or may be integrally formed with the engraving substrate 110. Although the probes 114 are shown as cantilevered in the above, the probes 114 may be vertical.
The probes 112 may be spring elements, composite contact elements or contact bumps disposed on the membrane. The spring element is an elongate element in which the end of the elongate element exhibits elastic (restoration) movement with respect to external force. The composite connection device includes a core device and an overcoat coated with the core device. The core element comprises a soft material having a relatively low yield strength, and the overcoating comprises a hard material having a relatively high yield strength. Examples of the soft material include gold wires, and examples of the hard material include nickel and alloys thereof. The overcoating may include core facing overcoating, single and multilayer overcoating, coarse overcoating with fine protrusions and overcoating over the entire length or only a portion of the core. The overcoating includes processes known to precipitate material, electrolytic plating, electroless plating, chemical vapor deposition (CVD), physical vapor deposition (PVD), separation of liquids, solids or gases from aqueous solutions, and all known methods for depositing materials. By any suitable process. On the other hand, the core element may be an elongate element of a hard material configured to function as a spring element. Contact bumps disposed on the membrane are contact bumps arranged on the membrane at regular intervals.
A plurality of electrical pads (not shown) are provided on the top surfaces of the engraving substrates 110. The electrical pads comprise a conductive material. A signal line (not shown) is formed inside the engraving substrate 110 and electrically connects the electrical pads and the probes 112. In detail, the signal line may include a via connecting the multilayer wiring to the multilayer wiring.
Side pieces of the pieces of substrate 110 are bonded to each other to form a large area substrate on the same plane.
The piece substrates 110 may be composed of two substrates, or may be composed of four substrates. In addition, the piece substrates 110 may be composed of four or more.
In addition, the piece substrates 100 may be arranged in the form of a checkerboard as shown in FIG. 1, or may be arranged adjacent to each other in a line although not shown.
The piece substrates 110 may include a first piece substrate and a second piece substrate. In this case, the first piece substrate and the second piece substrate may have a protrusion on a first side and a receiving groove on a second side different from the first side. In addition, the first piece substrate and the second piece substrate may have both a protrusion and a receiving groove on the side. In addition, the first piece of substrate may be provided with only a protrusion on the side, the second piece of substrate may have only a receiving groove on the side.
Therefore, each of the protrusions 116 is provided on the side of the first piece substrate, and the receiving groove 118 for receiving the protrusions 116 on the side of the second piece substrate, respectively, the protrusions 116 in the receiving groove 118. ) To bond the pieces substrates 110 to each other.
That is, the protrusions 116 and the receiving grooves 118 are provided on the side surfaces in which the engraving substrates 110 contact each other. In this case, the protrusions 116 and the receiving grooves 118 are provided at positions corresponding to each other. Accordingly, the protrusions 116 are inserted into the receiving grooves 118 so that the piece substrates 110 are fastened to each other. That is, the piece substrates 110 are bonded to each other to form a large area substrate on the same plane.
According to one embodiment of the present invention, as shown in FIG. 3, the protrusions 116 and the receiving grooves 118 may be provided at the same height on the side surfaces of the engraving substrates 110. According to another embodiment of the present invention, as shown in FIG. 4, the protrusions 116 and the receiving grooves 118 may be provided at different heights on the side surfaces of the engraving substrates 110.
Meanwhile, according to an embodiment of the present invention, as shown in FIG. 3, the protrusions 116 are provided on the first side surface of the engraving substrates 110, and the receiving grooves 118 are formed in the first side. It may be provided on the second side different from the one side. According to another embodiment of the present invention, the protrusions 116 and the receiving grooves 118 are provided on the first side and the second side, respectively.
The frame 120 has a rectangular ring shape, and the cross section has a 'L' shape. The frame 120 supports the side portion and the bottom edge portion of the large area substrate composed of the piece substrates 110. The frame 120 maintains the shape of the large area substrate. Although not shown, the frame 120 may further include a lattice-shaped support that crosses a central portion of the frame 120. The support supports a connection portion of the piece substrates 110 forming the large area substrate.
FIG. 5 is a cross-sectional view illustrating an alignment of the engraving substrates illustrated in FIG. 2.
Referring to FIG. 5, the first alignment member for aligning the engraving substrates 110 in a vertical direction includes a first plate 130, and the first alignment member for aligning the engraving substrates 110 in a horizontal direction. The second alignment member includes a second plate 140.
The first plate 130 is provided on at least one of upper and lower surfaces of the protrusions 116 respectively accommodated in the receiving grooves 118 provided in the engraving substrates 110. According to an embodiment of the present invention, as shown in FIG. 5, the first plate 130 is disposed between the upper wall of the receiving grooves 118 and the upper surface of the protrusions 116 and the receiving grooves. It may be interposed between the bottom wall of the 118 and the bottom surface of the protrusions 116, respectively. According to another embodiment of the present invention, the first plate 130 may be interposed between the upper wall of the receiving grooves 118 and the upper surface of the protrusions 116. According to another embodiment of the present invention, the first plate 130 may be interposed between the lower wall of the receiving grooves 118 and the lower surface of the protrusions 116.
The interposition position and the thickness of the first plate 130 may vary according to the height difference of the engraving substrates 110. The heights of the engraving substrates 110 may be adjusted by adjusting the interposition and thickness of the first plate 130. The flatness of the piece substrates 110 is adjusted by aligning the piece substrates 110 in a vertical direction.
The second plate 140 is provided on at least one of both side surfaces of the protrusions 116 respectively accommodated in the receiving grooves 118 provided in the engraving substrates 110. According to an embodiment of the present invention, as shown in FIG. 5, the second plate 140 is disposed between the first sidewall of the receiving grooves 118 and the first side surface of the protrusions 116 and the first plate. The second sidewalls of the receiving grooves 118 opposite to the first sidewall may be interposed between the second sidewalls of the protrusions 116 opposite to the first sidewalls. According to another embodiment of the present invention, the second plate 140 may be interposed between the first sidewall of the receiving grooves 118 and the first side of the protrusions 116. According to another embodiment of the present invention, the second plate 140 has a second sidewall of the receiving grooves 118 opposite to the first sidewall and the protrusions 116 opposite to the first sidewall. It may be interposed between the second side of the.
The interposition position and the thickness of the second plate 140 may vary depending on the state in which the engraving substrates 110 are aligned in the horizontal direction. Positioning the pieces of the substrate 110 in the horizontal direction by adjusting the interposition position and the thickness of the second plate 140. The piece substrates 110 are aligned in a vertical direction to align the contact pads 112 or the probes 114 of the piece substrates 110.
The first plate 130 and the second plate 140 includes a rigid material. Since the thickness of the first plate 130 and the thickness of the second plate 140 are kept constant, the piece substrates 110 may maintain a constant position.
According to another embodiment of the present invention, only the first plate 130 of the first plate 130 and the second plate 140 may be provided. Therefore, the piece substrates 110 may be aligned in the vertical direction.
According to another embodiment of the present invention, only the second plate 140 of the first plate 130 and the second plate 140 may be provided. Therefore, the engraving substrates 110 may be aligned in the horizontal direction.
6 is a cross-sectional view illustrating an alignment of engraving substrates according to another exemplary embodiment of the present disclosure.
Referring to FIG. 6, a first alignment member for aligning the engraving substrates 110 in a vertical direction includes first screws 132 and for aligning the engraving substrates 110 in a horizontal direction. The second alignment member includes second screws 142.
The first screw 132 penetrates at least one of the upper and lower surfaces of the engraving substrates 110 and is engaged with the protrusions 116 respectively received in the receiving grooves 118. According to an embodiment of the present invention, as shown in FIG. 6, the first screw 132 penetrates the upper and lower surfaces of the engraving substrates 110 and is accommodated in the receiving grooves 118, respectively. The first screw hole 117a of the protrusions 116 may be fastened to each other. According to another embodiment of the present invention, the first screw 132 penetrates the upper surfaces of the engraving substrates 110 and the first of the protrusions 116 respectively received in the receiving grooves 118. It may be fastened to the screw hole (117a). According to another embodiment of the present invention, the first screw 132 penetrates the lower surfaces of the engraving substrates 110 and is formed of the protrusions 116 respectively received in the receiving grooves 118. 1 may be fastened to the screw hole 117a.
The height of the engraving substrates 110 may be adjusted by adjusting the tightening and loosening of the first screw 132. The flatness of the piece substrates 110 is adjusted by aligning the piece substrates 110 in a vertical direction.
The second screw 142 is fastened to the protrusions 116 respectively received in the receiving grooves 118 through at least one of both side surfaces of the engraving substrates 110. According to one embodiment of the present invention, as shown in FIG. 6, the first screws 132 penetrate both sides of the engraving substrates 110 and the protrusions respectively received in the receiving grooves 118. It may be fastened to the second screw hole (117b) of the (116). According to another embodiment of the present invention, the first screws 132 pass through the first side of both sides of the engraving substrates 110 and the protrusions 116 respectively received in the receiving grooves 118. It may be fastened to the second screw hole (117b). According to another embodiment of the present invention, the first screw 132 penetrates through the second side opposite to the first side of both side surfaces of the engraving substrates 110 to each of the receiving grooves 118. It may be fastened to the second screw hole 117b of the protrusions 116 accommodated.
Adjusting the loosening and tightening of the second screw 142 to adjust the position of the pieces substrate 110 in the horizontal direction. The pieces of substrate 110 are aligned in a horizontal direction to align the contact pads 112 and the probes 114 of the pieces of substrate 110.
That is, the first screw 132 and the second screw 142 is inserted into the through hole connected to the receiving groove 118 formed on the inner side from the outer surface of the engraving substrate 110, the receiving groove 118 It is fastened with the protrusions 116 accommodated in each.
According to one embodiment of the present invention, the diameters of the through holes provided in the piece substrates 110 to which the first screw 132 and the second screw 142 are fastened are the first and second screws 132. , 142). Therefore, in the state where the first screw 132 is fastened to the upper or lower surface of the engraving substrates 110, the second screws 142 fastened to the side surface are adjusted to parallel the positions of the engraving substrates 110. Direction can be corrected. That is, the first screw 132 penetrates the through hole of the engraving substrate 110 and is fastened to the first screw holes 117a of the protrusion 116 so that the first and second screws ( The 132 and 142 may be moved in a parallel direction along the engraving substrates 110 by tightening and loosening the second screw 142 until the screws 132 and 142 are completely tightened.
In addition, by adjusting the first screw 132 on the upper surface or the lower surface in the state in which the screw (142) is fastened to the side of the engraving substrate 110, the position of the engraving substrate 110 can be corrected in the vertical direction. have. That is, the second screw 142 penetrates the through hole of the engraving substrate 110 and is fastened to the second screw holes 117b of the protrusion 116 so that the first and second screws ( It is possible to move in the vertical direction along the engraving substrates 110 by tightening and loosening the first screw 132 until the screws 132 and 142 are completely tightened.
According to another embodiment of the present invention, the first and second screw holes 117a and 117b provided in the protrusions 116 may be circular. There is a gap between the first screws 132 and the first screw holes 117a and between the second screws 142 and the second screw holes 117b. Accordingly, even when the first screw 132 is tightened or loosened in the state where the second screw 142 is fastened to the protrusions 116, the protrusions 116 may move in the vertical direction. In addition, the protrusions 116 may move in the horizontal direction even if the second screw 142 is tightened or loosened while the first screw 132 is fastened to the protrusions 116.
According to another embodiment of the present invention, the first screw 132 and the second screw 142 is fastened and penetrated through the receiving groove 118 formed on the inner side from the outer surface of the engraving substrate 110, the The protrusions 116 are respectively accommodated in the receiving grooves 118. In this case, the first and second screw holes 117a and 117b provided in the protrusions 116 may have a shape similar to an ellipse. Therefore, even when the first screw 132 is tightened or loosened while the second screw 142 is fastened to the protrusions 116, the protrusions 116 can be easily moved in the vertical direction. In addition, even when the first screw 132 is fastened to the protrusions 116, even if the second screw 142 is tightened or loosened, the protrusions 116 may be easily moved in the horizontal direction.
In addition, the first screw 132 and the second screw 142 may be provided through the frame 120. Since the first screw 132 and the second screw 142 are exposed to the outside of the frame 120, the first screw 132 and the second screw 142 can be easily adjusted.
According to another embodiment of the present invention, only the first screw 132 of the first screw 132 and the second screw 142 may be provided. Therefore, the piece substrates 110 may be aligned in the vertical direction.
According to another embodiment of the present invention, only the second screw 142 of the first screw 132 and the second screw 142 may be provided. Therefore, the piece substrates 110 may be aligned in the horizontal direction.
7 is a cross-sectional view illustrating an alignment of engraving substrates according to another exemplary embodiment of the present disclosure.
Referring to FIG. 7, the first alignment member for aligning the engraving substrates 110 in a vertical direction includes first screws 132 and first elastic members 150. The second alignment member for aligning 110 in the horizontal direction includes second screws 142 and second elastic members 152. The first elastic members 150 and the second elastic members 152 may be formed of a plate made of an elastic material or may have a spring shape.
The description of the first screws 132 and the second screws 142 is substantially the same as the description of the first screws 132 and the second screws 142 of FIG. 6.
The first elastic members 150 are provided on at least one of upper and lower surfaces of the protrusions 116 to which the first screws 132 are fastened. According to an embodiment of the present invention, as shown in FIG. 7, the first screws 132 are fastened to the protrusions 116 through the upper and lower surfaces of the engraving substrates 110. In this case, the first elastic member 150 is disposed between the upper wall of the receiving grooves 118 and the upper surface of the protrusions 116 and the lower wall of the receiving grooves 118 and the protrusions 116. It may be interposed between the lower surface of each. According to another embodiment of the present invention, when the first screws 132 are fastened to the protrusions 116 through the upper surfaces of the engraving substrates 110, the first elastic member 150 May be interposed between an upper wall of the receiving grooves 118 and an upper surface of the protrusions 116. According to another embodiment of the present invention, when the first screws 132 are fastened to the protrusions 116 through the lower surfaces of the engraving substrates 110, the first elastic member 150 ) May be interposed between the lower wall of the receiving grooves 118 and the lower surface of the protrusions 116.
The height of the engraving substrates 110 may be adjusted by adjusting the tightening and loosening of the first screw 132. The flatness of the piece substrates 110 is adjusted by aligning the piece substrates 110 in a vertical direction. In addition, the first elastic member 150 prevents direct contact between the upper wall and the lower wall defining the protrusions 116 and the receiving grooves 118. Therefore, it is possible to prevent damage to the portions provided with the protrusions 116 and the receiving grooves 118 according to the adjustment of the first screws 132.
The second elastic members 152 are provided on at least one of both side surfaces of the protrusions 116 to which the second screws 142 are fastened. According to one embodiment of the present invention, as shown in FIG. 7, when the second screws 142 are fastened to the protrusions 116 through both sides of the engraving substrates 110, 2 The elastic member 152 is formed between the first sidewall of the receiving grooves 118 and the first side surface of the protrusions 116 and the second sidewall of the receiving grooves 118 opposite to the first sidewall. It may be interposed between the second side of the protrusions 116 opposite to the first side. According to another embodiment of the present invention, when the second screws 142 are fastened to the protrusions 116 through the first side of both side surfaces of the engraving substrate 110, the second elastic member 152 may be interposed between the first sidewall of the receiving grooves 118 and the first side surface of the protrusions 116. According to another embodiment of the present invention, the second screws 142 are fastened to the protrusions 116 through a second side opposite to the first side of both sides of the engraving substrate 110. In this case, the second elastic member 152 is interposed between the second side wall of the receiving grooves 118 opposite to the first side wall and the second side surface of the protrusions 116 opposite to the first side surface. Can be.
Adjusting the loosening and tightening of the second screw 142 to adjust the position of the pieces substrate 110 in the horizontal direction. The piece substrates 110 are aligned in a vertical direction to align the contact pads 112 and the probes 114 of the piece substrates 110. In addition, the second elastic member 152 prevents direct contact between the protrusions 116 and both side walls defining the receiving grooves 118. Therefore, it is possible to prevent damage to the portions provided with the protrusions 116 and the receiving grooves 118 according to the adjustment of the second screws 142. On the other hand, the first elastic member 150 and the second elastic member 152 can prevent the positional variation of the engraving substrate that may occur due to the play of the screw coupling.
According to another embodiment of the present invention, when only the first screws 132 are provided, only the first elastic member 150 of the first elastic member 150 and the second elastic member 152 is provided. Can be.
According to another embodiment of the present invention, when only the second screws 142 are provided, only the second elastic member 152 of the first elastic member 150 and the second elastic member 152 is provided. It may be provided.
8 is a cross-sectional view illustrating an alignment of engraving substrates according to still another embodiment of the present invention.
Referring to FIG. 8, a first alignment member for aligning the engraving substrates 110 in a vertical direction includes third screws 134, and for aligning the engraving substrates 110 in a horizontal direction. The second alignment member includes fourth screws 144.
The third screw 134 fastens and penetrates at least one of the upper and lower surfaces of the engraving substrates 110 to contact the protrusions 116 respectively received in the receiving grooves 118. According to an embodiment of the present invention, as shown in FIG. 8, the third screw 134 fastens and penetrates the upper surfaces of the engraving substrates 110 to be received in the receiving grooves 118, respectively. In contact with the upper surface of the protrusions 116, the lower surface of the projections 116 are respectively received in the receiving grooves 118 by fastening and penetrating the lower surface of the engraving substrate 110. can do. According to another embodiment of the present invention, the third screw 134 fastens and penetrates the upper surfaces of the engraving substrates 110 so that the protrusions 116 respectively received in the receiving grooves 118. It may be in contact with the top surface. According to another embodiment of the present invention, the third screws 134 fasten and penetrate the lower surfaces of the engraving substrates 110 so that the protrusions 116 are respectively received in the receiving grooves 118. It may be in contact with the bottom surface of the.
The height of the engraving substrates 110 may be adjusted by adjusting the tightening and loosening of the third screw 134. The flatness of the piece substrates 110 is adjusted by aligning the piece substrates 110 in a vertical direction.
The fourth screw 144 fastens and penetrates at least one of both side surfaces of the piece substrates 110 to contact the protrusions 116 respectively received in the receiving grooves 118. According to an embodiment of the present invention, as shown in FIG. 8, the fourth screw 144 fastens and penetrates both sides of the engraving substrates 110 to be received in the receiving grooves 118, respectively. In contact with both sides of the protrusions 116, respectively. According to another exemplary embodiment of the present invention, the fourth screws 144 fasten and penetrate first side surfaces of both side surfaces of the engraving substrates 110 to receive the protrusions respectively received in the receiving grooves 118. 116 may be in contact with the first side of both sides. According to another embodiment of the present invention, the fourth screw 144 fastens and penetrates through the second side opposite to the first side of both side surfaces of the engraving substrates 110 so as to accommodate the receiving grooves 118. Each of the two sides of the protrusions 116 accommodated in the contact with the second side opposite to the first side.
By adjusting the loosening and tightening of the fourth screw 144, the pieces of substrates 110 are adjusted in the horizontal direction. The pieces of substrate 110 are aligned in a horizontal direction to align the contact pads 112 and the probes 114 of the pieces of substrate 110.
Meanwhile, the third screw 134 and the fourth screw 144 may be provided through the frame 120. Since the third screw 134 and the fourth screw 144 are exposed to the outside of the frame 120, the third screw 134 and the fourth screw 144 can be easily adjusted.
According to another embodiment of the present invention, only the third screw 134 of the third screw 134 and the fourth screw 144 may be provided. Therefore, the piece substrates 110 may be aligned only in the vertical direction.
According to another embodiment of the present invention, only the fourth screw 144 of the third screw 134 and the fourth screw 144 may be provided. Therefore, the piece substrates 110 may be aligned only in the horizontal direction.
9 is a cross-sectional view illustrating an alignment of engraving substrates according to still another embodiment of the present invention.
Referring to FIG. 9, the first alignment member for aligning the engraving substrates 110 in the vertical direction includes third screws 134 and third elastic members 154, and the engraving substrates ( The second alignment member for aligning 110 in the horizontal direction includes fourth screws 144 and fourth elastic members 156.
The description of the third screws 134 and the fourth screws 144 is substantially the same as the description of the third screws 134 and the fourth screws 144 of FIG. 8.
The third elastic members 154 are provided on at least one of upper and lower surfaces of the protrusions 116 to which the third screws 134 are fastened. According to an embodiment of the present invention, as shown in FIG. 9, the third screws 134 fasten and penetrate the upper and lower surfaces of the engraving substrates 110 so that the protrusions 116 and the protrusions 116. In contact, the third elastic member 154 may be disposed between the upper wall of the receiving grooves 118 and the upper surface of the protrusions 116 and the lower wall of the receiving grooves 118 and the protrusions ( 116 may be interposed between the bottom surfaces of each. According to another embodiment of the present invention, when the third screws 134 fasten and penetrate the upper surfaces of the engraving substrates 110 to contact the protrusions 116, the third elastic member ( 154 may be interposed between the upper wall of the receiving grooves 118 and the upper surface of the protrusions 116. According to another embodiment of the present invention, when the third screws 134 fasten and penetrate the lower surfaces of the engraving substrates 110 to contact the protrusions 116, the third elastic member. 154 may be interposed between the lower wall of the receiving grooves 118 and the lower surface of the protrusions 116.
The height of the engraving substrates 110 may be adjusted by adjusting the tightening and loosening of the third screw 134. The flatness of the piece substrates 110 is adjusted by aligning the piece substrates 110 in a vertical direction. In addition, the third elastic member 154 prevents direct contact between the upper wall and the lower wall defining the protrusions 116 and the receiving grooves 118. Therefore, it is possible to prevent damage to the portions provided with the protrusions 116 and the receiving grooves 118 according to the adjustment of the third screws 134.
The fourth elastic members 156 are provided on at least one of both side surfaces of the protrusions 116 to which the fourth screws 144 are fastened. According to one embodiment of the present invention, as shown in FIG. 7, when the fourth screws 144 fasten and penetrate both sides of the engraving substrates 110 to contact the protrusions 116, The fourth elastic member 156 is disposed between the first sidewall of the receiving grooves 118 and the first side surface of the protrusions 116 and the second of the receiving grooves 118 opposite to the first sidewall. It may be interposed between the side wall and the second side of the protrusions 116 opposite to the first side. According to another embodiment of the present invention, when the fourth screws 144 fasten and penetrate first side surfaces of both side surfaces of the engraving substrates 110 to contact the protrusions 116, the fourth screws 144 may contact the fourth parts 116. The elastic member 156 may be interposed between the first sidewall of the receiving grooves 118 and the first side surface of the protrusions 116. According to another embodiment of the present invention, the fourth screws 144 fasten and penetrate through the second side opposite to the first side of both side surfaces of the engraving substrates 110 so that the protrusions 116 are formed. The fourth elastic member 156 is in contact with the second sidewall of the receiving grooves 118 opposite to the first sidewall and the second sidewall of the protrusions 116 opposite to the first sidewall. It can be intervened in between.
Adjusting the loosening and tightening of the fourth screw 144 to adjust the position of the engraving substrate 110 in the horizontal direction. The pieces of substrate 110 are aligned in a horizontal direction to align the contact pads 112 and the probes 114 of the pieces of substrate 110. In addition, the fourth elastic member 156 prevents direct contact between the protrusions 116 and both side walls defining the receiving grooves 118. Therefore, it is possible to prevent damage to the portions provided with the protrusions 116 and the receiving grooves 118 according to the adjustment of the fourth screws 144. On the other hand, the third elastic member 154 and the fourth elastic member 156 can prevent the positional variation of the engraving substrate that may occur due to the play of the screw coupling.
According to another embodiment of the present invention, when only the third screws 134 are provided, only the third elastic member 154 of the third elastic member 154 and the fourth elastic member 156 is provided. Can be.
According to another embodiment of the present invention, when only the fourth screws 144 are provided, only the fourth elastic member 156 of the third elastic member 154 and the fourth elastic member 156 is provided. It may be provided.
10 is a cross-sectional view illustrating an alignment of engraving substrates according to another exemplary embodiment of the present disclosure.
Referring to FIG. 10, the first alignment member for aligning the engraving substrates 110 in a vertical direction includes fifth screws 136, and for aligning the engraving substrates 110 in a horizontal direction. The second alignment member includes sixth screws 146.
The fifth screw 136 is in contact with at least one of the upper and lower surfaces of the receiving grooves 118 and the protrusions 116 respectively received in the receiving grooves 118. According to an embodiment of the present invention, as shown in FIG. 10, the fifth screw 136 contacts the upper and lower surfaces of the receiving grooves 118 and the receiving grooves 118. It may be fastened to the third screw hole (117c) of the protrusions 116 respectively received in the. According to another embodiment of the present invention, the fifth screw 136 has the screw head in contact with the upper surface of the receiving grooves 118 and the protrusions 116 respectively received in the receiving grooves 118. It may be fastened to the third screw hole (117c). According to another embodiment of the present invention, the fifth screw 136 is the protrusions 116 are respectively received in the receiving grooves 118 and the screw head is in contact with the lower surface of the receiving grooves (118) ) May be fastened to the third screw hole 117c.
The heights of the engraving substrates 110 may be adjusted by adjusting the tightening and loosening of the fifth screw 136. The flatness of the piece substrates 110 is adjusted by aligning the piece substrates 110 in a vertical direction.
The sixth screw 146 is fastened to the protrusions 116 respectively received in the upper receiving grooves 118 with the screw heads contacting at least one of both sides of the receiving grooves 118. According to one embodiment of the present invention, as shown in FIG. 6, the fifth screw 136 has screw heads in contact with both sides of the receiving grooves 118, and is accommodated in the receiving grooves 118, respectively. And the fourth screw hole 117d of the protrusions 116. According to another embodiment of the present invention, the fifth screw 136 is the protrusions that the screw head is in contact with the first side of both sides of the receiving grooves 118 and are respectively received in the receiving grooves 118 And the fourth screw hole 117d of 116. According to another embodiment of the present invention, the fifth screw 136 has a screw head in contact with the second side opposite to the first side of both sides of the receiving grooves 118 and the receiving grooves 118 ) May be fastened to the fourth screw holes 117d of the protrusions 116 respectively.
The loosening and tightening of the sixth screw 146 is adjusted to adjust the position of the piece substrates 110 in the horizontal direction. The pieces of substrate 110 are aligned in a horizontal direction to align the contact pads 112 and the probes 114 of the pieces of substrate 110.
According to another embodiment of the present invention, only the fifth screw 136 of the fifth screw 136 and the sixth screw 146 may be provided. Therefore, the piece substrates 110 may be aligned in the vertical direction.
According to another embodiment of the present invention, only the sixth screw 146 of the fifth screw 136 and the sixth screw 146 may be provided. Therefore, the piece substrates 110 may be aligned in the horizontal direction.
Accordingly, the substrate structure 100 may align a plurality of pieces of substrates 110 forming a large area substrate in the vertical direction and the horizontal direction by using the first alignment member and the second alignment member.
FIG. 11 is a plan view illustrating a substrate structure 200 according to another embodiment of the present invention. FIG. 12 is a cross-sectional view of the substrate structure 200 shown in FIG. 11 taken along the line II-XIII. 13 is a cross-sectional view of the substrate structure 200 illustrated in FIG. 11 based on the XIII-XIII line. 14 and 15 are perspective views illustrating the engraving frame 220 illustrated in FIG. 11.
11 to 15, the substrate structure 200 includes a plurality of pieces of substrate 210, pieces of frame 220, first alignment plate 230, second alignment plate 240, and main frame 250. ).
The engraving substrates 210 have a flat plate shape. A plurality of contact pads 212 are provided on the top surfaces of the piece substrates 210, respectively. The plurality of probes 214 protrude from the lower surfaces of the engraving substrates 210, respectively. The descriptions of the contact pads 212 and the probes 214 are substantially the same as the descriptions of the pads 112 and the probes 114 described with reference to FIGS. 1 to 4.
The engraving frames 220 have a rectangular ring shape, and have a cross-section of an 'L' shape. The engraving frames 220 respectively support side portions and bottom edge portions of the engraving substrates 210.
Meanwhile, a centering member (not shown) may be provided between the engraving frames 220 and the engraving substrates 210 to position the engraving substrates 210 at the center of the engraving frames 220. Can be. An example of the centering member may be a leaf spring or the like.
The engraving frames 220 have protrusions 222 and receiving grooves 224, respectively. The protrusions 222 and the receiving grooves 224 are provided on the side surfaces in which the piece substrates 210 contact each other. The protrusions 222 and the receiving grooves 224 are provided at positions corresponding to each other. The protrusions 222 are inserted into the receiving grooves 224 to fasten the piece frames 220 to each other. The engraving frames 220 are fastened to form the large area substrate on the same plane.
According to an embodiment of the present invention, as shown in FIG. 14, the protrusions 222 and the receiving grooves 224 may be provided at the same height on the side surfaces of the engraving frames 220. According to another embodiment of the present invention, as shown in FIG. 15, the protrusions 222 and the receiving grooves 224 may be provided at different heights on the side surfaces of the engraving frames 220.
Meanwhile, according to an embodiment of the present invention, as shown in FIG. 14, the protrusions 222 are provided on the first side surface of the engraving frames 220, and the receiving grooves 224 are formed in the first side. It may be provided on a second side of the engraving frames 220 different from one side. According to another embodiment of the present invention, the protrusions 222 and the receiving grooves 224 are provided on the first side and the second side, respectively.
Like the engraving frame 220, the main frame 250 has a rectangular ring shape, and the cross section has a 'L' shape. The main frame 250 supports side portions and lower edge portions of the combined fragment frames 220. Although not shown, the main frame 250 may further include a lattice-shaped support that crosses a central portion of the main frame 250. The support supports the connection portions of the engraving frames 220 at the bottom of the coupled engraving frames 220.
Meanwhile, a centering member (not shown) is provided between the main frame 250 and the combined engraving frames 220 to position the combined engraving frames 220 in the center of the main frame 250. Can be. An example of the centering member may be a leaf spring or the like.
FIG. 16 is a cross-sectional view illustrating an alignment of the engraving frames illustrated in FIG. 13.
Referring to FIG. 16, a first alignment member for aligning the engraving frames 220 in a vertical direction includes a first plate 230, and a first arrangement for aligning the engraving frames 220 in a horizontal direction. The second alignment member includes a second plate 240.
The first plate 230 and the second plate 240 are disposed on the engraving frames 220 instead of the engraving substrates 210. The detailed description of the plate 240 is substantially the same as the description of the first plate 130 and the second plate 140 described with reference to FIG. 5.
By using the first plate 230 and the second plate 240, the positions of the engraving frames 220 may be adjusted in the vertical direction and the horizontal direction. Therefore, the positions of the engraving substrates 210 supported by the engraving frames 220 may also be adjusted.
17 is a cross-sectional view illustrating an alignment of engraving frames according to another exemplary embodiment of the present invention.
Referring to FIG. 17, the first alignment member for aligning the engraving frames 220 in the vertical direction includes first screws 232, and for aligning the engraving frames 220 in the horizontal direction. The second alignment member includes second screws 242.
The first screws 232 and the second screws 242 are provided on the engraving frames 220 instead of the engraving substrates 210, and the first screws 232 and the second screws 242 are not provided. The detailed description of the second screws 242 is substantially the same as the description of the first screws 132 and the second screws 142 described with reference to FIG. 6.
18 is a cross-sectional view illustrating an alignment of engraving frames according to another exemplary embodiment of the present invention.
Referring to FIG. 18, the first alignment member for aligning the engraving frames 220 in the vertical direction includes first screws 232 and first elastic members 260, and the engraving frames ( The second alignment member for aligning 220 in the horizontal direction includes second screws 242 and second elastic members 262.
The engraving frames in which the first screws 232, the first elastic members 260, the second screws 242, and the second elastic members 262 are not the engraving substrates 210 are formed. Except as provided in the 220, a detailed description of the first screws 232, the first elastic members 260, the second screws 242, and the second elastic members 262. Is substantially the same as the description of the first screws 132, the first elastic members 150, the second screws 142 and the second elastic members 152 described with reference to FIG. 7. Do.
19 is a cross-sectional view for explaining the alignment of the engraving frames according to another embodiment of the present invention.
Referring to FIG. 19, the first alignment member for aligning the engraving frames 220 in the vertical direction includes third screws 234, and for aligning the engraving frames 220 in the horizontal direction. The second alignment member includes fourth screws 244.
The third screws 234 and the fourth screws 234 are disposed on the engraving frames 220 instead of the engraving substrates 210. The detailed description of the fourth screws 244 is substantially the same as the description of the third screws 134 and the fourth screws 144 described with reference to FIG. 8.
20 is a cross-sectional view illustrating an alignment of engraving frames according to another exemplary embodiment of the present invention.
Referring to FIG. 20, the first alignment member for aligning the engraving frames 220 in the vertical direction includes third screws 234 and third elastic members 264, and the engraving frames ( The second alignment member for aligning 220 in the horizontal direction includes fourth screws 244 and fourth elastic members 266.
The engraving frames of the third screws 234, the third elastic members 264, the fourth screws 244, and the fourth elastic members 266 are not the engraving substrates 210. Except as provided in the 220, a detailed description of the third screws 234, the third elastic members 264, the fourth screws 244 and the fourth elastic members 266. Is substantially the same as the description of the third screws 134, the third elastic members 154, the fourth screws 144 and the fourth elastic members 156 described with reference to FIG. 9. Do.
21 is a cross-sectional view illustrating an alignment of engraving frames according to another exemplary embodiment of the present invention.
Referring to FIG. 21, the first alignment member for aligning the engraving frames 220 in the vertical direction includes fifth screws 236, and for aligning the engraving frames 220 in the horizontal direction. The second alignment member includes sixth screws 246.
The fifth screws 236 and the sixth screws 236 are provided on the engraving frames 220 instead of the engraving substrates 210. The detailed description of the sixth screws 246 is substantially the same as the description of the fifth screws 136 and the sixth screws 146 described with reference to FIG. 10.
In the substrate structures according to the above embodiments, the correction screws are described as being engaged with or in contact with the protrusions received in the receiving grooves, but the compensation screws may be partially engaged with the protrusions and the other may be in contact with the protrusions. .
FIG. 22 is a cross-sectional view for describing an inspection apparatus 300 including the substrate structure 310 illustrated in FIG. 1.
Referring to FIG. 22, the inspection apparatus 300 includes a first substrate structure 310, a second substrate structure 320, a connector 330, a fixing part 340, and a flatness adjusting member 350. .
The first substrate structure 310 includes a plurality of engraving substrates 312, a frame 314, a first alignment member 316, and a second alignment member 318. A detailed description of the first substrate structure 310 is substantially the same as the description of the substrate structure 100 with reference to FIGS. 1 to 10.
The second substrate structure 320 is provided on the first substrate structure 310. The second substrate structure 320 has a signal line (not shown) therein, and a connection hole 322 connected to the signal line penetrates up and down. A conductive film 324 is formed on the inner wall of the connection hole 322. The conductive film 324 is made of a conductive material. Copper may be mentioned as an example of the said conductive material. The signal line is electrically connected to a separate test device (not shown).
The connector 330 electrically connects the first substrate structure 310 and the second substrate structure 320. In detail, the connector 330 electrically connects the conductive layer 324 in the connection hole 322 of the second substrate structure 320 and the contact pad of the first substrate structure 310. The connector 330 includes a conductive material. Examples of the conductive material include metals.
The first end 332 of the connector 330 is electrically connected to the contact pad of the first substrate structure 310. For example, the first end 332 may contact the contact pad. As another example, the first end 332 may be fixed to the contact pad.
The second end 334 of the connecting body 330 opposite to the first end 332 is inserted into the connection hole 322 of the second substrate structure 320. For example, the second end 334 may contact the conductive layer 324 of the connection hole 322. As another example, the second end portion 334 may be fixed to the conductive layer 324 of the connection hole 322.
According to another embodiment of the present invention, the electrical inspection apparatus 300 is not provided with the connecting body 330, the second substrate structure 320 and the first substrate structure 310, such as FPC (Flexible Printed Circuit) It may be coupled to the wiring member and electrically connected.
The fixing part 340 fixes the first substrate structure 310 and the second substrate structure 320. The fixing part 340 includes a first reinforcement plate 341, a second reinforcement plate 342, a leaf spring 344, and a plurality of bolts.
The first reinforcement plate 341 has a disc shape and is disposed on an upper surface of the second substrate structure 320. The second reinforcement plate 342 has a ring shape and is provided along a circumference of a lower surface of the second substrate structure 320. The first bolt 345 fixes the first reinforcement plate 341, the second substrate structure 320, and the second reinforcement plate 342. The leaf spring 344 contacts the second reinforcement plate 342 and the frame 314 of the first substrate structure 310. The second bolt 346 fixes the second reinforcement plate 342 and the leaf spring 344, and the third bolt 347 fixes the leaf spring 344 and the frame 314.
The flatness adjusting member 350 penetrates through the first reinforcing plate 341 and the second substrate structure 320 to be in contact with the top surface of the first substrate structure 310. If the thickness of the first substrate structure 310 is formed to change from one side to the other side due to an error in the manufacturing process, even if the first substrate structure 310 is installed horizontally with respect to the second substrate structure 320 The ends of the probes 323 may not be located at the same height. The flatness adjusting member 350 adjusts the strength of contact with the upper surface of the first substrate structure 310 so that the ends of the probe 323 are positioned at the same height. Adjust the horizontality of the bottom surface.
On the other hand, since the flatness of the pieces of the substrate can be adjusted by aligning the plurality of pieces of substrate in the vertical direction, the first substrate structure 310 does not include the flatness adjusting member 350 as described above. Horizontalness of the lower surface of the first substrate structure 310 is adjusted. In particular, the first substrate structure 310 can be aligned in the vertical direction and at the same time in the horizontal direction of the lower surface.
FIG. 23 is a cross-sectional view for describing an inspection apparatus including the substrate structure illustrated in FIG. 11.
Referring to FIG. 23, the inspection apparatus 400 includes a first substrate structure 410, a second substrate structure 420, a connector 430, a fixing part 440, and a flatness adjusting member 450. .
The first substrate structure 410 includes a plurality of piece substrates 412, a piece frame 414, a main frame 416, and alignment members 418. A detailed description of the first substrate structure 410 is substantially the same as the description of the substrate structure 200 with reference to FIGS. 11 to 21.
A detailed description of the second substrate structure 420, the connector 430, the fixing part 440, and the flatness adjusting member 450 is described with reference to FIG. 22. , And are substantially the same as the description of the fixing portion 340 and the flatness adjusting member 350.
According to another embodiment of the present invention, the electrical inspection apparatus 400 may not be provided with the second substrate structure 420, and may be made of only the first substrate structure 410.
According to another embodiment of the present invention, the electrical inspection device 400 is not provided with a connecting portion 430, the second substrate structure 420 and the first substrate structure 410 is electrically coupled by bonding with an adhesive such as soldering May be connected.
According to another embodiment of the present invention, the electrical inspection apparatus 400 is not provided with a connecting portion 430, the second substrate structure 420 and the first substrate structure 410 is a wiring such as FPC (Flexible Printed Circuit) It may be coupled to the member and electrically connected.
24 is a cross-sectional view for describing a test apparatus 500 according to an exemplary embodiment.
Referring to FIG. 24, the electrical test apparatus 500 includes a first substrate structure 510, a second substrate structure 520, and a fixing part 530.
The description of the first substrate structure 510 is substantially the same as the description of the substrate structure 100 with reference to FIGS. 1 to 10, or substantially the description of the substrate structure 200 with reference to FIGS. 11 to 21. Same as Hereinafter, a case in which the first substrate structure 510 is substantially the same as the substrate structure 200 described with reference to FIGS. 11 to 21 will be described.
The description of the second substrate structure 520 is substantially the same as the description of the second substrate structure 320 with reference to FIG. 22.
The fixing part 530 is connected to the first substrate structure 510 and the second substrate so that the upper surface of the first substrate structure 510 and the lower surface of the second substrate structure 520 are directly contacted and electrically connected to each other. The substrate structure 520 is fixed. The fixing part 530 includes a reinforcing plate 531 and a plurality of bolts 532.
The reinforcement plate 531 has a disc shape and is disposed on an upper surface of the second substrate structure 520. The bolts 532 pass through the reinforcing plate 531 and the second substrate structure 520 and are fastened to the main frame of the first substrate structure 510.
The bolts 532 may be fastened to the main frame of the first substrate structure 510 by passing through the second substrate structure 520 without the reinforcing plate 531.
Meanwhile, the first substrate structure 510 does not include the main frame, and the bolts 532 may be fastened to fragment frames separated from each other.
Therefore, the electrical inspection apparatus 500 may correct the position of the engraving substrates in a direction perpendicular to the upper surfaces of the engraving substrates by using the first correction screws of the first substrate structure 510.
According to another exemplary embodiment of the present invention, the first substrate structure 510 and the first substrate structure 510 and the lower surface of the second substrate structure 520 are in direct contact with each other so as to be electrically connected to each other. The two substrate structures 520 are combined. The first substrate structure 510 and the second substrate structure 520 are coupled by soldering, adhesive, or the like.
Meanwhile, the first substrate structure 510 does not include the main frame, and the fragment frames may be separated from each other and combined with the second substrate structure 520.
Therefore, the electrical inspection apparatus 500 may correct the position of the engraving substrates in a direction perpendicular to the upper surfaces of the engraving substrates by using the first correction screws of the first substrate structure 510.
25 is a cross-sectional view for describing an electrical test apparatus 600 according to an exemplary embodiment.
Referring to FIG. 25, the electrical inspection apparatus 600 may include a first substrate structure 610, a second substrate structure 620, a third substrate structure 630, a first connector 640, and a second connector ( 650, a fixing part 660, and a flatness adjusting member 670.
The description of the first substrate structure 610 and the second substrate structure 620 is substantially the same as the description of the first substrate structure 510 and the second substrate structure 520 with reference to FIG. 24.
The third substrate structure 630 is provided between the first substrate structure 610 and the second substrate structure 620. The third substrate structure 630 includes a substrate 632 and a frame 634 supporting side and bottom surfaces of the substrate 632. The substrate 632 has a signal line (not shown) therein. Examples of the substrate 632 include a printed circuit board and a multilayer board.
The first connector 640 electrically connects the first substrate structure 610 and the third substrate structure 630. The first end 642 of the first connector 640 may be in contact with or fixed to the first substrate structure 610. The second end 644 of the first connector 640 opposite to the first end 642 may be in contact with or fixed to the third substrate structure 630.
According to another embodiment of the present invention, the electrical inspection apparatus 600 is not provided with the first connector 640, the first substrate structure 610 and the third substrate structure 630 is FPC (Flexible Printed Circuit) It may be coupled to the wiring member such as to be electrically connected.
The second connector 650 electrically connects the second substrate structure 620 and the third substrate structure 630. In detail, the second connector 650 electrically connects the conductive layer 624 of the connection hole 622 and the electrical pad of the third substrate structure 630. The first end 652 of the second connector 650 may be in contact with or fixed to the third substrate structure 630. The second end 654 of the second connector 650 opposite to the first end 652 may contact or be fixed to the conductive layer 624 of the second substrate structure 620.
According to another embodiment of the present invention, the electrical inspection apparatus 600 is not provided with the second connector 650, the second substrate structure 620 and the third substrate structure 630 is FPC (Flexible Printed Circuit) It may be coupled to the wiring member such as to be electrically connected.
The fixing part 660 fixes the first substrate structure 610, the second substrate structure 620, and the third substrate structure 630. The fixing part 660 includes a first reinforcement plate 661, a second reinforcement plate 662, a third reinforcement plate 663, a leaf spring 664, and a plurality of bolts.
The first reinforcement plate 661 has a disc shape and is disposed on an upper surface of the second substrate structure 620. The second reinforcing plate 662 has a ring shape and is provided along a circumference of a lower surface of the second substrate structure 620. The third reinforcement plate 663 has a ring shape and is provided around the lower surface of the third substrate structure 630, that is, along the frame 634. The first bolt 665 fixes the first reinforcement plate 661, the second substrate structure 620, and the second reinforcement plate 662. The leaf spring 664 connects the second reinforcement plate 662 and the frame 634 of the third substrate structure 630. Meanwhile, the leaf spring 664 connects the second reinforcement plate 662 and the frame 634 of the third substrate structure 630 to each other, and a portion of the leaf spring 664 is formed on the substrate 632. The upper surface may be pressed and contact to fix the substrate 632 to the frame 634.
The second bolt 666 fixes the second reinforcement plate 662 and the leaf spring 664, and the third bolt 667 fixes the leaf spring 664 and the frame 634. The fourth bolt 668 fixes the frame 634 and the third reinforcement plate 663. The fifth bolt 669 fixes the frame of the third reinforcement plate 663 and the first substrate structure 610. Although not shown, a plate spring is further installed between the third reinforcement plate 663 and the frame of the first substrate structure 610, so that the plate spring elastically covers the upper surface of the piece substrate of the first substrate structure 610. The engraving substrate may be fixed to the frame by pressing.
Meanwhile, the main frame of the first substrate structure 610 is formed in a separate configuration from the third reinforcement plate 663, and the main frame and the third reinforcement plate 663 are coupled by the fifth bolt 669. May be The main frame and the third reinforcement plate 663 may be integrally formed except for the fifth bolt 669.
The flatness adjusting member 670 is provided to contact the upper surface of the third substrate structure 630 through the first reinforcing plate 661 and the second substrate structure 620. When the thickness of the first substrate structure 610 is formed to change from one side to the other side due to an error in a manufacturing process, the first substrate structure 610 is installed horizontally with respect to the second substrate structure 620. However, the ends of the probes may not be located at the same height. The flatness adjusting member 670 adjusts the horizontal degree of the first substrate structure 610 fixed to the bottom by adjusting the strength in contact with the upper surface of the third substrate structure 630. Therefore, an end portion of the probe provided on the lower surface of the first substrate structure 610 may be positioned at the same height.
According to another embodiment of the present invention, the flatness adjusting member 670 may not be provided. The position of the engraving substrates may be corrected in a direction perpendicular to the upper surfaces of the engraving substrates by using the first correction screws of the first substrate structure 610. Therefore, even if the flatness adjusting member 670 is not provided, the horizontal or flatness of the lower surface of the first substrate structure 610 may be adjusted.
In addition, the embodiment of the present invention can correct the position of the engraving substrates in a direction parallel to the upper surface of the engraving substrates by using the second correction screws.
According to another embodiment of the present invention, the first substrate structure 610 is a plurality of pieces of the substrate is supported by a plurality of pieces of frame without a main frame, the fixing portion 660 so that the pieces of frame are spaced apart from each other The first substrate structure 610 may be fixed to the third substrate structure 630.
26 is a cross-sectional view for describing an electrical test apparatus 700 according to an exemplary embodiment.
Referring to FIG. 26, the electrical inspection apparatus 700 includes a first substrate structure 710, a second substrate structure 720, a third substrate structure 730, a connector 740, a fixing part 750, and a flat surface. And a degree adjusting member 760.
The description of the first substrate structure 710 and the second substrate structure 720 is substantially the same as the description of the first substrate structure 510 and the second substrate structure 520 with reference to FIG. 24.
For the description of the third substrate structure 730, the connector 740, and the flatness adjusting member 760, the third substrate structure 630, the second connector 650, and the flatness with reference to FIG. 25 are described. It is substantially the same as the description of the adjusting member 670.
The fixing part 750 has the first substrate structure 710 and the second substrate such that an upper surface of the first substrate structure 710 and a lower surface of the third substrate structure 730 are directly contacted and electrically connected to each other. The structure 720 and the third substrate structure 730 are fixed. The fixing part 750 includes a first reinforcement plate 751, a second reinforcement plate 752, a leaf spring 754, and a plurality of bolts.
The first reinforcement plate 751 has a disc shape and is disposed on an upper surface of the second substrate structure 720. The second reinforcement plate 752 has a ring shape and is provided along a circumference of a lower surface of the second substrate structure 720. The first bolt 755 fixes the first reinforcement plate 751, the second substrate structure 720, and the second reinforcement plate 752. The leaf spring 754 is in contact with the frame 734 of the second reinforcement plate 752 and the third substrate structure 730. The second bolt 756 fixes the second reinforcement plate 752 and the leaf spring 754, and the third bolt 757 fixes the leaf spring 754 and the frame 734.
The leaf spring 754 connects the second reinforcement plate 752 and the frame 734 of the third substrate structure 730. Meanwhile, the leaf spring 754 connects the second reinforcement plate 752 and the frame 734 of the third substrate structure 730 to each other, and a portion of the leaf spring 664 is formed on the substrate 732. The substrate 732 may be fixed to the frame 734 by pressing and contacting the upper surface.
A fourth bolt 758 secures the frame 734 and the frame of the first substrate structure 710. Thus, the first substrate structure 710 and the third substrate structure 730 are directly contacted and electrically connected. In addition, the electrical pad of one surface of the first substrate structure 710 and the electrical pad of one surface of the third substrate structure 730 may be bonded and electrically connected.
According to another embodiment of the present invention, the first substrate structure 710 and the third substrate structure 730 are electrically connected by the connecting body 740, the second substrate structure 720 and the third The substrate structure 730 may be electrically connected in direct contact.
The electrical inspection apparatus 700 may correct the position of the engraving substrates in a direction perpendicular to the upper surfaces of the engraving substrates by using the first correction screws of the first substrate structure 710.
According to another embodiment of the present invention, the first substrate structure 710 is a plurality of pieces of substrate is supported by a plurality of pieces of frame without a main frame, the fixing portion 760 is such that the pieces of frame are spaced apart from each other The first substrate structure 710 may be fixed to the third substrate structure 730.
