KR100872670B1 - Ionizer, ionizer attaching method, and clean room system - Google Patents

Abstract

assignment

It is main problem to reduce trouble and cost for wiring and construction of installation.

Resolution

An opening 48 is formed in the center portion by the plurality of hollow body edges 40 to 46, and the whole thereof can be installed by the air clean unit 18, and also surrounds the air outlet 30 of the air clean unit 18. Has a rim shape, and the hollow body rims 40 to 46 form a plane in which one surface thereof can be in close contact with a surface around the air outlet port 30 of the air clean unit 18, One surface is formed in a plane that can be in close contact with the surface around the opening of the clean room partition plate 14, and has a shape that can be inserted into the air clean unit 18 and the clean room partition plate 14, and faces 2 The frame width of the two hollow body edges 40 and 42 is narrow, and the edge height of the two opposing hollow body edges 44 and 46 is high.

Description

IONIZER, IONIZER ATTACHING METHOD, AND CLEAN ROOM SYSTEM

BRIEF DESCRIPTION OF THE DRAWINGS It is a figure which shows the outlined structure of the clean room installation which concerns on embodiment of this invention.

FIG. 2 is an enlarged front view of an ionizer and an air clean unit installed on the clean room partition plate of FIG. 1.

FIG. 3 is a perspective view of FIG. 2 viewed obliquely from above. FIG.

4 is a perspective view showing the ionizer and the air clean unit of FIG. 3 separately.

Fig. 5 is a perspective view of the ionizer and the air clean unit as viewed from the bottom of the inclined state.

FIG. 6 is a perspective view showing the ionizer and air clean unit of FIG. 5 separately. FIG.

Fig. 7 is a plan view showing the state in which the circuit components are stored within the hollow body frame by removing the upper half of the hollow body frame of the ionizer.

8 is a simplified circuit diagram of an ionizer.

(A) is a partial perspective view of a clean room partition plate, FIG. 9 (b) shows the installation structure of the ionizer and the air clean unit which were provided in the opening of the clean room partition plate of FIG. 9 (a). 9C is a front view showing the installation structure of the ionizer and the air clean unit provided in the opening of the clean room partition plate of FIG. 9A.

10 is a cross-sectional view illustrating a mounting structure of an ionizer and an air clean unit according to another embodiment.

11 is a cross-sectional view of an ionizer according to still another embodiment.

FIG. 12 is a cross-sectional view showing a clean room partition plate according to still another embodiment, an ionizer and an air clean unit attached thereto.

(Explanation of symbols for the main parts of the drawing)

2: clean room

4: topical clean room

14: clean room partition plate

16: ionizer

18: air clean unit

40 to 46: hollow body rim of ionizer

40a to 46a: surface on which the air clean unit is installed

40b to 46b: mounting surface to clean room partition plate

Technical field

An ionizer (electrostatic cleaner) and an air clean unit (air cleaner) which ionize air (air) in a clean room by discharge of an electrode and neutralize the static electricity charged on the surface of a workpiece by this ion. A method of attaching an ionizer in front of an air outlet of an air purifier and a clean room system for cleaning an area in a clean room using these ionizers and an air clean unit.

Background technology

In the manufacture of devices such as semiconductors and liquid crystals, it is required to remove dust from the air around these devices and to clean the air due to improvement in manufacturing yield. Therefore, in manufacture of these devices, generally, it is performed in the clean room controlled by a clean air environment, a clean booth, etc. (These are only called clean rooms only.). This clean room is a concept that includes a local clean room installed in the clean room locally and to make the air more clean. The clean room is provided with an air clean unit including a blower fan and a filter such as dust removal on the top of the room top plate, and is introduced into the clean room from the opening provided with air in the top plate from the air outlet of the air clean unit. I'm trying to. The air introduced into the clean room is generally drawn out of the clean room, cleaned again by the air clean unit, and refluxed into the clean room.

In such a clean room, when a semiconductor device, a liquid crystal device, or the like is electrostatic, various particles containing dust adhere to the device due to the static electricity, and abnormalities such as deterioration of the quality of the manufactured device occur. However, the dust and the like adhered by the static electricity are difficult to remove only by the flow of air, and there is a fear that electrostatic destruction of the IC or the like in the semiconductor or liquid crystal device, for example. Therefore, conventionally, in addition to an air clean unit, in order to remove (static discharge) the said static electricity, providing an ionizer in the top plate opening is performed (patent document 1).

As is known, the ionizer neutralizes the charge of the static electricity charged on the surface of the device by the ion generated by the corona discharge of the discharge needle, thereby counteracting the static electricity. To remove from the surface of the device.

By the way, conventionally, since an air clean unit is provided in the clean room exterior area | region with respect to the clean room partition board which divides a clean room inside and outside, and an ionizer is installed in the clean room internal area, each of the air clean unit and the ionizer is respectively. It is necessary to carry out attaching construction and wiring construction each, and labor and expense increase for the construction.

Therefore, it is considered that the structure of assembling the ionizer to the air clean unit and eliminating the separate attachment work and the wiring work of the ionizer only by the installation work of the air clean unit is considered. When a change is requested | required, depending on the assembly position of an ionizer, it becomes inevitable to change a design specification of an air clean unit significantly, and design and manufacturing cost increase.

In addition, in the case where both the air clean unit and the ionizer are installed separately in the clean room, the air from the air outlet of the air clean unit is leak-tight and laminar. It is difficult to supply to the area | region in a clean room without causing a disturbance in a flow.

Moreover, the ionizer which integrated the fan and is comprised is proposed (patent document 2). This patent document 2 discloses the ionizer which set the fan body by separating the positive electrode in the circumferential direction, and made the structure which protruded the discharge needle provided in each electrode into the ventilation path. However, this patent document 2 does not disclose an air clean unit provided with a filter or the like, and does not disclose a technique for solving the above-mentioned problem in the case where the air clean unit and the ionizer are arranged separately from the clean room. Do not.

Patent Document 1: Japanese Patent Application Laid-Open No. 9-73993

Patent Document 2: Japanese Patent Application Laid-Open No. 6-56797

Therefore, the problem which needs to be solved by this invention does not need to carry out the construction of the wiring of an air clean unit and an ionizer, respectively, and it is possible to reduce the labor and cost of the construction of such wiring, etc. The ionizer has a separate structure, and the air from the air outlet of the air clean unit can be airtightly suppressed and the laminar flow is less disturbed to be supplied to the area in the clean room.

(1) The ionizer according to the first aspect of the present invention is an ionizer attached to the air outlet of the air clean unit, and has an opening formed in the center by a plurality of connected main frame edges, and the entire air cleaner unit can be installed. Moreover, it has the structure of the main body which has the shape of the edge surrounding the air outlet of the air clean unit, The said main body forms the plane which the upper surface can contact with the surface around the air outlet of the air clean unit directly or indirectly, The lower surface forms a plane which can directly or indirectly contact the surface around the opening of the clean room partition plate, and has a shape that enables the ionizer to be inserted into the air clean unit and the clean room partition plate. It is.

The said plurality of main body edges are three or more, and are not necessarily limited to four of embodiment.

The clean room partition plate is a plate that divides the local clean room into and out of the local clean room when the local clean room is disposed in the clean room, and there is no local clean room. It is a partition plate. This plate is not limited to a plate shape, but also includes a sheet shape, a film shape, a film shape, and the like. In addition, it is not limited to the material of a clean room partition board.

In the shape which made it possible to insert the ionizer into the air clean unit and the clean room partition plate, the lower surface of the ionizer is placed on the upper surface of the clean room partition plate, and the air clean unit is mounted on the upper surface of the ionizer. It is not limited to the form to put in, but also includes the shape which clamped the side surface of the ionizer to the inner surface of the opening of a clean room partition board, and made the said insertion possible. In this case, it also includes a structure in which a step is attached to the side of the ionizer, and the side step of the ionizer is locked to the opening edge of the clean room partition plate.

At least one main frame edge having a narrow frame width is preferably used. Preferably, the frame widths of the pair of opposed main frame edges are all narrow.

According to the first aspect of the present invention, since the ionizer can be inserted into the air clean unit and the clean room partition plate, the air clean unit and the ionizer are provided together in the outside of the clean room, and their attachment and wiring work are performed. It is not necessary to do each separately, and labor and cost of the wiring work can be reduced.

Further, according to the first aspect of the present invention, the upper surface of the main body of the ionizer is made into a plane which can be in direct or indirect contact with the surface around the air outlet of the air clean unit, and the lower surface of the main body is made of the surface of the clean room partition plate. Since the ionizer is inserted into the air clean unit and the clean room partition plate because it is a flat surface that can be directly or indirectly contacted, the air blower may be inserted into the clean room partition plate, ionizer, and air cleaner unit by Air can be supplied to the area inside the clean room with high airtightness. For this reason, it is possible to suppress the leakage of air from the air outlet of the air clean unit and the incorporation of particles such as dust from the outside.

According to the first aspect of the present invention, since the air outlet of the air clean unit is surrounded by the main frame of the ionizer, it is possible to disturb the laminar flow of air blown out of the air outlet from the inner surface of the main frame. Only the discharge needle and the wire-shaped ion balance sensor which protrude into the opening of the ionizer are used, and the laminar flow of the air blown out from the air outlet is stabilized.

Further, according to the first aspect of the present invention, since the edge width of at least one of the main frame edges is narrower than the edge width of the other frame edges of the plurality of frame edges, the frame width in the form of such frame width is provided. The use of ionizers allows the ionizers to be placed adjacently at higher batch densities with the air clean unit on a clean room partition plate.

(2) According to a first preferred aspect of the present invention, a discharge needle protrudes into the opening from an inner side surface of at least one body frame among the plurality of body frames, and the edge width of at least one body frame is different. It is narrower than the frame width of the frame.

(3) According to a first preferred aspect of the present invention, the plurality of main body edges are integrated by two main body edges parallel to and opposed to each other, and a plurality of main body edges, the ionizer corresponding to only the other plurality of main body edges. The circuit module for operating the circuit board is arranged, and the edge widths of the two main body edges parallel to and opposite to each other are narrower than the edge widths of the other main body edges on which the circuit module is arranged.

The shape of the integrated body frame includes a rectangular shape.

The circuit module collects and arrange | positions the electronic components which comprise the circuit which are needed in order to operate this ionizer, and includes a circuit board or the thing equivalent to this. And a high voltage power supply circuit for supplying a high voltage to the discharge needle.

The two main body edges parallel to and opposed to each other do not include a circuit module, but a plurality of circuit modules and wires for connecting a plurality of circuit modules in the case where the other main body edges are arranged on other main body edges, or a circuit module And an electric wire connecting between the discharge needle and the discharge needle may be included.

(4) According to a first preferred aspect of the present invention, the main frame is composed of four hollow body frames, is integrated in a rectangular frame shape, and the interior is in communication.

(5) According to a first preferred aspect of the present invention, a screw hole in which the screw can be inserted in the direction perpendicular to the upper or lower surface of the main body is formed in the main body. Thereby, the screw hole of the main body of this ionizer can be matched with the screw hole of each of the clean room partition boards and the air clean unit to the vertical direction, and the work which connects and fixes them integrally with a screw can be performed easily.

(6) According to a first preferred aspect of the present invention, a circuit part of the ionizer is housed in the main body of the main body. The ionizer can be assembled compactly, including its circuit components.

(7) In a first preferred aspect of the present invention, a connector to which a power supply / input / output cable from an air clean unit can be connected is provided on the side of the main body. In this aspect, the air clean unit and the ionizer can be easily connected.

(8) The 1st suitable aspect of this invention is that the sealing material is provided in the upper surface or lower surface of the said main body. Clean room dividers, ionizers and air clean units can be assembled with high airtightness.

(9) According to a first preferred aspect of the present invention, in the plurality of hollow body edges of (4), a plurality of wire-shaped ion balance sensors are provided between inner surfaces of two opposing hollow body edges. The discharge needle is disposed on the inner side of each of the two opposing hollow body edges so as to protrude into the opening portion, and the at least two opposing hollow body edges have a stepped shape in which the outer peripheral side becomes higher on the inner circumferential side and the outer circumferential side. It becomes a cross section L shape, and can support the air clean unit between the mutually opposing inner surface.

In this aspect, the air clean unit can be easily positioned and assembled on the ionizer.

(10) In the method of attaching the second ionizer of the present invention, in the method of attaching the ionizer in front of the air outlet of the air clean unit, the ionizer is inserted between the clean room partition plate and the air clean unit. It is affixed on a clean room partition board.

(11) According to a second preferred aspect of the present invention, in the form of the insertion, the ionizer is inserted into the surface around the opening for the clean air of the clean room partition plate and the surface around the air outlet of the air clean unit. It is.

(12) According to a second preferred aspect of the present invention, the interposed form is such that the ionizer is interposed between the inner circumferential surface of the clean air opening of the clean room partition plate and the surface around the air outlet of the air clean unit. It is.

(13) The third clean room system of the present invention is a clean room system in which the ionizer according to claim 1 or 2 is disposed in front of an air outlet of an air clean unit.

At least two ionizers in which an air clean unit is provided are provided in a clean room partition plate in parallel with each other in a state in which the main frame edges facing each other are opposed to each other.

Implement the invention  Best form for

EMBODIMENT OF THE INVENTION Hereinafter, with reference to attached drawing, the ionizer, air clean unit, and clean room installation which concern on embodiment of this invention are demonstrated. BRIEF DESCRIPTION OF THE DRAWINGS The figure which shows the outlined structure of a clean room installation, FIG. 2 is the front view which expands and shows the ionizer and the air clean unit superimposed on the clean room partition board of FIG. 1, and FIG. 4 is a perspective view showing the ionizer and the air clean unit of FIG. 3 separated from each other, FIG. 5 is a perspective view of the ionizer and the air clean unit viewed obliquely from the state of overlapping, FIG. Fig. 7 is a plan view showing the niger and the air clean unit separated from each other, and Fig. 7 shows the upper half of the hollow body rim of the ionizer and shows the storage state of the circuit components inside the hollow body rim, and Fig. 8 is the ionizer. It is a circuit diagram shown in simplified form.

First, referring to FIG. 1, in this clean room facility, a local clean room 4 is provided in the clean room 2. The clean room 2 is provided with the air clean unit 8 which consists of a fan and a high performance filter in the ceiling 6, installs the perforated top plate 10, and air-conditions by the air conditioner 12 Air is supplied from the inside of the ceiling 6 to form a clean space (clean space) required in the clean room 2. The local clean room 4 is surrounded by a clean room partition plate 14, and the ionizer 16 and the local air clean unit are disposed on the upper clean room partition plate 14 (out of the clean room area). Semiconductors (not shown) arranged in such a manner as to overlap with each other, the air cleaner unit 18 supplies clean air to the local clean room 4 (in the clean room area), and is disposed in the local clean room 4. It is possible to perform a process required for a target object such as a wafer or a liquid crystal device.

The ionizer 16 is mounted on the clean room partition plate 14 of the local clean room 4, and the air clean unit 18 is mounted on the ionizer 16. By this mounting, the ionizer 16 is in the form of being fitted into the clean room partition plate 14 and the air clean unit 18.

2 and after, the air clean unit 18 is comprised by the lower main body 20 and the upper main body 22 in rectangular box shape, The upper main body 22 has the air inlet 24 in the upper surface side. ), And an AC adapter connector 26, an ionizer connecting connector 28, and the like, on its side. The lower main body 20 has a net air outlet 30 having a mesh shape on its lower surface.

Moreover, the ionizer 16 is equipped with the AC adapter connector 32, the ground terminal 34, and the air clean unit connection connector 36 which are used when the electric power is not supplied from the air clean unit 18 in the side surface. do. In the drawing shown in the embodiment, the ionizer connecting connector 28 of the air clean unit 18 and the air clean unit connecting connector 36 of the ionizer 16 are connected by a power / signal input / output cable 38. The power is supplied to the AC adapter connector 26 of the air clean unit 18, and the power is supplied from the air clean unit 18 to the ionizer 16. The air clean unit 18 is rotationally driven by a motor and various filters such as a vibration suppression filter and a HEPA filter, not shown, between the air intake port 24 and the air outlet port 30 therein. It is provided with a fan.

The ionizer 16 has a hollow body structure having a rectangular rim shape. The hollow body structure includes a pair of first and second hollow body edges 40 and 42 that face in parallel, and a pair of third and fourth hollow body edges 44 that orthogonal to and parallel to each other. , 46) in the form of a rectangular border. A rectangular opening 48 is formed inside the four hollow body edges 40 to 46.

Two wire-shaped ion balance sensors 48a and 48b are interposed between the inner surfaces of the first and second hollow body edges 40 and 42. Discharge needles 50a to 50d are disposed on the inner surface of each of the third and fourth hollow body edges 44 and 46 so as to protrude into the opening 48. As for the 1st, 2nd hollow main body edge 40 and 42, the cross section is rectangular shape and the edge width is narrow. The third and fourth hollow body edges 44 and 46 have a stepped shape in which the outer circumferential side becomes higher on the inner circumferential side and the outer circumferential side, and an end face is L-shaped. The air clean unit (a) is formed of the upper surfaces 40a and 42a of the first and second hollow body edges 40 and 42 and the upper surfaces 44a and 46a of the inner circumferential side of the third and fourth hollow body edges 44 and 46. 18) An edge-shaped mounting surface having a bottom surface is formed. These mounting surfaces 40a, 42a, 44a, 46a have a planar shape that can be in close contact with the lower surface of the air clean unit 18. The clean room partition plate 14 includes lower surfaces 40b and 42b of the first and second hollow body edges 40 and 42 and lower surfaces 44b and 46b of the third and fourth hollow body edges 44 and 46. Edge-mounted mounting surfaces 40b, 42b, 44b, 46b for mounting ionizer 16 on the upper surface are formed. This mounting surface has a planar shape that can be in close contact with the upper surface of the clean room partition plate 14. It is preferable to provide the cushioning material of omission of illustration on these both mounting surfaces. As the cushioning material, elastic materials such as rubber, double-sided tape, or the like can be used.

The air clean unit 18 is provided on the upper surfaces of the first and second hollow body edges 40 and 42 and the inner circumferential side of the third and fourth hollow body edges 44 and 46, and the third, It is interposed between the inner surface 44c, 46c of the outer peripheral side of the 4th hollow main body edge 44, 46, and is positioned. In addition, the circuit components 52a, 52b, 52c of the ionizer 16 and their wiring (not shown) are mounted inside the first to fourth hollow body edges 40 to 46.

The circuit components 52a, 52b, 52c of the ionizer 16 are circuit components that constitute a power supply section, a high voltage generation control section, a positive high voltage generation section, a negative high voltage generation section, and the like. The circuit of the ionizer 16 is as shown in FIG. 8, for example. As for the ionizer 16, the screw hole 54 which penetrated in the direction perpendicular | vertical to the clean room partition plate 14 is formed in several places. The air clean unit 18 also has a screw hole 55 corresponding to the screw hole 54. The screw hole 55 is provided with a tapping process of increasing diameter and diameter.

The ionizer 16 includes a power supply circuit 54, a high voltage generation control circuit 56, an ion balance sensor 58, a positive high voltage generation circuit 60, a negative high voltage generation circuit 62, and a positive discharge needle 64. Circuit 50a, 50c, and negative discharge needles 66 (50b, 50d). Since the operation of this circuit is well known, the details thereof are omitted.

In the ionizer 16 of the above-mentioned embodiment, the opening part 48 is formed in the center part by four hollow main body edges 40-46, The whole can install the air clean unit 18, and air The main body has a frame shape that surrounds the air outlet port 30 of the clean unit 18. The upper surface 40a to 46a of the hollow body edges 40 to 46 constituting the main body are in direct contact with the surface around the air outlet 30 of the air clean unit 18 directly or indirectly through a cushioning material. The lower surface 40b-46b makes the plane which can be made into the plane which can be made to contact the surface around the opening 14a of the clean room partition board 14 directly or indirectly through a cushioning material, and the ionizer 16 ) Is a shape which made it possible to insert into the air clean unit 18 and the clean room partition plate 14, and, among the hollow body edges 40 to 46, two pairs of opposed hollow bodies facing each other. The edge widths of the edges 40 and 42 are narrower than the edge widths of the other hollow body edges 44 and 46.

According to the ionizer 16 of the embodiment which has the above structure, since the ionizer 16 was made into the shape which can be inserted into the air clean unit 18 and the clean room partition plate 14, it is an air clean unit ( Even if the design 18 is changed, the air-clean unit 18 and the ionizer 16 can be installed together in the outside area of the clean room by the insertion, and there is no need to perform their attachment or wiring work separately. Can reduce labor and costs. Further, the upper surfaces 40a to 46a of the hollow body rims 40 to 46 of the ionizer 16 are made flat to be in close contact with the surface around the air outlet 30 of the air clean unit 18, Since 40b-46b were made into the plane which can contact with the surface of the clean room partition board 14, when the ionizer 16 is inserted into the air clean unit 18 and the clean room partition board 14, The airtightness can be made high among the three characters of the clean room partition board 14, the ionizer 16, and the air clean unit 18. As shown in FIG. In addition, since the edge widths of the two opposing hollow body edges 40 and 42 among the hollow body edges 40 to 46 are made narrower than the edge widths of the other hollow body edges 44 and 46, the hollow body edges 40 to 46 are shown in FIG. As described above, the openings 14a and 14b are arranged on the clean room partition plate 14 at formation intervals of approximately the total edge widths of the hollow body edges 40 and 42, and the periphery of the parallel openings 14a and 14b. The ionizer 16 and the air clean unit 18 can be arranged adjacent to each other at a high batch density.

In addition, as shown in FIG. 10, the ionizer 16 has a stepped shape on the inner circumferential side and the outer circumferential side on the lower surface side of the hollow body edges 40 to 46, and shows only the inner circumferential sides 40d to 46d (44d and 46d). ) Can be configured to be locked to the inner circumferential surface of the opening 14a of the clean room partition plate 14.

11, the ionizer 16 accommodates the side surface of the air clean unit 18 by the inner surface 40c-46c of the whole hollow body rim 40-46, and the air blower outlet 30 is carried out. It can be made into the shape which surrounds.

12, the ionizer 16 and the air clean unit 18 can be provided in the opening 14c of the slope 14b of the clean room partition plate 14. As shown in FIG.

According to the present invention, it is possible to reduce the labor and cost required for wiring and installation work, and to easily cope with a change in the design specification of the air clean unit, and also to separate the ionizer and air in the outside of the clean room. In the installation form provided with the clean unit, leakage of clean air can be suppressed reliably.

Claims (13)

An ionizer attached in front of the air outlet of the air clean unit, An opening is formed in the center portion by a plurality of connected main frame edges, and the whole of the main frame edge can be installed in the air clean unit, and has a structure of a main body having an edge shape surrounding the air outlet of the air clean unit, The main body has a flat surface on which the upper surface thereof can be in direct or indirect contact with the surface around the air outlet of the air clean unit, and the lower surface can be in direct or indirect contact with the surface around the opening of the clean room partition plate. An ionizer which forms a plane and has a shape which enables the ionizer to be inserted into the air clean unit and the clean room partition plate. The method of claim 1, The discharge needle protrudes from the inner side surface of at least one main body edge among the plurality of main body edges to the opening, and the edge width of the at least one main body edge is narrower than that of the other main body edges. Ionizer. The method of claim 1, The plurality of main body edges are integrated by two main body edges parallel to and opposed to each other, and a plurality of main body edges, and a circuit module for operating the ionizer is disposed only on the other plurality of main body edges. An ionizer, wherein an edge width of two parallel and opposing main body edges is narrower than that of another main body edge on which the above-described circuit module is disposed. The method of claim 1, The body frame is composed of four hollow body frame, integrated with each other in a rectangular frame shape, the ionizer, characterized in that the inside is in communication. The method of claim 1, An ionizer, wherein said main body is provided with a screw hole through which a screw can be inserted in a direction perpendicular to the upper or lower surface of said main body. The method of claim 1, The main body is an ionizer, characterized in that the circuit components of the ionizer are accommodated inside the main body edge. The method of claim 1, The main body has, on its side surface, a connector to which a power / input / output cable from an air clean unit can be connected. The method of claim 1, The main body is an ionizer, characterized in that the sealing material is provided on the upper and lower surfaces. The method of claim 4, wherein In the plurality of hollow body frame, A plurality of wire-shaped ion balance sensors are interposed between the inner surfaces of two opposing hollow body edges, Discharge needles are disposed on the inner surface of each of the other two opposing hollow body edges to protrude into the openings, The at least two opposing hollow body edges have a stepped shape in which the outer circumferential side becomes higher than the inner circumferential side, so that the cross section is L-shaped, and the air clean unit can be sandwiched and supported between the opposing inner surfaces. Ionizer. In the method of attaching the ionizer in front of the air outlet of the air clean unit, A method for attaching an ionizer, wherein the ionizer is attached to a clean room partition plate by inserting the ionizer according to any one of claims 1 to 7 between the clean room partition plate and the air clean unit. The method of claim 10, The method of attaching the ionizer is a form in which the ionizer is inserted into the surface around the opening for the clean air of the clean room partition plate and the surface around the air outlet of the air clean unit. The method of claim 10, The method of attaching the ionizer is a form in which the ionizer is inserted into the inner circumferential surface for the clean air of the clean room partition plate and the surface around the air outlet of the air clean unit. In the clean room system which arrange | positioned the ionizer of Claim 1 in front of the air blower outlet of an air clean unit, A clean room system, wherein at least two ionizers provided with an air clean unit are placed in a clean room partition plate in a state where the main frame edges, which are parallel to and face each other, face each other.

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