JP4218757B2 - Air purifier for use in glass substrate transport box and method of using the same - Google Patents

Description

  The present invention comprises a box body with a bottom and a lid body that is detachable with respect to the box body, and a plurality of glass substrates that respectively support both side edges of two opposite side walls of the box body. The present invention relates to an air cleaner used for a glass substrate carrying box in which a support groove is formed and a method of using the same.

  Conventionally, substrate glass, glass substrate for liquid crystal display, glass substrate for plasma display, hybrid IC ceramic substrate, various substrates such as wafer, or finished panel manufactured using these substrates (hereinafter simply referred to as “glass substrate”) For example, a box composed of a bottomed box body and a lid that can open and close the opening of the box body has been known as a transport box used when transferring from a glass manufacturer to a device manufacturer (Patent Document 1). 2).

  FIG. 4 is an external perspective view of a conventionally known glass substrate transport box. The glass substrate transport box 01 is composed of a bottomed main body 02 and a lid (not shown). A pair of side plates 04 having support grooves 04a for supporting the glass substrate are inserted therein. Both end portions of the glass substrate G are engaged and supported one by one in the support grooves 04a of the opposing side plates, and the lid is placed on the main body portion 02 so that the upper end edge of the glass substrate G is pressed from above. To be served.

JP-A-8-301354 (paragraph 0027, FIG. 5) JP-A-9-58770 (FIGS. 5 and 6)

  However, in the conventional glass substrate transport box described in the above patent document, since no consideration is given to the particles present in the box, in combination with the presence of static electricity, many glass substrates are used. For example, particles adhere to the substrate, which hinders formation of a conductive film when the base glass is used as a flat panel for liquid crystal display or a panel for electroluminescence display. Accordingly, it is necessary to clean the base glass taken out from the glass substrate transport box again to remove the particles, and it is impossible to remove the particles almost completely even after the cleaning.

  The present invention has been made in view of such circumstances, and at least in a state where the glass substrate is housed in the transport box, the air purifier used in the glass substrate transport box that can remove most of the particles in the box. And it aims at providing the usage method of the air purifier.

In order to solve the above-mentioned problems, an air cleaner used for a glass substrate transport box according to claim 1 of the present invention comprises a bottomed box body and a lid body that is detachable from the box body. An air purifier for use in a glass substrate transport box in which a plurality of support grooves for supporting both side edges of a plurality of glass substrates are formed on two opposing side walls of the box body, respectively. Consists of a second lid detachably attached to the box body and an air purifier attached to the outside of the second lid body, and the air purifier is attached to the box body. By operating the air, the air taken in from the outside is caused to flow in along the plurality of support grooves provided on the one side wall through the filter, and to flow outside through the plurality of support grooves provided on the other side wall. Features It is.
According to this feature, air flows along a plurality of support grooves provided on one side wall and flows out through the plurality of support grooves provided on the other side wall, so that the air circulates throughout the box body. At the same time, particles that tend to accumulate in the support groove can be efficiently discharged.

The air purifier used for the glass substrate transport box according to claim 2 of the present invention is the air purifier used for the glass substrate transport box according to claim 1, wherein the second lid is provided with a box. An air inlet and an exhaust port from the air purifier to the main body are provided, the air inlet is in the vicinity of a plurality of support grooves provided on one side wall, and the exhaust port is provided with a plurality of supports provided on the other side wall. It is characterized by being arranged in the vicinity of the upper part of the groove.
According to this feature, it is possible to form an air circulation path through which particles can be efficiently discharged by simply attaching the second lid body to the box body.

The air purifier used for the glass substrate transport box according to claim 3 of the present invention is the air purifier used for the glass substrate transport box according to claim 2, wherein one side wall is provided at the air inlet. A guide member is provided in which a plurality of support grooves provided in the airflow direction are directed toward the airflow.
According to this feature, even if the positions of the air inlet and the plurality of support grooves are somewhat separated, the air flow can be directed to the support groove by the guide member.

The air purifier used for the glass substrate transport box according to claim 4 of the present invention is the air purifier used for the glass substrate transport box according to claim 2 or 3, wherein the exhaust port has a plurality of air purifiers. A plurality of one-way valves arranged in the arrangement direction of the support grooves are provided.
According to this feature, by arranging a plurality of one-way valves along the arrangement direction of the plurality of support grooves, air can be smoothly discharged on the discharge side without causing air turbulence, When it does not operate, the one-way valve can block the outside air and prevent particles from entering.

The air cleaner used for the glass substrate carrying box according to claim 5 of the present invention is the air purifier used for the glass substrate carrying box according to any one of claims 1 to 4, wherein the second A static eliminator is attached to the box body side of the lid.
According to this feature, by using the static eliminator, it is possible to suppress the charging action of the glass substrate and prevent the adhesion of particles.

The method of using the air cleaner used in the glass substrate transport box according to claim 6 of the present invention is the method of using the air cleaner used in the glass substrate transport box according to any of claims 1 to 5. Then, before storing the glass substrate in the box body, the second lid is attached to the box body and the air cleaner is operated, and then the lid body is replaced with the box body instead of the second lid body. It is characterized by wearing.
According to this feature, if the air purifier is operated before the glass substrate is stored, particles can be prevented from adhering to the substrate at least when the glass substrate is stored.

The method of using the air cleaner used in the glass substrate transport box according to claim 7 of the present invention is the method of using the air cleaner used in the glass substrate transport box according to any of claims 1 to 5. Before and after storing the glass substrate in the box body, the second lid is mounted on the box body and the air cleaner is operated, and then the second lid is replaced with the lid. It is mounted on the box body.
According to this feature, if the air cleaner is operated even after the glass substrate is stored, at least particles generated in the vicinity of the support groove when the glass substrate is stored can be discharged.

The method of using the air cleaner used in the glass substrate transport box according to claim 8 of the present invention is the method of using the air cleaner used in the glass substrate transport box according to claim 6 or 7, wherein After the glass substrate transport box containing the substrate is transported, before removing the glass substrate from the box body, the air cleaner is operated by attaching the second lid body to the box body instead of the lid body. It is a feature.
According to this feature, if the air purifier is operated before taking out the glass substrate from the box body, at least particles generated during transportation can be discharged.

The method of using the air cleaner used in the glass substrate transport box according to claim 9 of the present invention is the method of using the air cleaner used in the glass substrate transport box according to any of claims 6 to 8. The operation of the air cleaner is performed in a clean room.
According to this feature, if the periphery of the glass substrate transport box is a clean room, the discharge time of particles in the box is shortened, and the frequency of filter replacement is reduced.

  Examples of the present invention will be described below.

  An embodiment of the present invention will be described with reference to the drawings. First, FIG. 1 is a perspective view showing a state in which an air purifier is operated by closing an opening of a box body with the air purifier of the present invention, and FIG. FIG. 3A is a perspective view showing a state in which the glass substrate is loaded on the cleaned box body and the opening is closed with a lid, FIG. 3A is an explanatory view showing the flow of air inside the box body by the air purifier, and FIG. ) Is an enlarged external view of the one-way valve.

  FIG. 1 shows a glass substrate carrying box body (hereinafter simply referred to as a box body) 2 provided with the air purifier C of the present invention. The box body 2 includes a plurality of glass substrates, for example, glass. Used as a transport box used when transferring from a maker to a device maker. The upper part is opened by a horizontally long rectangular parallelepiped, and the opening is closed by a lid F1 shown in FIG. 1 is built.

  As shown in FIG. 2, the four box side plates 6a, 6b and 8a, 8b constituting the box body 2 are composed of long rectangular box side plates 6a, 6b and short rectangular box side plates 8a, 8b. It has a cross-sectional structure in which foamed polystyrene resin (for example, foamed polyethylene resin) is sandwiched between aluminum composite plates from both sides, and the outermost and innermost surfaces of the aluminum composite plate are coated with a polyester resin-based baking paint for conductive treatment. ing.

  On the other hand, the lid F1 is mounted by attachments (for example, patchon locks) 25 that can be opened and closed, which are respectively provided at four positions on the upper edge of the box side plates 6a and 6b. This attachment 25 is configured to be shared with the second lid F2 shown in FIG.

  Further, on the upper surface of the bottom plate 9 in the box body 2, as shown in FIG. 3, a rectangular parallelepiped glass substrate bottom pad 5 having a predetermined thickness made of, for example, a polypropylene-based foam as a hard material has a predetermined interval in the longitudinal direction. They are attached side by side. On the upper surface of the bottom surface pad 5, a rib 24 having a mountain-shaped cross section having parallel support grooves M3 with a pitch interval of 14 mm, for example, is formed to support the lower edge of the glass substrate G. And the concave groove H which crosses in the width direction is formed in the lower surface of each bottom face pad 5, and functions as the air flow path by the air cleaner CU mentioned later.

  Further, side pads 14 and 18 are attached to the inner side walls of the box side plates 8a and 8b on the opposite sides of the short side of the box body 2, and the parallel and vertical cross-sectional chevron with a pitch interval of, for example, 14 mm is attached to the upper surface thereof. A plurality of support grooves M1, M2 are formed by the guide rib member 22, and the guide rib member 22 has a taper in which the plate thickness of the upper end portion is thin above the inlet side end of each base member and gradually becomes thicker downward. A guide surface having a surface is formed. The plurality of support grooves M1 and M2 are formed so as to all correspond to both side edge and lower edge of the glass substrate together with the support groove M3 formed on the upper surface of the bottom surface pad 5.

  Next, it attaches to an air cleaner and demonstrates with reference to FIG.

  The air purifier C includes a second lid F2 that is detachably attached so as to seal and close the opening of the box body 2 instead of the lid F1, and an air cleaner that is attached to the upper surface of the second lid F2. Unit CU.

  This air purifier CU uses a clean fan unit CF-H040 made by KEYENCE, for example, and purifies the outside air taken in from the air intake port 26 by a blower (not shown) (for example, a sirocco fan) by a filter 28. Then, it is configured to be fed into the inside of the box body 2 and discharged to the outside through a one-way valve 30 described later together with the particles present inside.

  Since the basic structure of the second lid F2 is substantially the same as that of the lid F1, a detailed description thereof is omitted, but an air cleaner CU is mounted on the upper surface as shown in FIG. The support surface 32 to be placed is recessed, and one of the support surfaces 32 is formed with a first opening 34a serving as an air inlet for allowing a plurality of one-way valves 30 for sending purified air to face the inside. On the other side, a second opening 34b is formed as an air discharge port for accommodating a plurality of one-way valves 30 for discharging the air inside the box body 2 containing particles to the outside.

  Further, the plurality of one-way valves 30 arranged in the first opening 34a are arranged corresponding to the support grooves M1 formed between the plurality of guide rib members 22 of the one box side plate 8a, and the second The plurality of one-way valves 30 arranged in the opening 34b are also arranged corresponding to the support grooves M2 formed between the plurality of guide rib members 22 of the other box side plate 8b.

  The periphery of the first opening 34a is sealed with a packing (not shown) interposed between the lower surface of the air cleaner CU and the support surface 32, and the periphery of the second opening 34b is similarly the one-way valve 30. Is sealed with a packing interposed between the base plate 31 and the support surface 32.

  Here, the one-way valve 30 used on the introduction side or the discharge side is a valve that allows air flowing in from the inlet side 30a to flow out only in one direction from the outlet side 30b, as shown in FIG. 3 (b). Thus, the inflow from the outlet side 30b is blocked by a rubber on-off valve 30c having return elasticity provided on the outlet side 30b.

  And the guide plate which guides the purified air introduced through the 1st opening 34a to the one side edge of the 1st opening 34a toward the one box side board 8a upper side on the back surface of the 2nd cover F2. 36 is fixed obliquely. When the opening of the box body 2 is closed by the second lid F2, the guide plate 36 forms a gap between the upper end edge of the loaded glass substrate G and the lower end edge thereof. It is configured.

  Further, on the back surface of the second lid F2, after the glass substrate G is loaded in the box body 2, the glass substrate G is used as an electrostatic removal device to remove static electricity charged on the glass substrate G. A static eliminator (ionizer) 41 capable of emitting ions is attached. A plurality of static eliminators are provided according to the size of the glass substrate.

  Next, a method for using the air purifier in the second embodiment of the present invention will be described.

  First, before loading the glass substrate G inside the box body 2, as shown in FIG. 1, the second lid F2 is attached to the opening of the box body 2 and the air cleaner CU is operated to operate the box. The inside of the main body 2 is purified. That is, as shown in FIG. 3, when the air purified by the air purifier CU is introduced into the inside of the box body 2 from the first opening 34a through the plurality of one-way valves 30, the inclined guide plate 36 A laminar air flow is formed toward the upper side of each support groove M1 on the one box side plate 8a side.

  Next, the air flowing downward along the plurality of support grooves M1 is directed to the bottom plate 9, and the air reaching the top surface of the bottom plate 9 is along the support grooves M3 formed between the plurality of ribs 24 on the top surface of the bottom surface pad 5. And flows to the other box side plate 8b side through the flow path formed by the concave groove H on the lower surface of the bottom surface pad 5.

  The air that has moved to the other box-side plate 8b becomes a rising airflow and forms a laminar flow that flows along the support groove M2 formed by the plurality of guide rib members 22 of the base member 18a. It is discharged to the outside through the one-way valve 30 of 34b.

  In this way, the purified air introduced into the box body 2 forms a series of flows as shown by the arrows in FIG. 3, and actively creates an air flow along the support grooves M1, M3, and M2. As a result, the particles between the support grooves M1, M3, M2 that are likely to accumulate are discharged, the air in the middle of the box body 2 is also fluidized, and the floating particles are discharged from the second opening 34b. Particles are removed.

  Next, as shown in FIG. 2, inside the purified box body 2, both side edges of the glass substrate G are formed on the top edges of the guide rib members 22 of the side pads 14 and 18 in order from the opening side. The lower end edge is supported by the support groove M3 on the upper surface of the bottom surface pad 5 by being guided into the plurality of support grooves M1 and M2.

  When a plurality of glass substrates G are loaded and supported in all the support grooves M1, M2 and M3, the opening of the box body 2 may be closed by the lid F1 and used as a glass substrate transport box 1, but the glass substrate G may be used for transport. In order to remove particles generated when the substrate G is loaded, the air cleaner CU is activated again and the static eliminator 41 is activated using the second lid F2.

  Accordingly, as described above, particles generated by the contact between the glass substrate G side edge and the side pads 14 and 18 are also positively discharged by a series of laminar air flows as shown in FIG. Particles adhering to the surface of the glass substrate G due to static electricity or the like can also be separated by the charge eliminating action and discharged together with air.

  In this way, when the inside of the box body 2 loaded with a plurality of glass substrates G is purified, the opening of the box body 2 is closed by the lid F1 instead of the second lid F2, and the fixture 25 Is hermetically sealed and is used for transportation to a device manufacturer.

  When the glass substrate transport box 1 is transferred to the device manufacturer, the second lid F2 is attached to the opening of the box body 2 instead of the lid F1 before the glass substrate G is taken out of the box body 2. In this case, if the transport box 1 is brought into the clean room and the air purifier CU and the static eliminator are operated, particles generated during the transport can be discharged more efficiently. Thereafter, the glass substrate G is taken out from the box body 2.

  Therefore, according to the glass substrate transport box of the present invention, air flows along the plurality of support grooves M1 provided on the inner wall of one side plate 8a, and the plurality of support grooves M2 provided on the inner wall of the other side plate 8b. Since the air flows out to the outside through the air, air circulates throughout the box body 2 and particles that tend to accumulate in the support grooves M1 and M2 can be efficiently discharged.

  The second lid F2 is provided with a first opening 34a for introducing air from the air cleaner CU to the box body 2 and a second opening 34b for discharging air, and the first opening 34a is provided on one side plate 8a. Since the second opening 34b is disposed in the vicinity of the upper side of the plurality of support grooves M1 provided on the inner wall of the second side wall 8b, the second opening 34b is provided in the vicinity of the upper side of the plurality of support grooves M2 provided on the other side wall 8b. Can be formed on the box body 2 to form an air circulation path through which the particles can be efficiently discharged through the support grooves M1, M3, and M2.

  Further, since the first opening 34a is provided with the guide plate 36 in which the air flow is directed to the plurality of support grooves M1 provided on the inner wall of the one side plate 8a, the position of the first opening 34a and the plurality of support grooves M1 is provided. Even if they are slightly separated, the guide plate 36 can direct the air flow toward the support groove M1.

  And by arranging a plurality of one-way valves 30 on the discharge side along the arrangement direction of the plurality of support grooves M2, air can be smoothly discharged on the discharge side without causing air turbulence, and an air purifier. When the CU is not actuated, the one-way valve 30 blocks the outside air and prevents particles from entering.

  On the other hand, according to the method of using the air purifier used for the glass substrate transport box of the present invention, before the glass substrate G is stored in the box body 2, the second lid F2 is attached to the box body 2 and the air is removed. If the purifier CU is operated and then the lid F1 is attached to the box body 2 instead of the second lid F2, particles can be prevented from adhering to the glass substrate G when the glass substrate G is stored. .

  In addition, when the second lid F2 is mounted on the box body 2 again after the glass substrate G is stored and the air cleaner CU and the static eliminator 41 are operated, particles generated when the glass substrate is inserted can be discharged and removed. Ions from the electric device 41 are released in a wider range by the convection action by the air cleaner CU, and the static electricity charged on the glass substrate G can be surely removed, and adhesion of particles to the glass substrate G can be prevented.

  Moreover, if the air cleaner CU and the static eliminator 41 are operated before the glass substrate G is taken out of the box body 2, at least particles generated during conveyance can be discharged. Furthermore, if the periphery of the transported glass substrate transport box 1 is a clean room, the discharge time of particles in the box body 2 is shortened, and the frequency of filter replacement is reduced.

  Although the embodiments of the present invention have been described with reference to the drawings, the specific configuration is not limited to these embodiments. For example, the one-way valve 30 on the air inflow side disposed in the first opening 34a is Since the filter 28 is used on the upstream side, it is not always necessary to provide it. Further, instead of the guide plate 36, the direction of the discharge nozzle of the air cleaner CU may be changed. Furthermore, the installation location of the static eliminator 41 is not necessarily limited to the back surface of the second lid F2, and can be installed at any location in the glass substrate transport box 1, and its radiation method is also excluded. Instead of providing a plurality of electric devices individually, it is possible to use a rod type having a plurality of nozzle openings.

It is a perspective view which shows the state which obstruct | occluded the opening of a box main body with the air cleaner of this invention, and has act | operated the air cleaner. It is a perspective view which shows the state which obstruct | occludes opening with a cover body, after loading a glass substrate in the box main body by which the inside was cleaned. (A) is explanatory drawing which shows the flow of the air inside a box main body by an air cleaner, (b) is an expansion external view of a one-way valve. It is an external appearance perspective view of the conventional box for glass substrate conveyance.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Glass substrate conveyance box 2 Box main body 5 Bottom surface pads 6a and 6b Box side plate 8a and 8b Box side plate 9 Bottom plate 11 Bonding angle frame 14 Side surface pad 18 Side surface pad 22 Guide rib member 24 Rib 25 Mounting tool 26 Air intake port 28 Filter 30 One-way valve 30a inlet side
30b Outlet side 30c On-off valve 31 Base plate 32 Support surface 34a First opening 34b Second opening 36 Guide plate (guide member)
41 Static eliminator (electrostatic eliminator)
C air purifier CU air purifier F1 lid F2 second lid G glass substrate H concave groove M1, M2, M3 support groove

Claims (9)

  A box body having a bottom and a lid that can be attached to and detached from the box body, and a plurality of support grooves for supporting both side edges of a plurality of glass substrates are formed on two opposing side walls of the box body. An air purifier used for a glass substrate carrying box, wherein the air purifier includes a second lid body that is detachable with respect to the box body, and air that is attached to the outside of the second lid body. It consists of a purifier, and operates the air purifier with the second lid mounted on the box body, so that air taken in from the outside passes along a plurality of support grooves provided on the one side wall through a filter. An air purifier used for a glass substrate carrying box, wherein the air purifier is allowed to flow in and out through a plurality of support grooves provided on the other side wall.   The second lid body is provided with an air inlet and an exhaust port from the air cleaner to the box body, the air inlet is near the upper portion of the plurality of support grooves provided on one side wall, and the exhaust port is The air cleaner used for the box for glass substrate conveyance of Claim 1 each arrange | positioned by the upper vicinity of the some support groove | channel provided in the other side wall.   The air cleaner used for the glass substrate transport box according to claim 2, wherein a guide member is provided at the air inflow port so that the air flow is directed to a plurality of support grooves provided on one side wall.   The air cleaner according to claim 2 or 3, wherein the exhaust port is provided with a plurality of one-way valves arranged along an arrangement direction of the plurality of support grooves.   The air cleaner used for the box for glass substrate conveyance in any one of Claim 1 thru | or 4 with which the static elimination device is attached to the box main body side of the said 2nd cover body.   6. The method of using an air purifier for use in the glass substrate carrying box according to claim 1, wherein the second lid is attached to the box body before the glass substrate is stored in the box body. A method of using an air purifier that attaches to the box body, operates the air cleaner, and then attaches the lid body to the box body instead of the second lid body.   6. A method of using an air purifier for use in a glass substrate transport box according to claim 1, wherein the second lid body is stored before and after storing the glass substrate in the box body. Is used on the box body, the air purifier is operated, and then the lid body is mounted on the box body instead of the second lid body.   After the glass substrate transport box containing the glass substrate is transported, before removing the glass substrate from the box body, the air cleaner is operated by attaching the second lid body to the box body instead of the lid body. Item 8. A method for using the air purifier according to Item 6 or 7.   The method of using an air purifier according to any one of claims 6 to 8, wherein the operation of the air cleaner is performed in a clean room.

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