KR100870800B1 - 고정밀도 구경을 갖는 자기 정합 구경 마스크 - Google Patents
고정밀도 구경을 갖는 자기 정합 구경 마스크 Download PDFInfo
- Publication number
- KR100870800B1 KR100870800B1 KR1020037010375A KR20037010375A KR100870800B1 KR 100870800 B1 KR100870800 B1 KR 100870800B1 KR 1020037010375 A KR1020037010375 A KR 1020037010375A KR 20037010375 A KR20037010375 A KR 20037010375A KR 100870800 B1 KR100870800 B1 KR 100870800B1
- Authority
- KR
- South Korea
- Prior art keywords
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- photoresist
- substrate
- positive
- polymer layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 229920002120 photoresistant polymer Polymers 0.000 claims abstract description 65
- 239000010410 layer Substances 0.000 claims description 60
- 238000000034 method Methods 0.000 claims description 44
- 239000000758 substrate Substances 0.000 claims description 43
- 230000005855 radiation Effects 0.000 claims description 31
- 229920000642 polymer Polymers 0.000 claims description 19
- 239000011159 matrix material Substances 0.000 claims description 15
- 239000000049 pigment Substances 0.000 claims description 12
- 239000000126 substance Substances 0.000 claims description 10
- 230000003287 optical effect Effects 0.000 claims description 8
- 239000012790 adhesive layer Substances 0.000 claims description 6
- 239000011347 resin Substances 0.000 claims description 6
- 229920005989 resin Polymers 0.000 claims description 6
- 239000000853 adhesive Substances 0.000 claims description 4
- 230000001070 adhesive effect Effects 0.000 claims description 4
- 239000007795 chemical reaction product Substances 0.000 claims description 3
- 125000000664 diazo group Chemical group [N-]=[N+]=[*] 0.000 claims description 3
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims 1
- 229910052709 silver Inorganic materials 0.000 claims 1
- 239000004332 silver Substances 0.000 claims 1
- 230000008859 change Effects 0.000 abstract description 12
- 239000002245 particle Substances 0.000 abstract description 5
- 239000007788 liquid Substances 0.000 abstract description 2
- 230000008569 process Effects 0.000 description 31
- 238000004519 manufacturing process Methods 0.000 description 10
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- 239000000463 material Substances 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 238000004458 analytical method Methods 0.000 description 4
- 238000003491 array Methods 0.000 description 4
- 239000000047 product Substances 0.000 description 4
- 239000011241 protective layer Substances 0.000 description 4
- 108010077544 Chromatin Proteins 0.000 description 3
- 230000032683 aging Effects 0.000 description 3
- 230000001680 brushing effect Effects 0.000 description 3
- 210000003483 chromatin Anatomy 0.000 description 3
- 238000003776 cleavage reaction Methods 0.000 description 3
- 238000013461 design Methods 0.000 description 3
- 230000007017 scission Effects 0.000 description 3
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 2
- 238000013459 approach Methods 0.000 description 2
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- 230000000694 effects Effects 0.000 description 2
- 238000004049 embossing Methods 0.000 description 2
- 239000000839 emulsion Substances 0.000 description 2
- 238000011049 filling Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 239000004417 polycarbonate Substances 0.000 description 2
- 229920000515 polycarbonate Polymers 0.000 description 2
- 230000011218 segmentation Effects 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 239000004820 Pressure-sensitive adhesive Substances 0.000 description 1
- 238000003848 UV Light-Curing Methods 0.000 description 1
- 230000003213 activating effect Effects 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 239000006229 carbon black Substances 0.000 description 1
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- 238000001227 electron beam curing Methods 0.000 description 1
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- 238000001093 holography Methods 0.000 description 1
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- 238000003475 lamination Methods 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- 238000006116 polymerization reaction Methods 0.000 description 1
- 239000004926 polymethyl methacrylate Substances 0.000 description 1
- 239000011253 protective coating Substances 0.000 description 1
- 238000004445 quantitative analysis Methods 0.000 description 1
- 238000001029 thermal curing Methods 0.000 description 1
- 229920001169 thermoplastic Polymers 0.000 description 1
- 239000004416 thermosoftening plastic Substances 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
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Images
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
- G03B21/00—Projectors or projection-type viewers; Accessories therefor
- G03B21/54—Accessories
- G03B21/56—Projection screens
- G03B21/60—Projection screens characterised by the nature of the surface
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B3/00—Simple or compound lenses
- G02B3/0006—Arrays
- G02B3/0012—Arrays characterised by the manufacturing method
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B3/00—Simple or compound lenses
- G02B3/0006—Arrays
- G02B3/0012—Arrays characterised by the manufacturing method
- G02B3/0031—Replication or moulding, e.g. hot embossing, UV-casting, injection moulding
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B3/00—Simple or compound lenses
- G02B3/0006—Arrays
- G02B3/0037—Arrays characterized by the distribution or form of lenses
- G02B3/0056—Arrays characterized by the distribution or form of lenses arranged along two different directions in a plane, e.g. honeycomb arrangement of lenses
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Overhead Projectors And Projection Screens (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US26703701P | 2001-02-07 | 2001-02-07 | |
| US60/267,037 | 2001-02-07 | ||
| PCT/US2002/003665 WO2002063392A1 (en) | 2001-02-07 | 2002-02-07 | Self-aligned aperture masks having high definition apertures |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR20030074795A KR20030074795A (ko) | 2003-09-19 |
| KR100870800B1 true KR100870800B1 (ko) | 2008-11-27 |
Family
ID=23017059
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020037010375A Expired - Lifetime KR100870800B1 (ko) | 2001-02-07 | 2002-02-07 | 고정밀도 구경을 갖는 자기 정합 구경 마스크 |
Country Status (4)
| Country | Link |
|---|---|
| US (2) | US20020177082A1 (enExample) |
| JP (1) | JP4226329B2 (enExample) |
| KR (1) | KR100870800B1 (enExample) |
| WO (1) | WO2002063392A1 (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101807188B1 (ko) | 2011-11-24 | 2017-12-11 | (주)아모레퍼시픽 | 의이인 추출물을 함유하는 지루성 두피염 완화 조성물 |
Families Citing this family (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7224529B2 (en) * | 2003-09-09 | 2007-05-29 | 3M Innovative Properties Company | Microreplicated article |
| US20050231809A1 (en) * | 2003-09-09 | 2005-10-20 | Carlson Daniel H | Microreplicated polarizing article |
| US7165959B2 (en) * | 2003-09-09 | 2007-01-23 | 3M Innovative Properties Company | Apparatus and method for producing two-sided patterned webs in registration |
| US7804649B2 (en) * | 2003-09-09 | 2010-09-28 | 3M Innovative Properties Company | Microreplicated achromatic lens |
| US7317577B2 (en) * | 2004-05-14 | 2008-01-08 | Eastman Kodak Company | Methods for producing a black matrix on a lenticular lens |
| JP4630009B2 (ja) * | 2004-06-22 | 2011-02-09 | 古河電気工業株式会社 | 表示ディスプレイ用もしくはスクリーン用シート |
| KR100623014B1 (ko) * | 2004-08-28 | 2006-09-19 | 엘지전자 주식회사 | 블랙매트릭스가 구비된 마이크로렌즈 배열 시트 및 그제조방법 |
| MX2007010994A (es) * | 2005-03-09 | 2007-11-07 | 3M Innovative Properties Co | Aparato y metodo para elaborar un articulo microrreplicado. |
| BRPI0609284A2 (pt) * | 2005-03-09 | 2010-09-08 | 3M Innovative Properties Co | artigo microrreplicado, método de produzir um artigo microrreplicado, e, monitor óptico |
| MX2007010858A (es) * | 2005-03-09 | 2007-11-12 | 3M Innovative Properties Co | Aparato y metodo para producir una trama configurada de dos lados en el registro. |
| JP5048644B2 (ja) * | 2005-03-09 | 2012-10-17 | スリーエム イノベイティブ プロパティズ カンパニー | 微細複製物品の作製装置および作製方法 |
| WO2006098958A1 (en) * | 2005-03-09 | 2006-09-21 | 3M Innovative Properties Company | Microreplicated article with defect-reducing surface |
| CN101137449B (zh) * | 2005-03-09 | 2012-08-29 | 3M创新有限公司 | 微复制物品及其生产方法 |
| US20070104911A1 (en) * | 2005-11-09 | 2007-05-10 | Whe-Yi Chiang | Laminate with optical structure and method for using the same |
| JP4576412B2 (ja) * | 2007-09-05 | 2010-11-10 | シャープ株式会社 | 着色マイクロレンズアレイの製造方法、カラー固体撮像素子およびその製造方法、カラー表示装置の製造方法、電子情報機器の製造方法 |
| CN107003557B (zh) | 2014-10-07 | 2023-05-30 | 康宁股份有限公司 | 直视型显示设备和用于直视型显示设备的光单元 |
| FR3084207B1 (fr) * | 2018-07-19 | 2021-02-19 | Isorg | Systeme optique et son procede de fabrication |
| JP7468067B2 (ja) * | 2020-03-30 | 2024-04-16 | 三菱ケミカル株式会社 | 非水系電解液二次電池用負極及び非水系電解液二次電池 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4666648A (en) | 1982-04-08 | 1987-05-19 | Marley Tile Ag | Method and apparatus for manufacturing roof tiles |
| JPH11101902A (ja) * | 1997-09-25 | 1999-04-13 | Goyo Paper Working Co Ltd | 遮光性マトリックスを有するマイクロレンズシートの製造方法 |
Family Cites Families (32)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US1942841A (en) | 1931-01-19 | 1934-01-09 | Shimizu Takeo | Daylight screen |
| US2338654A (en) | 1942-04-08 | 1944-01-04 | Eastman Kodak Co | Projection screen |
| US2362573A (en) | 1942-06-03 | 1944-11-14 | Eastman Kodak Co | Projection screen |
| US2358070A (en) | 1942-06-25 | 1944-09-12 | Eastman Kodak Co | Projection screen |
| US2618198A (en) | 1947-11-22 | 1952-11-18 | Eastman Kodak Co | Projection screen |
| JPS5251538Y2 (enExample) | 1972-04-25 | 1977-11-22 | ||
| DE2511390C2 (de) | 1975-03-15 | 1984-03-15 | Agfa-Gevaert Ag, 5090 Leverkusen | Verfahren und Vorrichtung zur Herstellung von Tageslichtprojektionsschirmen sowie nach diesem Verfahren hergestellter Tageslichtprojektionsschirm |
| US4260673A (en) | 1979-09-05 | 1981-04-07 | Minnesota Mining And Manufacturing Company | Single sheet color proofing system |
| US4601861A (en) | 1982-09-30 | 1986-07-22 | Amerace Corporation | Methods and apparatus for embossing a precision optical pattern in a resinous sheet or laminate |
| US4486363A (en) | 1982-09-30 | 1984-12-04 | Amerace Corporation | Method and apparatus for embossing a precision optical pattern in a resinous sheet |
| US4507382A (en) | 1983-03-03 | 1985-03-26 | Minnesota Mining And Manufacturing Company | Water developable positive acting lithographic printing plate |
| US4556626A (en) | 1983-08-24 | 1985-12-03 | North American Philips Consumer Electronics Corporation | Negative-working dichromate photoresist composition, process for applying it to a polymethyl methacrylate surface, and article produced |
| NL8503526A (nl) * | 1985-12-20 | 1987-07-16 | Philips Nv | Doorzichtprojektiescherm. |
| US4882262A (en) | 1987-09-28 | 1989-11-21 | Honeywell Inc. | Self-aligning aperture |
| JP2972271B2 (ja) | 1989-04-26 | 1999-11-08 | 株式会社日立製作所 | 透過型スクリーン及びそれに用いられるシート状部材の製造方法、並びにそのスクリーンを用いた背面投写型画像ディスプレイ装置 |
| US5264063A (en) | 1990-05-16 | 1993-11-23 | Reflexite Corporation | Method for making flexible retroreflective sheet material |
| US5210641A (en) | 1992-05-01 | 1993-05-11 | Lewis Richard B | High contrast front projection display screen |
| US5529878A (en) | 1995-05-22 | 1996-06-25 | Minnesota Mining And Manufacturing Company | Color proofing system |
| GB9514440D0 (en) | 1995-07-14 | 1995-09-13 | Nashua Corp | Screen for diffusing, depixelating or projection purposes and method of manufacturing same |
| EP0770902B1 (en) | 1995-10-25 | 2003-09-03 | Toppan Printing Co., Ltd. | Lenticular sheet, rear-projection screen or television using the same |
| JP3268204B2 (ja) | 1996-02-02 | 2002-03-25 | 凸版印刷株式会社 | 透過型スクリーン用レンチキュラーシートおよびその製造方法 |
| GB9800668D0 (en) | 1998-01-13 | 1998-03-11 | Nashua Corp | Enhanced microlens screens |
| JPH11344602A (ja) | 1998-03-30 | 1999-12-14 | Seiko Epson Corp | ブラックマトリクス付マイクロレンズ基板の製造方法、液晶パネル用対向基板、液晶パネルおよび投射型表示装置 |
| JP2000035616A (ja) | 1998-07-16 | 2000-02-02 | Toshiba Corp | スクリーンシート |
| JP3988285B2 (ja) | 1998-11-05 | 2007-10-10 | 凸版印刷株式会社 | 透過型プロジェクションスクリーン |
| JP3988287B2 (ja) | 1998-11-09 | 2007-10-10 | 凸版印刷株式会社 | 連続搬送型露光装置 |
| US6307675B1 (en) | 1998-12-24 | 2001-10-23 | Toppan Printing Co. Ltd. | Rear-projection screen for use with a liquid crystal panel as a video source |
| FR2793043B1 (fr) | 1999-04-29 | 2003-06-06 | Synelec Sa | Ecran de projection |
| US6594079B1 (en) | 1999-08-04 | 2003-07-15 | Agilent Technologies, Inc. | Image screen and method of forming anti-reflective layer thereon |
| JP2001074918A (ja) | 1999-09-02 | 2001-03-23 | Fuji Photo Film Co Ltd | 光拡散体およびその製造方法 |
| US6897911B2 (en) | 2000-02-14 | 2005-05-24 | Fuji Photo Film Co., Ltd. | Light diffusing plate, liquid crystal display apparatus and rear projection apparatus |
| WO2002010804A1 (en) | 2000-07-31 | 2002-02-07 | Rochester Photonics Corporation | Structure screens for controlled spreading of light |
-
2002
- 2002-02-07 JP JP2002563075A patent/JP4226329B2/ja not_active Expired - Lifetime
- 2002-02-07 WO PCT/US2002/003665 patent/WO2002063392A1/en not_active Ceased
- 2002-02-07 KR KR1020037010375A patent/KR100870800B1/ko not_active Expired - Lifetime
- 2002-02-07 US US10/072,457 patent/US20020177082A1/en not_active Abandoned
-
2003
- 2003-04-15 US US10/430,179 patent/US6770425B2/en not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4666648A (en) | 1982-04-08 | 1987-05-19 | Marley Tile Ag | Method and apparatus for manufacturing roof tiles |
| JPH11101902A (ja) * | 1997-09-25 | 1999-04-13 | Goyo Paper Working Co Ltd | 遮光性マトリックスを有するマイクロレンズシートの製造方法 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101807188B1 (ko) | 2011-11-24 | 2017-12-11 | (주)아모레퍼시픽 | 의이인 추출물을 함유하는 지루성 두피염 완화 조성물 |
Also Published As
| Publication number | Publication date |
|---|---|
| KR20030074795A (ko) | 2003-09-19 |
| JP4226329B2 (ja) | 2009-02-18 |
| US20030202244A1 (en) | 2003-10-30 |
| WO2002063392A1 (en) | 2002-08-15 |
| US6770425B2 (en) | 2004-08-03 |
| JP2004526993A (ja) | 2004-09-02 |
| US20020177082A1 (en) | 2002-11-28 |
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