KR100841406B1 - Two phase injection nozzle for mixing fluid - Google Patents

Abstract

A two-phase injection spray nozzle for mixing fluid is provided to reduce the volume of a nozzle assembly by drilling an injection nozzle passage in a direction of a transverse axis of a spray body and connecting a passage, an air supply pipe, and a fluid supply pipe in the spray body. A two-phase fluid injection nozzle for mixing fluid sprays fluid fed into a bar-shaped spray body having plural injection nozzles forming a fluid nozzle placed in an air cap, through a fluid supply pipe as fine particles by the high-pressure air supplied through an air supply pipe(220). The two-phase fluid injection nozzle comprises a cylinder-shaped fluid tank(270) installed at the lower part of the spray body to supply fluid from the outer side and first and second through-holes drilled in a direction of the inner transverse axis of the spray body and formed in a longitudinal direction of an axis to form injection nozzle passages(291,292). The first through-hole and the pipe line-shaped fluid supply pipe, and the second through-hole and the pipe line-shaped air supply pipe are connected in the spray body to mix the inflow fluid and air through the fluid nozzle and to spray the mixed fluid and air as fine particles.

Description

Two phase injection nozzle for mixing fluid

The present invention mixes air (air) and fluid (water), which are two-phase fluids, to be sprayed with fine particles, so that the object to be cleaned, such as a semiconductor wafer or liquid crystal substrate, can be cleaned in an air conditioner duct for humidification to an air conditioner. Related to two-phase fluid nozzles.

In general, a method of receiving a fluid (water) and air (air), mixing them, and spraying a mist of the mixed two fluids from a spray nozzle is widely known.

To this end, the nozzle body is configured to allow the fluid to be finely sprayed with the air by supplying air into the nozzle body through a separate pneumatic line while fluid is supplied into the nozzle body through the fluid supply line from the outside. .

Generally, a nozzle having a thinly shaped tube attached to the end of a flow path in order to eject a fluid or air into a free space at high speed is called a nozzle, and such a nozzle generally includes a nozzle body, an orifice provided in the nozzle body, and an amount of air flowing into the nozzle body. It consists of a control valve provided to adjust, and a fluid supply pipe or fluid supply formed in the center of the orifice.

Here, the nozzle body has a cylindrical or polygonal shape, both sides of the nozzle body is usually provided so that the inlet and the injection port are symmetrical.

In addition, an orifice is formed in the inside of the nozzle body, and a fluid supply pipe for receiving a fluid from the outside is installed at one side of the orifice.

And, one side of the nozzle body is provided with a disk-type control valve for controlling the amount of air supplied through the inlet from the outside.

The nozzle having such a configuration is provided with a liquid (water, paint, lubricant, rust inhibitor, adhesive, coating liquid (hereinafter referred to as "fluid") supplied from the outside through the fluid supply pipe formed on one side of the nozzle body and at the same time Air is supplied to the inlet of the nozzle body through the air unit.

Next, the air supplied to the inlet of the nozzle body is mixed with the fluid supplied or flowed out of the fluid supply pipe in the process of passing through the orifice through the control valve, and the fluid mixed with the air is provided on the other side of the nozzle body. Sprayed through the injection hole, depending on the fluid to be sprayed can be a semiconductor post-process, disinfection of food, mold release material on the surface of the mold, cooling, deodorizing dust removal, coating, and the like.

However, such a nozzle has a problem in that the injection angle is fixed to the front end of the nozzle body in one direction so that the injection angle cannot be easily adjusted in the process of injecting the fluid. In particular, in the bar-type siphon injection type two-phase fluid injection nozzle, the injection direction by the fluid supply device in the injection nozzle configuration was limited.

In addition, there is a difficulty in controlling the exact amount of air required by the operator in the process of controlling the amount of air passing through the orifice of the nozzle body through the disk-type control valve. Thus, difficulties have been encountered in adjusting the injection volume of the fluid.

On the other hand, in the conventional fluid supply pipe and air supply pipe configuration, the piping for supplying fluid and air to each supply path was complicated, and thus there was a problem that the assembly fabrication is difficult and the size is large. In order to solve the complexity of the piping configuration, there is disclosed a configuration in which a fluid supply pipe is installed inside the air supply pipe. There is a problem in that assembly and repair are difficult in that it is fixed and protrudes to the outside through an opening formed in the air supply pipe and is fixed to the air supply pipe.

In addition, in the conventional two-phase fluid injection nozzle, the amount and pressure of the mixed and injected fluid and air must be considered and adjusted at the same time. Therefore, a lot of tools are required when manufacturing the nozzle assembly, and the complexity of the work environment is followed during the spraying operation. .

Therefore, the inflow of fluid and air are not controlled accurately, and the size and distribution of the spray particles injected through the nozzle of the nozzle body are not constant, resulting in product defects and increased fluid consumption. There was a problem.

In addition, the conventional nozzle body is made of stainless steel or metal material to fasten a plurality of members that are screwed to the inner and outer surfaces of the body had to use a tool such as a spanner, the weight of the entire nozzle body according to the material limitation There was a problem going out.

And, as shown in Figure 1a to 1d, when viewed in the shape of a conventional fluid nozzle is composed of a main body 16 and a fastening portion 18 consisting of a screw thread extending integrally with the needle connecting portion 15, which is the fluid nozzle tip, The upper part of the main body 16 forms a plurality of air injection holes 17 to guide the introduced air flow.

In this case, there is a difficulty in processing the air injection hole 17 and the flow thereof is not smooth, and there is a problem in that the fluid nozzle processing is difficult and sufficient air flow is difficult. In addition, when the fluid nozzle is separated, there is a hassle to use a tool such as a spanner by forming a grip part on both sides of the main body.

The purpose of the present invention for solving the above-mentioned conventional problems is as follows.

First, in the bar-type fluid injection nozzle configuration using the siphon injection method, to provide a spray nozzle that can be freely changed the injection direction of the fine particles through the fluid nozzle.

Second, in the spray nozzle configuration having a bar-shaped spray body, the injection nozzle flow path through which air and fluid pass is drilled in the horizontal direction of the spray body, and the flow path, the air supply pipe, and the fluid supply pipe are connected to each other inside the spray body. In order to reduce the volume of the entire nozzle assembly, it is possible to provide a spray nozzle that can be used even in a narrow space.

Third, to provide a spray nozzle that can freely control the amount of fluid sprayed by adjusting the height of the water tank level in the siphon injection method using a height-adjustable ball tap valve.

Fourth, the nozzle body is made of engineer plastic material, and the shape of the fluid nozzle, which is the injection member screwed to the center of one side of the main body, can be simplified, and the operator can easily fasten the spray body directly and reduce the weight of the entire nozzle body. have.

Fifth, it can be used instead of the steam device, a humidity control device used in the clean process of the semiconductor and LCD manufacturing process has the effect of reducing the manufacturing cost and operating costs.

The configuration of the present invention for solving the above technical problem, the fluid supplied through the fluid supply pipe into the bar-shaped spray body having a plurality of injection nozzles that form a fluid nozzle that is placed inside the air cap is the air supply pipe A two-phase fluid injection nozzle for fluid mixing, which is configured to be sprayed into fine particles by high pressure air supplied through the gas, comprising: a cylindrical fluid tank provided in the spray body downward direction and configured to supply fluid from the outside; And first and second through holes which are drilled in the horizontal direction in the spray body in the axial length direction to form injection nozzle flow paths, wherein the fluid has a first through hole and a pipeline shape. The supply pipe and the second through hole and the air supply pipe having a pipeline shape are connected inside the spray body, so that the introduced fluid and air are mixed with each other through the fluid nozzle to be injected into fine particles.

In addition, a ball tap valve is further configured to adjust the height of the fluid level inside the fluid tank to adjust the fluid pressure and the fluid injection amount introduced into the fluid tank by using a negative pressure difference in the siphon method. Characterized in that.

In addition, the spray body is characterized in that composed of engineer plastic material or aluminum material or stainless steel material.

In addition, the fluid nozzle is composed of a fastening portion formed with a screw thread so as to extend along the main body and the main body is inserted into the needle and the cylindrical screw thread formed in the center of the nozzle body, processing the circular shape of the assembly surface and the opposite amount It is characterized by using the processing section flattened by milling the cross section as a holding part of the assembly tool and an air flow path.

In the case of using the two-phase fluid injection nozzle of the present invention provided with the above-mentioned means for solving the above problems, there is an effect that the injection direction can be freely changed in the bar-shaped fluid injection nozzle using the siphon injection method.

In addition, in the spray nozzle configuration having a bar-shaped spray body, the injection nozzle flow path through which air and fluid pass is drilled, and the flow path, the air supply pipe and the fluid supply pipe are connected to each other inside the spray body, so that the entire nozzle By reducing the volume of the assembly has an effect that can be used even in a narrow space.

In addition, by using a height-adjustable ball tap valve, it is possible to freely adjust the amount of fluid injected by adjusting the water tank level in the siphon injection method.

In addition, the nozzle body is made of engineer plastic material, and the shape of the fluid nozzle, which is an injection member screwed to the center of one side of the main body, can be simplified and the tool can be easily gripped, thereby enabling the operator to easily tighten the nozzle body.

In addition, it can be used instead of the steam device, a humidity control device used in the clean process of the semiconductor and LCD manufacturing process to reduce the manufacturing cost and operating costs.

Hereinafter, with reference to the accompanying drawings, a detailed description of the present invention and preferred embodiments will be described in detail.

2a to 2d is a configuration of a fluid nozzle according to the present invention.

As shown in FIG. 2, the fluid nozzle 120 placed inside the air cap, which is an injection member capable of finely injecting fluid and air, has a body 122 into which a needle 121 is inserted at a front end thereof. Consists of a fastening portion 123 formed with a screw thread to extend along the main body 122 and to be fastened along a cylindrical screw line formed at the center of the nozzle body, and is processed by processing the circular shape of the assembly surface and milling the opposing end surfaces. A two-phase fluid injection nozzle for fluid mixing, characterized in that the processing cross section is used as a holding part of the assembly tool and an air flow path.

 As a result, the process of forming a plurality of air holes at the tip end of the conventional fluid nozzle can be omitted, thereby reducing processing time and processing cost. And, the length of the entire fluid nozzle 120 can be reduced.

Hereinafter, the accompanying drawings will be described in detail with respect to the configuration of a single jet nozzle and a bar jet nozzle.

First, the configuration of the single injection nozzle 100 will be described in detail with reference to FIG. 3 as follows.

Single nozzle type two-phase fluid mixing injection nozzle 100 according to the present invention comprises a spray body 110 and needle assembly 150, the fluid nozzle 120, air cap 130, air cap nut 140, etc. do.

In this case, the spray body 110 is formed in a rectangular shape of a predetermined thickness, the front and rear of the spray body 110 to form a threaded thread (113, 115, 117) protruding extending, the screw line formed on the rear ( 117 and the lock nut 160 and the external knob (knob, 170) to engage with the screw thread formed therein, the screw thread 113 formed on the front inside the inner thread line 115 to the outside of the cylindrical body having another diameter ) Is formed and fastened to the fastening part 123 formed on one side of the fluid nozzle 120, and a screw thread is formed on the inner surface of the annular air cap nut 140 to form the front surface of the spray body 110. To be signed.

At this time, the spray body 110 is preferably composed of an engineer plastic material or aluminum material, such as MC nylon, polyacetal, PE. Accordingly, in screwing a plurality of members connected to the inside or the side of the spray body 110, the operation is easy and the weight of the entire nozzle can be reduced. Of course, it should be made of a material having a certain rigidity.

In addition, the fluid nozzle 120 placed inside the air cap 130, which is an injection member capable of finely injecting fluid and air, has a shape as described above.

On the other hand, the air cap 130 is formed in a conical shape is fixed to the front of the spray body 110, the inside is formed to take the form of the rear open, the front opposite is a closed form It is formed to take.

A fluid injection hole 133 is formed at the center of the closed front, and air injection holes 135 are integrally formed at both sides of the fluid injection hole 133. The air cap nut 140 serves to fix the air cap 130 body to the thread 113 formed in front of the spray body 110.

In addition, both sides of the fluid injection hole 133 are provided with air injection guides 131 and 132 having an annular vertical structure having a predetermined height. The air injection guides 131 and 132 have a function of spreading the fluid even more finely while the fluid is diffused by the injected air, and are integrally formed on the outside of the body of the air cap 130 to have a predetermined thickness and height. .

The fluid nozzle 120, which is an injection member, is sprayed to the spray body 110 through a fluid supply connector, and is sprayed forward through the fluid injection hole 133, and the spray body 110 through the air supply connector 180. The air supplied to the air injection hole 135 is provided so as to be able to finely spray the fluid.

To this end, the fluid nozzle 120 is composed of a cylindrical injection body, the injection body forms a connecting screw line 123 coupled to the female screw 115 of the spray body 110 at the rear, the front of the funnel It is provided in the form.

In this case, the needle assembly 150 including a needle pin 151 and a piston 152 having a needle-shaped probe structure having a pointed front portion to penetrate through the fluid nozzle 120 and the air cap 130 is formed.

Meanwhile, the lock nut 160 and the knob 170 are screwed to the thread 117 extending to one side of the spray body 110. In addition, the spring 165 adjusts the operating force of the needle pin 151 according to the viscosity or viscosity of the fluid, and is provided to be fitted between the knob 170 and the piston 152.

Hereinafter, as another embodiment, a nozzle assembly of a siphon injection method having a bar spray body having a plurality of nozzle tips will be described.

Figure 4 is a perspective view showing a bar nozzle body according to an embodiment of the present invention, Figure 5 is a plan view of Figure 4, Figures 6 and 7 shows a fluid tank according to the present invention, Figure 8 is a present invention It is a side cross-sectional view of the injection nozzle of the bar shape.

The siphon injection method refers to a method of injecting a mixed fluid through an orifice positioned at the tip of the nozzle by sucking the fluid with siphon generated by the supplied air, and changing the flow rate supplied according to the siphon height or the change in gravity Becomes possible. As a result, the conventional method has its utility in such a way that it is possible to solve the inconvenience of simultaneously controlling the amount of the supplied fluid and the air pressure.

First, as shown in the figure, the front of the spray body 210 of the bar form constitutes a plurality of injection nozzles 280 capable of injecting a mixture of two-phase fluid. The injection nozzle 280 can be attached freely installed in the range of 3 to 21 depending on the working space and environment.

Since the injection nozzle 280 is screwed to the front surface of the bar type spray body in the entire configuration of the single type spray body 210 described above, the threaded line 117, the lock nut 160, and the external knob 170 may be omitted. In addition, according to the present invention, since the siphon injection method can be controlled, there is no need for the needle assembly, thereby improving the simplicity in the nozzle assembly configuration.

One side of the spray body 210 in which the injection nozzle 280 is formed is provided with an air supply pipe 220 for supplying air from a compressor not shown, and is connected to an external air hose to supply high pressure air to an air flow path inside the body. Inflow.

Meanwhile, the spray body 210 is fastened in a detachable structure with the fluid supply pipe 230 formed at one side of the spray body 210 having a bar shape, so that the fluid can be steadily supplied into the spray body 210 while storing a certain amount of fluid. The bottom is provided with a fluid tank 270.

In this case, it is preferable that the spray body and the fluid tank are designed to be detachable and easy to be attached and detached according to a worker's need, and for this purpose, various fastening methods such as screw coupling or flange coupling are possible.

The fluid tank 270 has a cylindrical body 271 that can store a certain amount of fluid therein, an external fluid connection portion 274 that can be connected to an external fluid source at one side of the body 271, and the body (271) It is installed on the upper surface and the fluid tank cover 272 to prevent leakage of the storage fluid when the fluid tank is inclined at an angle, provided on one side of the cover 272 and fixed in connection with the back side of the main body 271 It has a configuration including a connecting member 275 to be made.

In addition, the height of the water level inside the fluid tank 270 to adjust the fluid pressure and the fluid injection amount introduced into the spray body 210 by using the negative pressure difference in the siphon method into the fluid tank 270. It is preferable to further configure the ball tap valve (273) to be adjustable.

This is to use the buoyancy principle to block the external fluid supply path flowing from the ball tap when the fluid stored in the fluid tank 270 is a certain height.

Accordingly, by setting the fluid height stored in the fluid tank 270 as desired by the user, it is possible to adjust the injection pressure and the like injected into the spray body 210.

In addition, the fluid tank 270 is separated from the spray body 210 so that the siphon injection method that can adjust the amount of fluid and the fluid pressure introduced by using the difference between the height and the negative pressure using the gravity difference. More preferably.

Meanwhile, a two-phase fluid injection injected through a plurality of fluid nozzles 282 is configured to fasten a bracket (not shown) to the bottom of the fluid supply pipe 230 to move the fluid tank 270 at a predetermined inclination. It is desirable to be able to change the direction freely.

That is, it is possible to obtain an effect of easily adjusting the nozzle injection amount by adjusting the height of the fluid to be filled without the user moving the fluid tank 270.

On the other hand, the spray body 210 is composed of engineer plastic or aluminum material, the fluid nozzle 282 is placed inside the air cap (283) that is an injection member that can finely inject the fluid and air flowing into the main body And a fastening part formed with a screw thread to be fastened along a cylindrical screw thread formed at the center of the nozzle body and extending to the main body, and processing the circular shape of the assembly surface and milling the opposing end surfaces to assemble the flattened cross section. It can be used as a holding part and air flow path.

Figure 8 is a side cross-sectional view showing a bar-shaped fluid injection nozzle of the present invention. Cylindrical fluid tank 270 for supplying fluid from the outside and detachably connected to the spray body 210 in the lower direction of the spray body 210 in order to form a spray nozzle using a siphon injection method, and The first and second through-holes are drilled in the spray body 210 in the horizontal axis direction and formed in the axial length direction to constitute the injection nozzle flow paths 291 and 292. The injection nozzle flow paths 291 and 292 ) And the fluid supply connection pipe 230 and the air supply connection pipe 220 to connect the inside of the spray body 210, the air cap 283 constituting the nozzle tip 280 with the fluid and air introduced It is configured to be mixed and sprayed with each other through the fluid nozzle 282 is placed inside.

Conventionally, the welding structure is mainly used when connecting the fluid supply pipe 230 and the air supply pipe 220 having a pipeline shape, but in the present invention, the injection nozzle flow path is a through-hole in the horizontal axis direction of the spray body 210 by processing holes by drilling. By forming the (291, 292) to be connected to the spray body 210 and the fluid supply pipe 230 and the air supply pipe 220 which is fastened to form a connection structure to form a spray nozzle flow path in the spray body 210 easily To make it possible.

That is, by drilling the injection nozzle flow paths 291 and 292 with the drill, the volume of the entire nozzle assembly can be reduced, and in particular, when used in the air conditioner duct for humidifying the air conditioner, the installation cross-sectional area is minimized to minimize the air resistance of the duct. You will get the effect.

The process of injecting liquid using the fluid mixing injection nozzles 100 and 200 having the above configuration is as follows.

First, when a fluid to be injected is supplied through a fluid supply connector fixed to one side of the spray body 110, the fluid moves inside through a flow path formed in the spray body 110. The introduced fluid passes through the inside of the fluid nozzle 120.

At the same time, when air is supplied to the spray body 110 through the air supply connector 180, the supplied air moves forward again through the milled flat cross section of the fluid nozzle 120.

Next, the air moved to the front of the fluid nozzle 120 is sprayed to the front side of the air cap 130 through the air injection hole 135 formed in front of the air cap 130 to maintain the state and the air cap ( Maintaining a state that is sprayed forward through the air injection hole 135 formed in the air injection guide (131, 132) of 130.

In this state, a high pressure air is supplied into the spray body 110 by operating a control valve or the like, which is not shown, and flows into the cylinder. As the air introduced into the cylinder is expanded, the fluid is injected forward through the open injection hole 133. At this time, as the air is being injected from the air injection hole 135, the fluid is diffused forward and widely sprayed. Will be.

In this state, by operating the control valve (not shown) to block the high pressure air supplied through the control air supply connector 180, the fluid supply is no longer stopped and the injection of the fluid is stopped.

In order to supply the fluid and the air, a hole is formed in the spray body 210 to have a predetermined diameter to form one or more injection nozzle flow paths 291 and 292 in which the introduced fluid and air are supplied to have a flow flow. In this case, it is preferable to drill in the horizontal axis direction inside the spray body 210 as described above.

At this time, it is preferable to install the end cap 260 on both ends of the left and right sides of the spray body 210 to prevent the leakage of the flow fluid.

Accordingly, the fluid flowing from the outside and the high-pressure air flows through the first and second flow paths 291 and 292, which are injection nozzle flow paths drilled, into air passages formed along the milling end surface of the fluid nozzle 282. Air flows and the fluid flow injected through the fluid spray hole formed at the center of the tip of the fluid nozzle 282 and the high pressure air are mixed with each other to spray fine particles.

That is, the fluid flowing through the fluid supply pipe 230 by the air introduced at a high pressure in the air supply pipe 220 occurs between the fluid due to the Venturi effect, and thus can be atomized finely generated spray of fine particles Will be.

In this case, one side of the spray body 210 may be a screw and the screw formed on the air cap nut 284 and the fluid nozzle 282 by forming a cylindrical protrusion 281 formed with a screw line on the inside and outside. It is preferable to configure so that.

Alternatively, it may be configured to install the injection nozzle body surrounding the fluid nozzle configuration of the front portion of the spray body and having a connection for supplying fluid and air.

As described above, although the present invention has been described by way of limited embodiments and drawings, the present invention is not limited thereto and is intended by those skilled in the art to which the present invention pertains. Of course, various modifications and variations are possible within the scope of equivalents of the claims to be described.

1a to 1d is a fluid nozzle configuration according to the prior art.

2a to 2d is a fluid nozzle configuration according to the present invention.

Figure 3 is an exploded perspective view showing a single nozzle body according to an embodiment of the present invention.

Figure 4 is a perspective view of a bar nozzle body according to another embodiment of the present invention.

5 is a plan view of FIG. 4.

6 and 7 illustrate a fluid tank according to the present invention.

Figure 8 is a side cross-sectional view of a bar-shaped injection nozzle in accordance with the present invention.

<Description of the symbols for the main parts of the drawings>

100: single fluid injection nozzle 110: spray body

120: fluid nozzle 121: needle connection

122: main body 123: fastening portion

130: air cap 133: fluid injection hole

135: air sprayer 140: air cap nut

150: needle assembly 151: needle pin

152: piston 160: lock nut

165: spring 170: knob

200: bar type fluid injection nozzle 210: bar type spray body

220: air supply pipe 230: fluid supply pipe

260: end cap 270: fluid tank 271: tank body 272: tank cover

273: ball tap valve 274: external fluid connection

275: connection member 276: bracket 280: injection nozzle 282: fluid nozzle

291, 292: jet nozzle

Claims (4)

The fluid supplied through the fluid supply pipe is sprayed into the fine particles by the high pressure air supplied through the air supply pipe into the bar shaped spray body having a plurality of injection nozzles forming a fluid nozzle which is settled into the air cap. In a configured two-phase fluid injection nozzle for fluid mixing, A cylindrical fluid tank provided in the spray body downward direction and configured to supply fluid from the outside; And The first and second through-holes are drilled in the horizontal direction of the spray body in the axial length direction to form an injection nozzle flow path. The fluid supply pipe having the first through hole and the pipeline shape and the air supply pipe having the second through hole and the pipeline shape are connected inside the spray body to mix the introduced fluid and air with each other through the fluid nozzle. A two-phase fluid jet nozzle for fluid mixing, characterized in that the fine particles to be injected. The method of claim 1, The two-phase fluid injection nozzle for fluid mixing, characterized in that to further control the fluid pressure and the fluid injection amount by further comprising a ball tap valve capable of adjusting the water level in the fluid tank. The method according to claim 1 or 2, The spray body is a two-phase fluid injection nozzle for fluid mixing, characterized in that the engineer plastic, stainless, aluminum material selected and configured. The method according to claim 1 or 2,  The fluid nozzle is composed of a fastening portion formed with a screw thread so as to extend along the main body and the main body and can be fastened along a cylindrical thread formed at the center of the nozzle body, and process the circular shape of the main body assembly surface and milling the opposing end surfaces. A two-phase fluid injection nozzle for fluid mixing, wherein the processed cross section is used as a holding part of the assembly tool and an air flow path.

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