KR100833881B1 - Apparatus for drying substrate - Google Patents

Abstract

A substrate transfer apparatus is provided to prevent slip and movement of rollers by press-fitting the rollers for transferring a substrate of a flat display device onto shafts. A substrate transfer apparatus includes a chamber(10), a plurality of shafts(20), a plurality of rollers, a first engaging member, a second engaging member. A substrate is accommodated in the chamber. The shafts are disposed parallel to each other inside the chamber and are rotatable. The rollers support the substrate. Each roller has an engaging groove through which a corresponding shaft passes at a central portion thereof. The first engaging member axially extends in the engaging groove of the roller and is press-fitted on the corresponding shaft. The first engaging member has at least one first engaging guide protruding from the surface thereof. A shaft passes through the second engaging member. The second engaging member is provided on the shaft so that a corresponding first engaging member can be attached to and detached from it. Second engaging guides correspond to the first engaging guides to accommodate the first engaging guides respectively. The first engaging members and the second engaging members are engaged with each other by the medium of the first engaging guide and the second engaging guide.

Description

Substrate transfer apparatus {apparatus for drying substrate}

1 is a plan view showing a substrate transfer apparatus according to an embodiment of the present invention.

FIG. 2 is an exploded perspective view for explaining the roller assembly of FIG. 1. FIG.

3 is a cross-sectional view illustrating a state in which the roller assembly of FIG. 2 is assembled.

Figure 4a is an enlarged cross-sectional view of the main portion for explaining an embodiment of the coupling member of the roller assembly of FIG.

Figure 4b is an enlarged cross-sectional view of the main portion for explaining another embodiment of the coupling member of the roller assembly of FIG.

Explanation of symbols on the main parts of the drawings

1 substrate 10 chamber

20: shaft 30: drive part

50: roller assembly 51: first coupling member

51a: first guide hole 52: second coupling member

52a: second guide hole 52b: seating portion

53: fixing member 100: substrate transfer device

121: support member 132: power transmission member

150: roller 150a: fastening hole

151: first coupling guide 151a: protrusion

151b: receiving groove 152: second coupling guide

The present invention relates to an apparatus for manufacturing a flat panel display device. More specifically, the present invention relates to a substrate transfer apparatus of a manufacturing apparatus for manufacturing a flat panel display apparatus such as a liquid crystal display device, a plasma display device, an organic light emitting diode (OLED) display device, and the like.

Recently, information processing devices have been rapidly developed in accordance with various forms and functions and demands for faster information processing speeds. These information processing devices require display devices for displaying processed information. The above information display apparatuses mainly use a CRT monitor, but according to the development of a portable information apparatus, a demand for a liquid crystal display device or an OLED display device is increasing in order to realize a demand for convenience of portability and small size and light weight. In addition, even in the case of a home or office display device, the demand for the flat panel display device has been increased for clearer image quality, response speed, reduction of worker fatigue, and space.

For example, the liquid crystal display device uses a difference in light transmittance according to an arrangement structure of liquid crystal molecules between an upper substrate and a lower substrate. In recent years, the liquid crystal display device is required to increase the amount of display information and thereby increase the display area. In order to comply, researches on an active matrix liquid crystal display device applying a driving signal to all pixels constituting the screen individually have been actively conducted.

The liquid crystal display device includes a liquid crystal panel assembly including a liquid crystal panel for displaying image data using optical properties of the liquid crystal, a driving circuit for driving the same, a backlight assembly for providing light for screen display, and the components. It may include a mold frame for fixing and receiving.

A large area glass substrate is used as the panel of the liquid crystal display device, and various unit processes may be performed to form electrode patterns on the glass substrate. For example, a film forming process for forming a film on the glass substrate, an etching process for forming the film into desired patterns, a cleaning process for removing impurities on the glass substrate, a drying process for drying the glass substrate, and the like. This can be done repeatedly as needed.

The substrate treating apparatus for performing the processes may include a substrate loader for loading a substrate, a first processor for performing an etching or cleaning process on a substrate loaded by the loader, and a rinsed substrate. A second processing unit for rinsing using a liquid, a third processing unit for drying the rinsed substrate, and an unloader for carrying out the substrate may be included. In addition, the substrate processing apparatus may further include an antistatic device for removing static electricity on the substrate, a buffer storage tank for temporary waiting of the substrate, and the like, as necessary.

In the case of processing a flat substrate such as a glass substrate using the substrate processing apparatus, the substrate may be transferred from the loader toward the unloader by a plurality of rotating rollers. The rotating rollers are mounted to a plurality of shafts arranged in the conveying direction of the substrate, and the rotating rollers are installed to be rotatable by a driving unit disposed outside each chamber for processing the substrate.

In a conventional substrate transfer apparatus for transferring a flat plate substrate as described above, the rollers are coupled to each shaft using a screwing method. Specifically, one side of each of the rollers is provided with a screw for screwing, the fastening nut is fastened to the screw, the wedge-shaped fixing member for fixing the roller is inserted between the screw and the fastening nut. In the case of the conventional fixing method as described above, some problems may occur. For example, damage to the roller and the rotating shaft due to the difference in the fastening force according to the respective operators may occur, and slip phenomenon may occur between the roller and the rotating shaft by loosening the fastening nut. The above problems may act as a cause of impurities in the process of processing a flat substrate, and damage to the substrate may occur due to unstable coupling of rollers.

The present invention has been made to solve the problems described above, an object of the present invention to provide a substrate transport apparatus for stably coupling the rollers in the apparatus for transporting the substrate of the flat panel display device.

In order to achieve the object of the present invention, a substrate transfer apparatus according to an embodiment of the present invention, a chamber in which a substrate is accommodated, a plurality of shafts disposed in parallel with each other in the chamber and rotatably provided, the center of the A fastening hole through which the shaft is formed is formed, a plurality of rollers supporting the substrate, a first coupling member extending along the axial direction from the fastening hole of the roller and fitted to the shaft, and the shaft penetrates the It may include a second coupling member provided on the shaft detachably attached to the first coupling member.

In an embodiment, at least one first coupling guide protruding from the surface of the first coupling member and a second coupling formed in the second coupling member to correspond to the first coupling guides to accommodate each of the first coupling guides. Having a guide, the first coupling member and the second coupling member may be coupled to each other via the first coupling guide and the second coupling guide.

In some embodiments, the first coupling guide may accommodate the protrusion so that the protrusion protruding from the first coupling member and the surface of the protrusion are retracted to be lower than or equal to the surface of the first coupling member. It includes a receiving groove, the first coupling member and the second coupling member may be detachably coupled via the first coupling guide and the second coupling guide.

In an embodiment, the first coupling member may further include a fixing member interposed between the first coupling member and the shaft to prevent the flow from occurring in the circumferential direction and the axial direction in the shaft.

In an embodiment, the first coupling member may be integrally formed with the roller. In addition, the driving unit for applying a rotational force to the shaft may further include.

According to the embodiments of the present invention described above, the rollers for supporting and transporting the substrate can be always mounted with a certain size of force, and the bonding force of the rollers can be maintained stably. Thus, as in the prior art, it is possible to prevent damage to the rollers and the rotating shaft caused by loosening of the nut for coupling the rollers, and thus generation of impurities.

Hereinafter, a substrate transfer apparatus according to embodiments of the present invention will be described in detail with reference to the accompanying drawings.

With respect to the embodiments of the present invention disclosed in the text, specific structural to functional descriptions are merely illustrated for the purpose of describing the embodiments of the present invention, the embodiments of the present invention may be embodied in various forms and It should not be construed as limited to the embodiments described.

As the inventive concept allows for various changes and numerous embodiments, particular embodiments will be illustrated in the drawings and described in detail in the text. However, this is not intended to limit the present invention to the specific disclosed form, it should be understood to include all modifications, equivalents, and substitutes included in the spirit and scope of the present invention.

Terms such as first and second may be used to describe various components, but the components should not be limited by the terms. The terms are used only for the purpose of distinguishing one component from another. For example, without departing from the scope of the present invention, the first component may be referred to as the second component, and similarly, the second component may also be referred to as the first component.

When a component is referred to as being "connected" or "connected" to another component, it may be directly connected to or connected to that other component, but it may be understood that other components may be present in between. Should be. On the other hand, when a component is said to be "directly connected" or "directly connected" to another component, it should be understood that there is no other component in between. Other expressions describing the relationship between components, such as "between" and "immediately between," or "neighboring to," and "directly neighboring to" should be interpreted as well.

The terminology used herein is for the purpose of describing particular example embodiments only and is not intended to be limiting of the present invention. Singular expressions include plural expressions unless the context clearly indicates otherwise. In this application, the terms "comprise" or "having" are intended to indicate that there is a feature, number, step, action, component, part, or combination thereof that is described, and that one or more other features or numbers are present. It should be understood that it does not exclude in advance the possibility of the presence or addition of steps, actions, components, parts or combinations thereof.

Unless defined otherwise, all terms used herein, including technical or scientific terms, have the same meaning as commonly understood by one of ordinary skill in the art. Terms such as those defined in the commonly used dictionaries should be construed as having meanings consistent with the meanings in the context of the related art and shall not be construed in ideal or excessively formal meanings unless expressly defined in this application. Do not.

1 is a cross-sectional view illustrating a substrate transfer apparatus according to an embodiment of the present invention. FIG. 2 is an exploded perspective view for explaining the roller assembly shown in FIG. 1, and FIG. 3 is a cross-sectional view for explaining a coupling state of the roller assembly of FIG. 2. 4A is an enlarged cross-sectional view of a main part for describing an embodiment of a coupling member of the roller assembly of FIG. 2, and FIG. 4B is an enlarged cross-sectional view of a main portion for explaining another embodiment of the coupling member.

Hereinafter, a substrate transfer apparatus according to an exemplary embodiment of the present invention will be described in detail with reference to FIGS. 1 to 4B.

Referring to FIG. 1, the substrate transfer apparatus 100 includes a chamber 10 in which a substrate 1 is accommodated and a predetermined processing process is performed, and a plurality of shafts 20 for supporting and transporting the substrate 1. And a roller assembly 50 coupled to each shaft 20 to support and transport the substrate 1.

Examples of the treatment process include an etching process for removing a film or impurities on the substrate 1, a cleaning process for removing impurities on the substrate 1, a rinsing process for etching or rinsing after etching or cleaning, and drying Drying process and the like. In addition, although not shown, in order to perform the treatment processes, nozzles for providing a chemical liquid or a processing gas, etc. for the treatment of the substrate 1 may be provided on the upper or lower portion of the substrate transfer apparatus 100. , An air knife or a shower knife may be provided.

The substrate transfer apparatus 100 may include a plurality of shafts 20, a plurality of roller assemblies 50 mounted on the shaft 20, and a driving unit 30 for providing rotational force to the shaft 20. Can be. On the other hand, the drive unit 30 may be disposed outside the chamber 10, the power transmission member 132 for transmitting a rotational force from the drive unit 30 to the shaft 20 on the wall of the chamber 10. ) May be provided.

The shaft 20 may be arranged in one direction, for example, parallel to each other along the transport direction of the substrate 1, a plurality of roller assembly 50 is mounted on each shaft 20, Each roller assembly 50 may be arranged at the same interval. Here, the number and arrangement of the shaft 20 and the roller assembly 50 may vary substantially according to the size of the substrate 1 to be the object, thereby not limited to the scope of the present invention. .

The shaft 20 may be supported to have a horizontal or predetermined inclination by the plurality of support members 121. For example, the support member 121 is formed so that the shaft 20 penetrates and surrounds an outer periphery of the shaft 20, and a bearing (not shown) to rotatably support the shaft 20. ) May be included.

The driving unit 30 may be disposed adjacent to an outer wall of the chamber 10. For example, the driving unit 30 may include a motor (not shown) generating a rotational force and the motor (not shown). It may include a power transmission unit (not shown) for connecting the shaft 20 to transfer the rotational force, a reducer (not shown) for adjusting the rotational speed and the rotational force.

Referring to FIG. 2, the roller assembly 50 includes a roller 150 inserted into the shaft 20 and a first coupling member 51 for fixing the roller 150 on the shaft 20. And a second coupling member 52.

The roller 150 rotates like the shaft 20 to substantially support and transport the substrate 1. That is, the roller 150 is in direct contact with the lower portion of the substrate 1 and the shaft 20 is rotated by the friction force acting between the substrate 1 and the roller 150. Can be transferred in one direction.

For example, the roller 150 may have a donut shape in which a fastening hole 150a having a diameter corresponding to the shaft 20 is formed to be fixed to an outer circumferential surface of the shaft 20. Here, the roller 150 may have a short cylindrical shape having a predetermined thickness to be in surface contact with the substrate (1). Alternatively, the roller 150 may have a disk shape or an outer circumferential portion of the roller 150 so as to be in linear contact with the substrate 1.

Since the outer periphery of the roller 150 is in direct contact with the substrate 1, the roller 150 is prevented from being damaged by the contact between the substrate 150 and the substrate 1. In order to prevent the slip phenomenon between 1) and the roller 150 from occurring, the roller 150 is preferably formed of a soft material having a predetermined coefficient of friction. For example, the roller 150 may be formed on the outer peripheral portion of the polyurethane resin. Here, since the polyurethane resin has a large friction coefficient, slippage between the roller 150 and the substrate 1 may be prevented, and the substrate 1 may be stably transferred. In addition, the roller 150 secures a predetermined strength to support the substrate 1, and when a predetermined substrate processing process is performed in the chamber 10, the roller 150 during the processing process. It is preferable to form a material having a strong heat resistance, oxidation resistance and strength so as to prevent deformation. For example, the roller 150 may be formed of SUS material. In addition, the roller 150 may have a double structure having a cylindrical body portion formed of SUS material and a protective layer formed of a polyurethane resin having a predetermined thickness along the outer circumference of the body portion.

One side of the roller 150 is provided with a coupling member (51, 52) for fixing the roller 150 to the shaft (20). In particular, the coupling members 51 and 52 are components for coupling the roller 150 on the outer circumferential surface of the shaft 20 in an interference fit manner.

Specifically, one side of the roller 150 is provided with a first coupling member 51, the first coupling member 51 may be formed integrally with the roller 150. For example, the first coupling member 51 may have a cylindrical shape extending from the fastening hole 150a of the roller 150 to one side along the axial direction of the shaft 20. In addition, the first coupling member 51 may have a first guide hole 51a having an inner diameter corresponding to the diameter of the shaft 20 and mounted to an outer circumferential surface of the shaft 20. In particular, the first coupling member 51 may have an inner diameter slightly smaller than the diameter of the shaft 20 so as to be coupled to the shaft 20 in a fitting manner.

In addition, a second coupling member 52 corresponding to the first coupling member 51 and coupled to an outer side of the first coupling member 51 may be provided. Similarly, the second coupling member 52 also has a second guide hole 52a having an inner diameter slightly smaller than the diameter of the shaft 20 and a seating portion 52b coupled to the outside of the first coupling member 51. ) May be formed.

That is, the roller assembly 50 is coupled to the shaft 20 by the roller 150 and the coupling members (51, 52) by the fitting method, and the first coupling member (51) By engaging the second coupling member 52 with each other, it is possible to prevent the roller 150 from flowing in the circumferential direction of the shaft 20.

Meanwhile, a fixing member 53 may be interposed between the first coupling member 51 and the second coupling member 52. For example, the fixing member 53 may have a tapered shape in which the diameter of the cross section increases along one direction, and the side surface of the fixing member 53, that is, the gap opened in the axial direction of the shaft 20. may have a gap. The gap allows the fixing member 53 to have elasticity, and the coupling members 51 and 52 are elastically pressed by the fixing member 53 to enable close coupling.

The coupling members 51 and 52 have coupling guides 151 and 152 for preventing the coupling between the coupling members 51 and 52 from loosening due to the circumferential flow of the roller 150 in the coupled state. Can be formed.

Hereinafter, the structure and the coupling method of the coupling members 51 and 52 will be described in detail with reference to FIGS. 3 to 4B.

As shown in FIG. 3, the first coupling guide 151 protruding from the first coupling member 51 and the first coupling guide 151 in the second coupling member 52 correspond to the first coupling guide 151. A second coupling guide 152 having a shape of a groove or a hole in which the first coupling guide 151 is accommodated may be formed.

Here, as shown in FIG. 4A, the first coupling guide 151 may have a protrusion shape projecting to a predetermined height on the first coupling member 51, and the circumference of the first coupling member 51. A plurality can be formed along the. In addition, the second coupling guide 152 may be an opening formed through the second coupling member 52 to accommodate the first coupling guide 151.

That is, when the coupling members 51 and 52 are engaged with each other, the first coupling guide 151 is accommodated in the second coupling guide 152 by a slide behavior of the coupling members 51 and 52. The join is complete. Here, the first coupling guide 151 preferably protrudes to a height high enough to pass the gap between the coupling members 51 and 52.

Meanwhile, as shown in FIG. 4B, the first coupling guide 151 has a protrusion 151a protruding from the first coupling member 51 and an accommodation groove 151b for elastically supporting the protrusion 151a. ) May be included. Specifically, the protrusion 151a protrudes a predetermined height on the first coupling member 51, and has a bar shape bent at a predetermined distance from the surface of the first coupling member 51 to have its own elastic force. Can have In addition, the protrusion 151a may be integrally formed with the first coupling member 51. The receiving groove 151b is a component for securing a free displacement of the protrusion 151a.

The second coupling guide 152 may correspond to the protrusion 151a and may be an opening formed through the second coupling member 52 to accommodate the protrusion 151a.

Here, the elastic behavior of the protrusion 151a allows the first coupling member 51 and the second coupling member 52 to be easily coupled and separated. That is, the first coupling member 51 and the second coupling member 52 are engaged with each other, and the protrusion 151a is accommodated in the second coupling guide 152 so that the coupling members 51 and 52 are connected to each other. Circumferential flow of the coupling members 51 and 52 and the roller 150 is prevented.

When the protrusion 151a is pressed through the second coupling guide 152, the protrusion 151a is accommodated in a rear receiving groove 151b and the upper surface of the protrusion 151a is the first coupling member ( It is retracted to a height lower than or equal to the surface of 51, and it is possible to separate the second coupling member 52.

In addition, in the above-described embodiments, an embodiment of the present invention is described with respect to a substrate transfer device used for a flat panel display device such as a glass substrate, but an embodiment of the present invention also relates to a substrate for a semiconductor device such as a silicon wafer. Various embodiments may be applied, and embodiments of the present invention may be preferably applied to any case in which components other than the substrate transfer device are to be fixed on the rotation axis without flow in the circumferential direction.

As described above, according to embodiments of the present invention by combining the rollers and the shafts for transporting the substrate of the flat panel display in a fitting manner, it prevents the slip and flow of the roller, and stably the roller Can be combined. In particular, it is possible to prevent the problem that the coupling of the roller is released due to the different forces for fastening the rollers, and the problem that the shaft and the rollers are damaged. Furthermore, since it is possible to prevent the generation of impurities due to the damage of the rollers and the shafts and the uncoupling of the rollers, it is possible to fundamentally eliminate the defects in the processing process of the substrate.

In addition, the coupling guide has the advantage that the assembly and disassembly of the roller can be easily detached so that the coupling member and the roller.

While the foregoing has been described with reference to preferred embodiments of the present invention, those skilled in the art will be able to variously modify and change the present invention without departing from the spirit and scope of the invention as set forth in the claims below. It will be appreciated.

Claims (6)

A chamber in which the substrate is accommodated; A plurality of shafts disposed in parallel with each other in the chamber and rotatably provided; A plurality of rollers having a fastening hole through which the shaft penetrates and supporting the substrate; A first coupling member extending in an axial direction from the fastening hole of the roller and fitted to the shaft, the first coupling member having one or more first coupling guides protruding from the surface; And A second penetrating through the shaft, the second coupling guide being provided on the shaft to be detachable from the first coupling member, and having a second coupling guide formed to correspond to the first coupling guides to accommodate the respective first coupling guides; Including a coupling member, And the first coupling member and the second coupling member are coupled to each other via the first coupling guide and the second coupling guide. delete The method of claim 1, The first coupling guide, A protrusion protruding from the first coupling member and elastically supported; And And a receiving groove accommodating the protrusion so that the surface of the protrusion may retract to be lower than or equal to the surface of the first coupling member. And the first coupling member and the second coupling member are detachably coupled to each other via the first coupling guide and the second coupling guide. The method of claim 1, wherein the first coupling member further comprises a fixing member interposed between the first coupling member and the shaft to prevent the flow from occurring in the circumferential and axial direction in the shaft. Board | substrate conveying apparatus made into. delete delete

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