KR100804357B1 - Laser beam incident optical device - Google Patents

Abstract

The present invention relates to a laser beam incidence optical apparatus, comprising a quartz-containing material, and having a step index type optical fiber 101 having a clad thickness of 0.035 to 0.1 times the core diameter and a numerical aperture NA of 0.06 to 0.22. The laser beam L is emitted from the solid-state laser oscillator 111 of the giant pulse oscillation method having a peak power of more than 10 MW into the incident end surface 102 of the optical fiber as divergence, so as not to damage the optical fiber. It can be transmitted.

Description

LASER BEAM INCIDENT OPTICAL DEVICE

The present invention relates to a laser beam incidence optical apparatus for stably injecting a laser beam of a giant pulse oscillation method into which an optical power has a peak power of 10 MW or more.

Conventionally, in laser ablation, laser organic fluorescence analysis, laser peening, or the like, a laser beam obtained from a solid laser oscillator of a giant pulse (GP) oscillation system having a peak power of several MW or more is used.

For example, a step index type optical fiber made of quartz is used to transmit such a large power laser beam.

The optical fiber made of quartz can transmit up to several kW in the case of continuous oscillation (CW) laser light. However, a short pulse laser light having a pulse width of several nsec, the laser light of which pulse energy exceeds several tens of mJ has a peak power of several MW or more.

The pulse energy of the short pulse laser light is three or more digits larger than the pulse energy of the continuous oscillation light, and the peak power density is also very high in the order of 10 ⁻¹ to 1.0 GW / cm 2. For this reason, it is known that damage by an electron avalanche phenomenon or multiphoton absorption occurs, and an optical fiber is destroyed and laser beam cannot be transmitted. In addition, it is reported that the threshold value damaged by the pulse laser light of quartz (quartz glass) material is about 100 GW / cm 2 at a pulse width of about 5 nsec ("Laser Handbook", Laser Society, Omsa, pp. 463, 473).

For this reason, the practical limitation in case of transmitting spatially and temporally distributed laser light, that is, short pulse laser light by optical fiber, is, for example, Nd: YAG laser light having a pulse width of 5 nsec and oscillation repeating 10 Hz, and a core diameter of 1 mm. Taking the case of incident on the phosphor optical fiber as an example, the pulse energy is about 30 to 40 mJ, that is, 6 to 8 MW at the peak power (peak power density with respect to the core diameter is 0.76 to 1.0 GW / cm 2).

For this reason, when trying to transmit short pulse laser light of 10 MW or more at present, the inside of an optical fiber will be damaged and a laser beam cannot be transmitted substantially. That is, laser light by a solid laser oscillator on the premise of transmission using an optical fiber is mainly a continuous oscillation (CW) laser light, and short pulse laser light having a peak power exceeding several MW has become difficult to transmit by the optical fiber. .

In addition, it has been reported to take a spatial match between the laser light and the optical fiber as an example in which the laser light is incident on the optical fiber to transmit the laser light by the optical fiber. In this case, there are reports of concentrating the laser beam to the optical fiber's incidence end face by limiting the aperture diameter of the laser beam to the optical fiber within the core diameter of the optical fiber and within the numerical aperture NA of the optical fiber ("Laser processing technology", Hiromi Kawasumi, Nikkan Kogyo Shimbun, pp.34-37).

However, it is known that when a laser beam with a high peak power is focused and incident on an optical fiber, partial convergence of the laser light occurs inside the optical fiber, power density increases at a specific portion of the optical fiber, and the interior of the optical fiber is damaged. In addition, a method of shallowing the concentration of laser light is also known for the purpose of preventing the convergence of laser light inside the optical fiber. However, when the peak power exceeds several MW, the convergence of the laser light inside the optical fiber is completely prevented. It is difficult.

In addition, in the report of Non-Patent Document 2, laser light is converged inside the optical fiber, and the reason that the optical fiber is damaged is that the high intensity of the electric field increases with the laser light having a high peak power, so that the refractive index of the quartz material of the optical fiber is partially caused by the strong electric field. It is reasonable to think that this is due to the fact that the magnetic procedure is caused by one kind of lens effect.

In addition, in order to enable laser beam transmission exceeding the peak power of 10 MW, the enlarged laser beam is incident on the dividing lens on the array and spatially divided into several tens, and then the total number of dividing elements is collected on the optical fiber by a condenser lens provided at the rear of the array. There is a method of making an incident.

In order to enable the laser beam transmission exceeding the peak power of 10 MW, the enlarged laser beam is incident on the dividing lens on the array and spatially divided by several tens, and then the incident light is incident on the optical fiber by the condensing lens having the total dividing number installed at the rear of the array. There is a method, but since the size of the dividing lens arranged on the array is about 2 mm, for example, in order to divide the number of dividing into 81 divisions (= 9 x 9), for example, 9 convex lenses of 2 mm angles are arranged in length and width and 18 mm x A divided lens group (focal lens) of 18 mm is required. However, there is a problem that the split lens group, that is, the compound eye lens, becomes very expensive.

In addition, nine cylindrical lenses having a dividing number 81 (= 9 × 9) having a curvature in a direction of 2 mm in width and 18 mm in length, for example, are arranged vertically to be a dividing lens group in the lateral direction. It is also possible to obtain the same effect as the above-mentioned compound eye lens by combining the same lenses in nine horizontally to form a split lens group in the longitudinal direction, and combining these two lens groups. However, although the cost of the lens is slightly reduced, there is a problem that the total cost is increased due to an increase in the number of parts and a structural member for maintaining the same.

In the case of using a compound lens, the cross-sectional size (beam diameter) of the laser beam is enlarged to about 26 mm, which is a diagonal of 18 mm on one side even when the size of the lens is set at a division number of 81 = 9 × 9 and an angle of 18 mm. Required.

In addition, in the case of using the compound eye lens, not only the cost increase but also the problem that the transmission efficiency is reduced by about 10 to 20% due to the influence of the reflection loss occurring at the boundary portion of each lens, and the problem that the position of the compound eye lens must be adjusted have.

An object of the present invention is to transmit the laser light without damaging the optical fiber in the incident optical apparatus of the laser light in which the laser light from the solid laser oscillator of the giant pulse oscillation type with a peak power greater than 10 MW is incident on the incident end face of the optical fiber, It is possible to provide a low cost by eliminating the need for lowering transmission efficiency and complicated adjustments.

The present invention provides a laser light incident optical apparatus for injecting laser light from a solid pulse oscillator of a giant pulse oscillation method having a peak power of more than 10 MW to an incident cross section of an optical fiber, comprising: a condensing lens for condensing laser light from the solid laser oscillator; And an optical fiber position adjusting mechanism for providing an incidence end face of the optical fiber at a predetermined position behind the condensing point of the laser light by the condensing lens, and making the laser light divergent to enter the incidence end face of the optical fiber. It is a material containing quartz and has a step index type of 0.035 to 0.1 times the thickness of the clad with respect to the core diameter, and the numerical aperture NA of 0.06 to 0.22.

In addition, a material containing quartz includes an optical fiber having a step index type of 0.035 to 0.1 times the thickness of the clad with respect to the core diameter and a numerical aperture NA of 0.06 to 0.22, and a peak power of 10 MW is applied to the incident end surface of the optical fiber. The laser beam is transmitted without damaging the optical fiber by making the laser beam from the solid laser oscillator of the giant pulse oscillation system exceedingly divergent and incident.

1 is a schematic diagram showing an example of an embodiment of a laser beam incident optical device of the present invention;

2 is a schematic diagram illustrating a transmission model of a light converging optical system to which a divergent incident system is applied;

3 is a graph showing a relationship between an incident angle to an optical fiber and a focal length of a condenser lens;

4 is a graph showing a relationship between an incident angle into an optical fiber and an incident divergence angle of a condenser lens;

5 is a graph showing a relationship between an incident method into an optical fiber and transmission energy;

6A is a cross-sectional view in the axial direction of an optical fiber;

6B is a cross-sectional view of a direction orthogonal to the axial direction of the optical fiber shown in FIG. 6A;

7 is a graph showing the relationship between clad thickness and transmission energy;

8 is a graph showing the relationship between core diameter and transmission energy;

9 is a graph showing a relationship between an incident angle into an optical fiber and transmission energy;

10 is a schematic view showing another embodiment of the laser beam incident optical apparatus of the present invention; and

Fig. 11 is a schematic diagram showing an example of a laser organic fluorescence spectrometer incorporating the laser light incident optical apparatus of the present invention.

EMBODIMENT OF THE INVENTION Hereinafter, embodiment of this invention is described with reference to drawings.

1 to 9, an embodiment of a laser beam incidence optical device will be described.

As shown in Fig. 1, the laser beam incidence optical device 11 receives a pulsed laser beam generated by a solid laser oscillator (laser device) 111 of a giant pulse oscillation method having a peak power of more than 10 MW. And the incident end face 102 of the clad-thickness optical fiber 101 without being damaged by the optical fiber 101, and being able to be incident with a slight loss.

The laser beam incidence optical device 11 includes a condenser lens 13 for condensing a laser beam L having a predetermined size with a cross-sectional beam diameter supplied by the solid state laser oscillator 111, a condenser lens 13, and an optical fiber ( The optical fiber position adjustment mechanism 15 which maintains the distance between the incident end surface 102 of 101 by a fixed distance is provided.

The condenser lens 13 is a convex lens that can be easily obtained at a low price, and is not particularly limited as long as it is a material and a shape that withstands heat generated by the incidence of the laser light L emitted from the solid state laser oscillator 111. The condensing lens 13 may be a synthetic lens in which two thin thickness lenses are combined as necessary.

The optical fiber position adjusting mechanism 15 is held by the condenser lens holding unit 16 holding the condenser lens 13, the optical fiber holding unit 17 holding the optical fiber 101, and the condensing lens holding unit 16. It has the adjustment part 18 which adjusts the space | interval which the incident end surface 102 of the optical fiber 101 faces with respect to the condensing lens 13. By the adjusting unit 18, the optical fiber 101 is adjusted such that the incident end surface 102 of the optical fiber 101 is positioned at a focal position of the condenser lens 13, that is, a position away from the condensing point A by a predetermined distance. It is. Moreover, the adjustment part 18 enables the distance between the optical fiber holding part 17 and the condensing lens holding part 16 to be set to arbitrary positions by the movement mechanism by manual, a motor, a gear mechanism, etc., and the like.

Further, arranging the incident end surface 102 of the optical fiber 101 at a focal position of the condensing lens 13, that is, at a predetermined position away from the condensing point A by a predetermined distance, is the incident end surface 102 of the optical fiber 101. The laser beam L incident on the beam 1) is divergent. That is, by optimizing the distance between the incidence end surface 102 of the optical fiber 101 and the condensing lens 13, the laser light L incident on the incidence end surface 102 of the optical fiber 101 becomes divergent. The laser light L incident on the 101 is converged at a specific position in the optical fiber 101. As a result, the density of the peak power at the specific position of the optical fiber 101 is increased, thereby preventing the optical fiber 101 from being damaged.

Further, by optimizing the positional relationship between the condenser lens 13 and the incident end surface 102 of the optical fiber 101, the peak power density of the laser light L exceeded a predetermined size, for example, 100 GW / cm 2. At this time, the laser light L cannot be transmitted stably under the influence of the air breakdown generated at the condensing point A of the condensing lens 13, and the plasma generated by the air breakdown is generated in the optical fiber 101. It is possible to prevent the incident end surface 102 of the optical fiber 101 from being damaged by reaching the incident end surface 102.

Although specifically demonstrated with reference to FIGS. 2-4, the distance between the condensing point A where the laser beam L is condensed by the condensing lens 13, and the incident end surface 102 of the optical fiber 101 is 1, for example. 10 mm.

That is, the pulse energy of the laser light L is' E [Wt] ', the pulse width of the laser light L is' t [sec]', and the peak power density of the threshold at which air breakdown occurs is' Pth [ Wt / cm <2> '"and the condensing diameter (radius) of the laser beam L condensed by the condensing lens 13) are" ω [mm] ", the condensing diameter' ω 'is

Is displayed.

Further, when the peak power of the transmitted laser light L is 'P [Wt]', Equation 1 is

Becomes

On the other hand, when the divergence angle of the laser light L incident on the condenser lens 13 is' θ ₁ (half angle) [rad] and the focal length of the condenser lens 13 is' f [mm] ', the condensing diameter ( Radius) (ω),

Is displayed.

Further, if the cross-sectional beam diameter (diameter) of the laser beam L is 'r (radius) [mm]', and the distance from the solid state laser oscillator 111 to the condenser lens 13 is 'D ₁ [mm]' The laser beam focused by the condenser lens 13 by the focal length f [mm] of the condenser lens 13 and the divergence angle θ ₁ (half angle) of the laser beam L incident on the condenser lens 13. The condensing angle of L (that is, the incident angle when the laser light L condensed by the condensing lens 13 is incident on the optical fiber 101) θ ₁ (half angle) [rad] is

Obtained by

Accordingly, Equations 2 to 4 are the lens focal length f, the laser aperture (cross-beam diameter) r, the incident angle θ ₁ of the laser light L incident on the optical fiber 101, and the solid state laser. The distance D ₁ from the oscillator 111 to the condenser lens 13, the peak power P of the laser light L, and the peak power density Pth of the generation threshold of air breakdown are:

Has a relationship defined by

According to Equation 5, the focal length f of the light collecting lens 13 in which air breakdown does not occur at the light collecting point A of the light collecting lens 13 can be obtained. That is, the focal length f of the condenser lens 13 obtained by Equation 5 and the incident angle of the laser light L incident on the condenser lens 13 from Equation 3, Equation 1 or Equation 2 are determined. (Ie, the divergence angle) θ ₁ can be obtained. When the incident angle of the laser light L incident on the condensing lens 13 is set to be θ ₁ , the optical fiber 101 can be efficiently generated without generating an air breakdown. The laser beam L can be made to enter.

As an example, the condensing lens usable when the aperture (diameter) of the laser beam L is in the range of 2 to 13 mm, and the distance between the condenser lens 13 and the solid state laser oscillator 111 is changed in the range of 10 to 500 mm. The result of having calculated the focal length f of (13) is shown in FIG. 3, and the result of having calculated the incident angle (diffusion angle) (theta) ₁ of the laser beam L incident on the condensing lens 13 is shown in FIG.

For example, the diameter of the laser beam L is 'r = 3mm (diameter 6mm)', and the distance D ₁ from the solid state laser oscillator 111 to the condenser lens 13 is 'D ₁ = 100mm', condensing The incidence angle (condensing angle) of the laser light L incident from the lens 13 into the optical fiber 101 is 'θ ₂ = 0.15rad', the peak power is 'P = 20MW', and the peak of the generation threshold of air breakdown When the power density is set to 'Pth = 100GW / cm 2' and the focal length f of the condenser lens 13 and the incident angle θ _{1 of the} laser beam incident on the condenser lens 13 are obtained, f = 24.9 mm and θ ₁ = 3.2mrad (6.4mrad).

For example, the focal length f of the condenser lens 13 set to the actual measurement is substituted into the equation (4), and the size of the incident angle θ ₂ of the optical fiber 101 is determined by the optical fiber in which the laser light L is incident. It is necessary to set the focal length f of the condensing lens 13 in a range not exceeding the NA of 101 (see FIG. 3).

That is, FIG. 3 shows the condensing lens 13 in which air breakdown occurs when the condensing angle (incidence angle into the optical fiber 101) θ ₁ when the laser light L is incident on the optical fiber 101 is changed. Although the focal position is shown, the lower limit is about 0.06 rad as a result of changing the aperture (cross section beam diameter) of the laser beam L and the installation position of the condenser lens 13.

However, the actual condensing diameter may be larger than the ideal condensing diameter due to the influence of the quality of the laser light L (space mode, wavefront, etc.), the aberration of the condensing lens 13, and the like.

In such a case, the focal length f of the condensing lens 13 is shortened until the condensing diameter which does not cause air breakdown obtained by Equation 2 and the actual condensing diameter are equal, and the laser light L is the optical fiber 101. It is preferable to enlarge the numerical aperture NA when it enters into () (refer FIG. 4). Further, due to the relationship between the numerical aperture NA when the laser light L is incident on the optical fiber 101 and the incident angle θ ₁ to the condensing lens 13 suitable for the divergent incidence method, it is incident on the optical fiber 101. It is preferable that the lower limit of the incident angle (theta) ₂ of the laser beam L is larger than about 0.06 rad.

Further, the condensing point A of the condensing lens 13 and the installation position of the optical fiber 101 (position of the incident end face 102) have a condensing diameter (radius) at the condensing point A as 'ω [mm]'. The cross-section beam diameter when the distance between the light-converging point A and the incident end face 102 of the optical fiber 101 is 'Lf [mm]' and the laser light L is incident on the core of the optical fiber 101. That is, when the incident diameter is 'Wi (diameter) [mm]' and the incident angle when the laser light L is incident on the optical fiber 101 is 'θ ₂ (half angle) [rad]',

Is displayed.

The distance Lf between the focal position (condensing point A) of the condensing lens 13 and the incident end surface 102 of the optical fiber 101 is 0.25 to 16 mm, for example, using the above equation (6). Is set. Specifically, the minimum value of the incident diameter of the laser light L incident on the core of the optical fiber 101 is, for example, 420 μm (the power of the laser light L to be transmitted by the optical fiber 101, that is, Minimum value of the core diameter determined by energy or peak power), and the maximum value is, for example, 1350 μm, which is 90% of the maximum core diameter 1500 μm of the readily available optical fiber 101, and Wi = 420 to 1350 μm. , ω = 100 µm (peak power 30 MW, the lowest condensing diameter of the air breakdown generation threshold 100 GW / cm ₂ ), θ ₂ = 0.06 to 0.22 rad (to be described later), and the range of Lf is calculated by calculating the preferred range of Lf. As mentioned above, it exists in the range of 0.25-16 mm.

In practical use, the minimum distance at which the incident end face 102 of the optical fiber 101 can be set is 1 mm, and the distance from the light converging point A to the incident end face 102 of the optical fiber 101 is set in the range of 1 to 16 mm. However, when the distance Lf becomes larger than necessary, the laser light L that does not enter the optical fiber 101 also increases, so that the upper limit is, for example, about 10 mm.

More preferably, the distance lf between the condenser lens 13 and the incident end surface 102 of the optical fiber 101 is in the range of 1.5 to 5 mm in most cases based on the result of the actual assembly adjustment.

Next, the intensity of the laser light L that can be incident on the optical fiber 101 from the core diameter of the optical fiber 101 and the thickness of the clad layer will be described.

As described above, when the laser beam L whose peak power obtained by the giant pulse oscillation method exceeds several MW (peak power density of 10 ^{−1 to} 1.0 GW / cm 2) is attempted to enter the optical fiber 101. It is known that the optical fiber 101 is damaged and the laser beam L cannot be transmitted.

For this reason, the laser beam L is applied to the distance Lf between the condensing lens 13 described above with reference to FIGS. 1 and 2 to 4 and the incident end surface 102 of the optical fiber 101 and the condensing lens 13. defining a home wide angle (θ ₂₎ at the time of incidence of the focused laser beam (L) on the entrance end face 102 of the optical fiber 101 by an incident angle (θ ₁₎ and the condenser lens 13 in the time the incident Only the optical fiber 101 may be damaged.

Hereinafter, the structural features of the optical fiber 101 and the transmission characteristics of the laser light L will be described.

5, the optical fiber 101 having a diameter of 1000 µm, a thickness of a cladding layer of 50 µm, and a numerical aperture NA of 0.2 has a pulse width of 5 nsec and a diameter of the laser light L (cross-sectional beam diameter) of 700. The experimental results in which the micrometer laser beam L was incident by the divergent incidence method and the general converging incidence method described by FIG.

In the convergence incident method in FIG. 5, it is recognized that the optical fiber 101 is damaged at a transmission energy of 30 mJ (peak power 6 MW). On the other hand, it is confirmed that the optical fiber 101 is not damaged even by transmission energy of 70 mJ (peak power of 14 MW) by applying the divergent incidence method.

The optical fiber 101 is characterized by a step index type quartz material having the structure shown in FIG. 6, which is known to be resistant to damage caused by the energy of the laser light L because of high purity of the core material. The optical fiber 101 is composed of a core 103, a clad 104 formed around the core 103, and a coating layer 105 formed around the clad 104.

In addition, it is known that the thickness of the clad 104 is more prone to breakage due to mechanical stress when the optical fiber 101 is bent as the thickness becomes thicker than the predetermined thickness, whereas the thickness of the layer of the clad 104 is thin. It is known that the optical fiber 101 is damaged by the laser light L leaking from the core 103 to the clad 104 when the laser light L having a peak power of several MW level is incident.

In addition, the thickness of the clad 104 is thinner than the diameter of the core 103, and is about 0.05 to 0.1 times the diameter of the core 103, for example. For this reason, even the slight laser light L which leaked to the clad | rod 104 has a peak power density about 1 position higher than the core 103 part. In addition, since the peak power is partially increased as if standing waves exist due to the effect of diffraction, which is also generated in the transmission of normal laser light L at the boundary between the clad 104 and the core 103, the clad 104 is increased. There is also a lower limit for thinning the thickness of.

In Fig. 7, an optical fiber 10 having a core diameter of 1000 mu m and a numerical aperture NA of 0.2 has a laser beam L having a pulse width of 5 nsec and an aperture diameter (section beam diameter) of 700 mu m, with an incident angle of 0.02 rad. It enters by the divergent incidence system demonstrated by FIG. 2, and the experimental result which changed the thickness of the clad 104 is shown.

As is apparent from FIG. 7, it is recognized that as the thickness of the clad 104 increases, large energy can be transmitted. That is, in the case where the thickness of the clad 104 is 20 µm in FIG. 7, the limit was 40 mJ (peak power 8 MW). However, the optical fiber 101 was formed at 70 mJ (peak power 14 MW) with the thickness of the clad 104 at 50 µm. It is recognized that it is not damaged.

Therefore, in FIG. 7, it is recognized that the thickness of the clad 104 is required to be 35 µm or more in order to enable transmission of the laser light L having a peak power of 10 MW or more. In addition, when the cladding 104 becomes thicker than 100 mu m, it becomes hard and weak, the optical fiber 101 is hard to bend, and the bending radius becomes large, so that it is 100 mu m or less.

On the other hand, for the core diameter, the lower limit is set in relation to the laser power density to be transmitted by the optical fiber 101, but the upper limit of the core diameter is, for example, incident laser light as described below with reference to FIG. It can judge as a ratio with respect to the aperture (cross section beam diameter) of L).

In Fig. 8, the thickness of the clad 104 is made constant, and the aperture (section beam diameter) of the laser light L when the optical fiber 101 is incident on the optical fiber 101 having the core diameter changed is changed so that the laser is changed. The experimental result which incident light L is shown.

In FIG. 8, even if there is a difference between the core diameter and the cross-sectional beam diameter (diameter) of the incident laser light L, if the thickness of the clad 104 is the same, the laser beam of the same peak power of 10 MW is equal to the incident aperture in the range. The result that can transfer (L) was obtained.

That is, as shown in Fig. 8, in order to be able to transmit 10MW or more of peak power, the result is that a condensing diameter is required to be 420 µm or more. For this reason, the core diameter is preferably 500 µm or more in consideration of allowing a margin of about 80% with respect to the condensing diameter.

In addition, as shown in FIG. 9, the aperture diameter (cross-section beam diameter) is applied to the optical fiber 101 having a core diameter of 100 m, a thickness of the clad 104 50 m, and a numerical aperture NA of 0.2 by an optical fiber 101. The peak power was 15 MW (energy) when the incident angle θ ₂ of the laser light L incident on the optical fiber 101 was changed when the laser light L having 700 μm and a pulse width of 5 nsec was incident. An incident angle θ _{2 of} about 0.06 rad is required in order to inject the laser light L around 80 mJ with a low loss. Further, as the incident angle θ ₂ is increased, large energy can be transmitted, and the incident angle θ ₂ is about 0.12 rad, so that the laser beam W having a peak power of 20 MW can be transmitted.

On the other hand, in the optical fiber 101, laser light L incident on the optical fiber 101 by diffraction at the boundary between the core 103 and the clad 104 is transmitted into the optical fiber 101 depending on the transmission of the laser light L. There is an upper limit of the numerical aperture NA when) is incident. That is, if the numerical aperture NA of the optical fiber 101 is too small, the incident angle θ ₂ to the optical fiber 101 becomes small in the divergent incidence method, and a sufficient effect is not obtained. As described above, the laser light L incident on the optical fiber 101 converges at a specific position inside the optical fiber 101, causing damage to the optical fiber 101.

In addition, when the numerical aperture NA of the optical fiber 101 is increased, the angle of the laser light L emitted from the optical fiber 101 is increased to be used to irradiate the laser light L to the object with a predetermined cross-sectional beam diameter. The size of the irradiation optical system also increases. For example, the laser beam L emitted from the optical fiber 101 at an imaging magnification of 1 or less using one flat convex lens made of a glass material having a refractive index n of about n = 1.5 is applied to the object. For condensing, the numerical aperture NA of the optical fiber 101 becomes NA ≒ 0.25 rad or less from the viewpoint of the production limitation of the lens aperture with respect to the lens curvature.

In addition, since the thickness of the clad 104 is thicker than that of a general optical fiber, the optical fiber 101 has a refractive index of the core 103 'n1', and the clad 104 has a refractive index in consideration of a decrease in mechanical strength (anti-flexibility). When the refractive index is 'n2', the numerical aperture NA is

It is prescribed.

In addition, the optical fiber 101 is widely used as a method of lowering the refractive index of the clad 104 layer in order to increase the numerical aperture NA, and is weak due to an increase in the amount of fluorine or boron doped in the clad 104 layer. It becomes easy to be. In addition, considering the thickness of the clad 104 obtained by FIG. 7, the upper limit of the numerical aperture NA defined depending on the irradiation optical system is further lowered to be approximately 0.22 rad.

Therefore, the upper limit of the numerical aperture NA of the optical fiber 101 is 0.22. In addition, since an upper limit changes according to the structural characteristic and physical property of the optical fiber 101 actually used, the upper limit of the numerical aperture NA which can be set to the optical fiber 101 in a divergent incident method is not necessarily limited to 0.22, and the optical fiber 101 The numerical value specified by the structural characteristic and physical property of) is taken.

In addition, the lower limit is the focal position of the condensing lens 13 and the incident angle θ ₂ of the laser light L incident on the optical fiber 101 by FIGS. 3 and 4, and the optical fiber 101 described by FIG. 8. From the results of the experiment that the core diameter is not limited by the core diameter and the aperture (cross section beam diameter) of the laser light L incident on the optical fiber 101, and the result of confirming the energy transfer capability described with reference to FIG. Since it is recognized that it should just be equivalent to the incident angle (theta) ₂ of L), numerical aperture NA will be 0.66-0.22rad.

As described above, the optical fiber 101 capable of transmitting the laser light L of the giant pulse oscillation method of about 20 MW (100 GW / cm 2 at peak power density) by the divergent incidence method,

Core 103 diameter is 500-1500 μm

The thickness of the clad 104 is 35-100 μm

The numerical aperture NA of the optical fiber 101 is 0.06 to 0.22

It is preferable that it is the range of.

Incidentally, the incident angle θ ₂ of the laser beam L when the laser beam L is incident on the optical fiber 101 is an angle as large as possible within the range allowed for the configuration of the laser beam incident optical apparatus 11. It is preferable.

As described above, in order to enable stable transmission of the pulsed laser light L having a peak power of 10 MW or more or the peak power of 10 MW or less, for example, the opening of the optical fiber 101 is possible. When the number NA is 0.2, the incidence angle θ ₂ of the laser light L incident on the optical fiber 101 is set to 0.2 rad (the upper limit of the numerical aperture NA of the optical fiber 101). desirable.

Subsequently, a specific example of the laser beam incident optical device 11 will be described.

In addition, the numerical values shown below are data of the laser light L of 22 MW of the peak power demonstrated above by FIG. 9, for example, using the solid-state laser oscillator 111 which is a Nd: YAG laser oscillator of a giant pulse oscillation system. The laser beam L having a pulse width of 5 nsec, pulse energy of 110 mJ (peak power 22 MW = 110 mJ / 5 nsec), and a diameter of 6 mm is transmitted to the optical fiber 101 of step index quartz material under the following conditions.

Angle of incidence (incidence divergence angle) θ ₁ = 1.8 mrad (half angle) to the condenser lens 13,

Laser aperture (cross-section beam diameter) r (radius) = 3 mm (diameter 6 mm),

Spacing (D ₁ ) between the condenser lens 13 and the solid state laser oscillator 111 = 600 mm,

Focal length f of the condenser lens 13 = 31 mm,

The core diameter of the optical fiber 101 1000㎛,

The thickness of the clad 104 is 50 μm,

Numerical aperture (NA) = 0.2rad,

Angle of incidence (θ ₂ ) of the laser light L into the optical fiber 101 = 0.13rad (half angle),

Distance Lf from the light collecting point A of the light collecting lens 13 to the incident end surface 102 of the optical fiber 101,

Incidence aperture (cross section beam diameter) of the laser light L to the optical fiber 101: 700 micrometers (diameter).

Further, each of the above values, namely, the incident angle (incidence divergence angle) θ ₁ = 1.8 mrad into the condenser lens 13, the distance D ₁ between the condenser lens 13 and the solid state laser oscillator 111 = 600 mm, the laser incident aperture (Section beam diameter) r (radius) = 3 mm and the focal length f of the condenser lens 13 = 31 mm, the angle of incidence θ ₂ into the optical fiber 101 described above was obtained using Equation 4, where the angle of incidence was obtained. (θ ₂ ) = 0.13rad, and it is confirmed that it is the range of NA = 0.06-0.22rad which is the range of the numerical aperture of the optical fiber 101 made available in this invention.

In addition, according to the divergent incident method, the influence of the reflection loss occurring at the boundary portion of each lens is eliminated as compared with the known example using the composite lens divided by m × n, so that the optical fiber 101 on the incident side of the condensing lens 13 is eliminated. ), The transmission efficiency to the exit side can be improved by about 10%.

In addition, since the number of optical elements is reduced in the divergent incident method, the cost of the entire laser beam incident optical apparatus 11 is reduced.

Therefore, the incident cross section of the optical fiber 101 is made of a material containing quartz using a step index type optical fiber 101 having a thickness of 0.035 to 0.1 times the thickness of the core and a numerical aperture NA of 0.06 to 0.22. The laser beam L can be transmitted without damaging the optical fiber 101 by injecting as a divergence the laser beam L from the solid state laser oscillator 111 of the giant pulse oscillation method exceeding the peak power of 10 MW to 102. In this way, the transmission efficiency can be reduced and complicated adjustments can be made unnecessary, thereby providing a low cost.

Subsequently, another embodiment of the laser beam incidence optical device 11 will be described with reference to FIG. 10.

In addition, in the embodiment shown in FIGS. 1-9, the same code | symbol is attached | subjected to the structure similar to what was already demonstrated, or the similar description is abbreviate | omitted.

The laser beam incidence optical apparatus 11 includes an incident end surface of the condenser lens 13, the condenser lens 13, and the optical fiber 101 which impart a predetermined condensing property to the laser beam L from the solid state laser oscillator 111. It is provided between the optical fiber positioning mechanism 15, the solid state laser oscillator 111, and the condenser lens 13, which maintains the distance between the optical fiber 102 and the constant distance, and at the incident end surface 102 of the optical fiber 101. A beam splitter (sampling mirror) 31 as a semi-transparent mirror which separates the reflected reflected laser light (return laser light) R from the solid laser oscillator 111 toward the condensing lens 13 from the laser light L; The reflected laser beam R separated by the beam splitter 31 is received and outputs an electric signal corresponding to the intensity thereof, and is provided with, for example, a CCD camera 32 as an observation means having a photoelectric conversion element. In addition, an imaging lens 33 for forming a reflection laser light R separated by the beam splitter 31 on the light receiving surface (not shown) of the CCD camera 32 between the CCD camera 32 and the beam splitter 31. Is provided, and the light amount adjusting device 34 which is an attenuation filter or the like that adjusts the intensity of the reflected laser light R incident on the CCD camera 32 as needed between the imaging lens 33 and the CCD camera 32. ) Is installed.

Information resulting from the incident position of the laser light L incident on the incident end surface 102 of the optical fiber 101 is imaged in the CCD camera 32. Therefore, based on the image of the incident end surface 102 obtained by the CCD camera 32, for example, the movement mechanism of the optical fiber holding part 17 of the optical fiber position adjustment mechanism 15 is not mentioned above, for example. The distance between the position of the incident end surface 102 of the optical fiber 101 and the imaging lens 103 can be set to the desired position described with reference to FIGS.

Further, the focal length of the condenser lens 13 is 'f ₁ ', the focal length of the imaging lens 33 is 'f ₂ ', and the distance from the incident end surface 102 of the optical fiber 101 to the imaging lens 13 is determined. If it is set to 'a', the position (distance from the incident end surface 102 of the optical fiber 101) where the CCD camera 32 should be placed is set to 'b', between the condenser lens 13 and the imaging lens 33. The distance d is when the magnification is 'm',

Is displayed.

Thus, by using the equation (12) establish the focal length (f ₂₎ of the condenser lens 13, a focal length (f ₁₎ and the imaging lens 33 to the observation, and the magnification (m) wants, the continuously formula 13 and Equation 14 determine the distance between the two lenses (distance d), the position of the CCD camera 32, and the like, so that the incident end surface 102 of the optical fiber 101 can be observed.

As an example, the focal length of the condenser lens 13 is set to 'f ₁ = 31 mm', and the beam splitter (sampling mirror) 31 is directed toward the condenser lens 13 from the fixed laser oscillator 111. The CCD camera 32 is positioned at a predetermined position behind the imaging lens 33, and the reflected laser beam R from the incident end surface 102 of the optical fiber 101 ) Was imaged on the CCD camera 32, and the incident adjustment was performed while observing with a TV monitor (not shown).

In addition, when the image magnification m is made approximately 3 times, if the focal length of the imaging lens 33 is f ₂ = 100 mm, for example, by equation (12), the condensing lens 13 and the imaging lens are expressed by equation (13). The distance d between 33 is approximately 131 mm. Further, since the distance a between the condenser lens 13 and the incident end surface 102 of the optical fiber 101 is about 33 mm, the distance between the imaging lens 33 and the CCD camera 32 is about 79 mm. At this time, the phase magnification m is approximately 3.2 times by the equation (11).

The adjustment of the distance a between the incident end face 102 of the optical fiber 101 and the condenser lens 13 by the optical fiber position adjusting mechanism 15 is carried out except when the assembly adjustment of the laser beam incident optical apparatus 11 is performed. Since it is not necessary, the configuration used for the monitoring of the incidence state of the CCD camera 32 and the imaging lens 33 of the beam splitter 31 may be removed from the optical path between the solid state laser oscillator 111 and the condenser lens 13. It may be configured so that.

Subsequently, another embodiment of the laser beam incidence optical device 11 will be described with reference to FIG. 11.

Fig. 11 shows an example in which the laser beam incident optical device 11 is used for a laser organic fluorescence analysis device (a high speed analysis device using Laser Induced Breakdown Spectroscopy). Laser organic fluorescence spectrometers have some limitations on the types of analytes (analytes) that can be analyzed, but can simplify the pretreatment step of preparing the samples, and can be applied at high speeds and when the analytes are solid. It has an advantage, and widespread use is expected.

As shown in FIG. 11, the laser organic fluorescence analyzer 301 includes a solid laser oscillator 111 of a giant pulse (GP) oscillation method, a laser light incident optical device (laser light transmission system: a light guide optical system) 11, An irradiation optical system 331, a fluorescence detection optical system 341, a monochromator (photodetector or spectrometer) 351, an imaging mechanism 361, a timing adjustment mechanism 371, a data processing apparatus 381, and the like are provided.

As the solid state laser oscillator 111, for example, Nd: YAG laser or the like. The size of the laser beam L output from the solid state laser oscillator 111 is, for example, about 5 nsec pulse width, peak power of 14 to 20 MW, transmission energy of 70 to 100 mJ (80 GW / cm 2 at peak power density). ) In addition, the solid state laser oscillator 111 includes, in most cases, an oscillation control device, a power supply device, a cooling device, and the like, and a detailed description thereof will be omitted.

As described with reference to FIG. 1 or FIG. 10, the laser beam incidence optical device 11 uses the laser light L from the solid state laser oscillator 111 as divergent light to the incident end surface 102 of the optical fiber 101. And a condenser lens 13 to be incident. In addition, the distance between the condensing lens 13 and the incident end surface 102 of the optical fiber 101 is set by the said embodiment.

For example, the optical fiber 101 has a core diameter of 1000 µm, a cladding layer thickness of 50 µm, condensed by the condenser lens 13, exhibits divergence by passing through a condensing point, and a spread angle of 0.06 to The laser beam L whose cross section beam diameter is changed to 0.22 rad has a numerical aperture NA of 0.06 to 0.22 so as to be able to be incident efficiently.

The irradiation optical system 331 emits the pulsed laser light L, which is emitted from the exit end surface 106 of the optical fiber 101 of the laser beam incident optical device 11 and exhibits divergence once, the sample S or the sample S. The condenser lens 333 condenses the light into a predetermined range of the sample holding unit 399 holding. In addition, the characteristic of the condensing lens 333 is arbitrarily set according to the magnitude | size or shape of the sample S. FIG.

The fluorescence detection optical system (detection light guide optical system) 341 includes a condenser lens 343 for capturing fluorescence from the sample S positioned on the sample holding unit 399, and a fluorescence captured by the condenser lens 343. It has an optical fiber 345 for injecting into the spectrometer (monochromator) of a later stage.

The monochromator 351 is arbitrarily combined with a known spectrometer including a grating (diffraction grating), a wavelength filter, or the like, or a detection mechanism adapted to the characteristics of the sample S.

The imaging mechanism 361 receives light (fluorescence) having a specific wavelength extracted by the monochromator 351 and outputs an electric signal corresponding to the light intensity. For example, a known CCD camera or a photo multiplayer Alternatively, an FFT analyzer or the like is arbitrarily selected according to the characteristics of the sample S.

The timing adjustment mechanism 371 is, for example, a main control device of the pulse generator or the laser organic fluorescence analyzer 301, and output timing of the drive pulse supplied to the power supply device (not shown) of the solid state laser oscillator 111 and the CCD camera. For example, the operation timing of the gate-controlled I-CCD is controlled to capture the fluorescence generated from the sample S at a predetermined timing.

The data processing device 381 temporarily stores an image, a spectral spectrum, or the like output from the imaging mechanism 361, and stores the "element identification program", the "element determination program", or the imaging mechanism 361, which are stored in advance. The data of the sample S is analyzed or processed as a previous step in accordance with an algorithm or the like which adds predetermined processing to image data supplied from the same.

In the laser organic fluorescence analysis device 301 shown in FIG. 11, a driving pulse is generated at a predetermined timing by the main control unit 391 (in the example shown in FIG. 11, integrated with the timing adjustment device 371). On the basis of this drive pulse, a GP laser pulse laser light L having a peak power of 14 to 20 MW is output at a predetermined pulse width from the solid state laser oscillator 111.

The pulsed laser light L output from the solid state laser oscillator 111 is converted into divergence by the condensing lens 13, is efficiently incident on the optical fiber 101, and exits to the exit cross section 106 of the optical fiber 101. Is sent.

The laser light L emitted from the optical fiber 101 is irradiated onto the sample S by the condensing lens 333 of the irradiation optical system 331. As described above, the laser light L has a peak power of 14 to 20 MW, and is collected by the condenser lens 333 at, for example, a light having a diameter of several hundred μm and irradiated onto the sample S. The density is 80 GW / cm 2. As a result, the sample S is converted into plasma, and the fluorescence (spectrum containing fluorescence) inherent is emitted from each element present in the sample by the plasma energy.

This light emission (spectrum including fluorescence) is captured by the condensing lens 343 of the fluorescence detection optical system 341 and is incident on the monochromator 351 through the optical fiber 345.

Hereinafter, the spectral component etc. from the sample S main body are removed by the monochromator 351, and the spectrum peculiar to the element contained in the sample S is extracted.

The spectrum extracted by the monochromator 351 is photoelectrically converted by the imaging mechanism 361, supplied to the data processing unit 381, and an element included in the sample S in the data processing unit 381 is identified. For example, when the imaging mechanism 361 is an FFT analyzer, for example, the element contained in the sample S can be specified by the eyes of an operator.

In addition, since it is known to delay several microseconds-several hundred microseconds in plasma light emission (that is, irradiation of the laser beam L) until the fluorescence spectrum peculiar to the element contained in the sample S is obtained, timing adjustment mechanism 371 ( The operation of the imaging mechanism 361 is controlled by the main controller 391. For example, when the imaging mechanism 361 is a CCD camera with a gate, a predetermined delay (delay) is added to the measurement time, the gate is turned on at a predetermined timing, and only the necessary fluorescence spectrum can be measured.

In addition, in the laser organic fluorescence analyzer 301, pretreatment of a sample such as ICP emission analysis is almost unnecessary, and rapid measurement is possible. In addition, the laser organic fluorescence spectrometer 11 has little spatial (location or size) constraint when irradiating the laser light L to the sample, so that the unit is analyzed to determine the measurement object at any place where the measurement object is located. This becomes possible.

As described above, according to the laser organic fluorescence spectrometer 11, one or two condensing lenses (convex lenses) are used without the use of a beam expanding corimeter and a beam splitting array lens at a high magnification at a low cost. It can enter into an optical fiber with a field.

In addition, the laser beam incident optical apparatus 11 used in the process of laser organic fluorescence analysis, laser ablation, laser peening, etc. using the laser pulse L of the giant pulse oscillation system exceeding peak power 10 MW is also used. Small size and low price can be provided.

In addition, various deformation | transformation or a change are possible in the range which does not deviate from the summary in the said implementation step, without being limited to each said embodiment. In addition, each embodiment may be implemented in combination as suitably as possible, and the effect by a combination is acquired in that case.

According to the present invention, a material containing quartz uses an optical fiber having a step index type of 0.035 to 0.1 times the thickness of the clad with respect to the core diameter and a numerical aperture (NA) of 0.06 to 0.22. By injecting the laser light from the solid laser oscillator of the giant pulse oscillation method exceeding as a divergence property, it is possible to transmit the laser light without damaging the optical fiber, and it is possible to provide a low cost by eliminating the reduction in transmission efficiency and complicated adjustment. Can be.

Claims (6)

In a laser beam incident optical apparatus in which a laser beam from a solid laser oscillator of a giant pulse oscillation type with a peak power larger than 10 MW is incident on an incident end face of an optical fiber, A condenser lens for condensing laser light from the solid state laser oscillator, and An optical fiber position adjusting mechanism for providing an incidence end face of the optical fiber at a predetermined position behind the condensing point of the laser light by the condensing lens, and injecting the laser light into the incidence end face of the optical fiber with divergence; The optical fiber is a material containing quartz and has a step index type of 0.035 to 0.1 times the thickness of the clad with respect to the core diameter and the numerical aperture (NA) of 0.06 to 0.22. The method of claim 1, And the optical fiber has a core diameter of 500 to 1500 µm and a cladding thickness of 35 to 100 µm. The method according to claim 1 or 2, A laser beam incidence optical device, characterized in that a laser beam is incident on any one of 0.06 to 0.22rad at an angle of incidence to the incident end face of the optical fiber, and an angle of inherent limit to the optical fiber. The method according to claim 1 or 2, And the optical fiber position adjusting mechanism positions the incident end face of the optical fiber at 1 to 16 mm behind the condensing point of the laser beam by the condensing lens. The method of claim 4, wherein And the optical fiber position adjusting mechanism is provided with an incident end face of the optical fiber 1.5 to 5 mm behind the focusing point of the laser beam by the condensing lens. The method according to claim 1 or 2, And a translucent mirror provided between the solid state laser oscillator and the condenser lens, and observation means for observing an optical image of an incident cross section of the optical fiber through the translucent mirror.

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