1277730 (1) 九、發明說明 【發明所屬之技術領域】 本發明係關於使尖鋒功率爲10MW以上之巨脈波振盪 方式之雷射光安定地入射至光纖之雷射光入射光學裝置。 > 【先前技術】 傳統上，雷射剝蝕、雷射誘導螢光分析、或雷射擊等 • 時，係使用利用尖鋒功率爲數MW以上之巨脈波（GP)振盪 方式之固體雷射振盪器所得到之雷射光。 此種功率較大之雷射光之傳送，係利用例如以石英爲 , 材質之階變折射型光纖。 其次，以石英爲材質之光纖在連續振盪（CW)雷射光時 ，至數kw爲止都可傳送。然而，脈波期間爲數nsec程度之 短脈波雷射光且脈波能超過數十mJ之雷射光，尖鋒功率會 達到數MW以上。 ® 相對於連續振盪光之脈波能，短脈波雷射光之脈波能 大約爲100倍以上，且尖鋒功率密度亦爲極高之ΙίΓ1〜 l.OGW/cm2級。因此，因爲電子突崩現象或多光子吸收所 導致之損害，會使光纖被破壞而無法傳送雷射光。此外， ♦[Brief Description of the Invention] [Technical Field] The present invention relates to a laser light incident optical device in which a laser beam of a giant pulse wave oscillation mode in which a peak power is 10 MW or more is stably incident on an optical fiber. > [Prior Art] Conventionally, laser ablation, laser-induced fluorescence analysis, or thunder shots, etc., use a solid-state laser using a giant pulse wave (GP) oscillation method with a peak power of several MW or more. The laser light obtained by the oscillator. The transmission of such a large-powered laser light is, for example, a step-change optical fiber made of quartz. Secondly, an optical fiber made of quartz can be transmitted up to several kw in continuous oscillation (CW) laser light. However, during the pulse period, the short-pulse laser light of a few nsec and the pulse wave energy exceeds the tens of mJ of laser light, and the peak power will reach several MW or more. ® Compared with the pulse wave energy of continuous oscillation light, the pulse energy of short pulse laser light is about 100 times, and the power density of the spike is also extremely high. Γ1 to l.OGW/cm2. Therefore, the damage caused by the electron sag phenomenon or multiphoton absorption causes the optical fiber to be broken and the laser light cannot be transmitted. In addition, ♦
有報告指出，石英（石英玻璃）材之脈波雷射光導致受損之 ~ 臨界値，在脈波期間約5nsec時約爲100GW/cm2(「LASER HANDBOOK」、雷射學會著、OHMSHA、pp.463、473)。 因此，具有空間及時間之分布之雷射光，亦即短脈波 雷射光，利用光纖傳送時之實用限度，例如，以使脈波期 -5- (2) 1277730 間5nsec、振盪頻率10Hz之Nd: YAG雷射光入射至芯徑爲 1mm之光纖時爲例來進行說明的話，脈波能爲30〜4〇1111程 度，亦即，尖鋒功率爲6〜8MW(相對於芯徑之尖鋒功率密 度爲 〇·76 〜1 .OGW/cm2)。 因此，以現狀而言，欲傳送10MW以上之短脈波雷射 ~ 光時，光纖之內部會受損，實質上，無法傳送雷射光。亦 即，以利用光纖實施傳送爲前提之固體雷射振盪器之雷射 # 光，主要係連續振盪（CW)雷射光，尖鋒功率超過數MW之 短脈波雷射光，難以利用光纖來進行傳送。 此外，爲了利用光纖傳送雷射光而使雷射光入射至光 纖之實例，有報告指出應使雷射光及光纖獲得空間之匹配 。此時，爲了使雷射光對光纖之入射口徑限制於光纖之芯 徑以內且限制於光纖之數値孔徑N A以內，而有使雷射光 聚光並入射至光纖之入射端面之報告（「雷射加工技術」 、川澄博通著、日刊工業新聞社、pp. 34〜37)。 ® 然而，實施高尖鋒功率之雷射光之聚光並入射至光纖 ，在光纖之內部會發生雷射光之部份收斂，光纖之特定部 份之功率密度會較高，而使光纖之內部受損。此外，亦有 以較淺之雷射光之聚光程度來防止光纖內部發生雷射光收 0 斂之方法，然而，尖鋒功率超過數MW時，難以完全防止 ~ 光纖內部之雷射光收斂。 此外，非專利文獻2之報告指出，光纖內部之雷射光 收斂導致光纖受損之原因，係因爲尖鋒功率較高之雷射光 之電場強度亦較高，光纖之石英材之部份折射率會因爲較 -6 - (3) 1277730 強之電場而改變，而發生一種透鏡效果所導致之自聚焦。 此外，爲了傳送尖鋒功率超過10MW之雷射光，可以 採用以下之方法，亦即，將經過放大之雷射光入射至陣列 狀分裂透鏡進行空間之數十分割後，再利用配設於陣列後 * 方之聚光透鏡使全部分割數入射至光纖。 爲了傳送尖鋒功率超過10MW之雷射光，將經過放大 之雷射光入射至陣列狀分裂透鏡進行空間之數十分割後， • 再利用配設於陣列後方之聚光透鏡使全部分割數入射至光 纖之方法，因爲陣列狀配列之分裂透鏡可製造之尺寸爲 2mm程度，例如，爲了得到81分割（ = 9X9)之分割數，必須 ^ 使2 mm四方之凸透鏡成爲縱橫9個並列之18mmX 18mm之分 裂透鏡群（蠅眼透鏡）。然而，分裂透鏡群有十分昂貴之問 題，亦即，蠅眼透鏡有十分昂貴之問題。 此外，例如，利用縱向倂列9個寬度2mmX長度18mm 之寬度2mm方向具有曲率之柱面透鏡的橫向分裂透鏡群、 ® 及橫向倂列9個同樣透鏡之縱向分裂透鏡群之2個透鏡群組 成分割數81 ( = 9X9)，亦可獲得與上述蠅眼透鏡相同之效果 。然而，透鏡之成本雖然可降低少許，卻有構件點數及用 以保持之構造構件等增加而使總成本增加之問題。 此外，使用蠅眼透鏡時，即使透鏡之大小爲分割數 8 1=9X9之18mm四方，雷射光之剖面尺寸（束徑）必須放大 爲一邊爲1 8mm之正方形之對角線之約26mm ° 此外，使用蠅眼透鏡時，除了上述之成本增大以外， 因爲各透鏡之境界部份之反射損失所造成之影響’而有傳 -7- 1277730It has been reported that the pulsed laser light of quartz (quartz glass) material causes damage to the critical threshold, which is about 100 GW/cm2 at about 5 nsec during the pulse wave ("LASER HANDBOOK", Laser Learning, OHMSHA, pp. 463, 473). Therefore, the laser light having a spatial and temporal distribution, that is, the short-pulse laser light, is a practical limit when transmitting by using an optical fiber, for example, a pulse period of -5 - (2) 1277730 between 5 nsec and an oscillation frequency of 10 Hz. : When YAG laser light is incident on an optical fiber with a core diameter of 1 mm as an example, the pulse wave energy is 30 to 4 〇 1111, that is, the peak power is 6 to 8 MW (relative to the tip power of the core diameter). The density is 〇·76 〜1 .OGW/cm2). Therefore, in the current situation, when a short pulse laser light of 10 MW or more is to be transmitted, the inside of the optical fiber is damaged, and substantially no laser light can be transmitted. That is, the laser light of the solid-state laser oscillator based on the transmission of the optical fiber is mainly continuous oscillation (CW) laser light, and the short-pulse laser light with a sharp power exceeding several MW is difficult to use the optical fiber. Transfer. In addition, in order to use the optical fiber to transmit laser light and to cause the laser light to be incident on the optical fiber, it has been reported that the laser light and the optical fiber should be spatially matched. At this time, in order to limit the incident aperture of the laser light to the fiber to within the core diameter of the optical fiber and to be within the aperture NA aperture NA of the optical fiber, there is a report that the laser light is condensed and incident on the incident end surface of the optical fiber ("Laser Processing Technology", Chuan Chengbo Tong, Journal Industry News Agency, pp. 34~37). ® However, when the high-point power laser light is concentrated and incident on the fiber, part of the laser light will converge inside the fiber, and the power density of a specific part of the fiber will be high, and the inside of the fiber will be affected. damage. In addition, there is also a method of preventing the occurrence of laser light absorption inside the optical fiber by the degree of concentration of the shallow laser light. However, when the peak power exceeds several MW, it is difficult to completely prevent the laser light inside the optical fiber from converging. In addition, the report of Non-Patent Document 2 indicates that the laser light inside the optical fiber converges to cause damage to the optical fiber, because the electric field intensity of the laser light having a high peak power is also high, and the partial refractive index of the quartz material of the optical fiber is Because of the stronger electric field than -6 - (3) 1277730, a self-focus caused by a lens effect occurs. In addition, in order to transmit laser light having a peak power exceeding 10 MW, the following method may be employed, that is, the amplified laser light is incident on the array split lens to perform tens of divisions of the space, and then used after being arranged in the array* The square condenser lens causes all the division numbers to be incident on the optical fiber. In order to transmit laser light with a spike power exceeding 10 MW, the amplified laser light is incident on the array split lens to divide the space into tens of parts, and then the concentrating lens disposed behind the array is used to make all the division numbers incident on the optical fiber. The method is because the size of the split lens of the array arrangement can be made to a size of about 2 mm. For example, in order to obtain the number of divisions of 81 divisions (= 9×9), it is necessary to make the 2 mm square convex lens into 9 vertical and horizontal juxtapositions of 18 mm×18 mm. Lens group (flying eye lens). However, the split lens group is very expensive, that is, the fly-eye lens is very expensive. Further, for example, two lens groups of nine longitudinal split lens groups having a cylindrical lens having a curvature of 2 mm in a width of 2 mm and a cylindrical lens having a curvature of 2 mm in the longitudinal direction are vertically aligned, and nine longitudinal split lens groups of the same lens are used in the lateral alignment. The same effect as the above-mentioned fly-eye lens can be obtained by dividing the number 81 (= 9X9). However, although the cost of the lens can be reduced a little, there is a problem that the number of components and the number of structural members used to maintain increase the total cost. In addition, when a fly-eye lens is used, even if the size of the lens is 18 mm square of the division number 8 1=9X9, the cross-sectional dimension (beam diameter) of the laser light must be enlarged to about 26 mm ° of the diagonal of the square of one side of 18 mm. When using a fly-eye lens, in addition to the above-mentioned increase in cost, because of the influence of the reflection loss of the boundary portion of each lens, there is a transmission -7-1277730
送效率降低10〜20%程度之問題、以及必須調整 之位置之問題。 【發明內容】 本發明之目的，係以較便宜之成本提供可在 受損的情形下傳送雷射光，且傳送效率不會降低 行複雜調整之將尖鋒功率大於10MW之巨脈波振 # 固體雷射振盪器之雷射光入射至光纖之入射端面 入射光學裝置。 本發明係用以將尖鋒功率大於10MW之巨脈 _ 式的固體雷射振盪器之雷射光，入射至光纖之入 雷射光入射光學裝置，具有：使從前述固體雷射 雷射光聚光的聚光透鏡；及於較此聚光透鏡所成 聚光點後方之特定位置，設置光纖之入射端面， 射光呈發散性入射至光纖之入射端面的光纖位置 • ;且，前述光纖係含有石英之材質，對於芯徑之 爲0.03 5〜0.1倍，數値孔徑NA爲0.06〜0.22之階 者。 其次，採用含有石英之材質，對於芯徑之纖 0.03 5〜0.1倍，數値孔徑NA爲0.06〜0.22之階變 ~ 纖，使尖鋒功率超過10MW之巨脈波振盪方式之 振盪器之雷射光呈發散性入射至該光纖之入射端 光纖不會受損的情形下傳送雷射光。 蠅眼透鏡 光纖不會 亦無需進 盪方式的 之雷射光 波振盪方 射端面之 振盪器之 雷射光之 使前述雷 調整機構 纖殼厚度 變折射型 殻厚度爲 折射型光 固體雷射 面，可在 (5) 1277730 【實施方式】 以下，參照圖面，針對本發明之實施形態進行說明。 第1圖至第9圖係說明雷射光入射光學裝置之實施形態 〇 如第1圖所示，雷射光入射光學裝置11係將尖鋒功率 大於10MW之巨脈波振盪方式之固體雷射振盪器（雷射裝置 )111所產生之脈波雷射光，射入特定之芯徑及纖殼厚度之 拳光纖101之入射端面102，可獲得光纖101不會受損且只有 少許損失之入射者。 雷射光入射光學裝置11具有：用以實施固體雷射振盪 . 器111提供之剖面束徑爲特定大小之雷射光L之聚光之聚光 透鏡1 3 ;及用以使聚光透鏡1 3及光纖1 0 1之入射端面1 02間 之距離維持於一定距離之光纖位置調整機構1 5。 聚光透鏡13係便宜且容易取得之凸透鏡，只要可承受 固體雷射振還器111射出之雷射光L入射時所產生之熱之材 ® 質及形狀，並無特別限制。此外，必要時，聚光透鏡1 3亦 可以爲由2片薄透鏡組合而成之合成透鏡。 光纖位置調整機構1 5具有：用以保持聚光透鏡1 3之聚 光透鏡保持部1 6、保持光纖1 0 1之光纖保持部1 7、用以調 整相對於聚光透鏡保持部1 6所保持之聚光透鏡1 3之光纖 ‘ 1 0 1之入射端面1 02之相對間隔之調整部1 8。該調整部1 8可 將光纖101調整於使光纖之入射端面102位於聚光透鏡 1 3之焦點位置，亦即，將光纖1 〇 1調整於使光纖1 〇 1之入射 端面1 02位於聚光點A後方之特定距離之位置。此外，調整 (6) 1277730 部1 8可利用手動、或由馬達及齒輪機構等所構成之移動機 構等，而任意設定與光纖保持部1 7之聚光透鏡保持部1 6間 之距離。 此外，使光纖101之入射端面102位於聚光透鏡13之焦 點位置，亦即，使光纖101之入射端面102位於聚光點A後 _ 方特定距離之特定位置，可使入射至光纖101之入射端面 1 02之雷射光L呈現發散性。亦即，使光纖1 0 1之入射端面 • 1 02及聚光透鏡1 3間之距離獲得最佳化，而使入射至光纖 101之入射端面102之雷射光L呈現發散性，入射至光纖1〇1 內之雷射光L會在光纖1 0 1內之特定位置呈現收斂’結果， 光纖101之特定位置之尖鋒功率之密度會昇高，而可抑止 光纖1 〇 1之受損。 此外，聚光透鏡13及光纖101之入射端面102間之位置 關係的最佳化，在雷射光L之尖鋒功率密度爲特定大小時 ，例如，超過l〇〇GW/cm2，可防止聚光透鏡13之聚光點A • 所發生之空氣分解之影響而使雷射光L無法安定傳送、及 發生空氣分解而產生之電漿到達光纖101之入射端面102而 使光纖101之入射端面102受損之情形。 參照第2圖至第4圖進行具體4說明，然而，聚光透鏡 13之用以實施雷射光L聚光之聚光點A及光纖101之入射端 ’ 面1 02間之距離爲例如1〜1 〇數mm。 亦即，若雷射光L之脈波能爲E[Wt]、雷射光L之脈波 期間爲t[sec]、發生空氣分解之臨界値之尖鋒功率密度爲 Pth [Wt/cm2]、利用聚光透鏡13聚光之雷射光L之聚光徑（半 -10- (7) 1277730 徑）爲ω [mm]，則聚光徑ω如下式所示。 ω=/" [E/ (P t h X π X t)] …⑴ 此外，若傳送之雷射光L之尖鋒功率爲P [W ] ’貝）式 可以下式表示。 [P/ (P t ΙιΧπ)] …⑵ 另一方面，若入射至聚光透鏡13之雷射光[之發散角 爲Θ】（半角）[rad]、聚光透鏡13之焦點距離爲f[mm]，則聚 光徑（半徑如下式所示。 f X θ ! = ω …（3) 此外，若雷射光L之剖面束徑（口徑）爲r(半徑）[mm]、 固體雷射振盪器111至聚光透鏡13之距離爲Di [mm] ’則可 利用聚光透鏡13之焦點距離f[nim]及入射至聚光透鏡13之 雷射光L之發散角0!(半角）利用下式求取聚光透鏡13聚光之 雷射光L之聚光角（亦即，聚光透鏡13聚光之雷射光L入射 至光纖101時之入射角）θ2(半角）[rad]。 02 = -r/f+ (l-Dx/f) ΧΘ1 …⑷ 因此，利用（2)〜（4)式，透鏡焦點距離f、雷射口徑（ 剖面束徑）r、入射至光纖101之雷射光L之入射角θ2、固體 雷射振盪器111至聚光透鏡13之距離Di、雷射光L之尖鋒功 率P、以及發生空氣分解之臨界値之尖鋒功率密度Pth具有 下式之關係。 f = [― (r — α) +/" {(r—a) 2—4X01XaXD1}] (2X Θ 2) :a [P/ (P t h X π)] …（5) 利用（5)式可求取聚光透鏡13之聚光點A不會發生空氣 -11 - (8) 1277730 分解之聚光透鏡13之焦點距離f。亦即，因爲可利用（5)式 求取聚光透鏡13之焦點距離f且可以利用（3)式及（1)式或（2) 式求取入射聚光透鏡13之雷射光L之入射角（亦即’發散角 )θ!，故只要將入射至聚光透鏡13之雷射光L之入射角設定 成Θ !，則可在不會發生空氣分解之情形下，使雷射光L有 W 效率地入射光纖1 0 1。 其實例上，例如，雷射光L之口徑（直徑）爲2〜1 3mm之 φ 範圍、聚光透鏡1 3及固體雷射振盪器Π 1間之距離在1 0〜 500mm之範圍變化時，可利用之聚光透鏡13之焦點距離f之 計算結果如第3圖所示，入射至聚光透鏡13之雷射光1"之入 射角（發散角）θι2計算結果如第4圖所示。 例如，若雷射光L之口徑爲r==3mm(直徑6mm)、固體雷 射振盪器111至聚光透鏡13之距離〇1爲01 = 10〇111111、從聚光 透鏡13入射至光纖101之雷射光L之入射角（聚光角）爲 e2 = 0.15rad、尖鋒功率爲P = 2〇MW、發生空氣分解之臨界値 肇之尖鋒功率密度爲Pth=100GW/cm2’可求取聚光透鏡13之 焦點距離f及入射至聚光透鏡1 3之雷射光之入射角θ 1分別 爲 f=24.9mm、e^SJmradC全角爲 6.4mrad)。 例如，將依據實測設定之聚光透鏡1 3之焦點距離（代 入（4)式，必須在光纖101之入射角〇2大小不超過雷射光[入 _ 射之光纖1 01之NA之範.圍，設定聚光透鏡1 3之焦點距離f( 參照第3圖）。 亦即，第3圖係圖示改變入射至光纖101之雷射光[之 聚光角（對光纖1〇丨之入射角）㊀2時發生空氣分解之聚光透鏡 -12- (9) 1277730 1 3之焦點位置，然而，改變雷射光L之口徑（剖面束徑）及 聚光透鏡13之設置位置’結果，下限値爲〇.〇6rad程度。 然而，因爲雷射光L之質（空間分佈及波前等）及聚光 透鏡1 3之光行差之影響等，有時實際聚光徑會大於理想聚 光徑。 • 此時，應使以（2)式求取之不會發生空氣分解之聚光徑 、及實際之聚光徑相等爲止’縮短聚光透鏡1 3之焦點距離 φ f，並放大雷射光L入射至光纖101時之數値孔徑NA(參照第 4圖）。此外，由雷射光L入射至光纖101時之數値孔徑NA、 及對適合發散入射方式之聚光透鏡1 3之入射角Θ !之關係’ 入射至光纖101之雷射光L之入射角θ2之下限値應大於 0 · 0 6rad 〇 此外，聚光透鏡1 3之聚光點A及光纖1 0 1之設置位置（ 入射端面102之位置）方面，若聚光點A之聚光徑（半徑）爲 ω [mm]、聚光點A及光纖101之入射端面102間之距離爲 # Lf[mm]、雷射光L入射至光纖101之芯時之剖面束徑（亦即 ，入射徑）爲Wi(直徑）[mm]、雷射光L入射至光纖101時之 入射角爲θ2(半角）[rad]，則可以下式表示。 L f = (Wi —2 〇>) / (2 X t a η 0 2)…（6) 利用（6)式，將聚光透鏡13之焦點位置（聚光點A)、及 光纖101之入射端面102間之距離Lf設定成例如0.25〜16mm 。具體而言，若入射至光纖101之芯之雷射光L之入射徑之 最小値爲例如420 μιη (利用光纖1〇1傳送之雷射光L之功率， 亦即，依據能量或尖鋒功率而決定之芯徑之最小値），此 -13- 1277730 (ίο) 外，若最大値爲例如容易取得之光纖1 〇 1之最大芯徑 1 5 00μηι 之 90% 之 1 3 5 0 μπι ，且 Wi = 4 2 0 〜1 3 5 Ο μ m 、 ω =1 00μιη(尖鋒功率30MW、發生空氣分解之臨界値 100GW/cm2之最小聚光徑）、θ2 = 〇·〇6〜0.22rad(如後面所述 )，計算適當之Lf範圍，則Lf之範圍爲如上面所述之〇·25〜 1 6 m m之範圍。 實用上，光纖101之入射端面102之可設定之最小距離 鲁 爲1 mm，聚光點A至光纖101之入射端面102之距離設定成1 〜16mm之範圍。然而，距離Lf若爲必要以上，則未入射 至光纖101之雷射光L亦增多，故其上限値應爲例如l〇mm 程度。 聚光透鏡13及光纖101之入射端面102間之距離Lf，最 好依據實際組合調整結果，而大致爲1.5〜5mm之範圍。 其次，從光纖101之芯徑及纖殼層之厚度，針對可入 射至光纖1〇1之雷射光L之強度進行說明。 # 如上面說明所示，使利用巨脈波振盪方式所得到之尖 鋒功率超過數MW(尖鋒功率密度爲lfT1〜l.〇GW/cm2)之雷 射光L入射至光纖1 0 1時，光纖1 〇 1會受損而無法傳送雷射 光L〇 因此，若只利用以第1圖、第2圖至第4圖進行說明之 ‘ 聚光透鏡13及光纖101之入射端面102間之距離Lf、雷射光 L入射至聚光透鏡13時之入射角Θ!、以及聚光透鏡13聚光 之雷射光L入射至光纖101之入射端面1〇2時之聚光角θ2 ’ 則光纖1 〇 1可能受損。 -14- (11) 1277730 以下，針對適當之光纖101之構造特徴及雷射光L之傳 送特性進行說明。 第5圖係實驗結果，係使脈波期間爲5nsec、雷射光l 之口徑（剖面束徑）爲7 0 0 μιη之雷射光L，利用第2圖進行說 明之發散入射方式及一般收斂入射方式，以入射角0.02i*ad 入射至芯徑爲ΙΟΟΟμηι、纖殻層厚度爲50μπι、數値孔徑ΝΑ 爲0.2之光纖101之實驗結果。 ί 由第5圖可知，收斂入射方式時，傳送能量30mJ(尖鋒 功率6MW)會導致光纖101受損。相對於此，應用發散入射 方式時，確認傳送能量7〇mJ(尖鋒功率14MW)亦不會導致 光纖1 〇 1受損。 此外，光纖1 〇 1之構造特徴上，係因爲芯材質之純度 較高而不易因爲雷射光L之能量而受損之如第6圖所示構造 之階變折射型石英材質。光纖1 0 1係由芯1 03、形成於該芯 103周圍之纖殻104、以及形成於纖殼104周圍之被覆層105 籲所構成。 此外，纖殼104之厚度方面，大於特定厚度時，彎曲 光纖1 〇 1時很容易因爲機械應力而導致破損，相反的’纖 殼104之層厚若太薄，則入射數MW電平之尖鋒功率之雷射 光L時，從芯103漏出至纖殼104之雷射光L會導致光纖1〇1 破損。 此外，纖殻1 〇 4之厚度應小於芯1 0 3徑，例如’爲芯 1 0 3徑之0 · 0 5〜0.1倍程度。因此’外漏至纖殻1 0 4之少許雷 射光L之尖鋒功率密度亦比芯1 〇 3之部份高出1 〇倍程度。此 -15- (12) 1277730 外，纖殼104及芯103之境界部之通常之雷射光L之傳送所 造成之繞射影響有點類似定波之存在，因爲部份尖鋒功率 會較高，故減少纖殻104之厚度時有其下限値。 第7圖係實驗結果，係改變纖殼104之厚度，使脈波期 間爲5nsec、口徑（剖面束徑）爲700μιη之雷射光L，利用第2 ’ 圖進行說明之發散入射方式，以入射角〇.〇2rad入射至芯徑 爲ΙΟΟΟμηι、數値孔徑NA爲0.2之光纖101之實驗結果。 # 由第7圖可知，隨著纖殼104之厚度增加，可傳送較大 之能量。亦即，由第7圖得知，纖殼1〇4之厚度爲20μηι時’ 40mJ(尖鋒功率8MW)爲其界限，然而，若纖殼104之厚度 爲50μιη，則70mJ(尖鋒功率14MW)時，光纖101亦不會受損 〇 因此，由第7圖得知，爲了可以傳送尖鋒功率10MW以 上之雷射光L，纖殻104之厚度必須爲35μηι以上。此外， 纖殼104之厚度若大於100 μπι，則會變硬變脆，不易彎曲光 # 纖101，且彎曲半徑變大，故應爲ΙΟΟμπι以下。 另一方面，因爲與利用光纖1 0 1傳送之雷射功率密度 之關係，對芯徑設定著下限値，然而，芯徑之上限値如利 用第8圖進行之以下說明所示，例如，可以相對於入射之 雷射光L之口徑（剖面束徑）之比例來進行判斷。 ~ 第8圖係實驗結果，係使纖殻104之厚度保持一定，並 使改變入射至光纖101時之雷射光L口徑（剖面束徑）之雷射 光L入射至改變芯徑之光纖101之實驗結果。 由第8圖可知，芯徑及入射之雷射光L之剖面束徑（口 -16- (13) 1277730 徑）之間即使有差異，若纖殻】〇4之厚度相同’則該範圍之 入射口徑可以傳送同樣爲1 0MW之尖鋒功率之雷射光L。 亦即，如第8圖所示，爲了傳送尖鋒功率10MW以上， 聚光徑必須爲420 μηι以上。因此，若考慮相對於聚光徑具 有8 0%程度之寬裕度，則芯徑應爲5 00μιη以上。 > 此外，如第9圖所示，依據改變雷射光L對光纖1 〇 1之 入射角θ2利用發散入射方式使口徑（剖面束徑）爲700 μιη、 # 脈波期間爲5nseC之雷射光L入射至芯徑爲ΙΟΟΟμπι、纖殼 104厚度爲50μηι、數値孔徑ΝΑ爲0.2之光纖101時之實驗結 果，爲了使尖鋒功率爲15MW(能量換算爲80mJ)前後之雷 射光L以低損失之方式入射，必須爲〇.〇6rad程度之入射角 θ2。此外，隨著入射角θ2之增大，可傳送之能量會愈大， 入射角θ2爲0.12rad程度時，可以傳送尖鋒功率爲20MW之 雷射光L。 另一方面，依據因爲芯103及纖殼104之境界部之繞射 # 而在光纖101內傳送入射至光纖1〇1之雷射光L，光纖101存 在雷射光L入射時之數値孔徑N A之上限。亦即，光纖1 0 1 之數値孔徑NA若太小，則發散入射方式時，對光纖101之 入射角θ2會變小而無法得到充分之效果。因此，如前面之 說明所示，入射至光纖1〇1之雷射光L在光纖101之內部之 特定位置會發生收斂，而導致光纖1 〇 1受損。 此外，光纖101之數値孔徑ΝΑ若較大，則從光纖101 射出之雷射光L之角度會增大，故以使雷射光L以特定剖面 束徑照射對象物爲目的所使用之光學系亦會增大。例如， -17- (14) 1277730 使用折射率η爲n= i . 5程度之玻璃材料所構成之1片之平凸 透鏡’爲了以1以下之成像倍率使光纖1 0 1射出之雷射光L 聚# Μ對象物，從相對於透鏡曲率之透鏡口徑之製作極限 觀點而言’光纖101之數値孔徑ΝΑ應爲ΝΑ与0.25rad以下。 比匕外’因爲纖殻104之厚度大於一般光纖之纖殻厚度 ’若考慮前述光纖1〇1之機械強度（抗彎曲性）之降低，若芯 103之折射率爲ηι、纖殼1〇4之折射率爲n2，則數値孔徑να _ 可以下式來規定。 ΝΑ==λΓ [(Πι) 2- (η2) 2] 此外，爲了增大光纖101之數値孔徑ΝΑ，降低纖殼 104層之折射率的方法被廣泛利用，增加摻雜於纖殼104層 之氟及硼之量會使其變脆而容易折斷。此外，若考慮利用 第7圖求取之纖殻1〇4厚度，則依據上述照射光學系所規定 之數値孔徑ΝΑ之上限應爲更低之大致0.22rad。 因此，光纖101之數値孔徑NA之上限爲0.22。此外， • 因爲上限値會依據實際使用之光纖1 〇 1構造特徴及物性而 改變，故發散入射方式時，光纖1 ο 1可設定之數値孔徑N A 之上限不一定爲0.22，而爲依據光纖101構造特徴及物性 所規定之數値。 此外，由芯徑不受利用第3圖及第4圖說明之聚光透鏡 ~ 1 3之焦點位置及入射至光纖1 〇 1之雷射光L之入射角θ2、及 利用第8圖說明之光纖1 〇 1之芯徑及入射至光纖1 〇 1之雷射 光L之口徑（剖面束徑）之限制之實驗結果、以及利用第9圖 說明之能量傳送能力之確認結果’確認下限値只要與雷射 -18- (15) 1277730 光L·之入射角Θ2相等即可，故數値孔徑NA = 0.06〜〇.22rad 〇 由以上之說明可知，可以發散入射方式傳送20MW(尖 鋒功率密度爲1 〇 〇 G W / c m2)程度之巨脈波振盪方式之雷射光 L之光纖1〇1，應介於 ' 芯 103 徑爲 5 00 〜1 500μηι、 纖殼104厚度爲35〜ΙΟΟμηι、 • 光纖101之數値孔徑ΝΑ爲0.06〜0_22 之範圍。 此外，雷射光L入射至光纖101之雷射光L之入射角θ2 ，應爲雷射光入射光學裝置11之構成所容許之範圍內之較 大角度。 由以上可知，爲了安定傳送尖鋒功率爲10MW以上之 脈波雷射光L、或尖鋒功率爲10MW以下之短脈波雷射光L ，例如，光纖101之數値孔徑ΝΑ = 0·2時，入射至光纖101之 Φ 雷射光L之入射角θ2應爲至0.2r ad (光纖101之數値孔徑ΝΑ 之上限値）爲止之値。 其次，針對雷射光入射光學裝置1 1之具體實例進行說 明。 此外，以下所示之數値，係第9圖之前所說明之尖鋒 > 功率爲22MW之雷射光L之資料，例如，在以下之條件對階 變折射型之石英材質之光纖1 0 1傳送利用巨脈波振盪方式 之Nd : YAG雷射振盪器之固體雷射振盪器111之脈波期間 爲5nsec、脈波能爲110mJ(尖鋒功率爲22MW=ll〇niJ/5nsec) -19- (16) 1277730 、直徑6 m m之雷射光L之結果。 對聚光透鏡13之入射角（入射發散角WfUmrad(半 角） 雷射口徑（剖面束徑）r(半徑）=3 mm(直徑6mm) 聚光透鏡13及固體雷射振盪器111之間隔D^SOOmm 聚光透鏡1 3之焦點距離f= 3 1 m m 光纖101之芯徑ΙΟΟΟμπι • 纖殼104之厚度50μιη 數値孔徑NA = 0.2rad 對光纖101之雷射光L之入射角θ2 = 0.13 rad(半角） 聚光透鏡13之聚光點A至光纖101之入射端面1〇2之 距離Lf=2mm 對光纖1 〇 1之雷射光L之入射口徑（剖面束徑）： 700μιη(直徑） 此外，利用上述數値以（4)式求取前面說明之對光纖 # 101之入射角θ2時，亦即，利用對聚光透鏡13之入射角（入 射發散角）eiM.Smrad、聚光透鏡13及固體雷射振盪器111 之間隔D ! = 6 0 0 m m、雷射入射口徑（剖面束徑）r (半徑）=3 m m 、以及聚光透鏡13之焦點距離f=3 1mm以（4)式求取前面說 _ 明之對光纖1〇1之入射角θ2時，入射角02 = 〇.13rad，確認本 •發明可利用之光纖1〇1之數値孔徑之範圍爲ΝΑ = 0·06〜 〇.22rad之範圍。 此外，將發散入射方式與使用分割成ηιχη之複合透鏡 之眾所皆知之實例進行比較，因爲可消除各透鏡之境界部 -20 - (17) 1277730 份所產生之反射損失之影響，聚光透鏡1 3之入射側對光纖 1 0 1之射出側之傳送效率可提高大約1 〇%。 此外，因爲發散入射方式可減少光學要素之個數，故 可降低雷射光入射光學裝置Π整體之成本。 因此，採用含有石英之材質、對於芯徑之纖殻厚度爲 + 0.03 5〜0.1倍、數値孔徑NA爲0.06〜0.22之階變折射型光 纖101，使尖鋒功率超過10MW之巨脈波振盪方式之固體雷 φ 射振盪器1 1 1之雷射光L以呈發散性方式入射至該光纖1 0 1 之入射端面1 02，可在光纖1 0 1不會受損之情形下傳送雷射 光L，且傳送效率不會降低，此外，無需複雜之調整且更 價格更爲低廉。 其次，參照第1 〇圖，針對雷射光入射光學裝置1 1之其 他實施形態進行說明。 此外，與利用第1圖至第9圖所示之實施形態進行說明 之構成相同或類似之構成，附與相同符號並省略詳細說明 •。 雷射光入射光學裝置11具有：用以對固體雷射振盪器 1 1 1之雷射光L附與特定聚光性之聚光透鏡1 3 ;用以使聚光 透鏡1 3及光纖1 0 1之入射端面1 02間之距離維持於一定距離 ~ 之光纖位置調整機構1 5 ;配設於固體雷射振盪器1 1 1及聚 β 光透鏡1 3之間，用以從固體雷射振盪器Π 1朝聚光透鏡1 3 之雷射光L分離出光纖101之入射端面102反射之反射雷射 光（戻雷射光）R之半透明鏡之光束分岐器（抽樣鏡）3 1 ;用以 受取該光束分岐器31分離之反射雷射光R並對應該強度輸 -21 - (18) 1277730 出電性訊號，例如，具有光電變換元件之觀測手段之CCD 攝影機32。此外，CCD攝影機32及光束分岐器31之間，配 設著使利用光束分岐器31分離之反射雷射光R在CCD攝影 機3 2之圖上未標示之受光面上成像之成像透鏡3 3，此外.， 必要時，可在成像透鏡33及CCD攝影機32之間配設用以調 整入射至CCD攝影機32之反射雷射光R強度之衰減濾光器 等光量調整裝置3 4。 ® CCD攝影機32會依據入射至光纖101之入射端面102之 雷射光L之入射位置之資訊形成圖像。因此，依據CCD攝 影機32所得到之入射端面102之圖像，例如，以例如未詳 述之移動機構移動光纖位置調整機構1 5之光纖保持部1 7之 位置，可將光纖1 〇 1之入射端面1 02之位置及成像透鏡1 3間 之距離設定成利用第2圖〜第4圖說明之期望位置。 此外，若聚光透鏡1 3之焦點距離爲fi、成像透鏡33之 焦點距離爲f 2、光纖1 〇 1之入射端面1 0 2至成像透鏡1 3之距 馨離爲a，且應設置CCD攝影機32之位置（至光纖1〇1之入射立而 面102之距離）爲b、聚光透鏡13及成像透鏡33間之距離爲d 、倍率爲m，則可分別以下述諸式表不° b = (1+m) X f 2—m2x a ··· (11) m= f 2/ f i …（1 2) d=f 2+f ! …（13) 因此，利用（1 2 )式決定聚光透鏡1 3之焦點距離fl及欲 觀測之像倍率m之成像透鏡33之焦點距離h，其次，利用 (1 3 )式及（1 1)式決定2個透鏡間之間隔（距離d)及C C D攝影機 32之位置等，故可對光纖101之入射端面102進行觀測。 -22- (19) 1277730 例如，若聚光透鏡1 3之焦點距離爲f! = 3 1 mm，以使光 束分岐器（抽樣鏡）3 1相對於固定雷射振盪器1 1 1朝聚光透鏡 13之雷射光L之主光線呈45度之角度進行配置，並使CCD 攝影機3 2位於成像透鏡3 3之後方特定位置，來自光纖1 〇 1 之入射端面102之反射雷射光R在CCD攝影機32形成圖像， 可利用圖上未標示之TV監視器進行觀測，同時實施入射調 整。 # 此外，使像倍率m成爲大約3倍時，若利用（12)式使成 像透鏡33之焦點距離成爲例如f2 = l 00mm，則利用（13)式求 取之聚光透鏡1 3及成像透鏡3 3間之距離d大約爲1 3 1 mm。 此外，因爲聚光透鏡13及光纖101之入射端面102間之距離 a大約爲33mm，故成像透鏡33及CCD攝影機32間之距離大 約爲79mm。此時，依據（11)式，像倍率m大約爲3.2倍。 利用光纖位置調整機構1 5實施之光纖1 0 1之入射端面 102及聚光透鏡13間之距離a調整，除了雷射光入射光學裝 泰置1 1之組合調整以外，並非必要，故利用於光束分岐器3 1 、C CD攝影機32、以及成像透鏡33等之入射狀態之監視器 時之構成上，可以爲可從固體雷射振盪器1 Π及聚光透鏡 1 3間之光路拆除之構成。 其次，參照第11圖，針對雷射光入射光學裝置11之其 他實施形態進行說明。 第11圖係將雷射光入射光學裝置11應用於雷射誘導螢 光分析裝置（使用 Laser Induced Breakdown Spectroscopy之 高速分析裝置）之實例。雷射誘導螢光分析裝置可分析之 -23- (20) 1277730 試料（分析對象物）種類受到少許限制，然而，因爲具有可 簡化準備試料之前處理階段、速度快、以及分析對象物爲 固體時可直接使用等各種優點，故可應用之範圍十分廣泛 〇 如第11圖所示，雷射誘導螢光分析裝置301具有巨脈 波（GP)振盪方式之固體雷射振盪器111、雷射光入射光學 裝置（雷射光傳送系統··導光光學系）Π、照射光學系3 3 1、 ^ 螢光檢測光學系3 4 1、單色器（光檢測器或分光器）3 5 1、攝 像機構3 6 1、時序調整機構3 7 1、以及資料處理裝置3 8 1等 〇 固體雷射振盪器111係例如Nd : YAG雷射等。此外， 固體雷射振盪器111輸出之雷射光L之大小，例如，脈波期 間爲5nsec前後、尖鋒功率爲14〜20MW、傳送能量爲70〜 100mJ(尖鋒功率密度爲80GW/cm2)程度。此外，固體雷射 振盪器111通常含有振盪控制裝置、電源裝置、以及冷卻 • 裝置等，然而，省略其詳細說明。 雷射光入射光學裝置11係與利用第1圖或第10圖進行 說明者相同，含有使固體雷射振盪器111之雷射光L呈發散 性入射至光纖1 0 1之入射端面1 02之聚光透鏡1 3等。此外， 聚光透鏡13及光纖101之入射端面M2間之距離設定與上述 # 實施形態相同。 例如’光纖ιοί之芯徑爲1 000μηι、纖殻層厚度爲 時，爲了使利用聚光透鏡1 3進行聚光並利用通過聚光點而 呈發散性之擴散角爲0 · 0 6〜〇 · 2 2r ad之剖面束徑改變之雷射 -24- (21) 1277730 光L能有效入射，應爲0.06〜0.22之數値孔徑ΝΑ。 照射光學系3 3 1具有聚光透鏡3 3 3，用以使從雷射光入 射光學裝置11之光纖101之射出端面106射出之暫時呈現發 散性之脈波雷射光L，聚光於試料S或用以保持試料S之試 料保持部3 99之特定範圍。此外，聚光透鏡3 3 3之特性可配 ^ 合試料S之大小及形狀進行任意設定。 螢光檢測光學系（檢測光導光光學系）34 1具有用以捕獲 # 來自位於試料保持部3 9 9上之試料S之螢光之聚光透鏡3 4 3 、及用以使利用聚光透鏡343捕獲之螢光入射至後段之分 光器（單色器）之光纖3 45。 單色器3 5 1係例如配合含有光柵（繞射光柵）及波長濾波 器等之眾所皆知之分光計或試料S之特性而任意組合之檢 測機構。 攝像機構3 6 1係受取利用單色器3 5 1析出之特定波長之 光（螢光），並對其光強度輸出電性訊號，例如，眾所皆知 • 之CCD攝影機、光電倍增器、或FFT分析器等，可配合試 料S之特性而任意選擇。 時序調整機構3 7 1係例如脈波產生器或雷射誘導螢光 分析裝置3 0 1之主控制裝置，用以控制供應給固體雷射振 盪器Π 1之圖上未標示之電源裝置之驅動脈波之輸出時序 _ 、及例如閘極控制型Ι-CCD之CCD攝影機之動作時序等， 而以特定時序攝取試料S產生之螢光。 資料處理裝置3 8 1係用以暫時儲存攝像機構3 6 1輸出之 圖像或光譜等，依據預先儲存之「元素識別程式」、「元 -25- (22) 1277730 素定量程式」、或對攝像機構3 6 1提供之圖像資料等實施 特定處理之算則等，進行試料S之特性解析、或其前階段 之資料處理。 第11圖所示之雷射誘導螢光分析裝置301時，係利用 主控制裝置3 9 1 (第1 1圖之實例係與時序調整裝置3 7〗爲一 體化）依特定時序產生驅動脈波，並依據該驅動脈波由固 體雷射振盪器111以特定脈波期間輸出尖鋒功率爲1 4〜 # 2〇MW之GP方式之脈波雷射光L。 固體雷射振盪器1 1 1輸出之脈波雷射光L經由聚光透鏡 1 3變換成呈現發散性，有效地入射至光纖1 〇 i而被傳送至 光纖101之射出端面106。 利用照射光學系3 3 1之聚光透鏡3 3 3使光纖1 0 1射出之 雷射光L照射於試料S。此外，如前面說明所示，雷射光L 之尖鋒功率爲14〜2 0MW，利用聚光透鏡3 3 3聚光成例如數 百μπι之直徑，而照射於試料s時之尖鋒功率密度爲 ^ 80GW/cm2。因此，試料S被電漿化，該電漿能量使存在於 試料中之各元素分別放射出固有之螢光（含有螢光之光譜） 〇 利用螢光檢測光學系341之聚光透鏡3 43捕獲該發光（ 含有螢光之光譜），並經由光纖345入射至單色器351。 其後，利用單色器3 5 1除去試料S本體之光譜成分等， 析出試料S所含有之元素之固有光譜。 利用攝像機構3 6 1實施以單色器3 5 1析出之光譜之光電 變換’並提供給資料處理部3 8 1，資料處理部3 8 1則特定試 -26- (23) 1277730 料S所含有之元素。例如，攝像機構3 6〗爲例如FFT分析器 時，可利用作業者之目視來特定試料S所含有之元素。 此外，因爲至得到試料S所含有之元素之固有螢光光 譜爲止，會比電漿發光（亦即’雷射光L之照射）延遲數psec 〜數百psec，故利用時序調整機構371 (主控制裝置391)來 控制攝像機構3 6 1之動作。例如，攝像機構3 6〗爲附閘極之 CCD攝影機時，除了在計測時間加上特定延遲以外，尙在 9 特定時序導通閘極，而可只計測必要之螢光光譜。 此外，上述雷射誘導螢光分析裝置301幾乎不需要如 ICP發光分析之試料之前處理，故可迅速測定。此外，因 爲雷射誘導螢光分析裝置1 1對試料照射雷射光L時，空間（ 場所及大小）限制較少，利用單元化可在測定對象物存在 之任意場所實施測定對象物之分析。 利用如以上所示之雷射誘導螢光分析裝置1 1，光學構 件數較少且較便宜卻更有效率，無需使用光束放大用準直 • 儀及光束分割用陣列透鏡，只要使用1片或2片聚光透鏡（ 凸透鏡）即可入射至光纖。 此外，可以較便宜之成本提供較小型之利用尖鋒功率 超過10MW之巨脈波振盪方式之雷射光L之例如雷射誘導螢 ^ 光分析、雷射剝蝕、以及雷射擊等之處理所使用雷射光入 ‘射光學裝置1 1。 此外，並未受限於前述各實施形態’在實施上’只要 不背離其要旨範圍，可進行各種變形或變更。此外’亦可 將各實施形態進行適當組合，此時，可得到組合之效果。 -27- (24) 1277730 依據本發明，係利用採用含有石英之材質、對 之纖殻厚度爲0.03 5〜01倍、數値孔徑NA爲0.06〜 階變折射型光纖、及使尖鋒功率超過10MW之巨脈 方式之固體雷射振盪器之雷射光對該光纖之入射端 呈發散性之入射，可在光纖不會受損的情形下傳送 f ，不會降低傳送效率亦無需複雜之調整，且只要較 成本。 【圖式簡單說明】 第1圖係本發明之雷射光入射光學裝置之實施 實例槪略圖。 第2圖係說明發散入射方式之聚光光學系之傳 之槪略圖。 第3圖係對光纖之入射角及聚光透鏡之焦點距 係圖。 • 第4圖係對光纖之入射角及聚光透鏡之入射發 關係圖。 第5圖係對光纖之入射方式及傳送能量之關係圖 第6 A圖係光纖之軸線方向之剖面圖。 第6B圖係與第6A圖所示之光纖之軸線方向垂直 > 方向之剖面圖。 第7圖係纖殻厚度及傳送能量之關係圖。 第8圖係芯徑及傳送能量之關係圖。 第9圖係對光纖之入射角及傳送能量之關係圖。 於芯徑 0.22 之 波振盪 面實施 雷射光 便宜之 形態之 送模式 離之關 散角之 相交之 -28- (25) 1277730 第1 0圖係本發明之雷射光入射光學裝置之其他實施形 態之槪略圖 第1 1圖係組合著本發明之雷射光入射光學裝置之雷射 誘導螢光分析裝置之實例槪略圖。 【主要元件符號說明】 11 雷射光入射光學裝置 13 聚光透鏡 15 光纖位置調整機構 16 聚光透鏡保持部 17 光纖保持部 18 調整部 3 1 光束分岐器 32 CCD攝影機 3 3 成像透鏡 3 4 光量調整裝置 101光纖 102入射端面 1 03 芯 104纖殻 105被覆層 1 0 6射出端面 1 1 1固體雷射振盪器 3 3 1照射光學系 -29- (26) 1277730The problem of reducing the transmission efficiency by 10 to 20% and the problem of the position that must be adjusted. SUMMARY OF THE INVENTION The object of the present invention is to provide a large pulse wave vibration which can transmit laser light in a damaged situation at a relatively low cost, and the transmission efficiency does not reduce the complicated adjustment of the spike power of more than 10 MW. The laser light of the laser oscillator is incident on the incident end face of the optical fiber to enter the optical device. The invention is used for laser light of a solid-state laser oscillator with a spike power greater than 10 MW, incident on a laser light incident optical device, and having: concentrating the solid laser light from the foregoing a concentrating lens; and at a specific position behind the condensing point of the concentrating lens, an incident end surface of the optical fiber is disposed, and the illuminating light is divergently incident on the optical fiber position of the incident end surface of the optical fiber; and the optical fiber system includes quartz Material, for the core diameter is 0. 03 5~0. 1 time, the number of apertures NA is 0. 06~0. The order of 22. Secondly, the material containing quartz is used for the fiber of the core diameter. 03 5~0. 1 time, the number of apertures NA is 0. 06~0. The step of 22 is changed to make the laser light of the oscillator with a spike power exceeding 10 MW. The laser light of the oscillator is divergently incident on the incident end of the fiber. The laser beam is transmitted without damage to the fiber. The fly-eye lens fiber does not need to be laser-oscillated, and the laser beam of the oscillation of the square end face oscillator is made of the laser beam. The thickness of the shell of the lightning-reducing mechanism is a refractive-type solid-state laser surface. (5) 1277730 [Embodiment] Hereinafter, embodiments of the present invention will be described with reference to the drawings. 1 to 9 are views showing an embodiment of a laser light incident optical device. As shown in Fig. 1, the laser light incident optical device 11 is a solid laser oscillator having a giant pulse wave oscillation mode with a peak power greater than 10 MW. The pulsed laser light generated by the (laser device) 111 is incident on the incident end face 102 of the punching fiber 101 of the specific core diameter and the thickness of the sheath, and the incident that the optical fiber 101 is not damaged and has only a small loss can be obtained. The laser light incident optical device 11 has a function of performing solid laser oscillation. The illuminating lens 13 is provided by the illuminating lens L having a beam diameter of a specific size, and the distance between the illuminating lens 13 and the incident end surface 102 of the optical fiber 010 is maintained at a certain distance. The fiber position adjustment mechanism 1 5. The condensing lens 13 is a convex lens which is inexpensive and easy to obtain, and is not particularly limited as long as it can withstand the quality and shape of the heat generated when the laser light L emitted from the solid-state laser oscillator 111 is incident. Further, the condensing lens 13 may be a composite lens composed of two thin lenses, if necessary. The optical fiber position adjusting mechanism 15 has a condensing lens holding portion 16 for holding the condensing lens 13 and an optical fiber holding portion 17 for holding the optical fiber 110, for adjusting the concentrating lens holding portion 16 The adjusting portion 18 of the optical fiber '1' of the condensing lens 13 is held at an interval of the incident end surface 121 of the optical lens 1 . The adjusting portion 18 can adjust the optical fiber 101 such that the incident end surface 102 of the optical fiber is located at the focus position of the collecting lens 13 , that is, the optical fiber 1 〇 1 is adjusted so that the incident end surface 102 of the optical fiber 1 位于 1 is concentrated. The position of the specific distance behind the point A. Further, the adjustment (6) 1277730 portion 18 can be arbitrarily set to a distance from the condensing lens holding portion 16 of the optical fiber holding portion 17 by a manual movement or a moving mechanism constituted by a motor or a gear mechanism or the like. In addition, the incident end surface 102 of the optical fiber 101 is placed at the focus position of the collecting lens 13, that is, the incident end surface 102 of the optical fiber 101 is located at a specific position after the condensing point A, so that the incident light to the optical fiber 101 can be incident. The laser light L of the end face 102 exhibits divergence. That is, the distance between the incident end face of the optical fiber 110 and the condensing lens 13 is optimized, and the laser light L incident on the incident end face 102 of the optical fiber 101 is divergent and incident on the optical fiber 1 The laser light L in 〇1 will converge at a specific position within the optical fiber 110, and the density of the sharp power at a specific position of the optical fiber 101 will increase, and the damage of the optical fiber 1 〇1 can be suppressed. Further, the positional relationship between the condensing lens 13 and the incident end surface 102 of the optical fiber 101 is optimized, and when the sharp front power density of the laser light L is a specific size, for example, more than 10 GW/cm 2 , the condensing can be prevented. The condensing point A of the lens 13 • The effect of the decomposition of the air generated causes the laser light L to be unsteadyly transmitted, and the plasma generated by the decomposition of the air reaches the incident end surface 102 of the optical fiber 101 to damage the incident end surface 102 of the optical fiber 101. The situation. The fourth embodiment will be described with reference to FIGS. 2 to 4, however, the distance between the condensing point A of the condensing lens 13 for concentrating the laser light L and the incident end of the optical fiber 101 is, for example, 1~ 1 〇mm. That is, if the pulse wave energy of the laser light L is E[Wt], the pulse wave period of the laser light L is t[sec], and the sharp front power density at which the air decomposition occurs is Pth [Wt/cm2], and the utilization is utilized. The condensing path of the laser light L collected by the condensing lens 13 (half-10-(7) 1277730 diameter) is ω [mm], and the condensing diameter ω is expressed by the following equation. ω=/" [E/ (P t h X π X t)] (1) In addition, if the transmitted front-end power of the laser light L is P [W ] ‘Bei”, it can be expressed by the following equation. [P/(P t ΙιΧπ)] (2) On the other hand, if the laser light incident on the condensing lens 13 [the divergence angle is Θ] (half angle) [rad], the focal length of the condensing lens 13 is f [mm] ], the condensing path (radius is as follows: f X θ ! = ω (3) In addition, if the beam diameter (caliber) of the laser beam L is r (radius) [mm], solid laser oscillator The distance from the 111 to the condensing lens 13 is Di [mm] ', and the focal length f[nim] of the condensing lens 13 and the divergence angle 0! (half angle) of the laser light L incident on the condensing lens 13 can be utilized. The condensing angle of the laser light L collected by the condensing lens 13 (that is, the incident angle when the condensing light L of the collecting lens 13 is incident on the optical fiber 101) θ2 (half angle) [rad] is obtained. 02 = - r/f+ (l-Dx/f) ΧΘ1 (4) Therefore, with the equations (2) to (4), the lens focal length f, the laser aperture (sectional beam diameter) r, and the incident laser light L incident on the optical fiber 101 are incident. The angle θ2, the distance Di of the solid-state laser oscillator 111 to the condensing lens 13, the sharp-point power P of the laser light L, and the sharp-point power density Pth at which the critical decomposition of the air is generated have the following relationship: f = [― (r α) +/" {(r—a) 2—4X01XaXD1}] (2X Θ 2) : a [P/ (P th X π)] (5) The condensing lens 13 can be obtained by the formula (5) The focal spot A does not generate the focal distance f of the air condensing lens 13 which is decomposed by the air -11 - (8) 1277730. That is, since the focal length f of the condensing lens 13 can be obtained by the formula (5) and can be utilized (3) Formula and (1) or (2) The angle of incidence of the laser light L incident on the condensing lens 13 (that is, the 'divergence angle θ') is obtained, so that the laser light incident on the condensing lens 13 is required. When the incident angle of L is set to Θ !, the laser light L can be efficiently incident on the optical fiber 1 0 1 without causing air decomposition. In its example, for example, the diameter (diameter) of the laser light L is When the distance between the φ range of 2 to 1 3 mm, the condensing lens 13 and the solid-state laser oscillator Π 1 is changed in the range of 10 to 500 mm, the calculation result of the focal length f of the collecting lens 13 that can be used is as follows. 3, the calculation result of the incident angle (divergence angle) θι2 of the laser light 1" incident on the condensing lens 13 is as shown in Fig. 4. For example, if the diameter of the laser light L is r == 3 mm (diameter: 6 mm) Solid thunder The distance 〇1 of the oscillation oscillator 111 to the condensing lens 13 is 01 = 10 〇 111111, and the incident angle (concentrating angle) of the laser light L incident from the condensing lens 13 to the optical fiber 101 is e2 = 0. 15 rad, the peak power is P = 2 〇 MW, and the critical power density at which the critical point of air decomposition occurs is Pth = 100 GW / cm 2 '. The focal length f of the collecting lens 13 can be obtained and incident on the collecting lens 13 The incident angle θ 1 of the laser light is f=24. 9mm, e^SJmradC full angle is 6. 4mrad). For example, the focal length of the collecting lens 13 according to the actual measurement (into the formula (4), the incident angle 〇2 of the optical fiber 101 must not exceed the laser light [the NA of the optical fiber 101. The focus distance f of the condensing lens 13 is set (refer to Fig. 3). That is, Fig. 3 is a view showing a condensing lens 12-(9) 1277730 1 3 in which the laser light incident on the optical fiber 101 is changed [the condensing angle of the incident angle of the optical fiber 1 2). The focus position, however, changes the aperture (section beam diameter) of the laser light L and the position of the collecting lens 13 as a result, the lower limit 値 is 〇. 〇6rad degree. However, due to the influence of the quality of the laser light L (spatial distribution, wavefront, etc.) and the aberration of the condensing lens 13, the actual condensing path may be larger than the ideal condensing path. • At this time, the focus distance φ f of the condensing lens 13 is shortened by the condensing path that does not cause air decomposition and the actual condensing diameter is equal to the equation (2), and the laser beam L is amplified. The number of apertures NA when incident on the optical fiber 101 (refer to Fig. 4). Further, the relationship between the number 値 aperture NA when the laser light L is incident on the optical fiber 101 and the incident angle Θ of the condensing lens 13 suitable for the divergent incident mode 'the incident angle θ2 of the laser light L incident on the optical fiber 101 The lower limit 値 should be greater than 0 · 0 6 rad 〇 In addition, the condensing point A of the collecting lens 13 and the position of the optical fiber 110 (the position of the incident end surface 102), if the collecting point (radius) of the collecting point A The distance between ω [mm], the condensed point A, and the incident end face 102 of the optical fiber 101 is # Lf [mm], and the cross-sectional beam diameter (ie, the incident diameter) when the laser light L is incident on the core of the optical fiber 101 is Wi. (diameter) [mm], when the incident angle of the laser light L incident on the optical fiber 101 is θ2 (half angle) [rad], it can be expressed by the following formula. L f = (Wi - 2 〇 >) / (2 X ta η 0 2) (6) The focus position (concentration point A) of the collecting lens 13 and the incidence of the optical fiber 101 by the equation (6) The distance Lf between the end faces 102 is set to, for example, 0. 25~16mm. Specifically, the minimum 値 of the incident diameter of the laser light L incident on the core of the optical fiber 101 is, for example, 420 μm (the power of the laser light L transmitted by the optical fiber 1〇1, that is, depending on the energy or the spike power) The minimum diameter of the core diameter), outside this-13- 1277730 (ίο), if the maximum 値 is, for example, the maximum core diameter of the fiber 1 〇1 is 1 5 50 μm of 1 5 00μηι, and Wi = 4 2 0 〜1 3 5 Ο μ m , ω =1 00μιη (spike power 30MW, the minimum concentration of 100GW/cm2 for the initial decomposition of air), θ2 = 〇·〇6~0. 22 rad (as described later), the appropriate range of Lf is calculated, and the range of Lf is in the range of 〇 25 to 16 m m as described above. Practically, the minimum distance that can be set for the incident end face 102 of the optical fiber 101 is 1 mm, and the distance from the focal spot A to the incident end face 102 of the optical fiber 101 is set to be in the range of 1 to 16 mm. However, if the distance Lf is more than necessary, the amount of laser light L that is not incident on the optical fiber 101 is also increased, so the upper limit 値 should be, for example, about 10 mm. The distance Lf between the condensing lens 13 and the incident end face 102 of the optical fiber 101 is preferably adjusted according to the actual combination adjustment result, and is substantially 1. 5~5mm range. Next, the intensity of the laser light L that can be incident on the optical fiber 1〇1 will be described from the core diameter of the optical fiber 101 and the thickness of the fiber-shell layer. # As shown in the above description, the peak power obtained by using the giant pulse wave oscillation method exceeds several MW (the peak power density is lfT1~l. When the laser light L of 〇GW/cm2) is incident on the optical fiber 1 0 1 , the optical fiber 1 〇1 is damaged and the laser light L cannot be transmitted. Therefore, the description will be made only by using FIG. 1 and FIG. 2 to FIG. The distance Lf between the condensing lens 13 and the incident end surface 102 of the optical fiber 101, the incident angle 时 when the laser light L is incident on the condensing lens 13, and the laser light L condensed by the condensing lens 13 are incident on the optical fiber 101. The condensing angle θ2 ' at the incident end face 1 〇 2 may damage the optical fiber 1 〇1. -14- (11) 1277730 Hereinafter, the configuration characteristics of the appropriate optical fiber 101 and the transmission characteristics of the laser light L will be described. Fig. 5 is an experimental result, which is a laser light L with a pulse wave period of 5 nsec and a laser beam diameter (sectional beam diameter) of 700 μm, and a divergent incident mode and a general convergence incident mode described using FIG. , with an incident angle of 0. 02i*ad is incident on the core diameter of ΙΟΟΟμηι, the thickness of the shell layer is 50μπι, and the number of apertures ΝΑ is 0. 2 experimental results of fiber 101. ί As can be seen from Fig. 5, when the incident mode is converged, the transmission energy of 30 mJ (spike power of 6 MW) causes damage to the optical fiber 101. On the other hand, when the divergent incident mode is applied, it is confirmed that the transmission energy of 7 〇 mJ (spike power of 14 MW) does not cause damage to the optical fiber 1 〇 1. In addition, the structural characteristics of the optical fiber 1 〇 1 are due to the high purity of the core material, which is not easily damaged by the energy of the laser light L, and is a step-change refractive quartz material constructed as shown in Fig. 6. The optical fiber 110 is composed of a core 103, a fiber case 104 formed around the core 103, and a coating layer 105 formed around the fiber case 104. In addition, when the thickness of the shell 104 is larger than a certain thickness, the fiber 1 〇 1 is easily broken due to mechanical stress, and if the thickness of the shell 104 is too thin, the number of incident MW levels is sharp. When the laser light L of the front power is emitted, the laser light L leaking from the core 103 to the shell 104 causes the fiber 1〇1 to be broken. In addition, the thickness of the shell 1 〇 4 should be smaller than the diameter of the core 10 3, for example, '0' 0 0 0 0 of the core 1 0 3 diameter. 1 time. Therefore, the power density of the tip of the laser light L that leaks to the casing 10 is also 1 times higher than that of the core 1 〇 3. In addition to the -15-(12) 1277730, the diffraction effect caused by the transmission of the usual laser light L at the boundary of the shell 104 and the core 103 is somewhat similar to the existence of a fixed wave because some of the spike power is higher. Therefore, there is a lower limit 减少 when the thickness of the shell 104 is reduced. Fig. 7 is a result of experiment, which is to change the thickness of the shell 104 so that the pulse wave period is 5 nsec, and the laser beam L having a diameter (sectional beam diameter) of 700 μm is used, and the divergence incidence mode described by the second 'Fig. Hey. 〇2rad incident to the core diameter is ΙΟΟΟμηι, the number of apertures NA is 0. 2 experimental results of fiber 101. # From Figure 7, it can be seen that as the thickness of the shell 104 increases, a greater amount of energy can be delivered. That is, as shown in Fig. 7, when the thickness of the shell 1〇4 is 20 μm, '40 mJ (spike power 8 MW) is the limit, however, if the thickness of the shell 104 is 50 μm, then 70 mJ (spike power 14 MW) In the case of the optical fiber 101, the optical fiber 101 is not damaged. Therefore, as shown in Fig. 7, in order to transmit the laser light L having a peak power of 10 MW or more, the thickness of the fiber casing 104 must be 35 μm or more. Further, if the thickness of the shell 104 is larger than 100 μm, it becomes hard and brittle, and it is difficult to bend the light #fiber 101, and the bending radius becomes large, so it should be ΙΟΟμπι or less. On the other hand, because of the relationship with the laser power density transmitted by the optical fiber 101, the lower limit 设定 is set for the core diameter, however, the upper limit of the core diameter is as shown in the following description using FIG. 8, for example, The judgment is made with respect to the ratio of the diameter (cross-sectional beam diameter) of the incident laser light L. ~ Fig. 8 is an experimental result of keeping the thickness of the shell 104 constant and changing the laser light L of the laser light L diameter (section beam diameter) incident on the optical fiber 101 to the optical fiber 101 which changes the core diameter. result. It can be seen from Fig. 8 that even if there is a difference between the core diameter and the incident beam diameter of the incident laser light L (port 16-(13) 1277730 diameter), if the thickness of the fiber shell 〇4 is the same, then the incident of the range is The caliber can transmit laser light L which is also a sharp power of 10 MW. That is, as shown in Fig. 8, in order to transmit the peak power of 10 MW or more, the collecting path must be 420 μη or more. Therefore, if it is considered to have a margin of about 80% with respect to the collecting path, the core diameter should be 500 μm or more. > Further, as shown in Fig. 9, the laser beam L having a diameter (section beam diameter) of 700 μm and a pulse period of 5 nseC is obtained by changing the incident angle θ2 of the laser light L to the optical fiber 1 〇1 by divergent incidence. The incident diameter to the core is ΙΟΟΟμπι, the thickness of the shell 104 is 50 μηι, and the number of apertures ΝΑ is 0. In the experimental results of the fiber optic 101 of 2, in order to make the lightning power L before and after the peak power of 15 MW (energy conversion of 80 mJ) incident at a low loss, it must be 〇. 入射6rad degree of incidence angle θ2. In addition, as the incident angle θ2 increases, the energy that can be transmitted increases, and the incident angle θ2 is 0. At a level of 12 rad, a laser light L with a peak power of 20 MW can be transmitted. On the other hand, according to the diffraction # of the boundary portion of the core 103 and the shell 104, the laser light L incident on the optical fiber 101 is transmitted in the optical fiber 101, and the optical fiber 101 has a number of apertures NA when the laser light L is incident. Upper limit. That is, if the number of apertures NA of the optical fiber 10 1 is too small, the incident angle θ2 to the optical fiber 101 becomes small when the incident mode is diverged, and sufficient effects cannot be obtained. Therefore, as shown in the foregoing description, the laser light L incident on the optical fiber 101 converges at a specific position inside the optical fiber 101, resulting in damage of the optical fiber 1 〇 1. Further, if the number of apertures 光纤 of the optical fiber 101 is large, the angle of the laser light L emitted from the optical fiber 101 is increased. Therefore, the optical system used for the purpose of illuminating the object with the specific beam diameter of the laser beam L is also used. Will increase. For example, -17-(14) 1277730 uses a refractive index η of n=i. A plano-convex lens composed of a glass material of 5 degrees is used to make the laser light emitted from the optical fiber 101 into an object at an imaging magnification of 1 or less, from the viewpoint of the production of the lens aperture with respect to the curvature of the lens.言 'The number of optical fibers 101 値 aperture ΝΑ should be ΝΑ and 0. Below 25rad. If the thickness of the shell 104 is larger than the thickness of the shell of the general fiber, the mechanical strength (bending resistance) of the optical fiber 1〇1 is considered to be reduced, and if the refractive index of the core 103 is ηι, the shell is 1〇4. The refractive index is n2, and the number 値 aperture να _ can be specified by the following formula. ΝΑ==λΓ [(Πι) 2- (η2) 2] In addition, in order to increase the number of apertures 光纤 of the optical fiber 101, the method of reducing the refractive index of the shell 104 layer is widely used, and the doping of the shell 104 is increased. The amount of fluorine and boron makes it brittle and easily broken. Further, in consideration of the thickness of the shell 1 〇 4 obtained by the use of Fig. 7, the upper limit of the number 値 aperture ΝΑ according to the above-mentioned illuminating optical system should be lower than substantially zero. 22rad. Therefore, the upper limit of the number of apertures NA of the optical fiber 101 is 0. twenty two. In addition, • Since the upper limit 値 varies depending on the actual structure and physical properties of the fiber 1 〇 1 used, the upper limit of the number of apertures N A that the optical fiber 1 ο 1 can set is not necessarily 0. 22, which is a number defined by the structure and characteristics of the optical fiber 101. Further, the core diameter is not affected by the focal position of the condensing lens ～1 3 described in FIGS. 3 and 4 and the incident angle θ2 of the laser light L incident on the optical fiber 1 〇1, and the optical fiber described using FIG. 1 之1 core diameter and the experimental results of the limitation of the diameter (section beam diameter) of the laser light L incident on the fiber 1 〇1, and the confirmation result of the energy transfer capability described in Fig. 9 Shooting -18- (15) 1277730 The angle of incidence of light L· is equal to 2, so the number of apertures is NA = 0. 06~〇. 22rad 〇 From the above description, it can be seen that the optical fiber 1〇1 of the laser beam with a large pulse wave oscillation mode of 20MW (spike power density of 1 〇〇GW / c m2) can be transmitted in an incident manner. 103 The diameter is 5 00 ~ 1 500μηι, the thickness of the shell 104 is 35~ΙΟΟμηι, • The number of the fiber 101 is 0 aperture ΝΑ is 0. The range of 06~0_22. Further, the incident angle θ2 of the laser light L incident on the optical fiber 101 by the laser light L should be a larger angle within the range allowed by the configuration of the laser light incident optical device 11. It can be seen from the above that in order to stably transmit the pulse laser light L having a peak power of 10 MW or more or the short pulse laser light L having a peak power of 10 MW or less, for example, when the number of apertures 光纤 0 = 0·2 of the optical fiber 101, The incident angle θ2 of the Φ laser light L incident on the optical fiber 101 should be 0. 2r ad (the number of the fiber 101 is the upper limit of the aperture ΝΑ). Next, a specific example of the laser light incident optical device 1 1 will be described. In addition, the number shown below is the data of the laser light of the power of 22 MW which is described before the ninth figure. For example, in the following conditions, the optical fiber of the step-refractive type quartz material 1 0 1 The solid-state laser oscillator 111 transmitting the Nd:YAG laser oscillator using the giant pulse wave oscillation mode has a pulse period of 5 nsec and a pulse wave energy of 110 mJ (spike power is 22 MW = ll 〇 ni J / 5 nsec) -19- (16) The result of 1277730, 6 mm diameter laser light L. Incident angle to the condensing lens 13 (incident divergence angle WfUmrad (half angle) laser aperture (section beam diameter) r (radius) = 3 mm (diameter: 6 mm) The interval between the condensing lens 13 and the solid-state laser oscillator 111 D^ Focus distance of SOOmm condenser lens 1 3 f = 3 1 mm Core diameter of fiber 101 ΙΟΟΟμπι • Thickness of shell 104 50μιη Number of apertures NA = 0. 2rad incidence angle θ2 of the laser light L of the optical fiber 101 θ2 = 0. 13 rad (half angle) The distance from the condensed point A of the condensing lens 13 to the incident end face of the optical fiber 101 〇 2 Lf = 2 mm The incident aperture (sectional beam diameter) of the laser light L of the optical fiber 1 〇 1 : 700 μm (diameter) Further, when the incident angle θ2 of the optical fiber #101 described above is obtained by the above equation (4), that is, the incident angle (incident divergence angle) eiM of the collecting lens 13 is utilized. The interval between the Smrad, the condenser lens 13 and the solid-state laser oscillator 111 is D! = 600 mm, the laser incident aperture (sectional beam diameter) r (radius) = 3 mm, and the focal length of the collecting lens 13 f = 3 1mm is obtained by the formula (4). When the incident angle θ2 of the optical fiber 1〇1 is obtained, the incident angle is 02 = 〇. 13 rad, confirm that the number of optical fibers 1 〇 1 available for the invention is ΝΑ = 0·06~ 〇. The range of 22 rad. In addition, the divergent incident mode is compared with a well-known example using a composite lens that is divided into ηιχη, because the influence of the reflection loss generated by the boundary portion of each lens -20 - (17) 1277730 can be eliminated, and the light is concentrated. The transmission efficiency of the incident side of the lens 13 to the exit side of the optical fiber 110 can be improved by about 1%. In addition, since the divergence incidence mode can reduce the number of optical elements, the cost of the laser light incident optical device as a whole can be reduced. Therefore, the material containing quartz is used, and the thickness of the shell for the core diameter is + 0. 03 5~0. 1 time, the number of apertures NA is 0. 06~0. The 22th order refractive index optical fiber 101, the laser beam L of the solid lightning oscillating oscillator 1 1 1 having a giant pulse wave oscillation mode with a spike power exceeding 10 MW is incident on the incident end face of the optical fiber 1 0 1 in a divergent manner. 1 02, the laser light L can be transmitted without damage to the optical fiber 101, and the transmission efficiency is not lowered, and further, no complicated adjustment is required and it is more inexpensive. Next, other embodiments of the laser light incident optical device 1 1 will be described with reference to Fig. 1 . It is to be noted that the same or similar components as those of the embodiment shown in Fig. 1 through Fig. 9 are denoted by the same reference numerals, and the detailed description is omitted. The laser light incident optical device 11 has a condensing lens 13 for attaching the laser light L of the solid-state laser oscillator 11 to a specific condensing property; the condensing lens 13 and the optical fiber 1 0 1 are used. The distance between the incident end faces 102 is maintained at a certain distance ~ the fiber position adjusting mechanism 15; and is disposed between the solid-state laser oscillator 1 1 1 and the poly-beta lens 13 for use from the solid-state laser oscillator 1 is a laser beam splitter (sampling mirror) 3 1 of a semi-transparent mirror that reflects the reflected laser light (戻 laser light) R reflected from the incident end surface 102 of the optical fiber 101 toward the laser beam L of the collecting lens 1 3; The branching device 31 separates the reflected laser light R and transmits the power signal 21 - (18) 1277730, for example, a CCD camera 32 having an observation means of the photoelectric conversion element. Further, between the CCD camera 32 and the beam splitter 31, an imaging lens 33 that images the reflected laser light R separated by the beam splitter 31 on the light-receiving surface not shown on the map of the CCD camera 3 is disposed. . If necessary, a light amount adjusting device 34 such as an attenuation filter for adjusting the intensity of the reflected laser light R incident on the CCD camera 32 may be disposed between the imaging lens 33 and the CCD camera 32. The CCD camera 32 forms an image based on the information of the incident position of the laser light L incident on the incident end face 102 of the optical fiber 101. Therefore, according to the image of the incident end face 102 obtained by the CCD camera 32, for example, the position of the optical fiber holding portion 17 of the optical fiber position adjusting mechanism 15 can be moved by, for example, a moving mechanism not described in detail, the incidence of the optical fiber 1 〇1 can be made. The position of the end face 102 and the distance between the imaging lenses 13 are set to the desired positions described using Figs. 2 to 4 . In addition, if the focal length of the collecting lens 13 is fi, the focal length of the imaging lens 33 is f, the incident end face of the optical fiber 1 〇1 is spaced from the imaging lens 13 by a, and the CCD should be provided. The position of the camera 32 (the distance from the incident surface 102 of the optical fiber 〇1) is b, the distance between the condensing lens 13 and the imaging lens 33 is d, and the magnification is m, which can be expressed by the following equations, respectively. b = (1+m) X f 2—m2x a ··· (11) m= f 2/ fi (1 2) d=f 2+f ! (13) Therefore, it is determined by (1 2 ) The focal length fl of the condensing lens 13 and the focal length h of the imaging lens 33 of the image magnification m to be observed, and secondly, the interval between the two lenses (distance d) is determined by the equations (1 3 ) and (1 1). Since the position of the CCD camera 32 or the like is made, the incident end surface 102 of the optical fiber 101 can be observed. -22- (19) 1277730 For example, if the focal length of the condenser lens 13 is f! = 3 1 mm, so that the beam splitter (sampling mirror) 31 is concentrated toward the fixed laser oscillator 1 1 1 The chief ray of the laser light L of the lens 13 is disposed at an angle of 45 degrees, and the CCD camera 32 is placed at a specific position behind the imaging lens 33, and the reflected laser light R from the incident end surface 102 of the optical fiber 1 在1 is at the CCD camera. 32 forms an image, which can be observed by a TV monitor not shown on the figure, and the incidence adjustment is performed at the same time. When the image magnification 33 is set to, for example, f2 = 100 mm by the equation (12), the condensing lens 13 and the imaging lens obtained by the equation (13) are used. The distance d between 3 and 3 is approximately 1 3 1 mm. Further, since the distance a between the condensing lens 13 and the incident end surface 102 of the optical fiber 101 is about 33 mm, the distance between the imaging lens 33 and the CCD camera 32 is about 79 mm. At this time, according to the formula (11), the image magnification m is about 3. 2 times. The adjustment of the distance a between the incident end face 102 of the optical fiber 110 and the condensing lens 13 by the optical fiber position adjusting mechanism 15 is not necessary except for the combination adjustment of the laser light incident optical device 1 1 , so it is used for the light beam. The configuration of the monitors of the incident state of the splitter 3 1 , the C CD camera 32 , and the imaging lens 33 may be configured to be detachable from the optical path between the solid-state laser oscillator 1 Π and the condensing lens 13 . Next, another embodiment of the laser light incident optical device 11 will be described with reference to Fig. 11. Fig. 11 shows an example in which the laser light incident optical device 11 is applied to a laser induced fluorescence analyzer (a high speed analyzer using Laser Induced Breakdown Spectroscopy). Laser-inducible fluorescence analyzer can analyze -23- (20) 1277730 Samples (objects to be analyzed) are limited in number, however, because they can simplify the processing stage before preparing the sample, the speed is fast, and the analyte is solid. It can be used directly and various other advantages, so it can be applied in a wide range. As shown in Fig. 11, the laser induced fluorescence analyzer 301 has a solid pulse oscillator 111 with a giant pulse wave (GP) oscillation mode and laser light incident. Optical device (laser light transmission system··light guiding optical system)Π, illumination optical system 3 3 1 , ^ fluorescent detection optical system 3 4 1 , monochromator (photodetector or spectroscope) 3 5 1 , imaging mechanism 3 6 1. The timing adjustment mechanism 3 7 1 and the data processing device 3 8 1 etc. The solid-state laser oscillator 111 is, for example, a Nd:YAG laser or the like. Further, the size of the laser light L outputted by the solid-state laser oscillator 111 is, for example, a pulse wave period of 5 nsec or so, a spike power of 14 to 20 MW, and a transmission energy of 70 to 100 mJ (spike power density of 80 GW/cm 2 ). . Further, the solid-state laser oscillator 111 usually includes an oscillation control device, a power supply device, a cooling device, and the like, however, detailed description thereof will be omitted. The laser light incident optical device 11 is the same as that described with reference to Fig. 1 or Fig. 10, and includes a condensed light that causes the laser light L of the solid-state laser oscillator 111 to be incident on the incident end face 102 of the optical fiber 110. Lens 1 3 and the like. Further, the distance between the condensing lens 13 and the incident end surface M2 of the optical fiber 101 is set to be the same as that of the above-described embodiment. For example, when the core diameter of the optical fiber ιοί is 1 000 μηι and the thickness of the shell layer is used, the diffusion angle which is divergent by the condensing point is 0·0 6 〇· 2 2r ad section beam diameter change laser -24 (21) 1277730 light L can be effectively incident, should be 0. 06~0. 22 number 値 aperture ΝΑ. The illuminating optical system 33 has a condensing lens 333 for concentrating the divergent pulsed laser light L emitted from the exit end surface 106 of the optical fiber 101 of the laser light incident optical device 11 to the sample S or The specific range of the sample holding portion 3 99 for holding the sample S. Further, the characteristics of the condensing lens 3 3 3 can be arbitrarily set in accordance with the size and shape of the sample S. The fluorescent detecting optical system (detecting optical light guiding optical system) 34 1 has a collecting lens 3 4 3 for capturing the fluorescent light from the sample S located on the sample holding portion 399, and for making use of the collecting lens. The 343 captured fluorescent light is incident on the optical fiber 3 45 of the splitter (monochromator) in the latter stage. The monochromator 351 is, for example, a detection mechanism which is arbitrarily combined with a characteristic of a spectrometer or a sample S which is known to include a grating (diffraction grating) and a wavelength filter. The imaging unit 3 6 1 receives light of a specific wavelength (fluorescence) which is deposited by the monochromator 351, and outputs an electrical signal to the light intensity, for example, a CCD camera, a photomultiplier, Or an FFT analyzer or the like can be arbitrarily selected in accordance with the characteristics of the sample S. The timing adjustment mechanism 317 is a main control device such as a pulse wave generator or a laser induced fluorescence analysis device 310, for controlling the driving of an unlabeled power supply device supplied to the solid laser oscillator Π1. The output timing of the pulse wave _ and the operation timing of the CCD camera of the gate-controlled Ι-CCD, for example, and the fluorescence generated by the sample S is taken at a specific timing. The data processing device 381 is configured to temporarily store an image or spectrum output by the camera unit 361, based on a pre-stored "element recognition program", "yuan-25-(22) 1277730 prime quantitative program", or The image data obtained by the image pickup unit 361 is subjected to a specific processing such as image processing, and the characteristic analysis of the sample S or the data processing of the previous stage is performed. In the laser-induced fluorescence analyzer 301 shown in Fig. 11, the main control unit 319 (integrated with the example system of the first embodiment and the timing adjustment unit 37) is used to generate the driving pulse wave at a specific timing. According to the driving pulse wave, the solid laser oscillator 111 outputs the pulse laser light L of the GP mode with a sharp power of 1 4 to #2 〇 MW during a specific pulse period. The pulsed laser light L output from the solid-state laser oscillator 11 is converted into a divergent property by the collecting lens 13, and is efficiently incident on the optical fiber 1 〇 i and transmitted to the emission end surface 106 of the optical fiber 101. The laser light L emitted from the optical fiber 101 is irradiated to the sample S by the condensing lens 3 3 3 of the illuminating optical system 33. Further, as described above, the laser light L has a sharp power of 14 to 20 MW, and is condensed by the condensing lens 33 3 to a diameter of, for example, several hundred μm, and the sharp front power density when irradiated to the sample s is ^ 80GW/cm2. Therefore, the sample S is plasma-formed, and the plasma energy causes each element existing in the sample to emit a specific fluorescent light (a spectrum containing fluorescence), and is captured by the collecting lens 343 of the fluorescent detecting optical system 341. This luminescence (containing a spectrum of fluorescence) is incident on the monochromator 351 via the optical fiber 345. Then, the spectral component of the sample S is removed by the monochromator 351, and the intrinsic spectrum of the element contained in the sample S is precipitated. The photoelectric conversion of the spectrum precipitated by the monochromator 351 is performed by the imaging unit 361, and is supplied to the data processing unit 388. The data processing unit 3 8 1 is specifically tested -26-(23) 1277730 Contains elements. For example, when the imaging unit 36 is, for example, an FFT analyzer, the element contained in the sample S can be specified by visual observation by the operator. In addition, since the intrinsic fluorescence spectrum of the element contained in the sample S is delayed by several psec to several hundreds of psec than the plasma emission (that is, the irradiation of the laser light L), the timing adjustment mechanism 371 is used (main control) The device 391) controls the operation of the imaging mechanism 361. For example, when the imaging unit 36 is a CCD camera with a gate, in addition to a specific delay in the measurement time, the gate is turned on at a specific timing, and only the necessary fluorescence spectrum can be measured. Further, the above-described laser induced fluorescence analyzer 301 hardly needs to be processed as before the sample for ICP luminescence analysis, so that it can be quickly measured. Further, when the laser-induced fluorescence analyzer 1 irradiates the sample with the laser light L, the space (place and size) is less restricted, and the unitization can be used to analyze the object to be measured at any place where the object to be measured exists. With the laser-induced fluorescence analyzer 1 as shown above, the number of optical components is small and cheap, but more efficient, and it is not necessary to use the collimator for beam amplification and the array lens for beam splitting, as long as one piece or Two condensing lenses (convex lenses) are incident on the fiber. In addition, it is possible to provide a smaller type of laser light using a large-pulse oscillation method using a giant pulse wave oscillation method with a spike power exceeding 10 MW at a relatively low cost, such as laser-induced fluorescence analysis, laser ablation, and thunder shot processing. The light is incident on the 'optical optical device 1 1. Further, various modifications and changes may be made without departing from the scope of the inventions. Further, it is also possible to appropriately combine the respective embodiments, and in this case, the effect of the combination can be obtained. -27- (24) 1277730 According to the invention, the material containing quartz is used, and the thickness of the shell is 0. 03 5~01 times, the number of apertures NA is 0. 06~ The step-refractive fiber and the laser light of the solid-state laser oscillator with a giant pulse mode of more than 10 MW are divergent incident on the incident end of the fiber, so that the fiber will not be damaged. Transmitting f does not reduce transmission efficiency and does not require complicated adjustments, as long as it is more costly. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a schematic diagram showing an embodiment of a laser light incident optical device of the present invention. Fig. 2 is a schematic diagram showing the transmission of a concentrated optical system in a divergent incident mode. Figure 3 is a plot of the incident angle of the fiber and the focal length of the condenser lens. • Figure 4 is a plot of the incident angle of the fiber and the incident relationship of the condenser lens. Fig. 5 is a diagram showing the relationship between the incident mode of the optical fiber and the transmitted energy. Fig. 6A is a cross-sectional view of the optical fiber in the axial direction. Fig. 6B is a cross-sectional view of the > direction perpendicular to the axial direction of the optical fiber shown in Fig. 6A. Figure 7 is a graph showing the relationship between the thickness of the shell and the transfer energy. Figure 8 is a plot of core diameter and transmitted energy. Figure 9 is a graph showing the relationship between the incident angle of the fiber and the transmitted energy. Core diameter 0. The wave-oscillating surface of the 22-wave oscillating surface is in the form of a cheap mode of the laser light. The 280- (25) 1277730 is a schematic diagram of another embodiment of the laser light incident optical device of the present invention. 1 1 is a schematic diagram showing an example of a laser induced fluorescence analyzer of the laser light incident optical device of the present invention. [Description of main components] 11 Laser light incident optical device 13 Condenser lens 15 Optical fiber position adjustment mechanism 16 Condenser lens holding portion 17 Optical fiber holding portion 18 Adjustment portion 3 1 Beam splitter 32 CCD camera 3 3 Imaging lens 3 4 Light amount adjustment Device 101 fiber 102 incident end face 103 core 104 shell 105 coating layer 1 0 6 exit end face 1 1 1 solid laser oscillator 3 3 1 illumination optical system -29- (26) 1277730
3 3 3聚光透鏡 3 4 1螢光檢測光學系 3 4 3聚光透鏡 3 4 5光纖 351單色器 3 6 1攝像機構 3 7 1時序調整機構 3 8 1資料處理裝置 3 9 1主控制裝置 3 99試料保持部3 3 3 concentrating lens 3 4 1 fluorescent detection optical system 3 4 3 concentrating lens 3 4 5 fiber 351 monochromator 3 6 1 imaging mechanism 3 7 1 timing adjustment mechanism 3 8 1 data processing device 3 9 1 main control Device 3 99 sample holding unit
- 30-- 30-