KR100795080B1 - 기판검사용 조명장치 - Google Patents

기판검사용 조명장치 Download PDF

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Publication number
KR100795080B1
KR100795080B1 KR1020050100125A KR20050100125A KR100795080B1 KR 100795080 B1 KR100795080 B1 KR 100795080B1 KR 1020050100125 A KR1020050100125 A KR 1020050100125A KR 20050100125 A KR20050100125 A KR 20050100125A KR 100795080 B1 KR100795080 B1 KR 100795080B1
Authority
KR
South Korea
Prior art keywords
light
light source
illumination
liquid crystal
substrate
Prior art date
Application number
KR1020050100125A
Other languages
English (en)
Korean (ko)
Other versions
KR20070032893A (ko
Inventor
야스오 이마무라
츠토무 구보타
쥰이치 야마구치
Original Assignee
가부시키가이샤 모리텍스
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 가부시키가이샤 모리텍스 filed Critical 가부시키가이샤 모리텍스
Publication of KR20070032893A publication Critical patent/KR20070032893A/ko
Application granted granted Critical
Publication of KR100795080B1 publication Critical patent/KR100795080B1/ko

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/47—Scattering, i.e. diffuse reflection
    • G01N21/4738—Diffuse reflection, e.g. also for testing fluids, fibrous materials
    • G01N21/474—Details of optical heads therefor, e.g. using optical fibres
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/8422—Investigating thin films, e.g. matrix isolation method
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00—Simple or compound lenses
    • G02B3/02—Simple or compound lenses with non-spherical faces
    • G02B3/08—Simple or compound lenses with non-spherical faces with discontinuous faces, e.g. Fresnel lens
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H2201/00—Contacts
    • H01H2201/022—Material
    • H01H2201/026—Material non precious
    • H01H2201/028—Indium tin oxide [ITO]

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • General Health & Medical Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Mathematical Physics (AREA)
  • Optics & Photonics (AREA)
  • Liquid Crystal (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
KR1020050100125A 2005-09-20 2005-10-24 기판검사용 조명장치 KR100795080B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2005272425A JP3831744B1 (ja) 2005-09-20 2005-09-20 基板検査用照明装置
JPJP-P-2005-00272425 2005-09-20

Publications (2)

Publication Number Publication Date
KR20070032893A KR20070032893A (ko) 2007-03-23
KR100795080B1 true KR100795080B1 (ko) 2008-01-17

Family

ID=37214350

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020050100125A KR100795080B1 (ko) 2005-09-20 2005-10-24 기판검사용 조명장치

Country Status (3)

Country Link
JP (1) JP3831744B1 (ja)
KR (1) KR100795080B1 (ja)
TW (1) TWI314642B (ja)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5646922B2 (ja) * 2010-09-03 2014-12-24 株式会社トプコン 検査装置
JP2013092661A (ja) * 2011-10-26 2013-05-16 Panasonic Corp 部品実装装置に用いる撮像用照明ユニット及び部品実装装置
JP6353165B2 (ja) * 2014-11-07 2018-07-04 スリーエム イノベイティブ プロパティズ カンパニー 切替可能ディフューザを含む光学装置
JP2018197830A (ja) 2017-05-25 2018-12-13 スタンレー電気株式会社 発光機能を備えた透明パネル

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002071571A (ja) 2000-08-29 2002-03-08 Olympus Optical Co Ltd 外観検査用投光装置
JP2003337106A (ja) 2002-05-20 2003-11-28 Hitachi Kokusai Electric Inc マクロ検査装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002071571A (ja) 2000-08-29 2002-03-08 Olympus Optical Co Ltd 外観検査用投光装置
JP2003337106A (ja) 2002-05-20 2003-11-28 Hitachi Kokusai Electric Inc マクロ検査装置

Also Published As

Publication number Publication date
JP2007085781A (ja) 2007-04-05
TWI314642B (en) 2009-09-11
JP3831744B1 (ja) 2006-10-11
KR20070032893A (ko) 2007-03-23

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