KR100759426B1 - Apparatus for detecting mura of flat panel display - Google Patents

Apparatus for detecting mura of flat panel display Download PDF

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KR100759426B1
KR100759426B1 KR1020060051317A KR20060051317A KR100759426B1 KR 100759426 B1 KR100759426 B1 KR 100759426B1 KR 1020060051317 A KR1020060051317 A KR 1020060051317A KR 20060051317 A KR20060051317 A KR 20060051317A KR 100759426 B1 KR100759426 B1 KR 100759426B1
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light
optical system
fpd
flat panel
panel display
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박종철
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디아이티 주식회사
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/55—Specular reflectivity
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
    • G01N21/896—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/958—Inspecting transparent materials or objects, e.g. windscreens
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1306—Details
    • G02F1/1309—Repairing; Testing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N2021/9513—Liquid crystal panels

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  • Textile Engineering (AREA)
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  • Testing Of Optical Devices Or Fibers (AREA)
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Abstract

An apparatus for detecting spots on an FPD(Flat Panel Display) is provided to effectively and regularly detect the spots on the FPD by testing the FPD without adjusting the illumination property and an angle of the FPD. An apparatus for detecting spots on an FPD includes an illumination optical system(100), an image forming optical system(200), and a high sensitivity camera(300). The illumination optical system comprises a light source, a light pipe, and a lens system where various lenses are mixed to treat uniform light with the high light after uniformizing the emitted light to irradiate light to a detecting surface of the FPD. The image forming optical system forms an image by receiving the light with linearity among the light irradiated to the detecting surface of the FPD through the illumination optical system. The high sensitivity camera obtains the image of the detecting surface of the FPD treated through the image forming optical system as a high performance camera which is able to distinguish minute brightness data.

Description

평판 디스플레이 얼룩 검출 장치{APPARATUS FOR DETECTING MURA OF FLAT PANEL DISPLAY}Flat display spot detection device {APPARATUS FOR DETECTING MURA OF FLAT PANEL DISPLAY}

도 1 은 본 발명에 따른 평판 디스플레이 얼룩 검출 장치의 개념도. 1 is a conceptual diagram of a flat panel display spot detection apparatus according to the present invention.

도 2 는 본 발명에 따른 조명 광학계를 설명하기 위한 개념도.2 is a conceptual diagram for explaining an illumination optical system according to the present invention.

도 3 은 본 발명에 따라 얼룩을 검출하는 원리를 설명하기 위한 도면.3 is a view for explaining the principle of detecting spots in accordance with the present invention.

*도면의 주요부분에 대한 부호의 설명* Explanation of symbols for main parts of the drawings

100 : 조명 광학계 110 : 광원100: illumination optical system 110: light source

120 : 라이트 파이프 130 : 렌즈계120: light pipe 130: lens system

200 : 결상 광학계200: imaging optical system

300 : 카메라 300: camera

본 발명은 평판 디스플레이 얼룩 검출 장치에 관한 것으로서, 특히 평판 디스플레이 제조 과정 중에 발생되는 다양한 형태의 얼룩을 검출할 수 있는 평판 디 스플레이 얼룩 검출 장치에 관한 것이다.BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a flat panel display spot detection apparatus, and more particularly, to a flat display spot detection apparatus capable of detecting various types of spots generated during a flat panel display manufacturing process.

평판 디스플레이(FPD:Flat Panel display)는 제조 과정 중 그 표면 위에 특정 형태의 선형 얼룩이나 테두리가 불분명한 비선형 얼룩 등이 발생될 수 있다. 이러한 평판 디스플레이 표면에 발생되는 얼룩을 검출하는 시스템의 예로서 목시 검사를 위한 매크로 장비 및 자동 얼룩 검출 장치를 들 수 있다. 그런데, 이러한 매크로 장비의 경우는 사람이 직접 조명과 검사 표면의 각도, 조명 특성 등을 조정하면서 사람이 직접 육안에 의해 얼룩을 검사하여 판별하게 됨으로써 검사의 정확성 및 생산성이 떨어지는 문제점이 있었다. 또한, 자동 얼룩 검출 장치의 경우는 일반적인 광학계와 카메라를 사용함으로써 평판 디스플레이 제조 과정 중에 발생되는 얼룩에 대한 검출력이 현저하게 떨어지는 문제점이 있었다. A flat panel display (FPD) may generate a specific type of linear stain or non-linear stain with an uneven edge on its surface during manufacturing. Examples of a system for detecting spots generated on such flat panel display surfaces include macro equipment for visual inspection and automatic spot detection apparatus. However, in the case of such macro equipment, there is a problem in that the accuracy and productivity of the inspection are deteriorated since the person directly inspects and determines the spot by the naked eye while directly adjusting the illumination and the angle of the inspection surface, lighting characteristics and the like. In addition, in the case of the automatic spot detection apparatus, there is a problem that the detection power for the spots generated during the manufacturing process of the flat panel display is significantly reduced by using a general optical system and a camera.

이에 본 발명은 상기와 같은 문제점을 해결하기 위한 것으로서, 검사 표면의 각도나 조명 특성의 조정 없이도 다양한 종류의 얼룩들을 검출할 수 있을 뿐만 아니라 미세한 밝기 차이를 구별하여 얼룩에 대한 검출력을 향상시킬 수 있는 평판 디스플레이 얼룩 검출 장치를 제공하는데 그 목적이 있다. Accordingly, the present invention is to solve the above problems, it is possible to not only detect various kinds of stains without adjusting the angle or illumination characteristics of the inspection surface, it is possible to improve the detection power for spots by distinguishing minute brightness differences It is an object of the present invention to provide a flat panel display spot detection device.

상기와 같은 목적을 달성하기 위하여 본 발명에 따른 평판 디스플레이 표면 위의 얼룩을 검출하는 장치는, 빛을 균일하게 처리한 후 균일해진 빛을 직진성 있게 평판 디스플레이 표면으로 조사시키는 조명 광학계와; 상기 조명 광학계를 통하여 평판 디스플레이 표면으로 조사되어 반사되는 빛 중에서 직진성 있는 빛만을 수 광하여 결상시키는 결상 광학계와; 상기 결상 광학계를 통하여 결상 처리된 평판 디스플레이 표면 영상을 획득하는 카메라를 구비한 것을 특징으로 한다. In order to achieve the above object, an apparatus for detecting a spot on a flat panel display surface according to the present invention comprises: an illumination optical system for irradiating the flattened light straight to the flat surface after the uniform treatment of the light; An imaging optical system configured to receive and image only linear light from light irradiated onto the flat panel display surface through the illumination optical system; And a camera for acquiring an image of a flat panel display image formed by the imaging optical system.

여기서, 상기 카메라는 12 비트 이상의 이미지 깊이를 갖고 노이즈를 최소화 시킬 수 있도록 Cooled CCD(Charge-Coupled Device)를 사용한 CCD 카메라이거나, 라인 스캔일 경우 TDI(Time Delayed Integration) 카메라인 것이 바람직하다. The camera may be a CCD camera using a cooled CCD (Charge-Coupled Device) to minimize noise and have an image depth of 12 bits or more, or a time delayed integration (TDI) camera in the case of a line scan.

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이하, 첨부된 도면을 참조하여 본 발명을 상세히 설명하기로 한다.Hereinafter, with reference to the accompanying drawings will be described in detail the present invention.

도 1 은 본 발명에 따른 평판 디스플레이 얼룩 검출 장치의 개념도이고, 도 2 는 본 발명에 따른 조명 광학계를 설명하기 위한 개념도이고, 도 3 은 본 발명에 따라 얼룩을 검출하는 원리를 설명하기 위한 도면이다. 1 is a conceptual diagram of a flat panel display spot detection apparatus according to the present invention, FIG. 2 is a conceptual view illustrating an illumination optical system according to the present invention, and FIG. 3 is a view illustrating a principle of detecting spots according to the present invention. .

도시한 바와 같이 같이, 본 발명의 얼룩 검출 장치는 평판 디스플레이 검사면의 각도나 조명 특성의 지속적인 조정 없이 얼룩을 검출할 수 있을 뿐만 아니라 미세한 밝기 차이를 구별하여 얼룩에 대한 검출력을 향상시킬 수 있도록, 얼룩 검출을 위하여 특수하게 제작된 균일하고 직진성이 높은 조명을 만들어주는 조명 광학계(100), 조명 광학계(100)에서 만들어진 조명을 이용하여 미세한 밝기 차이를 극대화시켜 줄 수 있도록 결상을 맺는 결상 광학계(200) 및 결상 광학계(200)에서 맺어진 결상에 대한 고감도의 영상을 촬영하는 고감도 카메라(300)로 이루어진다. As shown in the figure, the spot detection apparatus of the present invention not only detects spots without continuously adjusting the angle or illumination characteristics of the flat panel display surface, but also makes it possible to distinguish minute brightness differences and improve detection ability of spots. An imaging optical system that forms an image to maximize the difference in brightness by using the illumination optical system 100 that creates a uniform and highly straightforward illumination specially manufactured for spot detection, and the illumination produced by the illumination optical system 100 (200). And a high sensitivity camera 300 for taking a high sensitivity image for the imaging formed in the imaging optical system 200.

상기 조명 광학계(100)는 광원(110), 라이트 파이프(120) 및 여러 종류의 렌즈가 조합된 렌즈계(130)로 이루어지는데, 발광된 빛을 균일하게 처리한 후 균일해진 빛을 직진성이 높은 빛으로 처리하여 평판 디스플레이의 검사면으로 조사시킨다. 즉, 도 2 에 도시한 바와 같이, 광원(110)에서 빛을 발광하게 되면 불균일한 상태의 빛(ⓐ)이 라이트 파이프(120)를 거치면서 내부 전반사를 통하여 균일한 상태의 빛(ⓑ)으로 처리되고, 렌즈계(130)를 통하여 균일한 상태의 빛이 직진성을 갖도록 처리되어 평판 디스플레이의 검사면으로 조사된다. 이 때, 상기 렌즈계(130)는 직진성이 높은 빛만이 조사될 수 있도록 주광선의 출사각이 광축 기준으로 ±1° 이내가 되도록 설계하는 것이 바람직하다. The illumination optical system 100 is composed of a light source 110, a light pipe 120 and a lens system 130 is a combination of several types of lenses, the uniformity of the light after processing the emitted light uniformly high linearity light Processing to irradiate the inspection surface of the flat panel display. That is, as shown in FIG. 2, when light is emitted from the light source 110, the light ⓐ in an uneven state passes through the light pipe 120 to the light ⓑ in a uniform state through total internal reflection. Through the lens system 130, the light in a uniform state is processed to have straightness and irradiated to the inspection surface of the flat panel display. In this case, the lens system 130 is preferably designed such that the emission angle of the chief ray is within ± 1 ° with respect to the optical axis so that only the light of high straightness can be irradiated.

상기 결상 광학계(200)는 상기 조명 광학계(100)에서 조사된 빛이 평판 디스플레이의 검사면으로부터 반사·굴절한 다음 다시 모여 그 검사면과 닮은 형태의 상(像)을 맺을 수 있도록 여러 종류의 렌즈가 조합된 형태로 구성할 수 있는데, 상기 조명 광학계(100)를 통하여 평판 디스플레이의 검사면으로 조사되어 반사되는 빛 중에서 직진성 있는 빛만을 수광하여 결상(結像)시키게 된다. 이 때, 결상 광학계(200)는 평판 디스플레이의 검사면 내부의 빛 흐름 현상 즉 내부 전반사에 의한 영상 불균일 현상이 발생되지 않도록 결상 경로를 설계하는 것이 좋다. The imaging optical system 200 has various types of lenses so that the light irradiated from the illumination optical system 100 can be reflected and refracted from the inspection surface of the flat panel display and then gathered again to form an image similar to the inspection surface. May be configured in a combined form, and receives only an image of linear light from the light that is irradiated to the inspection surface of the flat panel display through the illumination optical system 100 to form an image. In this case, the imaging optical system 200 may design an imaging path so that light flow phenomenon inside the inspection surface of the flat panel display, that is, image irregularity caused by total internal reflection, does not occur.

영상 불균일 현상이 발생되지 않는 결상 경로로 설계된 결상 광학계(200)는, 도 3 에 도시한 바와 같이 평판 디스플레이로부터 표면 반사된 빛 성분(굵은 화살표:얼룩에 의해 반사된 빛 성분), 굴절/내부 반사된 빛 성분(굵은 화살표:얼룩에 의해 반사된 빛 성분) 및 간섭된 빛 성분이 조합된 형태의 빛만을 수광하여 결상시키게 된다. 도면에 도시한 바와 같이, 빛 상호 간의 간섭에 의하여 φ1의 입사각으로 입사되는 빛은 φ2의 출사각으로 반사된다. 이렇게 설계된 결상 광학계(200)를 사용하게 되면 영상 불균일 현상이 발생되지 않기 때문에 조명 균일도를 해석하여 얼룩을 검출할 수 있게 된다. 그런데, 결상 광학계(200)는 구조적으로 직진성이 높은 빛만이 수광될 수 있도록 주광선의 입사각이 광축 기준으로 ±1° 이내가 되도록 설계하는 것이 바람직하다. The imaging optical system 200, which is designed as an imaging path in which an image non-uniformity does not occur, has a light component (a thick arrow: light component reflected by a stain) and reflection / internal reflection reflected from a flat panel display as shown in FIG. Only the light having a combination of the light component (thick arrow: light component reflected by the stain) and the interfering light component is received and imaged. As shown in the figure, light incident at an angle of incidence of? 1 due to interference between the lights is reflected at an emission angle of? 2. When the imaging optical system 200 is designed as described above, an image non-uniformity does not occur, and thus, unevenness may be detected by analyzing illumination uniformity. However, the imaging optical system 200 is preferably designed such that the incident angle of the chief ray is within ± 1 ° based on the optical axis so that only light having a high linearity can be received.

상기 고감도 카메라(300)는 미세한 밝기 정보를 구별할 수 있을 정도의 고성능 카메라로서 상기 결상 광학계(200)를 통하여 결상 처리된 평판 디스플레이 검사면의 영상을 획득할 수 있는데, 획득된 영상에서 밝기가 상이한 부분을 얼룩이 있다고 판단할 수 있다. 그런데, 이러한 고감도 카메라(300)는, 2D의 경우에는 감도가 뛰어나고 노이즈가 적은 12비트 이상의 이미지 깊이(Image depth)를 갖고 노이즈를 최소화 시킬 수 있도록 Cooled CCD(Charge-Coupled Device)를 사용한 CCD 카메라가 적합하고, 라인 스캔의 경우에는 CCD 잡음을 최소화시킨 TDI 카메라(Time Delayed Integration Camera)가 적합하다. The high-sensitivity camera 300 is a high-performance camera capable of distinguishing fine brightness information and may acquire an image of a flat panel display inspection surface formed through the imaging optical system 200. It can be judged that the part is stained. However, the high-sensitivity camera 300 is a CCD camera using a cooled CCD (Charge-Coupled Device) to minimize noise with an image depth of 12 bits or more, which is excellent in sensitivity and low in 2D. In the case of line scan, a TDI camera (Time Delayed Integration Camera) that minimizes CCD noise is suitable.

한편, 본 발명에 따른 평판 디스플레이 얼룩 검출 장치를 한정된 실시예에 따라 설명하였지만, 본 발명의 범위는 특정 실시예에 한정되는 것은 아니며, 본 발명과 관련하여 통상의 지식을 가진자에게 자명한 범위내에서 여러 가지의 대안, 수정 및 변경하여 실시할 수 있다. On the other hand, although the flat panel display spot detection apparatus according to the present invention has been described according to a limited embodiment, the scope of the present invention is not limited to the specific embodiment, it is within the scope obvious to those skilled in the art with respect to the present invention. Many alternatives, modifications and changes can be made.

본 발명에 따르면, 평판 디스플레이의 각도나 조명 특성을 조정하지 않고 평판 디스플레이를 검사함으로써 평판 디스플레이 표면의 얼룩을 규칙성 있게 효과적으로 검출할 수 있다. 또한, 미세한 밝기 차이의 구별에 의하여 평판 디스플레이를 검사함으로써 평판 디스플레이 표면의 얼룩 검출력을 향상시킬 수 있다. According to the present invention, irregularities on the surface of the flat panel display can be detected effectively and regularly by inspecting the flat panel display without adjusting the angle or illumination characteristics of the flat panel display. In addition, by inspecting the flat panel display by distinguishing the minute brightness difference, the spot detection power of the flat panel display surface can be improved.

Claims (6)

삭제delete 평판 디스플레이 표면 위의 얼룩을 검출하는 장치로서, A device for detecting spots on a flat panel display surface, 빛을 발광하는 광원, 내부 전반사를 통하여 발광된 빛을 균일하게 처리하는 라이트 파이프 및 균일해진 빛을 직진성을 갖도록 처리하여 평판 디스플레이 표면으로 조사시키는 렌즈계를 구비한 조명 광학계와; An illumination optical system having a light source for emitting light, a light pipe for uniformly processing the light emitted through total internal reflection, and a lens system for treating the uniformized light to have a straightness to irradiate the flat display surface; 상기 조명 광학계를 통하여 평판 디스플레이 표면으로 조사되어 반사되는 빛 중에서 직진성 있는 빛만을 수광하여 결상시키는 결상 광학계와; An imaging optical system configured to receive and image only linear light from light irradiated to the flat panel display surface through the illumination optical system; 상기 결상 광학계를 통하여 결상 처리된 평판 디스플레이 표면 영상을 획득하는 카메라를 구비한 것을 특징으로 하는 평판 디스플레이 얼룩 검출 장치. And a camera for acquiring an image of a flat panel display image formed by the imaging optical system. 삭제delete 삭제delete 제 2 항에 있어서, The method of claim 2, 상기 카메라는, 12 비트 이상의 이미지 깊이를 갖고 노이즈를 최소화 시킬 수 있도록 Cooled CCD(Charge-Coupled Device)를 사용한 CCD 카메라인 것을 특징으로 하는 평판 디스플레이 얼룩 검출 장치. And the camera is a CCD camera using a cooled CCD (Charge-Coupled Device) to minimize noise and have an image depth of 12 bits or more. 제 2 항에 있어서, The method of claim 2, 상기 카메라는, TDI(Time Delayed Integration) 카메라인 것을 특징으로 하는 평판 디스플레이 얼룩 검출 장치. And the camera is a TDI (Time Delayed Integration) camera.
KR1020060051317A 2006-06-08 2006-06-08 Apparatus for detecting mura of flat panel display KR100759426B1 (en)

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KR20040094817A (en) * 2002-03-28 2004-11-10 타카이 토후 앤 소이 밀크 이큅먼트 컴퍼니 리미티드 Evaluation method and device for gel state or sol-gel state change of object

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