KR100757574B1 - 유기전계 발광소자용 마스크 - Google Patents
유기전계 발광소자용 마스크 Download PDFInfo
- Publication number
- KR100757574B1 KR100757574B1 KR1020010056817A KR20010056817A KR100757574B1 KR 100757574 B1 KR100757574 B1 KR 100757574B1 KR 1020010056817 A KR1020010056817 A KR 1020010056817A KR 20010056817 A KR20010056817 A KR 20010056817A KR 100757574 B1 KR100757574 B1 KR 100757574B1
- Authority
- KR
- South Korea
- Prior art keywords
- light emitting
- mask
- slot
- metal mask
- organic material
- Prior art date
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Classifications
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/10—Deposition of organic active material
- H10K71/16—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering
- H10K71/166—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering using selective deposition, e.g. using a mask
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/04—Coating on selected surface areas, e.g. using masks
- C23C14/042—Coating on selected surface areas, e.g. using masks using masks
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/10—Deposition of organic active material
- H10K71/16—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering
- H10K71/164—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering using vacuum deposition
Abstract
Description
Claims (3)
- 유입되는 유기물질이 통과하도록 일정한 간격으로 형성되는 슬롯들과,인접한 상기 슬롯들을 연결하는 슬릿을 구비하고,상기 슬릿은 상기 슬롯의 폭보다 작은 것을 특징으로 하는 유기전계 발광소자용 마스크.
- 제 1 항에 있어서,상기 슬릿의 폭은 상기 슬롯의 폭대비 20% ~ 80%의 범위인 것을 특징으로 하는 유기전계 발광소자용 마스크.
- 제 1 항에 있어서,상기 마스크는 인접한 상기 슬롯들 사이에 슬릿들이 형성되어 긴 스트라이프 형태인 것을 특징으로 하는 유기전계 발광소자용 마스크.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020010056817A KR100757574B1 (ko) | 2001-09-14 | 2001-09-14 | 유기전계 발광소자용 마스크 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020010056817A KR100757574B1 (ko) | 2001-09-14 | 2001-09-14 | 유기전계 발광소자용 마스크 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20030027168A KR20030027168A (ko) | 2003-04-07 |
KR100757574B1 true KR100757574B1 (ko) | 2007-09-10 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020010056817A KR100757574B1 (ko) | 2001-09-14 | 2001-09-14 | 유기전계 발광소자용 마스크 |
Country Status (1)
Country | Link |
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KR (1) | KR100757574B1 (ko) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3915734B2 (ja) | 2003-05-12 | 2007-05-16 | ソニー株式会社 | 蒸着マスクおよびこれを用いた表示装置の製造方法、ならびに表示装置 |
KR100657024B1 (ko) * | 2004-07-24 | 2006-12-13 | 주식회사 타이가 | 돔형 건축물의 지붕막 설치장치 |
KR20100026655A (ko) | 2008-09-01 | 2010-03-10 | 삼성모바일디스플레이주식회사 | 박막 증착용 마스크 및 이를 이용한 유기전계발광 소자의 제조방법 |
KR20110101980A (ko) | 2010-03-10 | 2011-09-16 | 삼성모바일디스플레이주식회사 | 유기 발광 표시 장치 및 그 제조방법 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20010055531A (ko) * | 1999-12-10 | 2001-07-04 | 김순택 | 평면형 음극선관용 섀도우마스크 프레임 조립체 |
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2001
- 2001-09-14 KR KR1020010056817A patent/KR100757574B1/ko active IP Right Grant
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20010055531A (ko) * | 1999-12-10 | 2001-07-04 | 김순택 | 평면형 음극선관용 섀도우마스크 프레임 조립체 |
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Publication number | Publication date |
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KR20030027168A (ko) | 2003-04-07 |
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