KR100727646B1 - 이온 플레이팅장치의 금속타겟용 자속유도구 - Google Patents
이온 플레이팅장치의 금속타겟용 자속유도구 Download PDFInfo
- Publication number
- KR100727646B1 KR100727646B1 KR1020050118434A KR20050118434A KR100727646B1 KR 100727646 B1 KR100727646 B1 KR 100727646B1 KR 1020050118434 A KR1020050118434 A KR 1020050118434A KR 20050118434 A KR20050118434 A KR 20050118434A KR 100727646 B1 KR100727646 B1 KR 100727646B1
- Authority
- KR
- South Korea
- Prior art keywords
- magnetic flux
- metal target
- flux guide
- ion plating
- plating apparatus
- Prior art date
Links
- 229910052751 metal Inorganic materials 0.000 title claims abstract description 56
- 239000002184 metal Substances 0.000 title claims abstract description 56
- 238000007733 ion plating Methods 0.000 title claims abstract description 19
- 230000006698 induction Effects 0.000 title claims abstract description 18
- 230000004907 flux Effects 0.000 claims abstract description 62
- 238000000034 method Methods 0.000 claims description 5
- 238000001816 cooling Methods 0.000 claims description 2
- 238000010891 electric arc Methods 0.000 abstract description 5
- 239000000463 material Substances 0.000 description 14
- 238000000576 coating method Methods 0.000 description 8
- 229910021645 metal ion Inorganic materials 0.000 description 8
- 239000011248 coating agent Substances 0.000 description 5
- 150000002500 ions Chemical class 0.000 description 4
- 238000005229 chemical vapour deposition Methods 0.000 description 3
- 238000005240 physical vapour deposition Methods 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 2
- 239000011247 coating layer Substances 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 230000003213 activating effect Effects 0.000 description 1
- 238000005266 casting Methods 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000002542 deteriorative effect Effects 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 229910001385 heavy metal Inorganic materials 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000000197 pyrolysis Methods 0.000 description 1
- 239000012495 reaction gas Substances 0.000 description 1
- 238000006722 reduction reaction Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000002345 surface coating layer Substances 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Images
Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/46—Sputtering by ion beam produced by an external ion source
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16B—DEVICES FOR FASTENING OR SECURING CONSTRUCTIONAL ELEMENTS OR MACHINE PARTS TOGETHER, e.g. NAILS, BOLTS, CIRCLIPS, CLAMPS, CLIPS OR WEDGES; JOINTS OR JOINTING
- F16B35/00—Screw-bolts; Stay-bolts; Screw-threaded studs; Screws; Set screws
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F7/00—Magnets
- H01F7/02—Permanent magnets [PM]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/67207—Apparatus for manufacturing or treating in a plurality of work-stations comprising a chamber adapted to a particular process
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- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- General Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Power Engineering (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- Physical Vapour Deposition (AREA)
Abstract
Description
Claims (4)
- 금속타겟의 일면에 결합되는 판 형상의 고정플레이트와; 상기 고정플레이트의 후면에 고정되어 있으며, 내부에는 외부로부터 전류가 인가되면 자장이 형성되도록 사각 링 형태를 가지면서 권선되어 있는 제1 자속유도선과, 사각 링 형태를 가지며 상기 제1 자속유도선의 내측에 위치되는 제2 자속유도선으로 이루어진 자속유도선이 마련되어 있는 자속유도구로 구성되어 있는 이온 플레이팅장치의 금속타겟용 자속 유도구에 있어서,상기 고정플레이트는 상기 금속타겟에 고정할 수 있도록 볼트가 체결되는 체결공이 형성되며, 상기 제1 및 제2 자속유도선이 상기 고정플레이트의 외측으로 노출되지 않도록 테두리부가 돌출되어 형성되는 고정테와, 상기 고정테의 내측으로 일정간격 이격된 상기 고정플레이트의 부위에서 돌출되어 형성되며 상기 제1 자속유도선이 삽입되어 고정되는 제1 코어와, 상기 제1 코어의 내측으로 일정간격 이격된 상기 고정플레이트의 부위에서 돌출되며 상기 제2 자속유도선이 삽입되어 고정되는 제2 코어를 가지는 것을 특징으로 하는 이온 플레이팅장치의 금속타겟용 자속 유도구.
- 삭제
- 삭제
- 제 1 항에 있어서,상기 고정플레이트에는 냉각관이 삽입되도록 관통공이 더 형성되어 있는 것을 특징을 하는 이온 플레이팅장치의 금속타겟용 자속 유도구.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020050118434A KR100727646B1 (ko) | 2005-12-06 | 2005-12-06 | 이온 플레이팅장치의 금속타겟용 자속유도구 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020050118434A KR100727646B1 (ko) | 2005-12-06 | 2005-12-06 | 이온 플레이팅장치의 금속타겟용 자속유도구 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20070059514A KR20070059514A (ko) | 2007-06-12 |
KR100727646B1 true KR100727646B1 (ko) | 2007-06-13 |
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KR1020050118434A KR100727646B1 (ko) | 2005-12-06 | 2005-12-06 | 이온 플레이팅장치의 금속타겟용 자속유도구 |
Country Status (1)
Country | Link |
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KR (1) | KR100727646B1 (ko) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20050084412A (ko) * | 2002-12-19 | 2005-08-26 | 어낵시스 발처스 악티엔게젤샤프트 | 자기장 발생 장치를 포함하는 진공 아크 공급 장치 |
-
2005
- 2005-12-06 KR KR1020050118434A patent/KR100727646B1/ko active IP Right Grant
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20050084412A (ko) * | 2002-12-19 | 2005-08-26 | 어낵시스 발처스 악티엔게젤샤프트 | 자기장 발생 장치를 포함하는 진공 아크 공급 장치 |
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KR20070059514A (ko) | 2007-06-12 |
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