KR100697374B1 - 박막트랜지스터의 어레이기판 제조방법 - Google Patents
박막트랜지스터의 어레이기판 제조방법 Download PDFInfo
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- KR100697374B1 KR100697374B1 KR1020000084176A KR20000084176A KR100697374B1 KR 100697374 B1 KR100697374 B1 KR 100697374B1 KR 1020000084176 A KR1020000084176 A KR 1020000084176A KR 20000084176 A KR20000084176 A KR 20000084176A KR 100697374 B1 KR100697374 B1 KR 100697374B1
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1337—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
- G02F1/133711—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by organic films, e.g. polymeric films
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1337—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
- G02F1/133711—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by organic films, e.g. polymeric films
- G02F1/133723—Polyimide, polyamide-imide
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1337—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
- G02F1/13378—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by treatment of the surface, e.g. embossing, rubbing or light irradiation
- G02F1/133784—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by treatment of the surface, e.g. embossing, rubbing or light irradiation by rubbing
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1337—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
- G02F1/13378—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by treatment of the surface, e.g. embossing, rubbing or light irradiation
- G02F1/133788—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by treatment of the surface, e.g. embossing, rubbing or light irradiation by light irradiation, e.g. linearly polarised light photo-polymerisation
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- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Mathematical Physics (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Liquid Crystal (AREA)
- Thin Film Transistor (AREA)
Abstract
Description
Claims (3)
- 투명성 절연기판상에 게이트용 금속층을 증착한 후, 이를 패터닝하여 게이트전극을 형성하는 단계;상기 게이트전극이 형성된 투명성 절연기판 전면상에 게이트절연층을 형성하는 단계;상기 게이트절연층상에 반도체층을 형성하고, 상기 반도체층의 소정영역에 식각저지층을 순차적으로 형성하는 단계;상기 식각저지층이 형성된 반도체층상에 오믹층을 형성하고, 상기 반도체층과 오믹층의 일정부분을 제거하여 게이트절연층의 일부분을 노출시키는 단계;상기 반도체층과 오믹층의 일정부분이 제거되어 일부분이 노출된 게이트절연층상에 화소전극을 형성하는 단계;상기 오믹층, 노출된 게이트절연층 및 화소전극상에 소오스 및 드레인전극을 형성하여, 상기 화소전극의 일단부와 소오스전극의 일단부를 접속시키는 단계; 및상기 화소전극, 소오스 및 드레인전극을 포함한 투명성 절연기판 상부에 상기 화소전극, 소오스 및 드레인전극을 덮는 배향막 기능을 갖는 보호막을 형성하는 단계를 포함하는 것을 특징으로 하는 박막트랜지스터의 어레이기판 제조방법.
- 제 1 항에 있어서,상기 보호막 재료는 폴리이미드계 또는 폴리아미드산계의 배향제를 포함하는 것을 특징으로 하는 박막트랜지스터의 어레이기판 제조방법.
- 제 2 항에 있어서,상기 보호막 재료는 아크릴계 감광성 유기고분자수지 또는 아크릴계 비감광성 유기고분자수지를 혼합하여 사용하는 것을 특징으로 하는 박막트랜지스터의 어레이기판 제조방법.
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KR1020000084176A KR100697374B1 (ko) | 2000-12-28 | 2000-12-28 | 박막트랜지스터의 어레이기판 제조방법 |
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KR1020000084176A KR100697374B1 (ko) | 2000-12-28 | 2000-12-28 | 박막트랜지스터의 어레이기판 제조방법 |
Publications (2)
Publication Number | Publication Date |
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KR20020054911A KR20020054911A (ko) | 2002-07-08 |
KR100697374B1 true KR100697374B1 (ko) | 2007-03-20 |
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KR1020000084176A KR100697374B1 (ko) | 2000-12-28 | 2000-12-28 | 박막트랜지스터의 어레이기판 제조방법 |
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Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
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KR100857719B1 (ko) * | 2001-03-26 | 2008-09-08 | 엘지디스플레이 주식회사 | 액정표시장치 및 그 제조방법 |
KR101004546B1 (ko) * | 2003-12-29 | 2011-01-03 | 엘지디스플레이 주식회사 | 액정표시장치 및 그 제조방법 |
KR101240652B1 (ko) | 2006-04-24 | 2013-03-08 | 삼성디스플레이 주식회사 | 표시 장치용 박막 트랜지스터 표시판 및 그 제조 방법 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62296123A (ja) * | 1986-06-17 | 1987-12-23 | Toshiba Corp | アクテイブマトリツクス型液晶表示装置 |
JPH05173176A (ja) * | 1991-12-20 | 1993-07-13 | Toshiba Corp | 液晶表示装置の製造方法 |
JP2000187241A (ja) * | 1998-12-22 | 2000-07-04 | Sharp Corp | 液晶表示装置及びその製造方法 |
KR20000073219A (ko) * | 1999-05-07 | 2000-12-05 | 구본준 | 멀티도메인 액정표시소자 |
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- 2000-12-28 KR KR1020000084176A patent/KR100697374B1/ko active IP Right Grant
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62296123A (ja) * | 1986-06-17 | 1987-12-23 | Toshiba Corp | アクテイブマトリツクス型液晶表示装置 |
JPH05173176A (ja) * | 1991-12-20 | 1993-07-13 | Toshiba Corp | 液晶表示装置の製造方法 |
JP2000187241A (ja) * | 1998-12-22 | 2000-07-04 | Sharp Corp | 液晶表示装置及びその製造方法 |
KR20000073219A (ko) * | 1999-05-07 | 2000-12-05 | 구본준 | 멀티도메인 액정표시소자 |
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