KR100693766B1 - Test tray and latch open/close system of test tray insert for probing semiconductor device - Google Patents

Abstract

A test tray and a latch opening/closing system of a test tray insert for probing a semiconductor device are provided to load and fix a plurality of inserts therein by fixing an insert cover on an upper surface of a toggle. A test tray includes a rectangular rim(101), a plurality of partitions defined inside the rectangular rim, an inset supporting frame, and a plurality of insert receiving units formed by the inset supporting frame. Each of inserts(200) includes a spring(203), a toggle(202) supported elastically by the spring, and a latch(204) rotated by the toggle. The inserts are loaded into the test tray. The inserts are inserted into the insert receiving units. An insert cover(300) is fixed on an upper surface of the toggle of the insert in order to prevent the separation of the insert.

Description

TEST TRAY AND LATCH OPEN / CLOSE SYSTEM OF TEST TRAY INSERT FOR PROBING SEMICONDUCTOR DEVICE}

1 is a perspective view showing a latch opening and closing system of a test tray and a test tray insert according to the prior art

FIG. 2 is a cross-sectional view illustrating a state in which the toggle of the test tray insert of FIG. 1 is pressed by the toggle pusher block of the latch open plate to open the latch of the insert; FIG.

3 is a partially exploded perspective view illustrating a latch opening and closing system of a test tray and a test tray insert according to an exemplary embodiment of the present invention.

Figure 4 is a side cross-sectional view showing a closed state of the latch of the test tray insert according to an embodiment of the present invention

Figure 5 is a side cross-sectional view showing a latch open state of the test tray insert according to an embodiment of the present invention.

FIG. 6 is a partially exploded perspective view illustrating a latch opening and closing system of a test tray and a test tray insert according to another exemplary embodiment of the present invention.

Figure 7 is a perspective view showing a partially cut open the latch opening and closing system of the test tray and the test tray insert according to an embodiment of the present invention

8 is a side cross-sectional view showing the latch of the test tray insert of FIG.

Explanation of symbols on the main parts of the drawings

100. Test Tray 101. Border

102. Partition wall 103. Insert support frame

104. Bolt fastener 110. Insert compartment

200. Insert 201. Insert bottom rim

202. Toggle 203. Spring members

204. Latch 300. Insert cover

301. Bolt Fasteners 310. Bolts

400. Insert push plate 401. Insert push block

600. Test Tray 601. Border

602. Partition walls. 603. Insert pocket seat.

604. Bolt fasteners 610. Insert pocket seat

700. Insert 701. Insert bottom rim

702. Toggle 703. Spring members

704. Latch 760. Insert Pocket

761. Seating wings 763. Insert support frame

766. Insert compartment 800. Insert cover

801. Bolt Fasteners 810. Bolts

900. Insert push plate 901. Insert push block

The present invention relates to a latch opening and closing system of a test tray and a test tray insert. More specifically, the push push of a simple structure is used to rotate the latch so that the semiconductor element is loaded / unloaded into the insert center stack. The test tray and the test tray insert are equipped with a simple insert push plate which has a plate to push the insert bottom rim so that the toggle on the insert top is interviewed by the insert cover fastened to the test tray and pressed to open and rotate the latch. A latch opening and closing system.

In general, in a semiconductor device test handler, a picker, which is a semiconductor device loading / unloading device on a loading unit, in which an untested semiconductor device loaded in a customer tray is loaded into an insert of a test tray as a pre-test of the semiconductor device. A test preparation process of a semiconductor device is performed in which an adsorption head loads the semiconductor device into an insert of a test tray.

In the semiconductor device test process in which the semiconductor device loaded on the test tray insert is tested, the pusher block of the match plate descends upward and pushes the semiconductor device on the solder ball and the test head of the bottom surface of the semiconductor device. The contact pins of the provided test sockets are contacted to test the electrical characteristics to confirm whether the semiconductor device is normal.

In this case, in order to load / unload the semiconductor device into the insert of the test tray, the latch must be rotated by pressing a toggle protruding from the upper part of the insert fixed to the test tray by fasteners or bolts.

Such an operating system for opening and closing the test tray 10 and the latch 23 of the test tray insert 20 according to the prior art is shown in FIGS. 1 and 2.

1 is a perspective view illustrating a latch opening and closing system of a test tray and a test tray insert according to the prior art, and FIG. 2 is a toggle of the test tray insert of FIG. 1 pressed by a toggle pusher block of a latch open plate to open a latch of the insert. It is sectional drawing which shows the state.

1 and 2 while pressing the toggle 21 of the test tray 10 and the test tray insert 20 used in the semiconductor device test handler (not shown) according to the prior art while the spring member 22 of one side is compressed A latch open plate 30 is shown which allows the latch 23 to rotate.

The latch 23 of the insert serves as a locking piece to prevent the semiconductor device stored in the insert loading part from being separated, and the toggle 21 of the insert serves as a pressing piece to rotate the insert latch.

A plurality of inserts 20 are fastened to the test tray 10 by fasteners 26 or bolts, respectively.

Therefore, the conventional test tray 10 requires a large number of fasteners 26 or bolts in proportion to the number of inserts 20, and also utilizes the space of the test tray 10 because bolt insertion holes must be formed. There was a problem with the restriction.

On the bottom of the latch open plate 30, a plurality of insert toggle pusher blocks 31, which are precisely matched with the toggle 21 protruding from the upper surface of the insert 20 stored in the test tray, are pressed, a large number of fasteners or bolts ( 32).

In addition, a cutting hole 33 is inserted between the toggle pusher blocks 31 of the latch open plate 30 so that the semiconductor device D is loaded / unloaded.

Therefore, as described above, the latch open plate 30 of the related art requires a fastening hole 32a for fastening many fasteners 32 or bolts, and a cutting hole 33 into which the semiconductor device D is inserted. Since it is structurally complicated and takes a lot of manufacturing cost and assembly time, there is a problem in that partition walls 35 for partitioning the cut holes 33 must be thinly formed because a complicated shape is required.

Accordingly, the latch open plate 30 may be bent in a test handler (not shown), and the toggle pusher block 31 of the latch open plate 30 may be accurately interviewed with the insert toggle 21 of the test tray. There was a structural problem that could not be pressed.

As a result, the rotation operation angle of the insert latch 23 cannot be uniformly maintained, and thus a phenomenon in which the semiconductor device D loaded / unloaded from the center loading part of the insert 20 is released occurs, which requires a precise test yield. There was a problem that the reliability of the equipment is poor.

The present invention is to overcome the above-mentioned conventional problems, an object of the present invention is to support the storage in the test tray structure that is different from the prior art that requires a large number of bolts by bolting each insert to the test tray Since the plate-shaped insert cover is interviewed with a minimum bolt on the toggle upper surface of one or more inserts, that is, a plurality of inserts adjacent to the test tray are simultaneously fastened by two bolts. The fixed structure provides a test tray for accommodating and fixing a larger number of inserts with a minimum number of bolts.

The object of the present invention is that the insert support frame of each insert housing is inserted into the plurality of insert housings formed by the plurality of partition walls and the insert support frame, which are equally spaced inside the rectangular rim, so that the inserts can flow up and down. An upper circumferential surface of the insert is interviewed on the upper surface, and a plate-shaped insert cover having a predetermined width is interviewed on the upper surface of the insert so that the insert does not deviate upward.

Another object of the present invention is to press the toggle of the insert accurately on the upper surface of the test tray and to insert a hole for loading / unloading a semiconductor device, so that more toggle pusher blocks and a large number of bolts are engaged in a complicated shape latch In a structure different from the prior art in which an open plate should be provided, only a simple insert pusher block without a bolt is projected from the bottom of a test tray in which a plurality of inserts are movable up and down, so that the production cost is easy and accurate. An object of the present invention is to provide a latch opening and closing system for a test tray insert having a structure in which an insert push plate which is capable of pushing up the bottom edge of the insert so that the latch of the insert can be accurately rotated is operated.

The object of the present invention is that the insert push plate protruding from the insert pusher block at a position corresponding to the bottom edge of the insert exposed on the bottom of the test tray is liftable so that the latch of the test tray insert is rotatable. This is achieved by the latch opening and closing system of the test tray insert.

As an example of the latch opening and closing system of the test tray and the test tray insert according to the present invention for achieving the above object of the present invention, will be described in detail in the following configuration and effects.

The test tray according to the present invention for achieving the above object is the number of inserts formed by the plurality of partition walls 102 and the insert support frame 103 partitioned at equal intervals inside the rectangular edge 101. An insert 200 in which one side of the soldering part 110 is supported by the spring member 203 is protruded on the upper surface, and a toggle 202 that is vertically operated by an external force and a latch 204 that is rotated by the vertical operation of the toggle is installed. As the test tray 100 is accommodated, the insert 200 is inserted into the insert support frame 103 of each insert receiving portion 110 so that the insert 200 is inserted into the insert receiving portion 110 so as to be movable up and down. The upper circumferential surface of the 200 is supported by the interview, and the plate-shaped insert cover 300 having a predetermined width is interview-fixed to the upper surface of the toggle 202 of the insert so that the insert does not escape upward.

In addition, in the latch opening and closing system of the test tray insert according to the present invention, the insert push plates 400 and 900 having the insert push blocks 401 and 901 protruding at positions corresponding to the bottom edge of the insert exposed on the bottom of the test tray are provided. Elevated operation is characterized in that the latch of the test tray insert is rotated.

Hereinafter, a latch opening and closing system of a test tray and a test tray insert according to an exemplary embodiment of the present invention will be described in detail with reference to the accompanying drawings.

3 to 5, a latch opening and closing system of a test tray and a test tray insert according to an embodiment of the present invention is shown.

3 is a partially exploded perspective view illustrating a latch opening and closing system of a test tray and a test tray insert according to an embodiment of the present invention, and FIG. 4 is a view illustrating a closed state of a latch of a test tray insert according to an embodiment of the present invention. 5 is a side cross-sectional view, and FIG. 5 is a side cross-sectional view illustrating a state in which a latch of a test tray insert is open according to an embodiment of the present invention.

As shown in Figure 3 to 5, the test tray 100 according to an embodiment of the present invention is a toggle 202, one side of which is supported by the spring member 203 is projected on the upper surface and operated up and down by an external force And a plurality of compartments at equal intervals in which the inserts 200 including the latch 204 supporting the one side of the upper surface of the semiconductor device D loaded by the up and down operation of the toggle are accommodated. The insert receiving portion 110 formed by the partition wall 102 and the insert support frame 103 is formed.

Insert 200 is inserted into each insert receiving portion 110 of the test tray so as to be able to flow up and down, and insert cover 300 on the top surface of the toggle 202 of the insert 200 so that the insert does not escape upward Is interviewed.

As shown in FIG. 3, the insert cover 300 is interviewed with the top surface of the four toggles 202 of the four inserts 200 housed adjacent to the test tray and placed on the insert support frame 103 of the test tray. Two bolts. That is, the 16 inserts 200 stored in one row of the test tray according to an embodiment of the present invention are interviewed by the top surface of the toggle 202 by nine insert covers 300 and fixed to the test tray with 18 bolts. do.

Therefore, a large number of inserts 200 are simultaneously fixed to the test tray 100 by one insert cover 300 fastened and fixed by two bolts 310, thereby limiting the number of inserts with a minimum of bolts. It can be stored and fixed to the test tray of the space.

The insert housing 110 has a partition wall 102 of equal intervals is formed inside the rectangular edge 101, and the upper side of the insert is supported to allow the insert to be recessed and received inside the edge and the partition wall. The insert support frame 103 is partitioned.

On the other hand, the upper surface of the insert support frame 103 serves as a support jaw that is supported by the bottom surface of the circumferential surface (flange portion) of the insert 200 is interviewed and supported.

And, both ends of the insert support frame 103 of the insert housing 110, the bolt fastening hole in the extension direction of the insert toggle 202 so that the insert cover 300 is in contact with the upper surface of the insert toggle 202 ( 104 is formed, and the bolt 310 inserted into the bolt fastening hole 301 formed at both ends of the insert cover is screw-fastened, so that the insert accommodating part 110 of the insert cover 300 is formed on one side of the test tray 100. ) Is fixed to the insert support frame 103.

As described above, the insert 200 is downwardly caught from the bottom of the circumferential surface of the upper part of the insert 200 by the insert support frame 103 of the insert receiving portion 110 of the test tray, and is not detached downward. The top surface of the insert toggle 202 is interviewed on the bottom of the 300 so as not to be separated.

Therefore, the insert 200 inserted into the insert receiving unit 110 of the test tray as described above is able to flow up and down by the elasticity of the spring member 203 on one side of the toggle 202 and the test when a predetermined external force is applied. It flows at predetermined intervals in the insert receiving portion 110 of the tray.

Meanwhile, reference numeral 170 denotes a high-fix in which the semiconductor device D of the insert 200 loading part is located under the test tray 100 by the lowering of the semiconductor device pusher block (not shown) of the match plate (not shown). A guide hole (not shown) on one side of a match plate is inserted when a test of the semiconductor device D is performed while contacting a socket (not shown) on a board (not shown).

By the configuration as described above, the latch opening and closing system of the test tray insert according to an embodiment of the present invention operates as follows.

Referring to FIGS. 4 and 5, the operation of the latch opening / closing system of the test tray insert according to the exemplary embodiment of the present invention will be described in a position corresponding to the bottom edge 201 of the insert exposed to the bottom of the test tray. An insert push plate 400 protruding from the upper surface of the push block 401 which is interviewed by the insert bottom rim and pushed upward is provided to be movable on the bottom of the test tray 100.

At this time, the insert push block 401 of the insert push plate 400 is the insert by the coupling / separation with the bottom edge 201 of the insert according to the lifting operation to the bottom edge 201 of the insert of the test tray 100 The latch 204 is lifted and operated to rotate.

That is, when the insert push plate 400 is raised, the insert push block 401 protruding from the upper surface pushes the insert bottom rim 201 and protrudes on the insert upper surface while the insert 200 flows upward at a predetermined interval. The toggle 202 is pressed by the insert cover 300 so that the lower latch 204 is opened so that the upper surface of the semiconductor device D is not supported so that the semiconductor device D can be loaded / unloaded. .

Therefore, rather than pressing the toggle 202 of the insert protruding into a small area as in the prior art, the latch 204 is opened, and the insert bottom edge 201 of the larger area is pushed up to the toggle 202. The latch 204 of the insert is operated more precisely because of the structure that the latch 204 is rotated to be pressed.

Thereafter, when the insert push plate 400 is lowered, the toggle 202 of the insert pressed by the insert cover 300 is returned to its original position by the spring force 203 of one side, and the insert is moved downward. The latch 204 of the insert is moved to a predetermined interval and is closed to the original position to support one side of the upper surface of the semiconductor device D.

Therefore, the latch 204 of the insert is easily and accurately rotated by the lifting operation of the insert push plate, which is formed by only inserting the pusher block of the simple structure that does not require the bolt as described above.

6 is an exploded perspective view showing a latch opening and closing system of the test tray and the test tray insert according to another embodiment of the present invention, Figure 7 is a latch opening and closing of the test tray and test tray insert according to another embodiment of the present invention 8 is a perspective view of a partially cut away system, and FIG. 8 is a side cross-sectional view illustrating an open state of the latch of the test tray insert of FIG. 7.

Hereinafter, referring to FIGS. 6 to 8, a description of overlapping descriptions of the latch opening and closing system of the test tray and the test tray insert according to another exemplary embodiment will be omitted.

The test tray 600 according to another embodiment of the present invention is an insert pocket 760 in the insert pocket seat 610 formed by the plurality of partition walls 602 and the insert pocket seat 603 partitioned at equal intervals. ) Are seated.

Insert 700 is inserted into the insert receiving portion 766 of the insert pocket 760 so as to flow up and down, the insert 700 and the insert pocket 760 is separated upwards on the top surface of the toggle 702 of the insert Insert cover 800 is interviewed so as not to be.

The insert pocket seating portion 610 of the test tray 600 has a partition wall 602 of equal intervals formed inside the rectangular rim 601, and is formed extending from the outer side of the insert pocket inside the edge and partition wall. The insert pocket seating piece 603 on which the seating blade 761 is caught and supported by seating is formed at equal intervals.

The insert housing 766 of the insert pocket 760 has an insert support frame 763 on which one side of the insert 700 is hung and formed to partition the insert 700.

In addition, at one side of the insert pocket seat 603 of the insert pocket seat 610, the insert cover 800 may be interviewed with an upper surface of the toggle 702 of the insert accommodated in the insert pocket 760. A bolt fastening hole 604 is formed in the extension line direction, and the bolt 810 inserted into the bolt fastening hole 801 formed at both ends of the insert cover is screwed. That is, the insert cover 800 is not inserted into the insert 700 and the insert pocket 760 upward on one side of the insert pocket seat 603 of the insert pocket seat 610 formed on one side of the test tray 600. So that the bolts are fastened.

Accordingly, the insert cover 800 and the insert 700 and the insert pocket 760 on one side of the test tray 600 are not fixed to the test tray with a large number of fasteners or bolts, as in the related art. This is a structure that can increase the space utilization of the test tray 600 because it is a structure that is fixed at a time using a minimum bolt (810).

Meanwhile, reference numeral 770 denotes a high-fix in which the semiconductor device D of the insert 700 loading unit is located under the test tray 600 by the lowering of the semiconductor device pusher block (not shown) of the match plate (not shown). A guide hole (not shown) on one side of a match plate is inserted when a test of the semiconductor device D is performed while contacting a socket (not shown) on a board (not shown).

By the configuration as described above, the latch opening and closing system of the test tray insert according to another embodiment of the present invention operates as follows.

As shown in FIG. 7 and FIG. 8, the pusher block 901 which is interviewed by the insert bottom edge and pushes upward at a position corresponding to the bottom edge 701 of the insert exposed on the bottom surface of the test tray 600 is upper surface. An insert push plate 900 protruding from the lower surface of the test tray 600 is operated to be movable up and down.

In this case, the insert push plate 900 is the insert as the bottom edge 701 of the insert 700 accommodated in the insert pocket 760 of the test tray 600 and the upper surface of the insert push block 901 are combined / separated The latch 704 is lifted and operated to rotate.

That is, when the insert push plate 900 is raised, the insert pusher block 901 protruding from the upper surface pushes the insert bottom rim 701 and the insert 700 protrudes upward at a predetermined interval, protruding from the insert upper surface. The toggle 702 is pressed by the insert cover 800 so that the lower latch 704 is opened to rotate to enable the loading / unloading of the semiconductor device D. FIG.

Thereafter, when the insert push plate 900 is lowered, the toggle 700 of the insert pressed by the insert cover 800 is returned to its original position by the elastic force of the spring member 703 and the insert 700 is operated. Is moved downwards by a predetermined interval and the latch 704 of the insert is closed to its original position and is rotated to support the upper surface of the semiconductor element.

Although the technical spirit of the present invention has been described in detail according to the above preferred embodiment, it should be noted that the above embodiment is for the purpose of description and not of limitation. In addition, those skilled in the art will understand that various embodiments are possible within the scope of the technical idea of the present invention.

As described above, the test tray according to the present invention is fixed by interviewing a plate-shaped insert cover having a predetermined width on the upper surface of the toggle of one or more inserts which are received and supported in the test tray so as to be movable up and down, i.e., adjacent to the test tray. By simultaneously securing multiple inserts with a single insert cover that is fastened with two bolts to prevent them from escaping above the test tray, a larger number of inserts can be stored in the test tray with a minimum of bolts, thereby limiting the test tray. The space utilization of the effect is excellent.

In addition, the latch opening and closing system of the test tray insert according to the present invention is a simple structure of the insert pusher block without the need for bolts protruding from the bottom of the test tray in which a plurality of inserts are movable up and down to easily and precisely form The push-push plate allows for easy and accurate rotation of the insert's latches while reducing manufacturing costs.

Claims (7)

One side is supported by the spring member 203 on one side of the plurality of insert receiving portions 110 formed by the plurality of partition walls 102 and the insert support frame 103 partitioned at equal intervals inside the rectangular edge 101. As a test tray 100, which is inserted into the insert 200 protruding into the toggle 202 which is operated up and down by an external force and the latch 204 rotated by the up and down operation of the toggle is housed, The upper circumferential surface of the insert 200 is interviewed on the upper surface of the insert supporting frame 103 of each insert receiving portion 110 so that the insert 200 can be inserted into the insert receiving portion 110 so as to be movable upward and downward. A test tray, characterized in that the plate-shaped insert cover 300 having a predetermined width is fixed to the upper surface of the toggle 202 of the insert so that the insert does not escape upward. The method of claim 1, wherein both ends of the insert cover 300 and both ends of the insert support frame 103 of the insert receiving portion are formed with bolt fastening holes 301 and 104, respectively, so that the insert cover 300 supports the insert. Test tray, characterized in that the bolt 310 is fastened to the frame 103. The insert pocket 760 is seated in the plurality of insert pocket seating portions 610 formed by the plurality of partition walls 602 and the insert pocket seat 603 partitioned at equal intervals inside the rectangular rim 601, One side of the plurality of insert receiving portions 766 formed by the insert support frame 763 divided at equal intervals inside the insert pocket 760 is supported by the spring member 703 and protrudes from the upper surface, and is moved up and down by an external force. As a test tray 600 that accommodates the insert 700, which is a built-in toggle 702 and the latch 704 is rotated by the vertical movement of the toggle, The upper circumferential surface of the insert 700 is interviewed on the upper surface of the insert supporting frame 763 of the insert receiving portion 766 of each insert pocket 760 so that the insert 700 moves up and down the insert receiving portion 766. Possibly infused, A test tray, characterized in that the plate-shaped insert cover 800 having a predetermined width is fixed to the upper surface of the insert 702 so that the insert and the insert pocket 760 are not separated upward. According to claim 3, Both ends of the insert cover 800 and one side of the insert pocket seating portion 603 of the insert pocket seating portion 610 are formed with bolt fastening holes (801, 604), respectively, the insert cover (800) The test tray, characterized in that the bolt 810 is fastened to the insert pocket seat (603). According to claim 3, wherein the outer side of the insert pocket 760 seating wing (761) is formed to extend and is supported on the insert pocket seating piece 603 of the insert pocket seating portion (610) Test tray. Insert pusher blocks 401 and 901 protrude from the bottom of the test trays 100 and 600 according to any one of claims 1 to 5 at a position corresponding to the bottom edge of the insert exposed to the bottom of the test tray. The formed insert push plate (400, 900) is operated to move up and down, the latch opening and closing system of the test tray insert, characterized in that the latch of the test tray insert is rotated. According to claim 6, When the insert push plate (400, 900) is raised, the insert pusher block protruding on the upper surface pushes the insert bottom edge, the insert flows upward at a predetermined interval, the toggle protruding on the insert top surface insert It is pressed by the cover and pressed to open the lower latch is rotated to enable the loading / unloading of the semiconductor device (D), When the insert push plate (400, 900) is lowered, the toggle of the insert pressed on the insert cover is projected back to the original position by the spring force of the spring member, the insert is flowed downward at a predetermined interval while the lower latch is returned to the original position The latch opening and closing system of the test tray insert, characterized in that the closing operation is rotated to support the upper surface of the semiconductor device.

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