KR100687654B1 - 그리드 일체형 디지털 x선 검출기 모듈 및 그 제조방법 - Google Patents
그리드 일체형 디지털 x선 검출기 모듈 및 그 제조방법 Download PDFInfo
- Publication number
- KR100687654B1 KR100687654B1 KR1020050112074A KR20050112074A KR100687654B1 KR 100687654 B1 KR100687654 B1 KR 100687654B1 KR 1020050112074 A KR1020050112074 A KR 1020050112074A KR 20050112074 A KR20050112074 A KR 20050112074A KR 100687654 B1 KR100687654 B1 KR 100687654B1
- Authority
- KR
- South Korea
- Prior art keywords
- grid
- digital
- ray detector
- ray
- detector
- Prior art date
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 18
- 238000000034 method Methods 0.000 claims abstract description 26
- 239000000758 substrate Substances 0.000 claims abstract description 19
- 239000006096 absorbing agent Substances 0.000 claims abstract description 12
- 239000000463 material Substances 0.000 claims abstract description 12
- 239000000853 adhesive Substances 0.000 claims abstract description 11
- 230000001070 adhesive effect Effects 0.000 claims abstract description 11
- 239000011358 absorbing material Substances 0.000 claims abstract description 10
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 3
- 229920000049 Carbon (fiber) Polymers 0.000 claims abstract description 3
- 239000004917 carbon fiber Substances 0.000 claims abstract description 3
- 239000000919 ceramic Substances 0.000 claims abstract description 3
- 229910002804 graphite Inorganic materials 0.000 claims abstract description 3
- 239000010439 graphite Substances 0.000 claims abstract description 3
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 claims abstract description 3
- 229920000642 polymer Polymers 0.000 claims abstract description 3
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 claims description 4
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 4
- 239000004593 Epoxy Substances 0.000 claims description 2
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims description 2
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 claims description 2
- 229910045601 alloy Inorganic materials 0.000 claims description 2
- 239000000956 alloy Substances 0.000 claims description 2
- 229910052788 barium Inorganic materials 0.000 claims description 2
- DSAJWYNOEDNPEQ-UHFFFAOYSA-N barium atom Chemical compound [Ba] DSAJWYNOEDNPEQ-UHFFFAOYSA-N 0.000 claims description 2
- 229910052797 bismuth Inorganic materials 0.000 claims description 2
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 claims description 2
- 230000008878 coupling Effects 0.000 claims description 2
- 238000010168 coupling process Methods 0.000 claims description 2
- 238000005859 coupling reaction Methods 0.000 claims description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 2
- 229910052737 gold Inorganic materials 0.000 claims description 2
- 239000010931 gold Substances 0.000 claims description 2
- 229910052738 indium Inorganic materials 0.000 claims description 2
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 claims description 2
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 claims description 2
- 229910052753 mercury Inorganic materials 0.000 claims description 2
- 239000012811 non-conductive material Substances 0.000 claims description 2
- 229910052763 palladium Inorganic materials 0.000 claims description 2
- 229910052697 platinum Inorganic materials 0.000 claims description 2
- 229910052716 thallium Inorganic materials 0.000 claims description 2
- BKVIYDNLLOSFOA-UHFFFAOYSA-N thallium Chemical compound [Tl] BKVIYDNLLOSFOA-UHFFFAOYSA-N 0.000 claims description 2
- 239000011135 tin Substances 0.000 claims description 2
- 229910052718 tin Inorganic materials 0.000 claims description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 2
- 229910052721 tungsten Inorganic materials 0.000 claims description 2
- 239000010937 tungsten Substances 0.000 claims description 2
- 229910052725 zinc Inorganic materials 0.000 claims description 2
- 239000011701 zinc Substances 0.000 claims description 2
- 230000008569 process Effects 0.000 abstract description 11
- 238000003702 image correction Methods 0.000 abstract description 2
- 230000003287 optical effect Effects 0.000 abstract 1
- 238000003384 imaging method Methods 0.000 description 16
- 239000011159 matrix material Substances 0.000 description 5
- 238000001514 detection method Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 230000001681 protective effect Effects 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 238000003745 diagnosis Methods 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- 238000004088 simulation Methods 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000002059 diagnostic imaging Methods 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000002601 radiography Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/08—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors
- H01L31/10—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors characterised by potential barriers, e.g. phototransistors
- H01L31/115—Devices sensitive to very short wavelength, e.g. X-rays, gamma-rays or corpuscular radiation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
- G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
- G01T1/16—Measuring radiation intensity
- G01T1/20—Measuring radiation intensity with scintillation detectors
- G01T1/2018—Scintillation-photodiode combinations
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B6/00—Apparatus or devices for radiation diagnosis; Apparatus or devices for radiation diagnosis combined with radiation therapy equipment
- A61B6/42—Arrangements for detecting radiation specially adapted for radiation diagnosis
- A61B6/4208—Arrangements for detecting radiation specially adapted for radiation diagnosis characterised by using a particular type of detector
- A61B6/4233—Arrangements for detecting radiation specially adapted for radiation diagnosis characterised by using a particular type of detector using matrix detectors
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B6/00—Apparatus or devices for radiation diagnosis; Apparatus or devices for radiation diagnosis combined with radiation therapy equipment
- A61B6/42—Arrangements for detecting radiation specially adapted for radiation diagnosis
- A61B6/4291—Arrangements for detecting radiation specially adapted for radiation diagnosis the detector being combined with a grid or grating
-
- G—PHYSICS
- G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
- G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
- G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
- G21K1/02—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diaphragms, collimators
- G21K1/025—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diaphragms, collimators using multiple collimators, e.g. Bucky screens; other devices for eliminating undesired or dispersed radiation
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B6/00—Apparatus or devices for radiation diagnosis; Apparatus or devices for radiation diagnosis combined with radiation therapy equipment
- A61B6/06—Diaphragms
Landscapes
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- High Energy & Nuclear Physics (AREA)
- Molecular Biology (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Medical Informatics (AREA)
- Surgery (AREA)
- Heart & Thoracic Surgery (AREA)
- Veterinary Medicine (AREA)
- Public Health (AREA)
- Biophysics (AREA)
- General Health & Medical Sciences (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Optics & Photonics (AREA)
- Pathology (AREA)
- Radiology & Medical Imaging (AREA)
- Biomedical Technology (AREA)
- Animal Behavior & Ethology (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Computer Hardware Design (AREA)
- Electromagnetism (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Mathematical Physics (AREA)
- General Engineering & Computer Science (AREA)
- Measurement Of Radiation (AREA)
- Apparatus For Radiation Diagnosis (AREA)
Abstract
Description
Claims (6)
- 디지털 X선 검출기 모듈에 있어서,X선 투과 재질로 이루어진 기판의 상측에 다수개의 홈(slot)을 서로 일정한 간격으로 형성하고, 형성된 홈의 내부 공간에 X선 흡수 재질의 X선 흡수체를 매립하여 형성된 그리드와;상기 그리드를 이루고 있는 기판 하측에 소정 거리 이격되어 구비되며, 픽셀 형태로 배열된 광 검출기를 포함하여 이루어지는 디지털 X선 검출기와;상기 그리드와 상기 디지털 X선 검출기의 끝단 가장자리에서 상기 그리드와 상기 디지털 X선 검출기를 결합하여 일체화시키는 접착 부재;를 포함하여 구성되되,상기 그리드와 상기 디지털 X선 검출기는 그리드 라인에 의한 무아레 패턴이 나타나지 않도록, 상기 그리드의 그리드 라인과 상기 디지털 X선 검출기의 광 검출기의 배향 및 간격이 조정된 것을 특징으로 하는 그리드 일체형 디지털 X선 검출기 모듈.
- 제 1 항에 있어서,상기 기판은 플라스틱(plastic), 폴리머(polymer), 세라믹(ceramic), 그래파이트(graphite) 및 탄소섬유(carbon fiber)로 이루어지는 군에서 선택되는 한 가지로 이루어지는 것을 특징으로 하는 그리드 일체형 디지털 X선 검출기 모듈.
- 제 1 항에 있어서,상기 X선 흡수체는 납(lead), 비스무스(bismuth), 금(gold), 바륨(barium), 텅스텐(tungsten), 플라티늄(platinum), 수은(mercury), 인듐(indium), 탈륨(thallium), 팔라듐(palladium), 주석(tin), 아연(zinc) 및 그들의 합금으로 이루어지는 군에서 선택되는 한 가지 이상의 물질로 이루어지는 것을 특징으로 하는 그리드 일체형 디지털 X선 검출기 모듈.
- 제 1 항에 있어서,상기 그리드 일체형 디지털 X선 검출기 모듈의 가장자리에 비전도성 재질의 프레임이 더 구비되는 것을 특징으로 하는 그리드 일체형 디지털 X선 검출기 모듈.
- 제 1 항에 있어서,상기 접착 부재는 에폭시계열의 물질로 이루어지는 것을 특징으로 하는 그리드 일체형 디지털 X선 검출기 모듈.
- 그리드 일체형 디지털 X선 검출기를 제조하는 방법에 있어서,수평 조절 수단이 구비된 정렬 장치의 스테이지 상부에 디지털 X선 검출기를 장착하는 단계와;상기 스테이지에 수직 방향으로 연장되어 구비되는 거치대에 그리드를 장착 하는 단계와;상기 수평 조절 수단을 이용하여 상기 스테이지를 회동시켜 상기 디지털 X선 검출기에 구비되는 광 검출기 픽셀과 상기 그리드의 라인을 평행하게 위치시키는 단계와;상기 수평 조절 수단을 이용하여 상기 스테이지를 좌우로 미세하게 이동시켜 상기 디지털 X선 검출기의 광 검출기 픽셀과 상기 그리드의 라인을 무아레 패턴이 최소화되는 위치로 정렬하는 단계와;상기 거치대에 구비되는 높이 조절 수단을 이용하여 상기 그리드와 상기 디지털 X선 검출기 사이의 간격을 미세 조정하여 무아레 패턴이 제거되는 위치로 정렬하는 단계와;상기 그리드와 상기 디지털 X선 검출기의 가장자리에 접착 부재를 도포하여 상기 그리드와 상기 디지털 X선 검출기를 일체화시키는 단계와;상기 정렬장치로부터 일체화된 디지털 X선 검출기 모듈을 분리하는 단계;를 포함하는 것을 특징으로 하는 그리드 일체형 디지털 X선 검출기 모듈의 제조방법.
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020050112074A KR100687654B1 (ko) | 2005-11-23 | 2005-11-23 | 그리드 일체형 디지털 x선 검출기 모듈 및 그 제조방법 |
PCT/KR2005/004352 WO2007061152A1 (en) | 2005-11-23 | 2005-12-16 | A digital x-ray detector module and the manufacturing method thereof |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020050112074A KR100687654B1 (ko) | 2005-11-23 | 2005-11-23 | 그리드 일체형 디지털 x선 검출기 모듈 및 그 제조방법 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR2020050034450U Division KR200410071Y1 (ko) | 2005-12-07 | 2005-12-07 | 그리드 일체형 디지털 x선 검출기 모듈 |
Publications (1)
Publication Number | Publication Date |
---|---|
KR100687654B1 true KR100687654B1 (ko) | 2007-03-09 |
Family
ID=38067362
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020050112074A KR100687654B1 (ko) | 2005-11-23 | 2005-11-23 | 그리드 일체형 디지털 x선 검출기 모듈 및 그 제조방법 |
Country Status (2)
Country | Link |
---|---|
KR (1) | KR100687654B1 (ko) |
WO (1) | WO2007061152A1 (ko) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101131151B1 (ko) | 2010-07-12 | 2012-03-28 | 제이피아이헬스케어 주식회사 | 테이퍼드 집속형 그리드 및 그 제조 방법 |
KR101151024B1 (ko) * | 2010-04-26 | 2012-06-13 | 주식회사 디알텍 | 그리드 장치 및 엑스선 검출장치 |
KR101444731B1 (ko) * | 2012-10-11 | 2014-09-26 | 한국전기연구원 | 섬광체 일체형 그리드 및 그 제조 방법, 그리고 이를 이용한 그리드 일체형 x선 검출기 |
KR101652200B1 (ko) * | 2015-06-08 | 2016-08-30 | 장희철 | 연속가압방식을 이용한 x선 그리드 제조장치 |
KR102333006B1 (ko) | 2021-06-23 | 2021-12-01 | 제이피아이헬스케어 주식회사 | 자체 정렬 장치가 구비된 x선 그리드 패널 |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8331536B2 (en) | 2009-09-18 | 2012-12-11 | General Electric Company | Apparatus for reducing scattered X-ray detection and method of same |
US9968316B2 (en) | 2010-12-29 | 2018-05-15 | General Electric Company | High-frequency anti-scatter grid movement profile for line cancellation |
US20130164457A1 (en) * | 2011-12-27 | 2013-06-27 | Rigaku Innovative Technologies, Inc. | Method of manufacturing patterned x-ray optical elements |
EP2910189B1 (en) * | 2014-02-21 | 2016-09-14 | Samsung Electronics Co., Ltd | X-ray grid structure and x-ray apparatus including the same |
US20150325322A1 (en) * | 2014-05-08 | 2015-11-12 | General Electric Company | X-ray anti-scatter grid |
US10610191B2 (en) * | 2017-07-06 | 2020-04-07 | Prismatic Sensors Ab | Managing geometric misalignment in x-ray imaging systems |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20010017988A (ko) * | 1999-08-16 | 2001-03-05 | 전춘택 | 엑스레이 그리드 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6438210B1 (en) * | 2000-03-28 | 2002-08-20 | General Electric Company | Anti-scatter grid, method, and apparatus for forming same |
US6470072B1 (en) * | 2000-08-24 | 2002-10-22 | General Electric Company | X-ray anti-scatter grid |
US6422750B1 (en) * | 2000-12-22 | 2002-07-23 | Ge Medical Systems Global Technology Company, Llc | Digital x-ray imager alignment method |
-
2005
- 2005-11-23 KR KR1020050112074A patent/KR100687654B1/ko active IP Right Grant
- 2005-12-16 WO PCT/KR2005/004352 patent/WO2007061152A1/en active Application Filing
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20010017988A (ko) * | 1999-08-16 | 2001-03-05 | 전춘택 | 엑스레이 그리드 |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101151024B1 (ko) * | 2010-04-26 | 2012-06-13 | 주식회사 디알텍 | 그리드 장치 및 엑스선 검출장치 |
KR101131151B1 (ko) | 2010-07-12 | 2012-03-28 | 제이피아이헬스케어 주식회사 | 테이퍼드 집속형 그리드 및 그 제조 방법 |
KR101444731B1 (ko) * | 2012-10-11 | 2014-09-26 | 한국전기연구원 | 섬광체 일체형 그리드 및 그 제조 방법, 그리고 이를 이용한 그리드 일체형 x선 검출기 |
KR101652200B1 (ko) * | 2015-06-08 | 2016-08-30 | 장희철 | 연속가압방식을 이용한 x선 그리드 제조장치 |
KR102333006B1 (ko) | 2021-06-23 | 2021-12-01 | 제이피아이헬스케어 주식회사 | 자체 정렬 장치가 구비된 x선 그리드 패널 |
Also Published As
Publication number | Publication date |
---|---|
WO2007061152A1 (en) | 2007-05-31 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
KR100687654B1 (ko) | 그리드 일체형 디지털 x선 검출기 모듈 및 그 제조방법 | |
RU2595795C2 (ru) | Спектральный детектор изображения | |
US5834782A (en) | Large area image detector | |
US7112799B2 (en) | X-ray detector with a plurality of detector units | |
US7875855B2 (en) | Apparatus and method for detecting an image | |
EP2433156B1 (en) | Detector array with pre-focused anti-scatter grid | |
JP2001194463A (ja) | X線を吸収するためのグリッド | |
JP2006519377A (ja) | X線検出器 | |
KR20170046792A (ko) | 스퀘어클 형상의 디지털 평판 검출기 | |
JP5451145B2 (ja) | 放射線画像撮影装置 | |
US11086029B2 (en) | Apparatus for optically capturing a screen | |
JP4338938B2 (ja) | シンチレータ装置、x線検出器、x線検査装置、及び、シンチレータ装置を製造する方法 | |
US7211801B2 (en) | Radiation detector | |
JPH08211199A (ja) | X線撮像装置 | |
KR200410071Y1 (ko) | 그리드 일체형 디지털 x선 검출기 모듈 | |
KR20110090275A (ko) | 엑스선 그리드 및 그 제조 방법 | |
KR100907925B1 (ko) | X선 촬영장치용 그리드 및 그 제조방법 | |
KR101131151B1 (ko) | 테이퍼드 집속형 그리드 및 그 제조 방법 | |
JP2002318283A (ja) | 2次元アレイ型放射線検出器とそのx線遮蔽壁の製造方法 | |
JP6264723B2 (ja) | 放射線画像撮影装置 | |
JP2001188096A (ja) | 2次元アレイ型放射線検出器及びx線遮蔽壁の製造方法 | |
JPH09127248A (ja) | 放射線検出器 | |
JP5597291B2 (ja) | グリッド、撮影装置及び放射線画像撮影装置 | |
JP2014003988A (ja) | 放射線画像撮影用グリッド及びその製造方法、並びに放射線画像撮影システム | |
KR101684730B1 (ko) | 디지털 방사선 검출기 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A201 | Request for examination | ||
E701 | Decision to grant or registration of patent right | ||
GRNT | Written decision to grant | ||
N231 | Notification of change of applicant | ||
FPAY | Annual fee payment |
Payment date: 20130220 Year of fee payment: 7 |
|
FPAY | Annual fee payment |
Payment date: 20140219 Year of fee payment: 8 |
|
FPAY | Annual fee payment |
Payment date: 20150217 Year of fee payment: 9 |
|
FPAY | Annual fee payment |
Payment date: 20160217 Year of fee payment: 10 |
|
FPAY | Annual fee payment |
Payment date: 20170217 Year of fee payment: 11 |
|
FPAY | Annual fee payment |
Payment date: 20180213 Year of fee payment: 12 |
|
FPAY | Annual fee payment |
Payment date: 20190221 Year of fee payment: 13 |