KR100662144B1 - 전계 방출 전하 제어 미러(ｆｅａ-ｃｃｍ) 사용 광 변조기 - Google Patents

전계 방출 전하 제어 미러(ｆｅａ-ｃｃｍ) 사용 광 변조기 Download PDF

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Publication number
KR100662144B1
KR100662144B1 KR1020017004751A KR20017004751A KR100662144B1 KR 100662144 B1 KR100662144 B1 KR 100662144B1 KR 1020017004751 A KR1020017004751 A KR 1020017004751A KR 20017004751 A KR20017004751 A KR 20017004751A KR 100662144 B1 KR100662144 B1 KR 100662144B1
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South Korea
Prior art keywords
ccm
mirror
fea
potential
micromirror
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Expired - Fee Related
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KR1020017004751A
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English (en)
Korean (ko)
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KR20010105159A (ko
Inventor
윌리엄피. 로빈슨
마이클제이. 리틀
에릭에이. 지포드
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솔루스 마이크로 테크놀로지스 인코포레이티드
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02—Main electrodes
    • H01J1/30—Cold cathodes, e.g. field-emissive cathode
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N5/00—Details of television systems
    • H04N5/74—Projection arrangements for image reproduction, e.g. using eidophor
    • H04N5/7416—Projection arrangements for image reproduction, e.g. using eidophor involving the use of a spatial light modulator, e.g. a light valve, controlled by a video signal
    • H04N5/7458—Projection arrangements for image reproduction, e.g. using eidophor involving the use of a spatial light modulator, e.g. a light valve, controlled by a video signal the modulator being an array of deformable mirrors, e.g. digital micromirror device [DMD]

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Cathode-Ray Tubes And Fluorescent Screens For Display (AREA)
  • Transforming Electric Information Into Light Information (AREA)
  • Control Of Indicators Other Than Cathode Ray Tubes (AREA)
  • Micromachines (AREA)
KR1020017004751A 1998-10-15 1999-10-14 전계 방출 전하 제어 미러(ｆｅａ-ｃｃｍ) 사용 광 변조기 Expired - Fee Related KR100662144B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/172,612 1998-10-15
US09/172,612 US6034810A (en) 1997-04-18 1998-10-15 Field emission charge controlled mirror (FEA-CCM)

Publications (2)

Publication Number Publication Date
KR20010105159A KR20010105159A (ko) 2001-11-28
KR100662144B1 true KR100662144B1 (ko) 2006-12-27

Family

ID=22628441

Family Applications (1)

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KR1020017004751A Expired - Fee Related KR100662144B1 (ko) 1998-10-15 1999-10-14 전계 방출 전하 제어 미러(ｆｅａ-ｃｃｍ) 사용 광 변조기

Country Status (7)

Country Link
US (1) US6034810A (https=)
EP (1) EP1121618A1 (https=)
JP (1) JP2002527790A (https=)
KR (1) KR100662144B1 (https=)
AU (1) AU6497899A (https=)
CA (1) CA2347726A1 (https=)
WO (1) WO2000022472A1 (https=)

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US8138413B2 (en) 2006-04-13 2012-03-20 Daniel Luch Collector grid and interconnect structures for photovoltaic arrays and modules
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US8729385B2 (en) 2006-04-13 2014-05-20 Daniel Luch Collector grid and interconnect structures for photovoltaic arrays and modules
US9865758B2 (en) 2006-04-13 2018-01-09 Daniel Luch Collector grid and interconnect structures for photovoltaic arrays and modules
US8822810B2 (en) 2006-04-13 2014-09-02 Daniel Luch Collector grid and interconnect structures for photovoltaic arrays and modules
US9236512B2 (en) 2006-04-13 2016-01-12 Daniel Luch Collector grid and interconnect structures for photovoltaic arrays and modules
US8884155B2 (en) 2006-04-13 2014-11-11 Daniel Luch Collector grid and interconnect structures for photovoltaic arrays and modules
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Also Published As

Publication number Publication date
WO2000022472A1 (en) 2000-04-20
US6034810A (en) 2000-03-07
EP1121618A1 (en) 2001-08-08
JP2002527790A (ja) 2002-08-27
KR20010105159A (ko) 2001-11-28
CA2347726A1 (en) 2000-04-20
AU6497899A (en) 2000-05-01

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