CA2347726A1 - Field emission charge controlled mirror (fea-ccm) - Google Patents
Field emission charge controlled mirror (fea-ccm) Download PDFInfo
- Publication number
- CA2347726A1 CA2347726A1 CA002347726A CA2347726A CA2347726A1 CA 2347726 A1 CA2347726 A1 CA 2347726A1 CA 002347726 A CA002347726 A CA 002347726A CA 2347726 A CA2347726 A CA 2347726A CA 2347726 A1 CA2347726 A1 CA 2347726A1
- Authority
- CA
- Canada
- Prior art keywords
- ccm
- fea
- potential
- mirror
- charge
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
- 239000012528 membrane Substances 0.000 claims description 32
- 230000001747 exhibiting effect Effects 0.000 claims 2
- 201000000760 cerebral cavernous malformation Diseases 0.000 description 34
- 239000000758 substrate Substances 0.000 description 32
- 238000000034 method Methods 0.000 description 17
- 239000011521 glass Substances 0.000 description 16
- 239000004020 conductor Substances 0.000 description 14
- 230000005684 electric field Effects 0.000 description 14
- 125000006850 spacer group Chemical group 0.000 description 13
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 9
- 238000005516 engineering process Methods 0.000 description 9
- 239000000463 material Substances 0.000 description 9
- 238000013459 approach Methods 0.000 description 8
- 238000004519 manufacturing process Methods 0.000 description 8
- 230000008569 process Effects 0.000 description 7
- 238000000605 extraction Methods 0.000 description 6
- 230000003287 optical effect Effects 0.000 description 6
- 230000006870 function Effects 0.000 description 5
- 239000010409 thin film Substances 0.000 description 5
- 229910052782 aluminium Inorganic materials 0.000 description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 4
- 238000009125 cardiac resynchronization therapy Methods 0.000 description 4
- 238000013461 design Methods 0.000 description 4
- 239000010408 film Substances 0.000 description 4
- 239000011159 matrix material Substances 0.000 description 4
- 238000005411 Van der Waals force Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000010894 electron beam technology Methods 0.000 description 3
- 238000005036 potential barrier Methods 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 230000004044 response Effects 0.000 description 3
- 230000032683 aging Effects 0.000 description 2
- 238000003491 array Methods 0.000 description 2
- 230000004888 barrier function Effects 0.000 description 2
- 238000005513 bias potential Methods 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 239000002131 composite material Substances 0.000 description 2
- 230000006835 compression Effects 0.000 description 2
- 238000007906 compression Methods 0.000 description 2
- 238000010790 dilution Methods 0.000 description 2
- 239000012895 dilution Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 230000005641 tunneling Effects 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000003044 adaptive effect Effects 0.000 description 1
- 239000013590 bulk material Substances 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 230000008030 elimination Effects 0.000 description 1
- 238000003379 elimination reaction Methods 0.000 description 1
- 230000003090 exacerbative effect Effects 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 238000007667 floating Methods 0.000 description 1
- 239000003574 free electron Substances 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 230000004807 localization Effects 0.000 description 1
- 230000013011 mating Effects 0.000 description 1
- 230000003278 mimic effect Effects 0.000 description 1
- 230000008450 motivation Effects 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000002161 passivation Methods 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 230000009291 secondary effect Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 230000035882 stress Effects 0.000 description 1
- 230000001052 transient effect Effects 0.000 description 1
- 238000009461 vacuum packaging Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
- H01J1/02—Main electrodes
- H01J1/30—Cold cathodes, e.g. field-emissive cathode
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N5/00—Details of television systems
- H04N5/74—Projection arrangements for image reproduction, e.g. using eidophor
- H04N5/7416—Projection arrangements for image reproduction, e.g. using eidophor involving the use of a spatial light modulator, e.g. a light valve, controlled by a video signal
- H04N5/7458—Projection arrangements for image reproduction, e.g. using eidophor involving the use of a spatial light modulator, e.g. a light valve, controlled by a video signal the modulator being an array of deformable mirrors, e.g. digital micromirror device [DMD]
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Cathode-Ray Tubes And Fluorescent Screens For Display (AREA)
- Transforming Electric Information Into Light Information (AREA)
- Control Of Indicators Other Than Cathode Ray Tubes (AREA)
- Micromachines (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US09/172,612 | 1998-10-15 | ||
| US09/172,612 US6034810A (en) | 1997-04-18 | 1998-10-15 | Field emission charge controlled mirror (FEA-CCM) |
| PCT/US1999/021455 WO2000022472A1 (en) | 1998-10-15 | 1999-10-14 | Field emission charge controlled mirror (fea-ccm) |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CA2347726A1 true CA2347726A1 (en) | 2000-04-20 |
Family
ID=22628441
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA002347726A Abandoned CA2347726A1 (en) | 1998-10-15 | 1999-10-14 | Field emission charge controlled mirror (fea-ccm) |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US6034810A (https=) |
| EP (1) | EP1121618A1 (https=) |
| JP (1) | JP2002527790A (https=) |
| KR (1) | KR100662144B1 (https=) |
| AU (1) | AU6497899A (https=) |
| CA (1) | CA2347726A1 (https=) |
| WO (1) | WO2000022472A1 (https=) |
Families Citing this family (34)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6147664A (en) * | 1997-08-29 | 2000-11-14 | Candescent Technologies Corporation | Controlling the brightness of an FED device using PWM on the row side and AM on the column side |
| US6661637B2 (en) * | 1998-03-10 | 2003-12-09 | Mcintosh Robert B. | Apparatus and method to angularly position micro-optical elements |
| US6123985A (en) * | 1998-10-28 | 2000-09-26 | Solus Micro Technologies, Inc. | Method of fabricating a membrane-actuated charge controlled mirror (CCM) |
| US8664030B2 (en) | 1999-03-30 | 2014-03-04 | Daniel Luch | Collector grid and interconnect structures for photovoltaic arrays and modules |
| US8222513B2 (en) | 2006-04-13 | 2012-07-17 | Daniel Luch | Collector grid, electrode structures and interconnect structures for photovoltaic arrays and methods of manufacture |
| US20090111206A1 (en) | 1999-03-30 | 2009-04-30 | Daniel Luch | Collector grid, electrode structures and interrconnect structures for photovoltaic arrays and methods of manufacture |
| US8138413B2 (en) | 2006-04-13 | 2012-03-20 | Daniel Luch | Collector grid and interconnect structures for photovoltaic arrays and modules |
| US7507903B2 (en) | 1999-03-30 | 2009-03-24 | Daniel Luch | Substrate and collector grid structures for integrated series connected photovoltaic arrays and process of manufacture of such arrays |
| US8198696B2 (en) | 2000-02-04 | 2012-06-12 | Daniel Luch | Substrate structures for integrated series connected photovoltaic arrays and process of manufacture of such arrays |
| US6346776B1 (en) | 2000-07-10 | 2002-02-12 | Memsolutions, Inc. | Field emission array (FEA) addressed deformable light valve modulator |
| US7259510B1 (en) | 2000-08-30 | 2007-08-21 | Agere Systems Inc. | On-chip vacuum tube device and process for making device |
| US6433933B1 (en) | 2001-03-29 | 2002-08-13 | Palm, Inc. | Internal diffuser for a charge controlled mirror screen display |
| US6791742B2 (en) * | 2001-07-30 | 2004-09-14 | Glimmerglass Networks, Inc. | MEMS structure with raised electrodes |
| US6693735B1 (en) * | 2001-07-30 | 2004-02-17 | Glimmerglass Networks, Inc. | MEMS structure with surface potential control |
| JP2003109524A (ja) * | 2001-09-27 | 2003-04-11 | Toshiba Corp | 画像表示装置 |
| KR100474277B1 (ko) * | 2002-10-29 | 2005-03-10 | 엘지전자 주식회사 | 전계 방출 소자의 에이징 구동 장치 및 방법 |
| US6720569B1 (en) * | 2003-05-13 | 2004-04-13 | Motorola, Inc. | Electro-optical device including a field emission array and photoconductive layer |
| US20050140261A1 (en) * | 2003-10-23 | 2005-06-30 | Pinchas Gilad | Well structure with axially aligned field emission fiber or carbon nanotube and method for making same |
| US7276724B2 (en) * | 2005-01-20 | 2007-10-02 | Nanosolar, Inc. | Series interconnected optoelectronic device module assembly |
| US7732229B2 (en) * | 2004-09-18 | 2010-06-08 | Nanosolar, Inc. | Formation of solar cells with conductive barrier layers and foil substrates |
| US7838868B2 (en) * | 2005-01-20 | 2010-11-23 | Nanosolar, Inc. | Optoelectronic architecture having compound conducting substrate |
| EP1828831A1 (en) * | 2004-12-21 | 2007-09-05 | Micronic Laser Systems Ab | Slm structure comprising semiconducting material |
| TWI293401B (en) * | 2004-12-30 | 2008-02-11 | Au Optronics Corp | Microelectrooptomechanical device and fabricating method thereof |
| US8927315B1 (en) | 2005-01-20 | 2015-01-06 | Aeris Capital Sustainable Ip Ltd. | High-throughput assembly of series interconnected solar cells |
| US7460293B2 (en) * | 2005-09-30 | 2008-12-02 | Hewlett-Packard Development Company, L.P. | Display system |
| US9006563B2 (en) | 2006-04-13 | 2015-04-14 | Solannex, Inc. | Collector grid and interconnect structures for photovoltaic arrays and modules |
| US8729385B2 (en) | 2006-04-13 | 2014-05-20 | Daniel Luch | Collector grid and interconnect structures for photovoltaic arrays and modules |
| US9865758B2 (en) | 2006-04-13 | 2018-01-09 | Daniel Luch | Collector grid and interconnect structures for photovoltaic arrays and modules |
| US8822810B2 (en) | 2006-04-13 | 2014-09-02 | Daniel Luch | Collector grid and interconnect structures for photovoltaic arrays and modules |
| US9236512B2 (en) | 2006-04-13 | 2016-01-12 | Daniel Luch | Collector grid and interconnect structures for photovoltaic arrays and modules |
| US8884155B2 (en) | 2006-04-13 | 2014-11-11 | Daniel Luch | Collector grid and interconnect structures for photovoltaic arrays and modules |
| US8305342B2 (en) * | 2008-03-27 | 2012-11-06 | Edward Pakhchyan | Plasma addressed micro-mirror display |
| US8247243B2 (en) * | 2009-05-22 | 2012-08-21 | Nanosolar, Inc. | Solar cell interconnection |
| JP6246907B2 (ja) * | 2013-05-22 | 2017-12-13 | カール・ツァイス・エスエムティー・ゲーエムベーハー | 光学素子及び当該光学素子に対する放射の影響を低減する手段を備えた光学コンポーネント |
Family Cites Families (55)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2733501A (en) * | 1956-02-07 | Electrostatic shutter mosaic and method of manufacture | ||
| US2682010A (en) * | 1951-08-07 | 1954-06-22 | Us Air Force | Cathode-ray projection tube |
| US2681380A (en) * | 1951-09-26 | 1954-06-15 | Us Air Force | Color television projection system |
| US3517126A (en) * | 1966-11-17 | 1970-06-23 | Tokyo Shibaura Electric Co | Light value image projection system with deformable membrane and thin film target electrode |
| US3600798A (en) * | 1969-02-25 | 1971-08-24 | Texas Instruments Inc | Process for fabricating a panel array of electromechanical light valves |
| US3678196A (en) * | 1970-10-20 | 1972-07-18 | Solo S Roth | Means for projecting an enlarged television image |
| US3746911A (en) * | 1971-04-13 | 1973-07-17 | Westinghouse Electric Corp | Electrostatically deflectable light valves for projection displays |
| US3886310A (en) * | 1973-08-22 | 1975-05-27 | Westinghouse Electric Corp | Electrostatically deflectable light valve with improved diffraction properties |
| US3896338A (en) * | 1973-11-01 | 1975-07-22 | Westinghouse Electric Corp | Color video display system comprising electrostatically deflectable light valves |
| US4229732A (en) * | 1978-12-11 | 1980-10-21 | International Business Machines Corporation | Micromechanical display logic and array |
| US4441791A (en) * | 1980-09-02 | 1984-04-10 | Texas Instruments Incorporated | Deformable mirror light modulator |
| US4387964A (en) * | 1980-10-21 | 1983-06-14 | Mcdonnell Douglas Corporation | Electron addressed liquid crystal light valve |
| US4592628A (en) * | 1981-07-01 | 1986-06-03 | International Business Machines | Mirror array light valve |
| US4680579A (en) * | 1983-09-08 | 1987-07-14 | Texas Instruments Incorporated | Optical system for projection display using spatial light modulator device |
| US4710732A (en) * | 1984-07-31 | 1987-12-01 | Texas Instruments Incorporated | Spatial light modulator and method |
| US4615595A (en) * | 1984-10-10 | 1986-10-07 | Texas Instruments Incorporated | Frame addressed spatial light modulator |
| US4698602A (en) * | 1985-10-09 | 1987-10-06 | The United States Of America As Represented By The Secretary Of The Air Force | Micromirror spatial light modulator |
| US5172262A (en) * | 1985-10-30 | 1992-12-15 | Texas Instruments Incorporated | Spatial light modulator and method |
| EP0246547A3 (de) * | 1986-05-22 | 1990-06-13 | Siemens Aktiengesellschaft | Anordnung zur optischen Bildverarbeitung |
| US4728174A (en) * | 1986-11-06 | 1988-03-01 | Hughes Aircraft Company | Electron beam addressed liquid crystal light valve |
| US4826293A (en) * | 1987-03-03 | 1989-05-02 | Hughes Aircraft Company | Electron beam addressed liquid crystal light valve with input sheet conductor |
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| US4956619A (en) * | 1988-02-19 | 1990-09-11 | Texas Instruments Incorporated | Spatial light modulator |
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| US5706061A (en) * | 1995-03-31 | 1998-01-06 | Texas Instruments Incorporated | Spatial light image display system with synchronized and modulated light source |
| US5689278A (en) * | 1995-04-03 | 1997-11-18 | Motorola | Display control method |
| US5677784A (en) * | 1995-07-24 | 1997-10-14 | Ellis D. Harris Sr. Family Trust | Array of pellicle optical gates |
| US5610478A (en) * | 1995-10-30 | 1997-03-11 | Motorola | Method of conditioning emitters of a field emission display |
| US5774196A (en) * | 1996-06-13 | 1998-06-30 | Texas Instruments Incorporated | Method and apparatus of aligning color modulation data to color wheel filter segments |
| US5903804A (en) * | 1996-09-30 | 1999-05-11 | Science Applications International Corporation | Printer and/or scanner and/or copier using a field emission array |
| US5768009A (en) * | 1997-04-18 | 1998-06-16 | E-Beam | Light valve target comprising electrostatically-repelled micro-mirrors |
-
1998
- 1998-10-15 US US09/172,612 patent/US6034810A/en not_active Expired - Lifetime
-
1999
- 1999-10-14 EP EP99952923A patent/EP1121618A1/en not_active Withdrawn
- 1999-10-14 AU AU64978/99A patent/AU6497899A/en not_active Abandoned
- 1999-10-14 KR KR1020017004751A patent/KR100662144B1/ko not_active Expired - Fee Related
- 1999-10-14 JP JP2000576312A patent/JP2002527790A/ja active Pending
- 1999-10-14 WO PCT/US1999/021455 patent/WO2000022472A1/en not_active Ceased
- 1999-10-14 CA CA002347726A patent/CA2347726A1/en not_active Abandoned
Also Published As
| Publication number | Publication date |
|---|---|
| WO2000022472A1 (en) | 2000-04-20 |
| US6034810A (en) | 2000-03-07 |
| EP1121618A1 (en) | 2001-08-08 |
| JP2002527790A (ja) | 2002-08-27 |
| KR100662144B1 (ko) | 2006-12-27 |
| KR20010105159A (ko) | 2001-11-28 |
| AU6497899A (en) | 2000-05-01 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EEER | Examination request | ||
| FZDE | Discontinued |