KR100655144B1 - Apparatus for reducing load in transportation device of vacuum equipment - Google Patents

Abstract

The present invention relates to a conveying apparatus for a vacuum equipment, a base plate, a conveying plate provided on the base plate to convey the object, and at least one or more provided on both sides of the conveying plate to guide the conveying plate A transfer control unit provided between the guide unit and the at least one guide unit to control the transfer plate to be transferred through the at least one guide unit, and provided between the base plate and the transfer plate when the transfer plate is transferred. Consists of a load reducing unit for canceling the load applied to at least one guide portion by using the repulsive force of the magnetic field

The load reducing unit is provided with a first magnet array formed of a plurality of magnets on the base plate, the first load reduction unit for generating a magnetic field, and the structure having a gap while facing the first load reduction unit below the transfer plate The second load reduction unit includes a second magnet array including a plurality of magnets that generate magnetic fields having the same polarity as the magnetic field generated by the first load reduction unit. The present invention is to prevent the contamination of the vacuum working environment by minimizing the generation of fine particles and foreign substances by friction in the guide portion.

Description

Load reduction device added to the conveying device for vacuum equipment {APPARATUS FOR REDUCING LOAD IN TRANSPORTATION DEVICE OF VACUUM EQUIPMENT}

1 is a perspective view showing a magnet portion of a conveying apparatus for a vacuum apparatus according to the prior art;

FIG. 2 is a cross-sectional view showing the "a-a '" cross section of FIG.

3 is a magnetic force diagram showing an example of a magnetic field generated in the magnet of the magnet part shown in FIG. 1;

Figure 4 is a perspective view showing an embodiment of a load reducing device added to the conveying apparatus for vacuum equipment according to the present invention;

FIG. 5 is a sectional view taken along the line “b-b '” of FIG. 3; FIG.

6A and 6B are exploded perspective views showing in detail the configuration of the load reducing unit shown in FIGS. 4 and 5;

7A and 7B are magnetic force diagrams showing examples of magnetic field adjustment of the magnetic field control plate shown in FIGS. 6A and 6B.

<Explanation of symbols for main parts of drawing>

1: base plate 2: feed control unit

2a: stator 2b: mover

3: transfer plate 4: guide part

4a: guide rail 4b: guide block

5: magnet part 5a: first magnet

5b: 2nd magnet 100: load reduction part

110: first load reduction unit 111: first base

111a: first groove 111b: first magnet stopper

111c: first tab 112: first bracket

112a: second magnet stopper 112b: first through hole

113: first magnet array 113a: magnet

114: first magnetic field control plate 120: the second load reduction unit

121: second base 121a: second groove

121b: Third magnet stopper 121c: Second tab

122: second bracket 122a: fourth magnet stopper

122b: second through hole 123: second magnet array

123a: magnet 124: second magnetic field control plate

The present invention relates to a conveying apparatus for vacuum equipment, and more particularly, by using a plurality of short magnets connected in an array form instead of using one or a few long magnets, the magnetic field strength is kept relatively constant to be positioned in the conveying direction. Regardless of the load reduction device added to the conveying device for vacuum equipment to generate a certain repulsive force irrespective of the total load of the load efficiently to prevent the generation of fine dust and foreign substances by friction according to the load applied to the guide portion will be.

Hereinafter, referring to FIGS. 1 to 3, a magnet part of a transfer apparatus for a vacuum apparatus according to the prior art is as follows.

First, in a state where an object (not shown) having a predetermined load is loaded on the transfer plate 3, the transfer control unit 2 interposed between the base plate 1 and the transfer plate 3 is the transfer plate 3. By controlling the transfer plate 3 is to be stably transferred.

Here, the transfer control unit 2 is a linear motor method, and is composed of a stator 2a, a mover 2b, and a control unit (not shown). In other words, the stator 2a in the transfer control unit 2 is connected to the stator plate (unsigned) on the base plate 1 and the stator plate (unsigned) and is connected to the SNSNSNS ... or NSNSNSN .. At least one magnet (not shown) is formed to generate a magnetic field. At least one coil (not shown) is wound around the yoke (unsigned) in a predetermined pattern on the mover 2b. The controller (not shown) controls the direction of the current flowing through the coil of the mover 2b to move the mover 2b according to the attraction / repulsion according to the magnetic fields generated by the stator 2a and the mover 2b, respectively. It is moved to control the transfer of the transfer plate (3).

And, at least one guide portion (4) is to guide a stable transfer during the transfer of the transfer plate 3 under the control of the transfer control unit (2). That is, the guide block 4b in the guide portion 4 is stable in the transfer plate 3 in a state where it is engaged with the guide rail 4a by at least one horizontal / vertical bearing (unsigned) (unsigned). Guide the transfer.

Here, at least one horizontal / vertical bearing (not shown) (not shown) is coupled to the guide block 4b by bolts (not shown) and screws (not shown).

At this time, since the first and second magnets 5a and 5b of the magnet part 5 are configured to face each other, the weight of the transfer plate 3 by the repulsive force by the magnetic field of the same polarity, Vertical bearings (unsigned) formed in the guide block 4b of the guide part 4 by reducing the load by canceling the total of loads generated in accordance with the load generated during operation and the object weight on the conveying plate 3. ) And the guide rail (4a) formed on the base plate (1) to minimize the fine dust and foreign matter caused by the friction of the total load to prevent contamination of the vacuum working environment.

However, the load reduction device added to the conveying apparatus for vacuum equipment according to the prior art has the strength of the repulsive force of the opposing magnet due to the difference in the density of the magnetic field generated at the side of the magnet and the magnetic field at the center position and the edge of the magnet. As shown in FIG. 2, the load varies depending on the position of the conveying direction, and thus the self-weight of the conveying plate between the guide rail and the guide block of the guide portion, the load generated during the operation of the conveying control part, and the load generated by the self-weight of the object loaded on the conveying plate. There was a problem in that it is not enough to offset the total effectively eliminate the generation of fine dust and foreign matter due to friction generated in the guide portion.

In order to solve the above problems, the present invention uses magnetic field strength by connecting a plurality of short magnets in an array form instead of using one or a few long magnets to solve the magnetic field strength problem that varies greatly depending on the position in the transport direction. By maintaining a relatively constant to generate a uniform repulsion regardless of the position in the transport direction to effectively cancel the total of the load to prevent the generation of fine particles and foreign substances due to friction caused by the load in the guide portion It is an object of the present invention to provide a load reduction device added to a cost transfer device.

Another object of the present invention by combining the magnetic field control plate made of a magnetic material on the upper surface of the magnet array using a magnetic field to periodically increase and decrease in the transport direction to obtain a uniform constant repulsive force regardless of the transport direction position The present invention provides a load reduction device added to a transport apparatus for vacuum equipment to effectively cancel the total sum of the loads to minimize contamination of the vacuum work environment by minimizing fine particles and foreign substances generated in the guide unit.

In order to achieve the above object, the load reduction device added to the conveying apparatus for vacuum equipment according to the present invention is a base plate, a transfer plate which is provided on the base plate to transfer the object, both sides of the conveying plate At least one guide portion provided in the guide plate for guiding the transfer of the transfer plate, the transfer control portion provided between the at least one guide portion and controlling the transfer plate to be transferred through the guide portion, and between the base plate and the transfer plate. It is provided with a load reducing unit for canceling the load applied to the at least one guide portion when the transfer plate is transferred using the repulsive force of the magnetic field

The load reducing unit is provided with a first magnet array formed of a plurality of magnets on the base plate, the first load reduction unit for generating a magnetic field, and the structure having a gap while facing the first load reduction unit below the transfer plate The second load reduction unit includes a second magnet array including a plurality of magnets that generate magnetic fields having the same polarity as the magnetic field generated by the first load reduction unit.

Hereinafter, with reference to the accompanying drawings there may be a plurality of embodiments of the transfer device for a vacuum device according to the present invention, the following describes the most preferred embodiment.

Figure 4 is a perspective view showing an embodiment of a load reducing device added to the conveying apparatus for a vacuum equipment according to the present invention, Figure 5 is a cross-sectional view showing a "b-b '" section of Figure 3, Figure 6a and FIG. 6B is an exploded perspective view showing in detail the configuration of the load reducing unit shown in FIGS. 4 and 5, and FIGS. 7A and 7B are magnetic field diagrams showing examples of magnetic field adjustment of the magnetic field control plate shown in FIGS. 6A and 6B. to be.

1 and 2, the same reference numerals are used for the same components, and descriptions of the same components will be omitted.

As shown in Figures 4 to 6a and 6b, the load reduction device added to the conveying apparatus for vacuum equipment according to the present invention is a first magnet array consisting of a plurality of magnets (113a) on the base plate (1) A first load reducing unit 110 configured to generate a magnetic field, and a first air gap having a predetermined gap therebetween facing the first load reducing unit 110 below the transfer plate 3. The first load and the second load is composed of a second load reduction unit 120 consisting of a second magnet array 123 consisting of a plurality of magnets 123a for generating a magnetic field equal to the polarity generated in the reduction unit 110 By the self-weight and object weight of the transfer plate 3 in the guide part 4 by a constant magnitude of repulsion force generated in the first and second magnet arrays 113 and 123 of the reduction units 110 and 120. To offset the load It is configured to include a load reduction unit 100.

4 to 6A and 6B illustrate an embodiment of combining the base plate 1 and the first bracket 112, the transfer plate 3, and the first bracket 122. 111 through 121 are shown. That is, the first base 111 and the first through hole 112b having the structure of the first groove 111a, the first magnet stopper 111b, and the first tab 111c in the base plate 1. The first bracket 112 having a structure of the screw is sequentially screwed, the structure of the second groove 121a, the third magnet stopper 121b, and the second tab 121c in the transfer plate 3 The second base 121 having a and the second bracket 122 having a structure of the second through hole 122b is screwed in sequence. The first and second through holes 112b and 122b of the first and second brackets 112 and 122 may include insertion jaws (not shown) into which the heads of the screws are inserted and through holes through which the legs of the screws are inserted. Not shown) is formed.

In addition to the method of coupling the base plate 1 and the first bracket 112 with the transfer plate 3 and the second bracket 122 by the screws, other fastening methods such as strong bond or vacuum epoxy molding may be used. You may use it.

The first and second load reduction units 110 and 120 of the load reduction unit 100 may separate the plurality of magnets 113a and 123a constituting the first and second magnet arrays 113 and 123. To prevent the first and second brackets 112 and 122 having a plurality of second and fourth magnet stoppers 112a and 122a at the same interval as the size of the magnets 113a and 123a on both sides and inside thereof. It is configured to further include.

The first and second load reduction unit parts 110 and 120 of the load reduction part 100 are formed in the first and second magnet arrays 113 and 123 made up of the plurality of magnets 113a and 123a. It further comprises a first and second magnetic field control plate (114, 124) for adjusting the intensity of the periodically increasing and decreasing magnetic field to a uniform intensity irrespective of the transport direction position.

The first and second magnetic field regulating plates 114 and 124 are the first and second load reducing units 110 and 120 of the first and second brackets 112 and 122 and the load reducing unit 100. It is formed in a structure that is in close contact with the cover.

The introduction of the magnetic field generated in the side of the plurality of magnets 113a and 123a in the first and second load reduction units 110 and 120 of the load reduction unit 100 and the respective magnets 113a and 123a Due to the difference in density of the magnetic field at the center position and the edge, the repulsive force is solved by periodically increasing or decreasing the strength of the repulsive force generated between the adjacent magnets 113a and 123a and the magnets 113a and 123a depending on the position of the conveying direction. By maintaining the size of the uniformly it is possible to enable a smooth transfer of the transfer plate (3). Herein, the strengths of the magnetic fields generated by the first and second load reduction units 110 and 120 of the load reduction unit 100 may include the first and second magnet arrays 113 and 123 formed of the plurality of magnets. The strength of the magnetic field of each magnet (113a) (123a), the size of the gap between the opposing magnet array (113) (123), the distance between the magnet (113a) (123a) and the first and second magnetic field control plate 114 124 is controlled by adjusting the thickness of each.

When described in detail with reference to the accompanying drawings the operation of the structure of the load reduction portion of the transfer apparatus for a vacuum apparatus configured as described above are as follows.

First, the transfer plate 3 is guided along the guide unit 4 according to the control of the transfer control unit 2 in a state where an object (not shown) is loaded, where the self-weight and the operation of the transfer control unit 2 are operated. The vertical bearing (unsigned) and the base coupled to the guide block 4b of the guide portion 4 provided under the transfer plate 3 by a load generated by the object weight on the transfer plate 3. Friction occurs between the guide rails 4a formed on the plate 1.

In this case, the first and second load reduction units 110 and 120 of the load reduction unit 100 may be formed in the plurality of magnets 113a and 123a of the first and second magnet arrays 113 and 123 therein, respectively. By using the repulsive force generated by the magnetic field to cancel the total of the load generated in accordance with the weight of the transfer plate 3, the load generated during the operation of the transfer control unit 2 and the weight of the object loaded on the transfer plate 3 The friction generated in the vertical bearing (unsigned) formed in the guide block 4b of the guide portion 4 and the guide rail 4a formed on the base plate 1 is reduced, which can be generated in the transfer process. Minimize the generation of fine dust and foreign substances to prevent contamination of the vacuum working environment.

The first and second magnet arrays 113 and 123 of the first and second load reduction units 110 and 120 to offset the sum of the loads are composed of a plurality of magnets 113a and 123a. Due to the strength of the magnetic field (Fig. 7a) which is periodically increased and decreased depending on the position in the direction, there are a plurality of positions in which the friction of the size is negligible during the transfer of the transfer plate 3, so that the transfer is not smooth. .

Accordingly, the first and second magnetic field regulating plates 114 and 124 made of a magnetic plate formed in a structure covering the first and second load reducing units 110 and 120 in close contact with the load reducing unit 100 are illustrated in FIG. As shown in FIG. 7B, the intensity of the magnetic field of the same polarity generated in the first and second magnet arrays 113 and 123 including the plurality of magnets 113a and 123a is uniformly adjusted in the feed direction. The load is minimized to enable ideal transfer of the transfer plate 3.

Here, in the first and second magnet array 113 (123) consisting of a plurality of magnets (113a, 123a) by adjusting the thickness of the magnetic material used as the first and second magnetic field correction (114, 124) By adjusting the intensity of the magnetic field of the same polarity generated, it is possible to obtain a magnetic field of a desired size uniform in the conveying direction to obtain a repulsive force that can cancel the sum of the load.
That is, as shown in FIG. 7B, when the plurality of magnets 113a and 123a are arranged in an array form and closely adhere thereon to cover the first and second magnetic field control plates 114 and 124 made of a magnetic material. The magnetic fields generated by the rod-shaped first and second magnet arrays 113 and 123 magnetize the first and second magnetic field control plates 114 and 124 made of magnetic material.
In general, the strength of the magnetic field produced by the magnet varies rapidly with the position in inverse proportion to the square of the distance, while the magnetization of the magnetic body is determined by the magnitude of the magnetic moment per unit volume. There is no big change.
Therefore, the first and second magnetic field regulating plates 114 made of a magnetic material that is in close contact with the periodic large change in the magnetic field strength depending on the position in the conveying direction resulting from the first and second magnet arrays 113 and 123 form. Greatly relaxed by (124), resulting in a uniform magnetic field distribution result in the conveying direction coinciding with the magnet array arrangement direction, thereby generating a constant repulsion regardless of the position in the conveying direction to effectively offset the sum of the loads It is possible to prevent the generation of fine dust and foreign matter due to the friction caused by the load applied to the guide portion 4.
As the guide part 4, any weight of the transfer plate 3 in the guide part 4 may be used by using any other alternative guide part 4 for guiding the transfer plate 3. Because the contamination of the vacuum working environment due to the fine particles and foreign substances due to friction generated by the load generated by the load according to the operation of (2) and the load generated by the object (not shown) self-weight on the transfer plate (3) occurs In order to minimize the friction of the guide part 4 by the repulsive force generated by the first and second load reduction units 110 and 120 of the load reduction unit 100, The present invention can also be applied to prevent contamination of the vacuum working environment due to fine particles and foreign matter.

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As the feed control unit 2, any of a ball screw and a motor, a belt pulley and a motor, or a gear drive and a motor may be used in addition to the linear motor method. This is because, even when the above-described method is used as the transfer control unit 2, the load on the transfer plate 3 itself, the self load according to the operation of the transfer control unit 2, and an object on the transfer plate 3 (not shown) The first and second load reduction units 110 of the load reducing unit 100 are generated because contamination of the vacuum working environment due to the fine particles and foreign matters generated by the friction of the guide unit 4 occurs according to the load of the load reducing unit 100. The present invention for preventing the contamination of the vacuum working environment by the fine particles and foreign substances generated by minimizing the friction in the guide portion 4 by canceling the total of the load by using the repulsive force generated in the (120) You can apply too.

 Load reduction device added to the conveying device for vacuum equipment according to the present invention having the configuration and action as described above has the following effects.

First, the strength of the magnetic field generated at the side of the magnet and the magnetic field varying in the feeding direction due to the difference in the density of the magnetic field at the center position and the edge of the magnet, instead of using one or a few long magnets, By taking a magnet array type that connects magnets in the form of an array, it makes constant the strength of the non-uniform magnetic field in the transport direction. The total sum of the loads can be effectively canceled to eliminate the generation of fine particles and foreign matters caused by friction due to the loads present in the guide unit, thereby preventing contamination of the vacuum working environment.

Second, the strength of the magnetic field generated from the side of the magnet and the magnetic field, which varies depending on the position in the transport direction due to the difference in the density of the magnetic field at the center and the edge of the magnet, are transferred to the magnet on the load reducing section and the magnet array in the form of a magnet array. Friction according to the load applied to the guide part by effectively canceling the total of the load by maintaining a constant repulsive force in the conveying direction by additionally making the intensity of the magnetic field periodically increasing and decreasing in the conveying direction by combining the magnetic field control plate formed by the magnetic field By eliminating the generation of fine particles and foreign matter caused by the contamination of the vacuum working environment, it is possible to transfer the ideal transfer plate.

Those skilled in the art will appreciate that various changes and modifications can be made without departing from the spirit of the present invention.                     

Therefore, the technical scope of the present invention should not be limited to the contents described in the embodiments, but should be defined by the claims and their equivalents.

Claims (9)

A base plate; A transfer plate provided at an upper portion of the base plate to transfer an object; At least one guide unit provided at both sides of the transfer plate to guide the transfer of the transfer plate; A transfer control unit provided between the at least one guide unit and controlling the transfer plate to be transferred through the at least one guide unit; It is provided between the base plate and the transfer plate consists of a load reducing unit for canceling the load applied to the at least one guide portion when the transfer plate is transferred using the repulsive force of the magnetic field The load reducing unit is provided with a first magnet array formed of a plurality of magnets on the base plate, the first load reduction unit for generating a magnetic field, and the structure having a gap while facing the first load reduction unit below the transfer plate And a second load reduction unit having a second magnet array made up of a plurality of magnets generating magnetic fields having the same polarity as that of the magnetic field generated by the first load reduction unit. Added load reduction device. The method of claim 1, The first and second load reduction units of the load reduction unit are attached to the upper and lower portions of the base plate and the transfer plate, respectively, and the upper and lower portions of the first and second bases, respectively. The first and second brackets into which the magnets are inserted, the first and second magnet arrays inserted into the upper and lower parts of the first and second brackets, and the upper and lower parts of the first and second magnet arrays. Load reduction device added to the transfer device for vacuum equipment, characterized in that consisting of the first and second magnetic field control plate. The method according to claim 1 or 2, In order to control the strength of the repulsive force generated in the first and second load reduction unit, in the first and second magnet array consisting of a plurality of magnets, the strength of the magnetic field of the magnet, the size of the gap between the opposing magnets and the magnet A load reduction device added to a transfer device for vacuum equipment, characterized in that configured to adjust the distance. The method according to claim 1 or 2, Vacuum, characterized in that the thickness, size, or air gap of the magnet located in the specific region of the first and second magnet array to increase the repulsion of the specific region occurring in the first and second load reduction unit Load reduction device added to the feeder for equipment. The method of claim 2, Both sides of the first and second bases are provided with a first and a third magnet stopper for preventing the first and second magnet array consisting of a plurality of magnets from being separated Load reduction device. The method of claim 2, The first and second brackets are provided with a plurality of second and fourth magnet stoppers for supporting the magnets with a predetermined insertion interval to prevent the separation of the plurality of magnets constituting the first and second magnet array therein Load reduction device added to the transfer device for vacuum equipment, characterized in that. The method of claim 2, The first and second magnetic field control plates transfer vacuum equipment, characterized in that to uniformly adjust the intensity of the magnetic field of the same polarity periodically increasing in the feed direction generated in the first and second magnet array consisting of a plurality of magnets Load reduction device added to the device. The method of claim 2, And the first and second magnetic field regulating plates and the first and second brackets are magnetic bodies. The method according to claim 2 or 7, By adjusting the thickness of each of the first and second magnetic field control plate to adjust the strength of the magnetic field of the first and second load reduction unit to the weight of the transfer plate, the load generated during the operation of the transfer control unit and the transfer plate A load reducing device added to a conveying apparatus for vacuum equipment, characterized in that to obtain a repulsive force of a uniform size in the conveying direction to cancel the total load according to the weight of the loaded object.

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