KR100653442B1 - Supporthng apparatus for showerhead - Google Patents

Supporthng apparatus for showerhead Download PDF

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Publication number
KR100653442B1
KR100653442B1 KR1020050114432A KR20050114432A KR100653442B1 KR 100653442 B1 KR100653442 B1 KR 100653442B1 KR 1020050114432 A KR1020050114432 A KR 1020050114432A KR 20050114432 A KR20050114432 A KR 20050114432A KR 100653442 B1 KR100653442 B1 KR 100653442B1
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South Korea
Prior art keywords
diffuser body
shower head
support
bracket
support device
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KR1020050114432A
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Korean (ko)
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엄평용
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주식회사 유진테크
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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C23C16/45563—Gas nozzles
    • C23C16/45565—Shower nozzles
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs

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  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Engineering & Computer Science (AREA)
  • Metallurgy (AREA)
  • Mechanical Engineering (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical Vapour Deposition (AREA)

Abstract

An apparatus for supporting a shower head is provided to prevent a shower head from sagging by fixing the shower head to a diffuser body while the diffuser body is fixed to a lid cover. A second support unit(170) consists of a fixing unit and a vacuum cover to fix a shower head(150). The fixing unit is inserted into a spacer part formed in a diffuser body(140), penetrating the diffuser body to be inserted into the shower head. The space part is covered with the vacuum cover. A first support unit(160) includes a bracket and a fixing unit to fix the diffuser body. The bracket is disposed on the lid cover. The fixing unit penetrates the bracket and lid cover, functioning as a fixing unit inserted into the diffuser body. The bracket can be an H-type beam, a hexahedral type or a hexahedron of a trapezoid type.

Description

샤워헤드 지지장치{SupportHng apparatus for showerhead} Shower head support device {SupportHng apparatus for showerhead}

도 1은 종래의 샤워헤드 지지장치에 대한 개념도1 is a conceptual diagram of a conventional showerhead support device

도 2는 본 발명에 의한 샤워헤드 지지장치에 대한 개념도2 is a conceptual diagram of a showerhead support apparatus according to the present invention

도 3a는 본 발명에 의한 제1지지구의 상세 단면도,Figure 3a is a detailed cross-sectional view of the first support according to the present invention,

도 3b는 본 발명에 의한 제1지지구의 고정구에 대한 조립도,3b is an assembly view of the fixture of the first support according to the present invention,

도 4는 본 발명에 의한 제2지지구의 상세 단면도,4 is a detailed cross-sectional view of the second support according to the present invention;

도 5는 본 발명에 의한 제1지지구의 평면도,5 is a plan view of the first support according to the present invention,

도 6은 본 발명에 의한 제1고정구의 브라켓에 대한 일 실시예의 단면도,Figure 6 is a cross-sectional view of one embodiment of the bracket of the first fixture according to the present invention,

도 7은 본 발명에 의한 제1고정구의 브라켓에 대한 일 실시예의 단면도,7 is a cross-sectional view of an embodiment of a bracket of a first fixture according to the present invention;

<도면의 주요부분에 대한 부호의 설명><Description of the symbols for the main parts of the drawings>

110 : 리드 커버 140 : 디퓨져 바디110: lid cover 140: diffuser body

140a : 공간부 150 : 샤워헤드140a: space 150: shower head

160 : 제1지지부 170 : 제2지지부160: first support portion 170: second support portion

본 발명은 샤워헤드를 지지하는 장치에 관한 것으로서, 특히 샤워헤드를 지 지하기 위하여 디퓨져 바디와 고정되는 제2고정구와 상기 디퓨져 바디를 지지하기 위하여 리드 커버와 고정되는 제1고정구의 구성에 의해 상기 샤워헤드의 처짐 변형을 방지하여 증착 균일도를 향상시키는 기능을 갖는 지지장치에 관한 것이다.The present invention relates to an apparatus for supporting a shower head, and in particular, by a configuration of a second fixture fixed to the diffuser body to support the shower head and a first fixture fixed to the lid cover to support the diffuser body. A support apparatus having a function of preventing sag deformation of a showerhead to improve deposition uniformity.

일반적으로 LCD용 화학기상증착공정을 수행하기 위하여 도 1에 나타난 바와 같은 구성이 널리 사용되고 있다. 즉, 반응가스를 분사하기 위한 샤워헤드(15)가 디퓨져 바디(14)의 양측에 볼트에 의해 고정되는 한편 도입부(18)에 의해 도입된 반응가스가 서셉터(S)에 분사된다. In general, in order to perform a chemical vapor deposition process for LCD, the configuration as shown in Figure 1 is widely used. That is, the shower head 15 for injecting the reaction gas is fixed to both sides of the diffuser body 14 by bolts, while the reaction gas introduced by the introduction unit 18 is injected into the susceptor S.

한편 근래에는 LCD 가공을 위한 글래스의 크기와 중량이 증가됨에 의해 상기 샤워헤드(15)의 크기도 증가되는 추세에 있다. In recent years, the size of the shower head 15 also increases due to the increase in the size and weight of the glass for LCD processing.

그러나, 크기와 중량이 증가된 샤워헤드(15)가 상술한 바와 같이 종래의 구성에 의해 고정되는 경우 처짐등의 변형이 발생하거나 디퓨져 바디(14)의 경우 진공으로 인한 압력차이에 의해 변형이 발생되기도 한다. 이러한 변형에 의해 샤워헤드와 서셉터간의 중앙부와 주변부의 전극거리가 차이가 나고 이로 인한 플라즈마의 불균일 현상에 따라 증착시 균일도가 저해되는 문제점이 있었다.However, when the shower head 15 having an increased size and weight is fixed by the conventional configuration as described above, deformation such as sag occurs or deformation of the diffuser body 14 due to pressure difference due to vacuum. Sometimes. Due to this deformation, the electrode distance between the center and the peripheral part between the showerhead and the susceptor is different, and there is a problem in that uniformity is impaired during deposition due to uneven plasma phenomenon.

본 발명은 상술한 문제점을 해결하기 위한 것으로서 샤워헤드를 지지하기 위하여 디퓨져 바디에 고정시키는 한편 상기 디퓨져 바디를 지지하기 위하여 리드 커버 상부의 브라켓 및 이에 고정시키는 구성에 의해 상기 샤워헤드의 처짐 변형을 방지하여 증착 균일도를 향상시키는 화학기상증착장치를 제공하는데 그 목적이 있다.The present invention has been made to solve the above-mentioned problems, while fixing to the diffuser body to support the shower head, while preventing the deflection deformation of the shower head by a structure and a bracket on the upper lid cover to support the diffuser body The purpose is to provide a chemical vapor deposition apparatus that improves the deposition uniformity.

상술한 목적은 상기 샤워헤드를 고정하기 위하여, 상기 디퓨져 바디에 형성되는 공간부에 삽입되는 한편 상기 디퓨져 바디를 관통하여 상기 샤워헤드에 삽입되어 상기 샤워헤드를 고정하게 되는 고정구와 상기 공간부상에 덮여지는 진공커버로 되는 제2지지구와, 상기 디퓨져 바디를 고정하기 위하여, 상기 리드 커버상에 배치되는 브라켓과 상기 브라켓과 상기 리드 커버를 관통하는 한편 상기 디퓨져 바디에 삽입되는 고정구로 되는 제1지지구를 더 포함하는 것을 특징으로 하는 샤워헤드 지지장치에 의해 달성될 수 있다.In order to fix the shower head, the above-mentioned object is inserted into a space portion formed in the diffuser body and is inserted into the shower head through the diffuser body and covered on the fixture and the space portion to fix the shower head. A second support serving as a vacuum cover, and a first support comprising a bracket disposed on the lid cover and a fixture inserted through the bracket and the lid cover while being inserted into the diffuser body to fix the diffuser body. It can be achieved by a showerhead support device characterized in that it further comprises.

이하 실시예와 첨부된 도면에 의해 상기 기술적 사상을 상세히 설명하기로한다.Hereinafter, the technical spirit will be described in detail with reference to the accompanying drawings.

상술한 바와 같이 본 발명은 큰 크기와 중량을 가지는 샤워헤드의 처짐방지를 위하여 지지장치를 부가한 것으로서 이하 도 2를 참조하여 설명한다.As described above, the present invention adds a support device for preventing sagging of a shower head having a large size and weight.

본 발명의 지지장치는 샤워헤드(150)를 지지하기 위하여 디퓨져 바디(140)에 고정시키는 제2지지구(170)와 상기 디퓨져 바디(140)를 지지하기 위하여 리드 커버(110) 상부에 고정시키는 제1지지구(160)으로 구성된다.The support device of the present invention is a second support 170 for fixing to the diffuser body 140 to support the shower head 150 and to fix the upper lid cover 110 to support the diffuser body 140 It is composed of a first support (160).

상기 제1지지구(160)는 리드 커버(110)상에 배치되는 브라켓(161)을 기반으로 하여 고정구(162)가 상기 리드 커버(110)를 관통하며 디퓨져 바디(140)에 삽입되어 고정하는 구성에 의해 상기 디퓨져 바디(140)를 지지하게 된다. (도 3a 참조)The first support 160 is based on the bracket 161 disposed on the lead cover 110, the fastener 162 penetrates the lead cover 110 and is inserted into the diffuser body 140 to be fixed. The diffuser body 140 is supported by the configuration. (See Figure 3A)

이때 상기 브라켓(161)은 H형 빔을 사용하고 있으나 육면체 형상으로도 가능하고(도 6 참조) 사다리꼴 단면의 육면체 형상도 가능하다(도 7 참조) 즉 상기 고 정구(162)가 고정될 수 있는 형상이면 어느 것이나 가능하다.In this case, the bracket 161 uses an H-shaped beam, but may also have a hexahedral shape (see FIG. 6), and may also have a hexahedral shape with a trapezoidal cross section (see FIG. 7), that is, the fixture 162 may be fixed. Any shape is possible.

한편, 상기 고정구(162)는 절연이 가능한 피크(peek)나 테프론 등의 엔지니어링 플라스틱 재질로 하는 부싱형태의 튜브(162a)에 삽입되게 되는데, 그 이유는 고전압이 걸리는 디퓨져 바디(140)와의 전기적 절연을 하기 위함이다. On the other hand, the fixture 162 is inserted into the bushing-shaped tube 162a made of an engineering plastic material such as a peak (peek) or Teflon that can be insulated, because the electrical insulation with the diffuser body 140 is applied high voltage To do this.

상기 피크(peek)는 "Poly Ether Ether Ketone "의 약어로서 엔지니어링 플라스틱의 일종이다. 상기 피크는 용해 성형 가능한 결정성 수지로서는, 가장 높은 내열성을 가지고, 내피로성, 내환경성, 난소성(부식성 가스를 내지 않고, 연기의 발생도 적다) 등이 뛰어난 특징이 있다. The peak is an abbreviation of "Poly Ether Ether Ketone", which is a kind of engineering plastic. As the crystalline resin which can be melt-molded, the peak has the highest heat resistance, and is characterized by excellent fatigue resistance, environmental resistance, incombustibility (without generating a corrosive gas, and less generation of smoke).

한편, 상술한 바와 같이 디퓨져 바디(140)를 지지하는 이유는 대면적의 진공장치에서 상기 디퓨져 바디(140)가 진공힘에 의해 중앙부가 처짐을 상술한 리드커버(110)와 H 빔에 의해 지지하는 역할을 하게 함이며 상기 디퓨져 바디(140)에 연결되어 있는 상기 샤워헤드(150)의 중앙부가 처짐을 지지하고자 하기 위한 것이다.Meanwhile, as described above, the reason for supporting the diffuser body 140 is that the diffuser body 140 is supported by the lid cover 110 and the H beam described above where the central portion sags due to the vacuum force in a large-area vacuum apparatus. It is intended to support the deflection of the central portion of the shower head 150 is connected to the diffuser body 140.

한편 상기 고정구(162)는 와셔(162b)를 통해서 상술한 튜브(162a)에 삽입되게 하여 고정 후에도 잘 풀어지지 않도록 하였다.( 도 3b 참조) 상기 튜브(162)는 상부가 반경이 넓은 단턱부와 그 하부에 상기 고정구(162)가 삽입되는 삽입부로 구성된다. 한편 상기 와셔(162b)의 재질은 일반 금속을 사용하는 것도 바람직하다.On the other hand, the fastener 162 is inserted into the tube 162a described above through the washer 162b so as not to be released even after fixing. (See FIG. 3B.) The tube 162 has a stepped portion having a wide radius at the top. It is composed of the insertion portion is inserted into the fixture 162 in the lower portion. On the other hand, the material of the washer 162b is also preferably used a general metal.

상술한 바와 같이 본 발명은 샤워헤드(150)의 처짐에 의한 변형을 방지하기 위하여 제2지지구(170)에 의해 상기 샤워헤드(150)를 디퓨져 바디(140)에 고정시키는 한편 제1지지구(160)에 의해 상기 디퓨져 바디(140)를 리드 커버(110)에 고정시키는 것으로서 이하 도 4를 참조하여 제2지지구(170)를 설명하기로 한다.As described above, the present invention secures the shower head 150 to the diffuser body 140 by the second support 170 to prevent deformation due to the sag of the shower head 150. By fixing the diffuser body 140 to the lid cover 110 by 160, the second support 170 will be described with reference to FIG.

상기 제2지지구(170)의 고정구(172)는 상기 디퓨져 바디(140)에 형성되는 공간부(140a)에 삽입되는 한편 상기 디퓨져 바디(140)를 관통하여 샤워헤드(150)에 삽입되어 고정된다. 이때 상기 공간부(140a)의 윗면에는 반응가스의 누출을 방지하기 위하여 진공커버(171)가 배치된다. 상기 진공커버(171)는 실링 부재(173)이 설치되어 기밀을 유지하게 된다.The fastener 172 of the second support 170 is inserted into the space portion 140a formed in the diffuser body 140 while being inserted into and fixed in the shower head 150 through the diffuser body 140. do. At this time, the vacuum cover 171 is disposed on the upper surface of the space 140a to prevent the leakage of the reaction gas. The vacuum cover 171 is provided with a sealing member 173 to maintain the airtight.

또한 상기 고정구(172)의 경우 금속이나, 스테인레스 스틸의 재질을 사용하였으며, 튜브(172a)의 경우 알루미늄 재질로 하였으며 이는 고정구(172)가 반응가스에 직접 노출되어 부식되는것을 방지하고자 하였다. In addition, the fixture 172 was made of metal or stainless steel, and the tube 172a was made of aluminum, which was intended to prevent corrosion of the fixture 172 by being directly exposed to the reaction gas.

한편 상술한 제1지지구(160)는 다수개를 사용하는 것도 가능하다. 즉, 도 5에서 도시된 바와 같이 도입부(180)를 중심으로 원형으로 배열시키는 것도 바람직 하다.On the other hand, it is also possible to use a plurality of the first support 160 described above. That is, as shown in Figure 5 it is also preferably arranged in a circle around the inlet 180.

이상과 같이 샤워헤드의 처짐에 의한 변형을 방지하여 균일한 증착막을 얻기 위하여 제2지지구에 의해 상기 샤워헤드를 디퓨져 바디에 고정시키는 한편 제1지지구에 의해 상기 디퓨져 바디를 리드 커버에 고정시키는 하는 구성에 의해 샤워헤드의 처짐 변형을 방지하여 증착 균일도를 향상시키는 효과가 있다.As described above, the showerhead is fixed to the diffuser body by a second support while preventing the deformation caused by the sag of the showerhead to obtain a uniform deposition film, and the diffuser body is fixed to the lid cover by the first support. The configuration can prevent sagging deformation of the showerhead, thereby improving the deposition uniformity.

Claims (6)

증착이 이루어지는 서셉터(S)와 상기 서셉터(S)를 지지하는 서셉터 지지구(190)와 상기 서셉터(S)에 반응가스를 분사하는 샤워헤드(150)와 상기 샤워헤드(190)상에 위치하는 한편 반응가스 도입을 위한 도입부(180)가 형성되는 디퓨져 바디(140)와 상기 디퓨져 바디(140)의 상면에 배치되는 리드 커버(110)와 상기 디퓨져 바디(140)의 측면에 배치되는 챔버 리드(120) 및 상기 챔버 리드(120)의 밑에 배치되는 챔버 바디(130)로 구성되는 화학기상증착장치에 있어서, The susceptor S to be deposited, the susceptor support 190 for supporting the susceptor S, the shower head 150 for spraying the reaction gas to the susceptor S, and the shower head 190. A diffuser body 140 and a lead cover 110 disposed on an upper surface of the diffuser body 140 and a side surface of the diffuser body 140 are disposed on the diffuser body 140. In the chemical vapor deposition apparatus consisting of a chamber lid 120 and a chamber body 130 disposed below the chamber lid 120, 상기 샤워헤드(150)를 고정하기 위하여, 상기 디퓨져 바디(140)에 형성되는 공간부(140a)에 삽입되는 한편 상기 디퓨져 바디(140)를 관통하여 상기 샤워헤드(150)에 삽입되어 상기 샤워헤드(150)를 고정하게 되는 고정구(172)와 상기 공간부(140a)상에 덮여지는 진공커버(171)로 되는 제2지지구(170)와,In order to fix the shower head 150, the shower head 150 is inserted into the space portion 140a formed in the diffuser body 140 while penetrating the diffuser body 140 and inserted into the shower head 150. A second support member 170 including a fixing tool 172 to fix the 150 and a vacuum cover 171 covered on the space part 140a, 상기 디퓨져 바디(140)를 고정하기 위하여, 상기 리드 커버(110)상에 배치되는 브라켓(161)과 상기 브라켓(161)과 상기 리드 커버(110)를 관통하는 한편 상기 디퓨져 바디(140)에 삽입되는 고정구(162)로 되는 제1지지구(160)를 더 포함하는 것을 특징으로 하는 샤워헤드 지지장치In order to fix the diffuser body 140, the bracket 161 disposed on the lead cover 110 and the bracket 161 and the lead cover 110 are inserted into the diffuser body 140. Shower head support device characterized in that it further comprises a first support 160 to be a fixture 162 제1항에 있어서,The method of claim 1, 상기 브라켓(161)은 H형 빔인 것을 특징으로 하는 샤워헤드 지지장치The bracket 161 is a showerhead support device, characterized in that the H-beam 제1항에 있어서The method of claim 1 상기 브라켓(161)은 육면체 형상인 것을 특징으로 하는 샤워헤드 지지장치The bracket 161 is a showerhead support device, characterized in that the hexahedral shape 제1항에 있어서,The method of claim 1, 상기 브라켓(161)은 사다리꼴 형상의 육면체 것을 특징으로 하는 샤워헤드 지지장치The bracket 161 is a shower head support device, characterized in that the trapezoidal hexahedron 제1항에 있어서,The method of claim 1, 상기 고정구(162,172)는 와셔(162b, 172b)를 관통하여 상부단턱과 삽입부로 이루어지는 튜브(162a, 172a)에 삽입되게 되는데,The fasteners 162 and 172 penetrate the washers 162b and 172b to be inserted into the tubes 162a and 172a including the upper step and the insertion part. 상기 제1지지구(160)의 튜브(162a)는 피크나 테프론등의 엔지니어링 플라스틱 재질로 하고, 고정구(162)는 금속이나 스테인레스 스틸을 그 재질로 하는 한편, 상기 제2지지구(170)의 튜브(172a)는 알루미늄 재질로 하며, 고정구(172)는 금속이나 스테인레스 스틸을 재질로 하는 것을 특징으로 하는 샤워헤드 지지장치The tube 162a of the first support 160 is made of an engineering plastic material such as a peak or Teflon, and the fastener 162 is made of metal or stainless steel, and the tube 162a of the second support 170 is made of a material. The tube 172a is made of aluminum, and the fixture 172 is a showerhead support device, characterized in that the material is made of metal or stainless steel 제1항에 있어서,The method of claim 1, 상기 진공커버(171)와 상기 디퓨져 바디(140)사이에는 실링 부재(173)가 삽입되는 것을 특징으로 하는 샤워헤드 지지장치.Shower head support device, characterized in that the sealing member (173) is inserted between the vacuum cover (171) and the diffuser body (140).
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KR101249999B1 (en) 2010-08-12 2013-04-03 주식회사 디엠에스 Apparatus for chemical vapor deposition
KR101352925B1 (en) 2011-09-16 2014-01-22 주식회사 에스에프에이 Chemical Vapor Deposition Apparatus for Flat Display
KR101365075B1 (en) * 2011-11-02 2014-02-20 주식회사 에스에프에이 Chemical Vapor Deposition Apparatus for Flat Display
KR101373746B1 (en) * 2010-08-17 2014-03-14 세메스 주식회사 Apparatus for Processing Substrate Using Plasma
EP3178540A1 (en) 2015-12-09 2017-06-14 Point Engineering Co., Ltd. Fluid permeable anodic oxide film and fluid permeable body using anodic oxide film
KR20170068243A (en) 2015-12-09 2017-06-19 (주)포인트엔지니어링 Fluid permeable apparatus using anodic oxidation film
US10710102B2 (en) 2017-09-08 2020-07-14 Point Engineering Co., Ltd. Fluid permeable member
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Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101249999B1 (en) 2010-08-12 2013-04-03 주식회사 디엠에스 Apparatus for chemical vapor deposition
KR101373746B1 (en) * 2010-08-17 2014-03-14 세메스 주식회사 Apparatus for Processing Substrate Using Plasma
KR101352925B1 (en) 2011-09-16 2014-01-22 주식회사 에스에프에이 Chemical Vapor Deposition Apparatus for Flat Display
KR101365075B1 (en) * 2011-11-02 2014-02-20 주식회사 에스에프에이 Chemical Vapor Deposition Apparatus for Flat Display
EP3178540A1 (en) 2015-12-09 2017-06-14 Point Engineering Co., Ltd. Fluid permeable anodic oxide film and fluid permeable body using anodic oxide film
KR20170068243A (en) 2015-12-09 2017-06-19 (주)포인트엔지니어링 Fluid permeable apparatus using anodic oxidation film
US10533253B2 (en) 2015-12-09 2020-01-14 Point Engineering Co., Ltd. Fluid permeable anodic oxide film and fluid permeable body using anodic oxide film
US10710102B2 (en) 2017-09-08 2020-07-14 Point Engineering Co., Ltd. Fluid permeable member
KR20220034502A (en) * 2020-09-11 2022-03-18 주식회사 원익아이피에스 Substrate processing apparatus
KR102707623B1 (en) 2020-09-11 2024-09-19 주식회사 원익아이피에스 Substrate processing apparatus

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