KR100628457B1 - Driving unit of laser machining apparatus - Google Patents

Abstract

Disclosed is a drive unit of a laser processing apparatus. The driving unit of the disclosed laser processing apparatus includes: an X-axis driving unit for driving the mounted laser head in a second direction; A pair of Y-axis drivers installed at a lower portion of the X-axis driver to drive the X-axis driver in a first direction in which the workpiece is to be conveyed, wherein the Y-axis driver is linear with both sides of the X-axis driver in the first direction. A linear driving unit driven by; It characterized in that it comprises a; rotary drive unit for rotating the other side relative to one side of the X-axis drive unit.

Description

Driving unit of laser machining apparatus

1 is a perspective view schematically showing a driving unit of a conventional laser processing apparatus.

FIG. 2 is a plan view schematically illustrating a driving unit of the laser processing apparatus illustrated in FIG. 1.

3 is a view schematically showing a driving unit of the laser processing apparatus according to the preferred embodiment of the present invention.

FIG. 4 is a side cross-sectional view showing a driving part of the laser machining apparatus shown in FIG. 3.

FIG. 5 is a view illustrating an embodiment of a rotating part of the laser processing apparatus illustrated in FIG. 3.

<Description of the symbols for the main parts of the drawings>

100 Drive unit 110 Workpiece (LCD)

120 first linear drive 124 fine adjustment drive

130 ... 2nd linear drive 134 ... rotating part

140 Y-axis drive 150 Support member

160 ... X axis drive 170 ... Linear motor

180 ... linear motor 190 ... linear motor

The present invention relates to a laser processing apparatus, and more particularly, to a driving unit of a laser processing apparatus for cutting an electrode of a liquid crystal display (LCD), which is a type of flat panel display.

For the COG (Chip On Glass) operation of the liquid crystal display, a laser is used to cut the electrodes of the liquid crystal display (LCD). Conventional liquid crystal displays (LCDs) have a relatively small size and wide electrode spacing. However, as the liquid crystal display (LCD) becomes larger and the resolution becomes higher resolution, the spacing between electrodes is also getting smaller.

1 is a perspective view schematically showing a driving unit of a conventional laser processing apparatus, and FIG. 2 is a plan view schematically showing a driving unit of the laser processing apparatus shown in FIG. 1.

1 and 2, in order to process an enlarged liquid crystal display (LCD) 30, a laser processing apparatus carries a laser head 21 on a gantry-type driving unit to carry out a liquid crystal display 30. The electrode cutting operation is performed. For cutting the electrodes of the liquid crystal display 30, the laser processing apparatus requires very precise precision. Since the liquid crystal display 30 forms a micro thin film on the panel by using a semiconductor process, micromachining of micrometers should be performed in advance in order to process the liquid crystal display 30. Therefore, the laser light should be irradiated at the correct position of the liquid crystal display 30 in order to reduce the precision micro machining and processing error.

As shown in FIG. 2, there is a case where the liquid crystal display 30 conveyed in the direction of the arrow is conveyed out of order. As such, when the position of the liquid crystal display 30 is misaligned, the position error of the misaligned position should be compensated for precise laser processing.

In order to compensate for the position error, an alignment mark on a liquid crystal display (LCD) is read through a vision camera (not shown), and then the lower and upper shafts 10 and 20 of the gantry driver are interposed with each other. The micro-movement compensates for the positional error and laser processing.

In the processing method of the gantry drive unit as described above, the lower axis (or the upper axis) moves in a few μm while the upper axis (or the lower axis) moves at a high speed. This becomes a factor that makes the control of the controller controller difficult.

In addition, high precision linear encoders are required for precise fine movement. Equipped with a high resolution encoder is advantageous for fine movement but very disadvantageous for high speed movement. The driving unit equipped with the encoder having such a high resolution is difficult to move at a high speed in a process of processing a large liquid crystal display (LCD), thereby reducing productivity. This also lowers the overall production rate, which in turn reduces overall productivity.

In contrast, there is a method of correcting a position error between the liquid crystal display (LCD) and the gantry driver by installing a unit for rotating the working table under the working table on which the liquid crystal display (LCD) is loaded. However, the device for precisely rotating the large structure is expensive and the installation height of the working table is also increased because the rotatable unit must be mounted below the working table.

SUMMARY OF THE INVENTION The present invention has been made to improve the above problems, and an object thereof is to provide a driving unit of a compact laser processing apparatus capable of laser processing at high speed and high precision.

The driving unit of the laser processing apparatus according to the present invention comprises: an X-axis driving unit for driving the mounted laser head in a second direction;

And a pair of Y-axis drivers installed below the X-axis driver to drive the X-axis driver in a first direction in which a workpiece is to be transferred.

The Y-axis drive unit, the linear drive unit for linearly driving both sides of the X-axis drive unit in the first direction;

And a rotational drive unit rotating the other side relative to one side of the X-axis drive unit.

In the drive unit of the laser processing apparatus according to the present invention, the linear drive unit,

And a first linear driver installed on the one Y-axis driver and a second linear driver installed on the other Y-axis driver, wherein the first and second linear drivers each include a linear motor. It features.

In the drive unit of the laser processing apparatus according to the present invention, the rotary drive unit,

A fine adjustment driver installed on the first linear driver;

And a rotating part installed on the second linear driving part.

In the drive unit of the laser processing apparatus according to the present invention, the fine adjustment drive unit,

And a linear motor for precisely driving the X-axis driving portion in the upper portion thereof in the first direction.

In the drive unit of the laser processing apparatus according to the present invention, the rotating unit,

A fixing member fixed to the second linear driving unit;

And a rotating member rotatably installed on the fixing member.

In the driving unit of the laser processing apparatus according to the present invention, the fixing member and the rotating member is characterized in that the hinge is coupled.

In the drive unit of the laser processing apparatus according to the present invention, the X-axis drive unit,

One side is installed in the fine adjustment drive, the other side is characterized in that installed in the rotating member.

In the drive unit of the laser processing apparatus according to the present invention, the support member is provided between one side of the X-axis drive unit and the fine adjustment drive unit; It is characterized by further comprising.

In the driving unit of the laser processing apparatus according to the present invention, the support member is provided between the other side of the X-axis driving unit and the rotating member; It is characterized by further comprising.

Hereinafter, with reference to the accompanying drawings will be described in detail the driving unit of the laser processing apparatus according to a preferred embodiment of the present invention. In this process, the thickness of the lines or the size of the components shown in the drawings are exaggerated for quick understanding of the description.

In general, a laser processing apparatus for cutting a flat panel display such as a liquid crystal display (LCD) or the like includes a driving unit installed to be movable in a predetermined direction.

3 is a view schematically showing a driving unit of the laser processing apparatus according to a preferred embodiment of the present invention, and FIG. 4 is a side cross-sectional view showing the driving unit of the laser processing apparatus shown in FIG. 3. 5 is a view showing an embodiment of a rotating part of the laser processing apparatus shown in FIG.

3 and 4, the driving unit 100 of the laser processing apparatus according to the present invention is a pair of Y-axis driving units which are installed to be spaced apart by a predetermined interval in parallel with the direction in which the workpiece 110 is transferred (Y direction). X and X driving the laser head mounted and installed in the second direction (X direction) formed at a predetermined angle with the first direction (Y direction) on the pair of Y-axis driving parts 140. The soccer eastern part 160 is provided. Hereinafter, for convenience of description, the direction in which the workpiece 110 is transferred is called a first direction (Y direction), and the direction in which the X-axis driving unit 160 is installed is called a second direction (X direction).

The Y-axis driving unit 140 is installed to be spaced apart by a predetermined interval in parallel with the first direction (Y direction) to which the workpiece 110 is transferred, and linearly drives both sides of the X-axis driving unit 160 in the first direction. And linear driving units 120 and 130, and rotation driving units 124 and 134 which rotate the other side relative to one side of the X-axis driving unit 160. The linear driving units 120 and 130 include a first linear driving unit 120 installed on one Y-axis driving unit and a second linear driving unit 130 installed on the other Y-axis driving unit. The second linear driver 120 and 130 are each characterized by having a linear motor. In addition, linear encoders 175, 185, and 195 are provided in each of the first and second linear drivers 120 and 130 and the fine adjustment drivers 124 described later. The linear encoders 175, 185, and 195 detect the speed and position of the mover of the linear motor including a stator and a mover, and then generate an encoder signal to determine the position and speed of the mover. That is, the linear encoders 175, 185, and 195 determine the moving speed or the current position of the first and second linear drivers 120 and 130 and the fine adjustment driver 124. Since the configuration and operation of the linear encoder 175, 185, 195 itself is well known in the art, a detailed description thereof will be omitted.

Referring to FIG. 4, the first linear driving unit 120 includes a moving table 122 installed on the linear motor 170, and the fine adjustment driving unit 124 is installed on the moving table 122.

In general, the linear motor is divided into synchronous and asynchronous, and is composed of a stator and a mover. Alternatively, the linear motor is classified into a moving coil type in which the mover is a coil and a moving permanent magnet type in which the mover is a permanent magnet, depending on the configuration of the mover. As shown in FIG. 3, the linear motor 170 according to an exemplary embodiment of the present invention includes a permanent magnet 171 that is a stator and a coil 174 that is a mover. do. When the linear motor 170 supplies driving power to the plurality of coils 174 configured in the mover, a thrust force for pushing the coil 174 is generated between the coil 174 and the permanent magnet 171 installed at a predetermined interval. . This thrust causes the coil 174, which is a mover, to make a linear motion. Rails 172 are provided side by side in the first direction on both sides of the permanent magnet 171, which is a stator. The rail 172 is coupled to the block 173 to be reciprocated in the first direction by the linear motor 170 is coupled. Since the configuration and operation of the linear motor 170 itself is well known in the art to which the present invention pertains, a detailed description thereof will be omitted.

The moving table 122 is installed in the linear motor 170. In more precise terms, the moving table 122 is installed in the block 173 and restrains the movement of the block 173. On one side of the moving table 122, a coil 174 that is a mover is installed at a position facing the permanent magnet 171. That is, the moving table 122 reciprocates in the first direction by the interaction of the coil 174 and the permanent magnet 171. The other side of the moving table 122 is provided with a fine adjustment driving unit 124.

The second linear driver 130 includes a moving table 132 installed on the linear motor 180, and a rotating unit 134 is installed on the moving table 132.

The linear motor 180 includes a permanent magnet 181 that is a stator and a coil 184 that is a mover. Rails 182 are provided on both sides of the permanent magnet 181, which is a stator, side by side in a first direction. Block 183 is coupled to the rail 182 to be reciprocated in the first direction by the linear motor 180 is coupled. Since the configuration and operation of the linear motor 180 itself are similar to the linear motor 170 provided in the first linear driving unit 120 described above, a detailed description thereof will be omitted.

The moving table 132 is installed in the linear motor 180. More precisely, the moving table 132 is installed in the block 183 and is restrained by the movement of the block 183. On one side of the moving table 132, a coil 184, which is a mover, is installed at a position facing the permanent magnet 181. That is, the moving table 132 reciprocates in the first direction by the interaction of the coil 184 and the permanent magnet 181. The other side of the moving table 132 is provided with a rotating part 134 rotatably installed.

The rotation driving units 124 and 134 include a fine adjustment driving unit 124 installed on the first linear driving unit 120, and a rotating unit 134 installed on the second linear driving unit 130. One side of the fine adjustment driving unit 124 is installed on the moving table 122 and the other side is installed on the X-axis driving unit 160 or the supporting member 150 described later. The fine adjustment driver 124 includes a linear motor 190 for precisely driving the X-axis driver 160 in the upper direction thereof to adjust the posture of the X-axis driver 160. That is, the linear motor 190 compensates for the twisted position by moving one end of the X-axis driver 160 in the first direction to compensate for the position error when the position of the workpiece 110 is misaligned. The linear motor 190 includes a permanent magnet 191 that is a stator and a coil 194 that is a mover. On both sides of the permanent magnet (magnetic) 191, which is a stator, rails 192 are arranged side by side in the first direction. The rail 192 is coupled to the block 193 to be reciprocated in the first direction by the linear motor 190 is coupled. Since the configuration and operation of the linear motor 190 itself are similar to the linear motor 170 provided in the first linear driving unit 120 described above, a detailed description thereof will be omitted. However, unlike the linear motors 170 and 180 provided in the first and second linear driving units 120 and 130, the linear motor 190 provided in the fine adjustment driving unit 124 is configured to enable precise fine movement.

The moving table 196 is installed in the linear motor 190. More precisely, the moving table 196 is installed in the block 193 and is constrained by the movement of the block 193. One side of the moving table 196 is provided with a coil 194 as a mover in a position facing the permanent magnet 191. That is, the moving table 196 is reciprocated in the first direction by the interaction of the coil 194 and the permanent magnet 191. The other side of the moving table 196 is provided with one end of the support member 150 or the X-axis driving unit 160.

One side of the rotating unit 134 is installed on the moving table 132 and the other side is installed on the X-axis driving unit 160, and is rotatably installed in a predetermined direction. When the position of the workpiece 110 is changed, the X-axis driving unit 160 is finely moved in the first direction by the fine adjustment driving unit 124 to compensate for the position error. Therefore, it is preferable that the rotating part 134 is rotatably installed so that the fine adjustment driving part 124 can make a linear reciprocating motion relative to the second linear driving part 130. The rotating part 134 includes a fixing member 137 fixedly installed on the second linear driving part 130 and a rotating member 135 rotatably installed on the fixing member 137. That is, the rotating unit 134 includes a rotating member 135 installed on the X-axis driving unit 160 and a fixing member 137 fixedly installed on the moving table 132. Rotating member 135 and the fixing member 137 is preferably hinged to be relatively rotatable. In one embodiment, as shown in Figure 5, the rotating member 135 and the fixing member 137 may be hinged. One side of the rotating member 135 is formed with a cylindrical hinge 136 formed to protrude. In addition, one side of the fixing member 137 is formed with a coupling hole 138 in which the hinge 136 is rotatably inserted. When the hinge 136 is inserted into the coupling hole 138, the rotating member 135 may be rotated relative to the fixing member 137. In the present embodiment, the rotating part 134 is described as being relatively rotated by the configuration of the rotating member 135 and the fixing member 137 is complementary, the present invention is not limited to this one side of the rotating part 134 Various modifications may be made, such as a hinge formed at the second moving table 132 and a coupling hole at the second moving table 132. Such a modification is an embodiment of the present invention and does not limit the technical scope of the present invention. A support member (not shown) may be further provided between the rotating unit 134 and the X-axis driving unit 160. That is, a supporting member may be further provided between the rotating member 135 and the X-axis driving unit 160.

The X-axis driving unit 160 is installed above the first and second linear driving units 120 and 130, and is installed in the second direction (X direction) forming a predetermined angle with the first direction. The X-axis driving unit 160 may be disposed to be substantially perpendicular to the first and second driving units 120 and 130. One side of the X-axis driving unit 160 is installed in the fine adjustment driving unit 124, the other side is installed in the rotating unit 134, that is, the rotating member 135. Alternatively, the support member 150 may be further provided between the X axis driver 160 and the fine adjustment driver 124. The support member 150 supports one end of the X-axis eastern portion 160. In addition, as described above, a support member (not shown) may be further installed between the X-axis driving unit 160 and the rotating unit 134. Therefore, the X-axis driving unit 160 is horizontally supported in the first direction (Y direction) by the first and second linear driving units 120 and 130 while being supported on one side of the supporting member 150 and the rotating unit 134. Installed so that it can be moved. That is, the X-axis driving unit 160 is constrained by the operations of the linear motors 170 and 180 reciprocating in the first direction to reciprocate in the first direction, and the linear motor 190 installed above the linear motor 170. ) And one end moves precisely.

The X-axis driver 160 is provided with an X-axis mover 165 which is installed to reciprocate in the second direction (X direction). The X-axis mover 165 is provided with a laser head (not shown) for generating a laser light and a vision camera (not shown) for generating a vision image. The X-axis mover 165 moves horizontally in the second direction with respect to the work piece 110 below, and processes / cuts the work piece 110. Therefore, the laser head (not shown) provided in the X-axis mover 165 is moved in the second direction (X direction) by the X-axis driver 160, and in the first direction by the first and second linear drivers 120 and 130. It moves horizontally along (Y direction) and performs laser processing.

In addition, the laser processing apparatus is further provided with a motion controller (not shown) for controlling the movement of the X-axis mover 165 and the laser light output of the laser head (not shown). The motion controller (not shown) controls the light output of the laser head (not shown), the intensity of the emitted light, and the moving distance or the moving speed of the laser head (not shown).

Hereinafter, the operation of the driving unit 100 provided in the laser processing apparatus will be described. When the workpiece 110 is loaded into the working table, the vision camera reads an alignment mark of the workpiece 110 while moving along the second direction (X direction). At this time, when the workpiece 110 is positioned to be distorted in the X direction, the fine adjustment driving unit 124 is moved by the displaced position to compensate for the position. When the position compensation is completed, the X-axis mover 165 controlled by the motion controller is transferred along the second direction (X direction), and is avoided by the laser light emitted from the laser head attached to the X-axis mover 165. The electrode of the workpiece 110 is cut.

According to the configuration as described above, the present invention can process the workpiece 110 by compensating for the twisted position without additional equipment, even if the workpiece 110 is placed in a different position unlike the conventional invention.

In the present embodiment, the linear motors 170, 180, 190 are described as an example of a moving coil type in which the mover is a coil, but the present invention is not limited thereto, and the present invention is applicable to a case in which the mover is a moving permanent magnet type in which the mover is a permanent magnet.

As described above, the driving unit of the laser processing apparatus according to the present invention can compensate for this even when the workpiece is misaligned by the fine adjustment driving unit capable of precise fine movement, unlike the conventional invention, so that precise laser processing is possible. Do. In addition, the present invention can quickly compensate for the position by the fine adjustment driving unit when the position of the workpiece is misplaced, it is possible to obtain a high yield. In addition, the position can be compensated by adjusting the position of the X-axis driving unit where the laser head is installed without interfering with the workpiece.

Although the present invention has been described with reference to the embodiments shown in the drawings, this is merely exemplary, and those skilled in the art to which the art belongs can make various modifications and other equivalent embodiments therefrom. Will understand. Therefore, the true technical protection scope of the present invention will be defined by the claims below.

Claims (9)

An X-axis driving unit for driving the mounted laser head in a second direction; And a pair of Y-axis drivers installed below the X-axis driver to drive the X-axis driver in a first direction in which a workpiece is to be transferred. The Y-axis drive unit, A linear driving part which linearly drives both sides of the X-axis driving part in the first direction; And a rotation driving unit rotating the other side relative to one side of the X-axis driving unit. The method of claim 1, wherein the linear drive unit, A first linear driver installed on the one Y-axis driver and a second linear driver installed on the other Y-axis driver, And said first and second linear driving units comprise linear motors, respectively. The method of claim 2, wherein the rotary drive unit, A fine adjustment driver installed on the first linear driver; And a rotating part provided on the second linear driving part. The method of claim 3, wherein the fine adjustment driving unit, And a linear motor for precisely driving the X axis driver in the upper portion in the first direction. The rotating part according to claim 3 or 4, A fixing member fixed to the second linear driving unit; And a rotating member rotatably installed on the fixing member. The method of claim 5, The fixing member and the rotating member is a drive unit of the laser processing apparatus, characterized in that the hinge coupling. The method of claim 5, wherein the X-axis drive unit, One side is installed in the fine adjustment driving unit, the other side is a drive unit of the laser processing apparatus, characterized in that installed on the rotating member. The method of claim 7, wherein A support member installed between one side of the X axis driver and the fine adjustment driver; The drive part of the laser processing apparatus characterized by the above-mentioned. The method of claim 7, wherein A support member installed between the other side of the X-axis driving unit and the rotating member; The drive part of the laser processing apparatus characterized by the above-mentioned.

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