KR100623428B1 - System for providing information of parts comprised in semiconductor manufacturing equipments and method for providing the same - Google Patents

Abstract

The part information providing system for semiconductor manufacturing equipment of the present invention relates to a part information providing system for semiconductor manufacturing equipment having a web server connected to a user terminal and an administrator terminal through a communication network, and a database connected to the web server. In the component information providing system for semiconductor manufacturing equipment, a web server stores information input from an administrator terminal in a database, provides a search page to a user connecting through the user terminal, and provides a search page within a search page entered or selected by the user. Provide the user with parts information in the database corresponding to the search item, but include the customer, line, area, parts, serial number (S / N), manufacturer ( Maker, Date, and Process.

Description

System for providing information of parts comprised in semiconductor manufacturing equipments and method for providing the same

1 is a view showing a component information providing system for semiconductor manufacturing equipment according to the present invention.

2 is a view showing an initial screen provided to a user according to the method for providing parts information according to the present invention.

FIG. 3 is a diagram illustrating a search page provided after login in the initial screen of FIG. 2.

FIG. 4 is a view illustrating a search method for each line in the search page of FIG. 3.

FIG. 5 is a diagram illustrating a search method for each area in the search page of FIG. 3.

FIG. 6 is a view illustrating a search method by parts in the search page of FIG. 3.

FIG. 7 is a view illustrating a search method for each manufacturer in a search page of FIG. 3.

FIG. 8 is a view illustrating a search method for each date in the search page of FIG. 3.

FIG. 9 is a view illustrating a search method for each serial number (S / N) in the search page of FIG. 3.

FIG. 10 is a view illustrating a search method for each process in the search page of FIG. 3.

FIG. 11 is a diagram illustrating a search result page in the search page of FIG. 3.

FIG. 12 is a diagram illustrating an image popup window for providing a photograph of an abnormal part in a search result page of FIG. 11.

FIG. 13 is a diagram illustrating an import / export status information providing page for providing import / export status information on a search result page of FIG. 11.

The present invention relates to a component information providing system for semiconductor manufacturing equipment and a component information providing method.

Semiconductor devices, including memory devices, display devices, and the like, can be made using various semiconductor manufacturing facilities. Each of these semiconductor manufacturing facilities includes a number of components, which include components that greatly affect the process. For example, when various inert gases and other chemicals are used for manufacturing a semiconductor device, contaminants may be deposited on some parts of the semiconductor manufacturing equipment by the chemicals. It may also provide a cause for the manufacture of a defective semiconductor device. In order to prevent poor production of semiconductor devices due to contaminants deposited on the components, it is necessary to periodically clean the components. In general, it is not easy to clean the parts while attached to the semiconductor manufacturing equipment, so it is common to remove the components from the semiconductor manufacturing equipment and to request professional cleaning to a professional cleaning company. Here, specialized cleaning means not only the process of removing contaminants on the surface using chemical substances, but also sandblasting, micro blasting, carbon dioxide (CO ₂ ) cleaning, ultrasonic cleaning, heat treatment, polishing, lapping, etc. It includes the process of.

The professional cleaning company commissioned for the professional cleaning needs to manage the requested parts individually because the parts have a certain lifetime. That is, in addition to the inherent lifespan of each part, the lifespan of parts may be shortened due to the impact during the semiconductor manufacturing process or the detachment process from the manufacturing equipment, and also due to the etching of the part surface by the cleaning process. As their lifespan can be shortened, the professional cleaners need to know the history and condition of the parts. To do this, the professional cleaners put the number of cleanings, materials, name of parts, and owners of parts on the labels on the parts packaging. In addition, a separate paper was produced and provided to the customer.

However, these methods have the following problems. First of all, since information on components between a professional cleaner and a semiconductor manufacturing equipment provider is performed offline, there are problems such as unnecessary time, cost, and manpower consumption. Secondly, since the semiconductor manufacturing equipment company cannot grasp the progress and condition of the cleaning process for the requested parts in real time, there is a burden of unnecessarily securing a large number of replacement parts.

The technical problem to be achieved by the present invention, by providing information on the semiconductor manufacturing equipment parts on-line to provide information on the semiconductor manufacturing equipment parts that can solve the problems caused by the provision of information on the components that were made in the existing offline To provide a system.

Another object of the present invention is to provide a method for providing component information for a semiconductor manufacturing equipment as described above.

In order to achieve the above technical problem, the semiconductor manufacturing equipment component information providing system according to the present invention, a semiconductor manufacturing equipment having a web server connected to the user terminal and the manager terminal via a communication network, and a database connected to the web server In the system for providing parts information, the web server stores information input from the administrator terminal in the database, provides a search page to a user connecting through the user terminal, and searches entered or selected by the user. Provide the user with parts information in the database corresponding to a search item in a page, wherein the search item includes a customer, a line, an area, a parts, and a serial number (S / N). ), Manufacturers (Maker), date (Date) and process (Process).

Preferably, the web server provides a search result page for displaying, on the user terminal, part information corresponding to the search item input or selected by the user among the search items.

In this case, the search result page may include a first frame displaying a unique number and a cleaning frequency of the part, a second frame displaying a cleaning history of the part, and a third frame displaying information about the part. Can be.

The cleaning history displayed in the second frame may include a delivery date, an import date, a current working state, a department in charge, a receipt inspection, a final inspection, and specific details.

The information about the part displayed in the third frame may include a line name, a part name, a material, a cleaning frequency, and a division of the part.

The second frame may include an abnormal part button for loading an image viewer window which displays the specificity of the part by the user's selection.

Preferably, the web server provides the user with an import / export carrying status information providing page for providing the carry-in / out carrying status information by the user's selection in the search result page.

In this case, the import and export status information may include the export date, export number, line, export status, export quantity, actual export quantity, import quantity, stock waiting quantity, washing quantity and current working status.

In order to achieve the above technical problem, the method for providing component information for a semiconductor manufacturing apparatus according to the present invention checks whether the user is authenticated according to the authentication request from the user, and provides the customer with a customer, a line, Providing a search page having search items consisting of Area, Parts, Serial Number (S / N), Manufacturer, Date, and Process; And providing a user with a search result page displaying part information corresponding to the search item selected or input by the user among the search items.

Checking whether the user is authenticated comprises: displaying an initial screen including an ID and password input box for user authentication for the connected user; And checking the ID and password input through the ID and password input box to check whether the user is authenticated.

In this case, a menu for selecting a language may be further displayed in the initial screen.

The search result page preferably includes a first frame displaying a unique number of the part and a cleaning frequency, a second frame displaying a cleaning history of the part, and a third frame displaying information about the part. Do.

The cleaning history displayed in the second frame may include a delivery date, an import date, a current working state, a department in charge, a receipt inspection, a final inspection, and specific details.

The information about the part displayed in the third frame may include a line name, a part name, a material, a cleaning frequency, and a division of the part.

The second frame may include an abnormal part button for loading an image viewer window which displays the specificity of the part by the user's selection.

The method may further include providing the user with an import / export status information providing page for providing the import / export status information by the user's selection in the search result page.

In this case, the import and export status information may include the export date, export number, line, export status, export quantity, actual export quantity, import quantity, stock waiting quantity, washing quantity and current working status.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings. However, embodiments of the present invention may be modified in many different forms, and the scope of the present invention should not be construed as being limited by the embodiments described below. As an example, in the embodiment of the present invention has been described only for fine cleaning, it is obvious that the same can also be applied to the case of requesting to recycle or recycle parts, for example.

1 is a view showing a component information providing system for semiconductor manufacturing equipment according to the present invention.

Referring to FIG. 1, the component information providing system for semiconductor manufacturing equipment according to the present invention includes a server 120 connected to a user terminal 100 through a communication network 110, and a database connected to the server 120. 130, and the manager terminal 140 connected to the server 120 through the communication network 110 as the user terminal 100.

The user terminal 100 refers to a terminal held by a semiconductor manufacturer who has requested a process such as cleaning of components for semiconductor manufacturing equipment. Typically, it is a personal computer connectable to the Internet, but is not necessarily limited thereto.

The server 120 is a web server that receives a request for providing information input from the user terminal 100 through the communication network 110 and provides the user with parts information stored in a database. In addition, the part information is updated by transmitting new part information input from the manager terminal 140 to the database through the communication network 110.

The database 120 is a place for storing part information, and the part information is divided and stored by production line, area, part, manufacturer, date, serial number, and process.

Hereinafter, referring to FIGS. 2 to 13, a method of providing component information using the component information providing system for semiconductor manufacturing equipment of FIG. 1 will be described.

2 is a view showing an initial screen provided to a user according to the method for providing parts information according to the present invention.

Referring to FIG. 2, a user, that is, a semiconductor manufacturer, accesses the web server 120 through the communication network 110 using the user terminal 100. An initial screen is displayed on the display device of the user terminal 100 connected to the web server 120. This initial screen includes a menu for selecting a language and an ID and password input box for user authentication. In order for the user to continuously obtain the part information, the user must enter a preset ID and password to authenticate the user.

3 is a diagram illustrating a search page provided after logging in from the initial screen of FIG. 2.

Referring to FIG. 3, when a user inputs an ID and password in the initial screen of FIG. 2, the web server 120 determines whether the user is authenticated, and as a result, provides a search page to the user when authentication is performed as the user. The search page is a page for providing various search items to the user so that the user can easily obtain the parts information desired by the user, and for displaying the parts information which is a search result corresponding to the search item input by the user. Specifically, the search item provided by the search page includes a customer column 200, a line column 210, an area field 220, a parts column 230, and a serial. The number (S / N) field 250, the maker (Maker) field 240, the Date (Date) field (241, 245) and the Process (Process) field (260) is included. And a first frame 270, a second frame 280, and a third frame 290 that display a search result. The first frame 270 is disposed at the left side, the second frame 280 is disposed at the lower right side, and the third frame 290 is disposed at the upper right side. However, this arrangement position may be determined differently. The first frame 270 displays the unique number and the cleaning frequency, the second frame 280 displays the cleaning history, and the third frame 290 displays parts information.

The customer column 200 is determined according to the user's ID. In this case, the range in which the user can search is determined according to the predetermined customer item. In some cases, the user may select one of several customer items, in which case the user clicks a drop down list 201 to list the customer items, among which listed items. You can select by clicking on either.

The line column 210 is activated as a user selects one of the customer items in the customer column 200. Here, the line is a production line of a semiconductor manufacturer, which is a user, but in some cases, the line may be a manufacturing area set by the user. As shown in Fig. 4, several lines are displayed by the drop down list 211, and the user can select any of them by clicking on them.

The area column 220 is for selecting a semiconductor manufacturing area list, and as shown in FIG. 5 by the drop down list 221, for example, DRY-ETCH, SPT, CVD, DIFF, ALD. , T / F, MgO, OELD, Etc can be selected from the list representing each semiconductor manufacturing region.

The parts column 230 includes a code input field 231 for inputting a code of a part directly, and a part name input field 232 for directly inputting a part name. do. In addition, a pop-up window check box 233 is provided, and as shown in FIG. 6, a part code and a part name can be input even in a separate pop-up window 600.

The maker column 240 is for inputting and searching for a manufacturer of a part, and as shown in FIG. 7, any one of a plurality of manufacturers lists displayed by the drop-down list 241 is provided. You can choose.

The Date fields 241 and 245 are for searching based on the date when the parts are received and received, and include two pop-up window selection columns 242 and 246. By the pop-up window selection fields 242 and 246, as shown in Fig. 8, each date pop-up window 800 is displayed, and the user can select a date in this date pop-up window 800. The two date fields 241 and 245 are provided so that the date can be selected as a range.

The serial number (S / N) field 250, as shown in Fig. 9, is for inputting a unique number owned by the part to be searched. That is, the user can obtain the desired part information by typing the unique number of the part to be searched in the serial number field 250 and clicking the search button.

The process column 260 is for retrieving component information for each semiconductor manufacturing process. As shown in FIG. 10, a plurality of processes indicated by the drop-down list 261, for example, Ashing, Metal, One of the process list can be selected: Oxide, Poly, Common, TEOS, DIFF, HDL, BPSG, USG, SPUTTER, Photo Mask, CD Measurement, HDP, Memory. If there are a lot of processes to be displayed, specify a scroll bar (1000).

The user may obtain a search result corresponding to the selected or input search item by clicking the search button 251 after selecting or inputting at least one of the various search items as described above. That is, when the search button 251 is clicked while at least one of the search items is selected or input by the user terminal 100, the web server 120 may select from the parts information stored in the database 130. The corresponding part information is displayed to the user through the first frame 270, the second frame 280, and the third frame 290.

11 is a diagram illustrating such a search result page.

Referring to FIG. 11, in the first frame disposed on the left side of the search result page, a unique number of a part, a unique number indicating the number of times the part has been precisely cleaned, and a cleaning frequency list 1110 are displayed. That is, the unique number of the parts corresponding to the search item selected or input by the user and the number of cleaning of the parts are displayed. In the second frame disposed at the lower right of the search result page, the cleaning history list 1120 of the part corresponding to the unique number selected from the unique number and the cleaning frequency list 1110 is displayed. Here, the cleaning history includes the release date, the import date, the current work status, the department in charge, the receipt inspection, the final inspection, and the specific matters. In addition, in the third frame disposed at the upper right of the search result page, various pieces of information of parts corresponding to the unique number selected from the unique number and the cleaning frequency list 1110, for example, a line name, a part name, a material, a cleaning frequency, and a classification A parts information list 1130 such as this is displayed.

On the other hand, as shown in Figure 12, the abnormal part button 1200 is disposed in the second frame of the lower right of the search results page, when the user clicks the abnormal part button 1200, the image viewer window 1210 Is displayed to provide image specificity for the part.

FIG. 13 is a diagram illustrating an import / export status information providing page for providing import / export status information on a search result page of FIG. 11.

Referring to FIG. 13, when a user clicks on the import / export status 1300 among menus at the top of the screen, and is selected or input by a search item such as a customer company, a line, an area, an export date, an export number, etc. Import / Export status information is displayed. Here, the export status information includes export date, export number, line, export status, export quantity, actual export quantity, import quantity, stock waiting quantity, washing water quantity, current working status, etc. in each import status information. You can also search for more information.

As described so far, according to the component information providing system for semiconductor manufacturing equipment and the method for providing component information according to the present invention, by providing information on the components in real time with various items for the components for semiconductor manufacturing equipment, Information on manufacturing equipment parts, that is, processing progress such as cleaning, can be grasped using various search items such as the material of the parts, the line to which the parts belong, the manufacturer, the area, and the process. In addition, additional information such as cleaning history of parts can be easily grasped in real time. Therefore, the amount of spare parts can be adjusted and the life of the parts can be accurately identified, thus reducing unnecessary parts costs by accurately knowing when the parts are discarded and replaced. Furthermore, by providing an image of a specific part, such as an abnormality part, for a part before or after fine cleaning, the state of the part can be accurately provided in real time. In addition to this, the user can easily obtain the import and export status, line or semiconductor manufacturing process parts receipt status without the need to count separately.

Although the present invention has been described in detail with reference to preferred embodiments, the present invention is not limited to the above embodiments, and various modifications may be made by those skilled in the art within the technical spirit of the present invention. Do.

Claims (17)

In the component information providing system for semiconductor manufacturing equipment having a web server connected to a user terminal and a manager terminal through a communication network, and a database connected to the web server, The web server stores the information input from the administrator terminal in the database, provides a search page to a user connecting through the user terminal, and corresponds to a search item in a search page input or selected by the user. A search result page for displaying the parts information in the database to the user terminal, The search item includes a customer, a line, an area, parts, a serial number (S / N), a maker, a date, and a process. , The search result page may include a unique number and a cleaning frequency of the part; A cleaning history including the date of carrying out the parts, the date of the import, the current working condition, the department in charge, the goods receipt inspection, the final inspection and the specifics; And at least one frame for displaying information on the part, which includes the line name, the part name, the material, the number of cleaning and the division of the part. delete delete delete delete The method of claim 1, The frame is a component information providing system for a semiconductor manufacturing equipment, characterized in that it comprises an image viewer window for displaying the specificity of the component by the user's selection. The method of claim 1, And the web server provides the user with an import / export status information providing page for providing the carry-in / out status information by the user's selection in the search result page. The method of claim 7, wherein The carry-in and carry-out state information includes the export date, export number, line, export status, export quantity, actual export quantity, import quantity, stock waiting quantity, cleaning weight quantity and current working status Information provision system. Check the authentication status according to the authentication request from the user, and send the certified user to Customer, Line, Area, Parts, Serial Number (S / N), Manufacturer, Providing a search page having search items consisting of Date and Process; And A unique number and a cleaning frequency of a part corresponding to the search item selected or input by the user among the search items; A cleaning history including the export date, the import date, the current working state, the department in charge, the goods receipt inspection, the final inspection and the specifics of the parts; And providing the user with at least one search result page that displays information about the part, including the line name, part name, material, cleaning frequency and classification of the part. How to Provide Information. The method of claim 9, wherein the authentication of the user is confirmed, Displaying an initial screen including an ID and password input box for user authentication for the connected user; And And checking the ID and password inputted through the ID and password input box to confirm whether the user is authenticated. The method of claim 10, And providing a menu for selecting a language in the initial screen. delete delete delete delete The method of claim 9, And providing the user with an import / export status information providing page for providing the import / export status information by the user's selection in the search result page. The method of claim 16, The carry-in and carry-out state information includes the export date, export number, line, export status, export quantity, actual export quantity, import quantity, stock waiting quantity, cleaning weight quantity and current working status How to Provide Information.

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