KR100600323B1 - Device for moving of evaporation source - Google Patents

Abstract

The present invention relates to a vapor deposition apparatus, and a mobile device for a vapor deposition apparatus for reducing the weight of the shelf on which the depositor is fixed while being moved by the moving shaft to spray the deposition material on the granular substrate.

The present invention provides a mobile device for an evaporator comprising a shelf fixed to the evaporator, a moving shaft operated by a driving device to control the movement of the shelf, and a pulley mounted on both ends of the weight of the shelf and the shelf. to provide.

According to the present invention, the total weight of the evaporator and the shelf is significantly reduced, the driving force of the driving device for reciprocating the light weight shelf can also be reduced in volume, and the weight of the shelf on which the weight and the deposition source are fixed is equally Unexpected shelf displacement and free fall are eliminated.

 Evaporators, lathes, movers, pulleys

Description

Device for moving of evaporation source             

1 is a schematic view showing a state where the deposition source is located in the buffer region of the vacuum deposition system according to the present invention,

2 is a schematic view showing a state where the deposition source is located in the deposition region of the vacuum deposition system according to the present invention,

Figure 3 is a perspective view schematically showing a moving device for a vapor deposition machine according to the present invention

4 is a side view schematically showing the mobile device shown in FIG. 3;

<Description of Symbols for Main Parts of Drawings>

100 ... Transfer 102 ... shelf,

104 travel shaft 106 ...

110 pulley 112 connector

114 ... wheel 120 ... weight.

The present invention relates to an evaporator, and more particularly, to a mobile device for an evaporator, wherein the evaporator for spraying a substance applied to a substrate reduces the weight of a fixed shelf.

In general, an electroluminescent display device, which is one of flat panel displays, is classified into an inorganic electroluminescent display device and an organic electroluminescent display device according to a material used as a light emitting layer, and the organic electroluminescent display device can be driven at low voltage and is light in weight. It is attracting attention because of its thinness and wide viewing angle as well as fast response speed.

The organic light emitting device of the organic light emitting display device includes an anode, an organic material layer, and a cathode that are stacked on a substrate. The organic material layer includes an organic material layer of an organic light emitting layer that recombines holes and electrons to form excitons and emits light, and also between the cathode and the organic light emitting layer to smoothly transport holes and electrons to the organic light emitting layer to improve luminous efficiency. The organic material layer of the hole injection layer and the electron transport layer is interposed between the anode and the organic light emitting layer while interposing the organic material layer of the electron injection layer and the electron transport layer.

The organic light emitting device having the above-described structure is generally manufactured by a physical vapor deposition method such as a vacuum deposition method, an ion plating method and a sputtering method or a chemical vapor deposition method by a gas reaction. In particular, in order to form the organic material layer of the organic EL device, a vacuum deposition method in which an organic vapor material formed by evaporating an organic material in a vacuum chamber is sprayed from a deposition source and deposited on a substrate is widely used.

Recently, in response to the increase in size of the display, the size of the substrate has been enlarged, and in order to deposit the organic material layer on such a large substrate, a deposition system has been developed in which an evaporation source is sprayed while vertically moving up and down in a vacuum chamber.

Such a deposition system is provided with a drive shaft for moving the deposition source in the vertical direction, and the drive shaft is rotated by the drive means. Due to the axial rotation of the drive shaft, the deposition source injects the organic vapor material formed by evaporating the organic material while moving in the vertical vertical direction.

In addition, a vertical alignment system has been studied in which the substrate and the mask are aligned in a granular state so that a warp phenomenon of the substrate is removed while the substrate coated with the material sprayed from the evaporator is large.

Therefore, there is a need for a mobile device for precise movement of the deposition machine applied to such a vertical alignment system.

The present invention devised to meet the requirements as described above, because the evaporator is fixed and the shelf which is moved up and down by the moving shaft is fastened with the pulley equipped with the weight, the overall weight of the evaporator and the shelf is significantly reduced, The driving force of the drive device for reciprocating the lathe with reduced self-weight can also be reduced, and the weight of the lathe reduced by weight is preferably " zero " Its purpose is to provide a mobile device for an evaporator such that the drop is removed beforehand.

The moving device for an evaporator according to the present invention for achieving the above object, the shelf is fixed to the deposition source; and the movable shaft is interlocked so that the shelf can be selectively moved vertically; And, the shelf is fastened to one end, the pulley is attached to the other end of the weight; is provided.

The pulley includes a connecting body mounted on both ends of the shelves and weights respectively, and a wheel disposed on the connecting body so that the weight of the shelves and weights is switched while the connecting body is wound and contacted and fixed. .

The weight of the weight is equal to the weight of the shelf on which the deposition source is fixed.

Hereinafter, a mobile device for a vapor deposition machine according to the present invention will be described in detail with reference to the accompanying drawings.

1 is a schematic diagram showing a state where the deposition source is located in the buffer region of the vacuum deposition system according to the present invention, Figure 2 is a schematic diagram showing a state where the deposition source is located in the deposition region of the vacuum deposition system according to the present invention.

Referring to FIG. 1, a vacuum chamber 10 of a vacuum deposition system includes a substrate 30 on which an organic layer is to be formed, a mask 40 positioned in front of the substrate 30, and a predetermined interval from the mask 40. The spaced apart deposition source 20 is installed. The mask 40 and the substrate 30 are fixed in close contact with the chuck 50 in an aligned state by an alignment system (not shown).

The mask 40 includes a pattern forming part (indicated by a virtual line) in which a pattern corresponding to an organic layer to be formed on the substrate 30 is formed, and a fixing part fixed by welding to a mask frame (not shown). . At this time, the vacuum chamber 10 is divided into a film forming area B corresponding to the installation position of the mask 40 and the substrate 30 and a buffer area A corresponding to a position other than the film forming area B.

The deposition source 20 is movably mounted to a drive shaft that is axially rotated by an operation of a moving means (not shown), and moves vertically in the vacuum chamber 10 along the rotational direction of the drive shaft.

3 is a perspective view schematically showing a mobile device for a vapor deposition apparatus according to the present invention, and FIG. 4 is a side view schematically showing the mobile device shown in FIG.

As shown in FIGS. 3 and 4, the apparatus 100 for moving a deposition source for a light emitting device according to the present invention includes a vapor deposition unit 106 for injecting a deposition material onto a substrate when a granular substrate and a mask are aligned. In this vertical alignment system, the evaporator 106 is fixed and the shelf 102, which is lifted and lowered by a driving device (not shown), is engaged with one end of the pulley 110, and the other end of the pulley 110 is fixed. The predetermined weight 120 is made to be mounted at the end.

The evaporator 106 is for depositing an organic material on a granular substrate, and is firmly fixed to the shelf 102. In this case, one or more evaporators 106 may be installed.

The shelf 102 is a member to which the evaporator 106 is fixed to move the evaporator 106 up and down, and is engaged with one or more moving shafts 104. At this time, the shelf 102 is preferably provided with the same number as the evaporator 106 so that the evaporator 106 is fixed, respectively.

The moving shaft 104 is divided into lifting and lowering and installed so as to be rotated by separate driving devices, and the two moving shafts 104 are simultaneously fastened to one or more shelves 102 and the shelves 102. When moving up or down, the moving shaft 104 is operated separately or simultaneously.

The pulley 110 has a connecting body 112 on which both ends of the shelf 102 and the weight 120 are mounted, and are disposed on the connecting body 112 of the shelf 102 and the weight 120, respectively. It is made of a wheel 114 that is in contact with the connector 112 is wound while allowing the weight direction to be switched.

One end of the connecting body 112 is fastened to both ends of the shelf 102 one by one, the connecting body 112 is wound around each wheel 114, and the other end of the connecting body 112 is one It is coupled with the weight (120).

The wheel 114 may be installed on a ceiling or sidewall and a separate standing support so that the wheel 114 may be rotated together with friction due to the movement of the connection body 112, and the shelf 102 and the weight ( 120 is preferably fastened to each other with a connection bolt 112 and the eye bolt of the pulley 110, the connector 112 may be used including a belt, a string, a chain, etc., the type of the connection 112 Depending on the wheel 114 may also be converted to a suitable member to be used.

Thus, the shelf 102 and the weight 120 is installed to be mounted at both ends so that the weight of the shelf 102 is reduced by the weight (120).

The weight of the weight 120 is preferably equal to the weight of the shelf 102 on which the deposition source 106 is fixed, and may be less than that.

If the weight of the shelf 102 on which the deposition source 106 is fixed is equal to the weight of the weight 120, the free fall due to an unexpected accident is prevented when the weight of the shelf 102 is close to "0".

Meanwhile, as shown in FIG. 3, the shelf 102 having the evaporation source 106 is moved along the first guide plate 132a fixed to the fixed first support frame 130a, and the fixed second support is moved. The surface plate 116 on which the weight 120 is seated is moved along the second guide plate 132b fixed to the frame 130b, and the shelf 102 and the surface plate 116 are connected to the connector 112. It is fastened to both ends of the connector 112 is wound on the wheel 114, the weight direction of the shelf 102 and the weight direction of the surface plate 116 is directed toward the gravity direction.

At this time, the wheel 114 is rotatably fixed to the ceiling or support frame 130. In addition, the weight 120 seated on the surface plate 116 is firmly fastened by the fixing member 118.

Hereinafter, the operation of the evaporator mobile device according to the present invention will be briefly described.

One end of the connector 112 is fastened to each of the two ends of the shelf 102 on which the evaporation source 106 is fixed, and the connector 112 is wound around the respective wheels 114, and the connector 112 is connected. The other end of these is fastened with one or more weights (120).

In this case, the movement path may be guided through the guide plates 132a and 132b of the shelf 102 on which the deposition source 106 is fixed and the surface plate 116 on which the weight 120 is fixed.

The weight 120 is to reduce the weight of the shelf 102 is fixed to the deposition source 106 to the maximum, most preferably deposited so as to prevent free fall of the shelf 102 due to malfunction or accidental accidents The circle 106 may be equal to the weight of the fixed shelf 102.

When the weight of the shelf 102 on which the deposition source 106 is fixed is reduced, the driving device can easily move the shelf 102 even with a small driving force.

According to the present invention configured as described above, the total weight of the deposition source and the shelf is significantly reduced, the weight of the weight is reduced, that is, the driving force of the drive device for reciprocating the lightweight shelf can also be converted to a small capacity, and also When the weight of the shelf on which the weight and the deposition source are fixed is equal, there is an effect that unexpected deviation of the shelf position and free fall are removed in advance.

Claims (6)

A shelf on which the evaporator is seated and fixed; A moving shaft which is interlocked so that the shelf can be moved vertically and reciprocally; A weight reducing member having the shelf coupled to one end and having a weight added to the other end; Moving device for the evaporator, characterized in that is provided. The method of claim 1, And the weight reducing member is a pulley. The method of claim 2, The pulley includes a connecting body on which both shelves and weights are mounted, and a wheel which is disposed on the connecting body so that the weight of the rack and the weight is canceled while the connecting body is wound and is fixed in position. Mobile device for evaporator characterized in that. The method of claim 1, And a weight of the weight is equal to a weight of a shelf on which a deposition source is fixed. The method of claim 3, And the wheel is rotatably fixed to a vertically fixed support frame. The method according to claim 3 or 4, Moving device for evaporator, characterized in that the guide plate is mounted on the support frame to guide the movement of the shelf and weight.

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