KR100586094B1 - A Multistage Furnace for Drying/Baking FPDFlat Panel Display - Google Patents

Abstract

The multi-stage drying / firing furnace of the disclosed display plate includes: a drying / firing furnace body having inlets and outlets for inputting or unloading the display plate; The main rod for moving the display plate up and down, the main rod arm combined with the main rod to support the display plate, the lift motor for moving the main rod up and down, and the display plate for raising and lowering A raising and lowering unit including a guide rod for rotating motion and a guide rod arm coupled with the guide rod and rotating according to the rotational motion of the guide rod; It is provided with a circulation unit for supplying and circulating air or gas into the interior of the drying / baking furnace body.

The multi-stage drying / firing furnace of the display flat plate of such a configuration can greatly reduce the installation space of the device, resulting in a high production efficiency and a reduction in the number of devices, thereby increasing the utilization of the space, and improving the installation and maintenance costs. It is possible to save, and to create various environments with a single device can provide the effect of controlling the drying / baking conditions according to the purpose.

Display, flat panel, drying, firing, ascent, multistage

Description

A Multistage Furnace for Drying / Baking Flat Panel Display (FPD)}

1 is a cross-sectional view of a tunnel type drying / firing furnace according to the prior art.

2 is a cross-sectional view of a batch drying / firing furnace according to the prior art.

3 is a cross-sectional view of a rotary drying / firing furnace according to the prior art.

Figure 4 is a perspective view of a drying / baking furnace according to an embodiment of the present invention.

5 is a perspective view of a drying / baking furnace according to another embodiment of the present invention.

6 is a plan view of a drying / firing furnace according to the embodiment of FIG.

7 is a cross-sectional view of the drying / baking furnace according to the embodiment of FIG. 4 or FIG. 5.

8 is a longitudinal sectional view of the drying / baking furnace according to the embodiment of FIG. 4 or FIG. 5;

<Description of the symbols for the main parts of the drawings>

100: drying / baking furnace body 110: display flat

200: entrance 300: lifter

310: lifter guide rod 320: pallet

400: main road 410, 410 ': main road arm

420: guide rod 430, 430 ': guide rod arm

440: rack and pinion 500: heater

520: fan 540: fan drive motor

600, 610: door 700: support frame

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a drying / firing furnace for a display flat plate, and more particularly to a drying / firing furnace for enabling drying or firing of a display flat plate in multiple stages.

The display is an important interface for exchanging information between humans and electronic devices. The types of displays can be largely classified into cathode-ray tube (CRT) and flat panel display (FPD). have.

Dual flat panel displays include Liquid Crystal Display (LCD), Plasma Display Panel (PDP), Electro Luminescent Diode (ELD), Field Emission Display (FED), and Micro Precision Machines. Liquid crystal on silicon (LCOS) using technology (Micro Electro Mechanical System, MEMS).

Unlike the past, with the rapid development of mobile communication products, the implementation of digital broadcasting, and the rapid growth of the personal computer market, the demand for light and small, low power consumption, ease of movement, and large screen to replace the existing cathode ray tube is increasing. As a result, technology development of flat panel displays is rapidly progressing.

Among the flat panel displays, the largest share as of 2003 is the liquid crystal display, which occupies more than 75% of the entire flat panel display market, and the plasma display panel is competitive for large screens of 40 inches or more. In addition to liquid crystal displays, organic light emitting diodes (OLEDs) are striving, and liquid crystal displays, organic light emitting diodes, and field effect displays are competing in the small and medium sized flat panel display market.

According to the kind of said flat plate, the material of the flat plate used differs, the environment of drying and baking differs, and the conditions which form a thin film also differ from each other.

In the case of the plasma display panel, the manufacturing process of the plasma display panel is composed of two plates, a top plate and a bottom plate, and the top plate is formed of indium oxide film (ITO) and patterning, electrode coating, and black stripe. ), The dielectric is applied, and the protective film is laminated.

The lower plate of the plasma display panel is coated with an electrode, a dielectric is applied thereto, and a phosphor is formed after the partition wall is formed.

A discharge sustaining electrode, a bus electrode, a dielectric layer, and a protective film are formed on the upper plate prepared through the above process, and an address electrode, the dielectric layer, and a partition fluorescent layer are formed on the lower plate.

The upper plate and the lower plate prepared by the above process are a sealing process for joining the upper and lower plates in a post process, an exhaust process for increasing the degree of vacuum, a process for injecting several hundred torr of gas, and a gas injection pipe Plasma display panel is made through a tip off process of sealing a.

As described above, in the manufacturing process of the plasma display panel, in the case of the upper plate, there is a drying and firing process after printing the dielectric, and in the case of the lower plate, there is also a drying and firing process in forming the electrode, forming a partition, and forming a phosphor. In addition, there are firing processes in each case, and drying and firing processes are involved in the sealing process, such as drying and firing processes.

The drying process and the firing process are essential steps in the manufacturing process of a flat panel display, and various techniques have been developed for this purpose.

Conventional drying furnaces or kilns, the dried plate is fed to the drying furnace or the kiln by a conveying means such as a conveyor belt, and transported by the conveying means in the drying furnace and the inside of the kiln, drying and drying according to the conditions for each step The firing process takes place.

As a device for drying and baking the flat panel display flat plate, an air circulation heating device (for example, Japanese Patent Application Laid-Open No. 6-317514) or a hot plate heating device (for example, Japanese Patent Application Laid-Open No. 6-97269) is widely used. In addition, an apparatus using a far infrared heater (for example, Japanese Patent Laid-Open No. 7-159768) is also used.

1 and 2 illustrate such a conventional general tunnel and batch type drying or firing furnaces.

That is, drying or firing is performed by heating in a predetermined atmosphere. In the continuous process for mass production of the display plate 2, the drying or firing furnace is mainly in the form of a tunnel using a conveyor having a cross section as shown in FIG. Alternatively, a batch drying furnace and a kiln as shown in FIG. 2 are used.

Referring to the conventional drying furnace or firing furnace as shown in FIG. 1, hot air is circulated into the drying furnace or the firing furnace 1 for drying and firing the display plate 2, and thus the display plate 2 ) Drying or baking operation is performed, the display plate 2 is carried by the conveyor belt (3) in the drying furnace or the interior of the firing furnace (1) to perform the operation according to a predetermined condition.

That is, a heat transfer heater 5 or a hot air circulator is installed in the heat treatment furnace 1 to maintain the temperature in the heat treatment furnace 1, and the pallet 2 to be dried is generally palletized. It is loaded on the conveyor (3) in the state loaded in the 4) is passed through the tunnel-type drying furnace or the firing furnace to be dried or fired.

The tunnel-type drying furnace or the kiln as described above is not designed to maintain a uniform internal temperature, but is designed to be maintained at elevated or lowered temperatures for each zone according to a predetermined heating schedule. There is a characteristic.

However, the length of the drying / firing furnace according to the process of drying and firing the tunnel-type kiln or kiln, the air circulation device is required accordingly, not only increases the installation cost of the equipment, but also increases the installation space There has been a problem that takes up a lot.

In addition, the worker has a problem that the efficiency of the work is lowered because the moving distance is far when drying and firing work.

On the other hand, Figure 2 shows an example of the batch-type firing furnace or drying furnace, which has been disclosed as a heat treatment system of the Republic of Korea Patent Publication No. 1997-0017811 flat plate.

Referring to FIG. 2, the disclosed invention relates to a heat treatment system for a flat plate, and loads the flat plate 8 in a rack 7 to a heat treatment furnace 6 in which a plurality of heaters 9 are installed. It is a way to take out.

However, the above invention is characterized by including a rack 7 and a heater 9 for loading the flat plate 8 so as to heat the loaded flat plate 8 directly by conduction heat, and the rack 7 Since the plate loaded into the inside of the heat treatment furnace (6) and the drying or firing process is carried out again to the outside method, there is an advantage to save the installation space, but the process is not continuous work There has been a problem of low efficiency and low production efficiency.

In addition, in order to improve on the conventional method, Korean Patent Application Publication No. 1991-0005361 discloses an automated drying apparatus.

Referring to FIG. 3, a drying furnace 10 having an inlet port 15 and an exhaust port 16 to circulate heated air therein, and having an inlet port 11 and an outlet port 12 to be dried, and the drying furnace Conveyor 21 in the drying means 10 and the input means 24 which feeds and supplies the to-be-dried object 20 to the inlet 11 of 10, and pushes it to the inside of the said drying furnace 10 in order. Transfer drying means for transporting the dried object 20 introduced from the feeding means toward the outlet 12 of the drying furnace 10 and drying at the same time, and the dried object 20 transferred from the conveying drying means. ) And a drawing means 25 which draws and transports them in turn by pushing them laterally.

In the disclosed invention, opening and closing doors 13 and 14 are formed at the inlet 11 and the outlet 12 of the drying furnace 10 so as to be opened only at the time of introduction and withdrawal, respectively, and the conveyor 21 of the transfer drying means. By hypothesizing to form an endless track, the object to be dried 20 is conveyed in an annular form, dried by heated air circulating in the drying furnace 10, and then withdrawn through the outlet 12. .

However, the present invention can be used for drying a variety of flat plate, the size of the dry object 20 is limited by the size of the container 23 for loading the dry object 20 is suitable for a small display panel, but in recent years It is not suitable for drying and firing flat panel displays that are being enlarged, and is conveyed to the annulus by the conveyor 21, so that not only an installation space corresponding thereto is required, but also a single temperature and air amount inside the drying furnace 10 There has been a problem that it is not possible to carry out the drying of various conditions in multiple stages at the same time.

The present invention was created in view of the above necessity, and in a drying furnace or a firing furnace for performing a drying or firing operation of a display plate, it is possible to significantly reduce the installation space of the device, compared to a conventional tunnel drying furnace or a firing furnace. The aim is to provide a drying / firing furnace with high production efficiency.

In addition, another object of the present invention in the drying or firing operation, by allowing the composition of the internal conditions of the drying / baking furnace step by step, divided into a predetermined section according to the rise and fall of the display plate in one device drying and By firing, it is possible to reduce the number of devices required for the drying or firing of the display plate, increase the utilization of space, and provide a drying / firing furnace that can easily control drying and firing according to the purpose. There is.

In addition, another object of the present invention is to design the unit by blocking each unit is easy to assemble the device according to the present invention, the installation cost and maintenance cost is reduced, as well as the drying / baking furnace to facilitate maintenance and repair To provide.

As the drying / firing of the display plate for performing the drying or firing operation of the display plate of the present invention for achieving the above object, an inlet and an outlet for the input or export of the display plate is formed, and the display plate is dried or A drying / firing furnace body in which the firing operation is performed, a lifting unit for moving the display plate up and down, and a circulation unit for supplying and circulating air or gas into the drying / firing furnace is provided.

In a drying / firing furnace for drying or baking a display plate (FPD), the raising and lowering unit includes a main rod for raising and lowering the display plate up and down and a display coupled with the main rod. A main rod arm supporting a plate, a lift motor for lifting and lowering the main rod up and down, a guide rod and a guide for rotational movement when the plate is raised and lowered It is preferable to include a rod rod arm.

The circulation unit may further include a fan for injecting and circulating the heated air or gas into the main body in a drying / firing furnace, a duct for injecting the heated air or gas, and heating the heated air or gas. It is preferable to include a heater (heater), and a fan drive motor for driving the fan.

In addition, it is preferable that a lifter is further provided on one side or both sides of the drying / firing furnace body, and a door is further provided on the drying / firing furnace body.

In addition, it is preferable to further include a hepa filter (hepa filter) for preventing the contamination of air in circulating the heated air or gas.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings.

Figure 4 is a perspective view showing a multi-stage drying / baking furnace according to an embodiment of the present invention.

Referring to the drawings, the multi-stage drying / firing furnace according to the present invention, as shown in Figure 4, the drying / firing furnace body 100 is carried out the drying or firing operation of the display plate 110, and the display plate 110 ) Up and down unit (see Figs. 7 and 8) and a circulation unit (see Figs. 7 and 8) for supplying and circulating air or gas into the drying / firing furnace main body 100. And, an inlet (200) is formed on the opposite side of the inlet 200 and the inlet 200 for the input or export of the display plate 110.

The display plate 110 to be dried / baked is guided to the drying / firing furnace main body 100, and the inside of the drying / firing furnace main body 100 through the inlet 200 installed at one side of the drying / firing furnace main body 100. Is introduced into the drying / firing process.

In addition, the door 600 is formed on one side or both sides for convenient maintenance and repair of the drying / baking furnace, the support frame 700 for supporting the drying / baking furnace body 100 for the efficiency of work is to be formed Can be.

FIG. 5 is a perspective view of a case in which a lifter is further included in the drying / firing furnace of FIG. 4, and FIG. 6 is a plan view of FIG. 5.

Referring to the drawings, as in FIG. 4, the drying / firing furnace includes a drying / firing furnace main body 100, a raising / lowering unit (see FIGS. 7 and 8), a circulation unit (see FIGS. 7 and 8), and In addition, an outlet (not shown) is provided at the inlet 200 and the opposite side thereof, and a lifter 300 is further provided to guide the display flat plate 110 to the inlet 200.

That is, a pair of lifters 300 may be further included on one side or both sides of the drying / firing furnace body 100, respectively, and the lifter 300 may include a lifter guide rod 310 and a lifter guide rod 310. Along with supporting the plate 110 to be dried / fired, it is configured to include a pallet 320 and a drive motor (not shown) of the lifter to enable the lifting or lowering movement.

As the lifter 300 is driven, the pallet 320 supporting the flat plate 110 moves up or down along the lifter guide rod 310, and thus the display flat plate 110 is the main body of the drying / firing furnace. Guided to the inlet 200 formed in the (100).

In addition, it is preferable that the door 600 is further installed on one side or both sides of the drying / firing furnace body 100 to facilitate maintenance of the drying / firing furnace.

Fig. 7 is a cross sectional view showing a lifting unit and a descending unit and a circulation unit of a multi-stage drying / firing furnace according to the present invention, and Fig. 8 is a longitudinal sectional view showing the lift unit and the descending unit and circulation unit shown in Fig. 7.

In addition, the right part of FIG. 8 shows the state when the main rod 400 and the main rod arm 410 are raised and the cross section of the heater 500, and the left part of FIG. 8 shows the main rod 400 and The cross section of the fan 520 and the fan drive motor 540 for the circulation of the heating air or gas and the state when the main rod arm 410 is lowered are shown.

In FIG. 7 and FIG. 8, the first raising / lowering unit will be described. The raising / lowering unit may include a main rod 400 for raising and lowering the display flat plate 110 up and down, and the main rod 400 up and down. A lifting and lowering motor (not shown) for raising and lowering and a guide rod 420 for supporting the lifting and lowering of the display plate are provided.

A plurality of main rod arms 410 are fixed to the main rod 400, and a plurality of guide rod arms 430 are fixedly coupled to the guide rod 420, and the main rod arm 410 is rotated. The movement and the lifting and lowering movement is installed, the guide rod 420 is installed to enable the rotational movement.

The main rod arm 410 and the guide rod arm 430 rotate with the main rod 400 and the guide rod 420 as rotation axes, respectively. Such rotation movement is driven in the case of the main rod 400. It is made by a motor (not shown) and the gear 440, in the case of the guide rod 420 may be driven by a rotation cylinder 450.

In addition, the lifting and lowering motion of the main rod 400 can be driven in the vertical direction by changing the rotational movement of the drive motor into a linear movement in the vertical direction by the rack & pinion (440) gear.

That is, the main rod 400 is driven in the vertical direction and the rotation drive at the same time, the guide rod 420 is only a rotational drive, when the main rod 400 is lowered and the display plate 110 It is conveyed downward by the main rod arm 410, where the guide rod 420 is in a position (430 in FIG. 7) that does not support the display plate 110.

In addition, when the main rod 400 is raised, the display plate 110 is supported by both the guide rod arm (430 ′ in FIG. 7) and the main rod arm (410 ′ in FIG. 7) and transported upward.

When the display plate 110 is retracted, the guide rod arm 430 'and the main rod arm 410' support the display plate 110, and when the display plate 110 is lowered, the guide rod 430 rotates (430 '). The display plate 110 is supported by the main rod arm 410 ′ only, and the plate 110 is lowered by the downward movement of the main rod 400.

In addition, in order to elevate the display flat plate 110, the display flat plate 110 is supported by the main rod arm 410 ′ as in the lowering process, and the display flat plate ( 110) goes up and down.

As the display plate 110 is raised or lowered by the lifting and lowering movement, the drying or firing process of the multi-stage is performed by changing the atmosphere of drying or firing.

In addition, the circulation unit, a fan (520) for injecting and circulating the heating air or gas into the drying / baking furnace (100), a fan drive motor 540 for driving the fan 520 and And a duct 530 for circulating heated air or gas and a heater 500 for heating the air or gas.

Heated air or gas generated in a hot air supply device (not shown) is injected into the interior of the main body 100 by drying / firing through the duct 530, passes through the heater 500 and heated air or gas of a desired temperature The display plate 110 is circulated into the drying / baking furnace into which the display plate 110 is put, and drying or firing is performed. After that, the heated air or gas is partially exhausted through the door 600, and the remaining gas is fan ( Returning to 520 and mixed with the heated air or gas supplied through the duct 530 is circulated back to the heater 500.

Through the above process, the circulation unit serves to supply, circulate, and exhaust hot hot air to the interior of the drying / baking furnace, and to dry or fire the display plate staying inside the drying / baking furnace by the circulation unit. This is done.

In addition, it is preferable to further include a hepa filter (Hepa Filter, 620) for preventing the contamination of air in circulating the heating air or gas, it is contained in the heating air or gas supplied from the outside, or the fan drive motor ( The HEPA filter 620 filters dust generated by friction when the fan 520 is driven by the 540 to maintain cleanliness according to the working environment.

The HEPA filter 620 plays an important role as the manufacturing of the display substrate requiring high cleanliness.

The drying / baking furnace of the display plate of the present invention described above provides the following effects.

First, in the drying or firing of the display plate, it is possible to significantly reduce the installation space of the device, compared to the conventional tunnel type device, there is an advantage in terms of production efficiency.

Second, unlike conventional batching or firing furnaces, by allowing a single device to perform drying or firing operations under various conditions, the number of devices required for the production process of the display plate can be reduced, and the space is utilized. It is possible to increase the cost and reduce the installation and maintenance costs of the device.

Third, by dividing the display plate into a certain section according to its position in accordance with the rise and fall of the display plate, it is possible to dry or fire at different temperatures and conditions, thereby creating various different environments with a single device. According to the advantage that can control the drying or firing.

It is to be understood that the invention is not limited to that described above and illustrated in the drawings, and that more modifications and variations are possible within the scope of the following claims.

Claims (6)

In a drying / firing furnace that performs drying or firing of a display flat panel (FPD), A drying / firing furnace body in which a drying or firing operation of the display plate is performed, and an inlet and an outlet for inputting or removing the display plate are formed; A main rod for moving the display plate up and down, a main rod arm coupled to the main rod to support the display plate, and a lift rod for moving the main plate up and down; A lowering motor, a guide rod that rotates when the display plate moves up and down, and a guide rod arm that is coupled to the guide rod and rotates according to the rotation of the guide rod. A raising and lowering unit including; Multi-stage drying / baking of the display plate is provided with a circulation unit for supplying and circulating air or gas into the interior of the drying / baking furnace body. delete The method of claim 1, The circulation unit, A fan for injecting and circulating the heated air or gas into the drying / firing furnace; A duct for injecting the heated air or gas; A heater for heating the heated air or gas; And a fan drive motor for driving the fan. The method of claim 1, A multi-stage drying / baking furnace of a display plate, characterized in that a lifter is further provided on one side or both sides of the main body having an inlet or an outlet. The method of claim 1, Multi-stage drying / baking of the display plate, characterized in that the door (door) is formed on one side or both sides of the drying / baking furnace body. The method of claim 1, And a hepa filter for preventing contamination of air in circulating hot air or gas.

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