KR100565138B1 - Apparatus for growing epitaxial layers on wafers - Google Patents

Abstract

The device for growing the epitaxial layer includes a spindle 142 having an opening 158 extending between the top and bottom ends. A rotatable platform 134 is mounted to the top of the spindle, the platform including a top surface 136 and a central opening 140 that substantially aligns with the bottom surface 138 and the spindle opening 158. The deposition chamber also has a substantially porous wafer carrier having a wafer receiving cavity 128 disposed over the top surface 136 of the platform 134 and having a hollow space 130 substantially aligned with the central opening 140 of the platform 134. 124. The spindle opening 158 is preferably connected to a vacuum pump such that the pressure level in the hollow space 130 of the wafer carrier 124 is lower than the pressure level in the deposition chamber, thereby maintaining the wafer 122 in a substantially flat orientation. Aspiration can be created in the wafer receiving cavity.

Description

A device for growing an epitaxial layer on a wafer {APPARATUS FOR GROWING EPITAXIAL LAYERS ON WAFERS}

The present invention relates to the manufacture of semiconductor devices, and more particularly, to an apparatus for growing an epitaxial layer on a substrate such as a wafer.

Semiconductor wafers are often fabricated by placing a wafer substrate in a reaction chamber of a chemical vapor deposition (CVD) reactor and then growing one or more epitaxial layers on the wafer. During this process, the wafer is placed in a CVD reactor and the reaction compound in gaseous form is injected onto the wafer in a controlled amount and speed to grow an epitaxial layer on the wafer. The CVD reactor includes a horizontal reactor in which the wafer is mounted at a predetermined angle with respect to the incoming reaction gas, a horizontal reactor in which planetary rotation of the reaction gas passes through the wafer, a barrel reactor, and a reaction gas in the wafer. It can have a variety of configurations, including a vertical reactor in which the wafer is rotated at a relatively high speed in the reaction chamber when injected downward onto the bed.

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Reaction compounds, commonly called precursors, are generally injected into the reaction chamber by placing the reaction compounds in a device known as a bubbler and then passing a carrier gas through the bubbler. This carrier gas picks up molecules of the reactant compound to provide a reactant gas that is fed into the reaction chamber of the CVD reactor using a mass flow controller.

The conditions under which the reactant gas is injected into the reaction chamber have a significant effect on the properties of the epitaxial layer grown on the wafer. Such conditions may be modified to optimize the physical properties of the epitaxial layer grown on the wafer, typically including the viscosity, density, vapor pressure, flow path of the reaction gas, chemical activity and temperature of the material. For example, the flow path of the reaction gas may be changed by changing the configuration of the flow flange used to inject the reaction gas into the reaction chamber. In many cases, epitaxial layers grown on substrates are being investigated to determine the optimal flow path for growing a particular type of layer.

When depositing an epitaxial layer on a wafer, the wafer is typically placed on the wafer carrier in the reaction chamber, which in turn can be placed on the rotatable susceptor. In such a reactor, the growth of a uniform epitaxial layer is achieved by rotating the wafer carrier and susceptor at high speed with the wafer mounted thereon. The thickness, composition and quality of the deposited layers determine the properties of the final semiconductor device. Thus, the deposition process must be able to deposit films of uniform composition and thickness on the front of each wafer. The requirement for uniformity is becoming increasingly stringent as larger wafers are used and devices are used to deposit films on multiple wafers simultaneously.

In a deposition process using a conventional wafer carrier, the surface temperature of the wafer is typically the surface temperature of the wafer carrier due to the thermal resistance produced by the interface between the wafer and the wafer carrier and the different emissivity of the wafer carrier and the material from which the wafer is made. Will be lower. Unfortunately, this temperature difference degrades the quality of the resulting semiconductor wafer. For example, due to the higher temperature of the wafer carrier, the temperature becomes uneven along the surface of the wafer, especially along its periphery, so that the layer (s) deposited along the periphery of the wafer typically has to degrade and be discarded.

In the general conventional apparatus shown in FIG. 1A, the wafer 10 is mounted on top of the wafer carrier 12. In turn, the wafer carrier 12 is mounted on a susceptor 14 attached to the top of the rotatable support spindle 16. The upper ends of the wafer (s) 10, wafer carrier 12 and susceptor 14 are generally disposed in a sealed reaction chamber. A heating assembly 18 may be arranged under the susceptor 14 to heat the susceptor, wafer carrier 12 and the wafer mounted thereon. The spindle 16 is preferably rotated to improve the uniformity of the reactant gas flowing over the wafer 10. The rotating spindle 16 generally improves the uniformity of the reaction gas flowing over the wafer 10 as well as the temperature uniformity across the wafer 10.

The wafer carrier 12 includes a circular pocket 20 on its top surface 22 to hold the wafer 10 in place when the wafer carrier 12 is rotated during the deposition process. In general, the diameter of the circular pocket 20 is about 0.020 "larger than the diameter of the wafer (s) 10 and the depth is 0.002" deeper than the thickness of the wafer. This wafer carrier 12 also typically includes an annular flange 24 used to lift and transport the wafer carrier 12 into and out of the reaction chamber. Wafer carrier 12 may include an annular wall 26 on its bottom surface for placing and holding wafer carrier 12 on susceptor 14 as the wafer carrier is rotated during the deposition process.

Referring to FIG. 1B, during the deposition process, wafer 10 is heated by heating assembly 18. As a result, the early deposited epitaxial layer generally has a higher temperature than the later deposited epitaxial layer. As a result, as shown in FIG. 1B, the peripheral edge 28 of each wafer 10 is often rolled up and moved away from the wafer carrier 12. As a result, the peripheral edge 28 of the wafer (s) 10 is no longer in contact with the wafer carrier 12 and no longer heated to the same level as the interior of the wafer. Although the present invention is not limited by any particular law of operation, it is believed that the curling phenomenon is due to the fact that the early deposited epitaxial layer is at a higher temperature than the later deposited epitaxial layer. Moreover, the heating of the wafer becomes irregular because the inside of the wafer is heated with the curled outside of the wafer further away from the heating assembly. As a result, because the epitaxial layer is not uniform across the wafer, the curled portion of the wafer 10 must be discarded. This is especially because the semiconductor device taken in the curled portion of the wafer has different operating characteristics from the semiconductor device taken in the inner region of the wafer.

Thus, there is a need for an apparatus capable of depositing epitaxial layers more uniformly on top of the entire surface of each wafer. More specifically, there is a need for a wafer carrier that keeps the wafer substantially flat during the epitaxial layer forming process, thereby preventing the wafer's edges from curling up.

An apparatus for growing an epitaxial layer on a substrate such as a wafer used to manufacture a semiconductor device includes an upper end disposed inside the reaction chamber, an lower end disposed outside the reaction chamber, and an opening extending between the upper end and the lower end of the spindle. It includes a rotatable spindle having a. The device includes a rotatable platform mounted to the upper end of the spindle. In certain embodiments, the rotatable platform is preferably a susceptor made of a non-porous material. The upper end of the spindle preferably includes an outwardly extending flange portion to enhance the mounting engagement between the rotatable platform and the spindle. The platform includes an upper surface, a lower surface in contact with the upper end of the spindle, and a central opening extending between the upper and lower surfaces of the platform. When the rotatable platform is mounted on top of the spindle, the central opening of the rotatable platform is preferably aligned substantially with the opening extending between the upper and lower ends of the spindle. In certain preferred embodiments, the apparatus comprises a motor coupled to a rotatable spindle for selectively rotating the spindle and the platform mounted thereon. One or more vacuum rotary feedthroughs may be provided in sealing engagement with the spindle and / or the reaction chamber to provide a vacuum seal between the spindle and the reaction chamber and around the spindle.

The apparatus also preferably includes a substantially porous wafer carrier disposed over the top surface of the platform. Substantially porous wafer carriers preferably have an upper surface that includes one or more cavities therein to receive one or more wafers therein. Each cavity preferably has an outer diameter or outer portion greater than or equal to the outer diameter or outer portion of one of the wafers disposed therein. In certain preferred embodiments, the diameter of each cavity formed on the top surface of the wafer carrier is about 1.0 to 1.25 times the diameter of each wafer disposed therein. The wafer carrier may also have a bottom surface in contact with the top surface of the platform. The lower surface of the wafer carrier preferably has a hollow space formed therein. When the wafer carrier is placed on top of the platform, the hollow space of the wafer carrier is substantially in alignment with the central opening of the platform. As a result, the hollow space of the wafer carrier is in substantial alignment with the central opening of the platform and the long opening extending through the rotatable spindle.

The substantially porous wafer carrier is preferably made of a material selected from the group consisting of graphite, SiC and molybdenum and preferably has a porosity of about 7-14%. The wafer carrier may include one or more channels in communication with the hollow space. The one or more channels preferably extend outwardly from the hollow space and may pass under one or more cavities formed in the top surface of the wafer carrier. In certain preferred embodiments, the channel extends along the bottom surface of the wafer carrier and below the cavity of the wafer carrier. The wafer carrier may also include a sealing arrangement, such as a sealing ring provided adjacent to its outer periphery to isolate the hollow space of the wafer from the reactant gas in the deposition chamber. The sealing arrangement may include an outer flange portion of the wafer carrier that extends beyond the outer periphery of the platform when the wafer carrier is disposed on top of the platform. In certain embodiments, the top surface of the wafer carrier surrounding the cavity may be covered by a nonporous coating or layer. As will be described in more detail below, when the wafer is placed in a cavity of the wafer carrier and a vacuum is drawn through the substantially porous wafer carrier, the nonporous layer improves the level of suction in the cavity, thereby keeping the wafer substantially flat. The performance of the wafer carrier can be improved.

The deposition chamber may also include a pump in communication with the spindle opening that generates a vacuum or suction within the elongated opening extending through the spindle. When a low pressure region occurs in the spindle opening, a vacuum or low pressure region of the same force is generated both in the central opening of the rotatable platform and in the hollow space of the wafer carrier. The vacuum may extend into one or more channels extending from the hollow space through the wafer carrier. When the wafer is placed in the cavity of the wafer carrier and one or more reactant gases are injected into the reaction chamber, the vacuum or suction in the hollow space is lower than the pressure level in the reaction chamber. As a result, suction is expressed in the cavity at the interface between the wafer and the wafer carrier. Such aspiration prevents the peripheral edges of the wafer from curling up or falling from the wafer carrier when the epitaxial layer is deposited, as occurs in a conventional deposition chamber (eg, the conventional embodiment shown in FIG. 1A). As a result, a uniform epitaxial layer can be formed over the entire surface of the wafer, thereby providing a reliable semiconductor device that may be manufactured from the peripheral edge of the wafer.

According to another preferred embodiment of the present invention, an apparatus for supporting a wafer in a reaction chamber of a CVD reactor includes a rotatable spindle having an upper end disposed inside the reaction chamber and a lower end disposed outside the reaction chamber, wherein the spindle is And an opening extending between the upper and lower ends. The apparatus also includes a rotatable platform mounted over an upper end of the spindle, the platform including an upper face, a lower face in contact with the upper end of the spindle, and a central opening extending between the upper and lower surfaces of the platform, The central opening is in substantial alignment with the spindle opening. The apparatus may also include a substantially porous wafer carrier disposed over the top surface of the platform. The wafer carrier includes a bottom surface in substantial alignment with the central opening of the platform and having a hollow space in fluid communication with the opening of the spindle. The opening of the spindle is connected to a low pressure source such that the pressure level in the hollow space of the wafer carrier is lower than the pressure level on top of the wafer disposed on the wafer carrier. As a result, any wafer placed on the wafer carrier is attracted toward the wafer carrier so that the edge of the wafer does not curl up as would occur in a conventional apparatus.

In another preferred embodiment of the present invention, a method of growing an epitaxial layer on a wafer comprises the steps of: providing a deposition chamber having a rotatable substantially porous wafer carrier therein; Holding, disposing a wafer on the substantially porous wafer carrier, and after the disposing step, the interface between the wafer and the wafer carrier has a substantially second pressure level in the deposition chamber that is less than a first pressure level. Introducing a vacuum through the porous wafer carrier.

In another embodiment, the substantially porous wafer carrier has a top surface, a bottom surface, and a plurality of wafer receiving cavities formed in the top surface to receive the wafer. In this embodiment, the top surface of the wafer carrier surrounding the wafer receiving cavity is covered by a nonporous layer. Although the present invention is not limited by any particular law of operation, it is believed that the nonporous layer enhances the strength of the vacuum force drawn into the cavity. In yet another embodiment, the substantially top surface of the porous wafer carrier does not have a cavity, but has a wafer receiving region formed by a nonporous layer formed over the wafer carrier. Since the wafer receiving region is not covered by the nonporous layer, suction in the wafer receiving region can hold the wafer on top of the wafer carrier when growing the epitaxial layer.

These and other embodiments of the present invention will be described in more detail below.

1A is a cross-sectional view of a conventional wafer carrier including a wafer mounted on top of a wafer carrier, a susceptor, a rotatable spindle used to support the susceptor, and a heating device for heating the susceptor.

FIG. 1B illustrates an epitaxial layer grown on top of a wafer with the conventional wafer carrier of FIG. 1A.

2 is a cross-sectional view of a deposition chamber including a wafer carrier, a rotatable platform and a rotatable spindle, in accordance with certain preferred embodiments of the present invention.

3A is a plan view of the wafer carrier of FIG. 2 taken along line IIIA-IIIA in FIG.

3B is a bottom view of the wafer carrier of FIG. 3A.

4 is a partial cross-sectional view of the deposition chamber of FIG. 2.

5 is a cross-sectional view of a wafer carrier having a substantially nonporous top surface surrounding the wafer receiving cavity and the wafer receiving cavity, in accordance with certain preferred embodiments of the present invention.

2 shows an apparatus for growing an epitaxial layer on a wafer in accordance with certain preferred embodiments of the present invention. The apparatus comprises a top flange having a deposition chamber 100 having sidewalls 102 and one or more openings 106 for injecting a reaction compound, such as a reaction gas, into the interior region 108 of the deposition chamber 100. 104). The deposition chamber 100 also includes a bottom sealing flange 110. Preferably, the deposition chamber 100 is made of stainless steel, and the upper flange and the lower flange 104 and 110 are hermetically coupled to the side wall 102. The reactant gas injected through the opening 106 of the upper flange 104 is distributed almost uniformly by one or more showerheads 114. The reaction gases preferably interact with each other within the deposition chamber 100 to form an epitaxial layer on the wafer, which will be described in more detail below. After the reactant gases interact with each other and are deposited on top of the wafer, waste is removed through an outlet 116 extending through the lower sealing flange 110. In certain preferred embodiments, waste reaction gas is removed through outlet 116 using pump 118. The internal pressure level of the interior region 108 of the deposition chamber 100 is controlled by the throttle valve 120.

In order to grow the epitaxial layer on the wafer, such a wafer 122 is preferably disposed on top of the wafer carrier 124 in the deposition chamber 100. Wafer carrier 124 has an upper surface 126, a lower surface 129 and one or more wafer receiving cavities 128 adapted to receive therein one or more wafers 122 therein. It is preferable that the diameter of each wafer accommodating cavity 128 is more than the outer diameter of the wafer 122 accommodated in it. The wafer carrier 124 also preferably includes a hollow space 130 formed in the bottom surface 129 of the wafer carrier 124. The hollow space 130 may be located at the center of the wafer carrier 124. Wafer carrier 124 is preferably made of a substantially porous material, such as graphite, SiC, molybdenum or other well known materials commonly used in wafer carriers. In certain preferred embodiments, the porosity of wafer carrier 24 is approximately 7-14%.

Wafer carrier 124 also includes an outer flange 132 that forms the outer periphery of wafer carrier 124. The wafer carrier 124 is adapted to be positioned on top of the rotatable platform or susceptor. The susceptor 134 includes an upper surface 136 and a lower surface 138 remote from there. The susceptor 134 also includes a central opening 140 extending between the top and bottom surfaces 136, 138.

The susceptor 134 is connected to a rotatable spindle 142 having an upper end 144 disposed inside the deposition chamber 100 and a lower end 146 disposed outside the deposition chamber. The top end of the spindle 142 preferably includes a flange portion 148 mounted to the bottom surface 138 of the susceptor 134. Spindle 142 may be rotated by motor 150 via pulleys 152 and 154 and belt 156. The spindle 142 preferably has an elongated opening 158 extending through the spindle, which is aligned with the central opening 140 extending through the susceptor 134. When the wafer carrier 124 is provided above the susceptor 134, the hollow space 130 at the lower surface thereof is preferably in a substantially aligned state with the spindle opening 158 and the susceptor opening 140. . The outer flange 132 holds the wafer carrier 124 on top of the susceptor 134 as the wafer carrier 124 and susceptor 134 rotate.

The lowest end of the spindle 142 is preferably connected to the pump 118 to draw in vacuum through the spindle opening 158. The differential pressure controller 162 regulates the pressure in the interior region 108 of the deposition chamber 100 and the pressure levels in the spindle opening 158, the susceptor opening 140, and the hollow space 130. The pressure level in the hollow space 130 is always lower than the pressure level in the interior region 108 of the deposition chamber 100. In certain preferred embodiments, a vacuum seal between the deposition chamber 100 and the spindle 142 or around the spindle 142 by using one or more vacuum rotary feedthroughs 160, 164, or the like. This is provided. Well-known vacuum rotary feedthroughs are manufactured by Ferrofluidic Corporation, Advanced Fluid Systems and Rigaku.

As described above, the wafer carrier 124 preferably includes a hollow space 130 formed in the bottom surface 129 of the wafer carrier 124. When the pump 118 is actuated, a vacuum is created in the spindle opening 158, the susceptor opening 140 and the hollow space 130. The wafer carrier includes one or more channels 135 in communication with the hollow space 130 such that a low pressure or vacuum in the hollow space 130 spans substantially the entire area of the porous wafer carrier. As a result, the pressure level at the interface of the wafer 122 and the wafer carrier (ie, in the cavity 128) is lower than the pressure level in the region 108 inside the reaction chamber 100. As used herein, the technical term "interface of wafer 122 and reaction chamber 100" refers to the area where the wafer carrier is in direct contact with the wafer overlying the carrier. The low pressure at the interface sucks the wafer 122 into the cavity 128, thereby preventing the peripheral edge of the wafer 122 from curling up as occurs in the conventional apparatus shown in FIG. 1B. Although the present invention is not limited by any particular law of operation, the wafer 122 is substantially flat during deposition of the reactive gas thereon to form a semiconductor wafer having a uniform epitaxial layer over the entire area of the wafer. It is thought to be possible. As a result, a semiconductor device formed at the edge of the wafer can be used and is not discarded as occurs by conventional processes.

In certain preferred embodiments, the wafer carrier 124 aligns the wafer carrier 124 on top of the susceptor 134 and prevents the wafer carrier 124 from falling off the susceptor 134 while the susceptor rotates. Flange area 132 to prevent. The flange region also allows the wafer carrier 124 to isolate the relatively high pressure gas in the region 108 inside the deposition chamber 100 from the relatively low pressure gas in the hollow space 130 and the channel 135 of the wafer carrier 124. And a susceptor 134 may be provided.

3A illustrates a top view of the wafer carrier 124 of FIG. 2, in accordance with certain preferred embodiments of the present invention. Wafer carrier 124 includes an upper surface 126 in which a plurality of wafer receiving cavities are formed. Wafer carrier 124 includes a peripheral flange 132 extending around its outer periphery. As mentioned above, the peripheral flange 132 preferably provides an alignment guide for positioning the wafer carrier 124 on top of the susceptor 134. Peripheral flange 132 also provides a sealing function to effectively isolate the relatively high pressure gas in the interior region 108 of the deposition chamber 100 from the relatively low pressure gas in the hollow space 130 of the wafer carrier 124. You can also provide

3B shows a bottom view of a wafer carrier 124 including a hollow space 130 and channels 135 extending outwardly therein and around a common support area of the wafer carrier 124. It is shown. Channel 135 preferably distributes the vacuum generated by pump 118 in a more uniform pattern throughout substantially porous wafer carrier 124. In certain preferred embodiments, cavity support region 168 is substantially aligned with wafer receiving cavity 128. The diameter of the cavity support region 168 may be about 1 to 1.5 times the diameter of the wafer receiving cavity 128. Although the present invention is not limited by any particular law of operation, the cavity support region 168 is capable of bending, bending, or bending the wafer carrier 124 when a vacuum is drawn through the wafer carrier 124. It is believed to improve the structural stability of the wafer carrier 124 so as to prevent buckling.

4 shows an enlarged view of the wafer carrier 124 positioned on top of the susceptor 134 during the epitaxial layer forming process. After one or more wafers 122 are disposed in the cavity 128, a reactant gas 170 is deposited on top of the wafers 122. First, the spindle 142 is rotated by a motor 150 (not shown), and in turn, the susceptor 134 and the wafer carrier 124 mounted at the upper end of the spindle 142 are rotated. Thereafter, the reaction gas 170 is injected into the interior region 108 of the deposition chamber 100. Pump 118 (FIG. 2) introduces vacuum 172 through spindle opening 158. When a vacuum is drawn through the spindle opening 158 and the susceptor opening 140, a similarly sized vacuum is formed in the hollow space 130 of the wafer carrier 124. Due to the significant porosity of the wafer carrier 124, suction 175 occurs at the interface 174 between the cavity 128 and the wafer 122. The suction 175 pulls the edge 176 of the wafer 122 into the cavity 128, so that the peripheral edge 176 of the wafer 122 can be prevented from curling up during the formation of the epitaxial layer. As a result, a semiconductor wafer having a uniform layer and / or constant characteristics over the entire surface can be formed.

5 shows a wafer carrier 224 for receiving a wafer 222, according to another preferred embodiment of the present invention. Wafer carrier 224 has an upper surface 226 and a lower surface 228 remote from the upper surface. Wafer carrier 224 includes one or more wafer receiving cavities 229 formed therein. Each cavity 229 is sized and shaped to accommodate the wafer 222 so that the epitaxial layer can grow on the wafer. Each cavity 229 forms an interface 274 facing the lower side of the wafer 222. Top surface 226 of wafer carrier 224 surrounding cavity 229 is covered by nonporous layer 280. When the vacuum is drawn through the hollow space 230, the nonporous layer 280 causes the vacuum force to be concentrated at the wafer / carrier interface 274, thereby substantially flattening the wafer 222 as the epitaxial layer is grown. Improve the ability of the assembly to hold in position. In another embodiment, the top surface of the wafer carrier is substantially flat and has a wafer receiving area formed by a non-porous coating formed over the top surface and surrounding the wafer receiving area. In the case of a porous wafer carrier, such vacuum force is concentrated in the wafer receiving area of the carrier (ie, the top surface area of the wafer is not covered by the nonporous coating).

Since the foregoing features and other variations and combinations may be employed, the foregoing description of the preferred embodiments should be considered as illustrative rather than limiting on the scope of the claims.

The present invention can be used in the semiconductor industry.

Claims (27)

An apparatus for growing an epitaxial layer on a wafer, A rotatable spindle including an upper end disposed inside the reaction chamber, a lower end disposed outside the reaction chamber, and an opening extending between the upper end and the lower end; A rotatable mounted upper end of the spindle, the rotatable center comprising: an upper surface, a lower surface in contact with the upper end of the spindle, and a central opening extending between the upper and lower surfaces and substantially aligned with the opening of the spindle Platform, Substantially porous wafer carrier comprising a bottom surface removably disposed over the top surface of the platform and having a hollow space in contact with the top surface of the platform and substantially aligned with the central opening of the platform. Wherein the lower end of the spindle is connected to a low pressure source such that the pressure level in the hollow space of the wafer carrier is lower than the pressure level in the reaction chamber. The apparatus of claim 1, wherein the substantially porous wafer carrier is made of a material selected from the group consisting of graphite, SiC, and molybdenum. The apparatus of claim 1, wherein the substantially porous wafer carrier has a porosity of 7-14%. The apparatus of claim 1, wherein the rotatable platform is a susceptor made of a nonporous material. 10. The apparatus of claim 1, further comprising a motor coupled to the rotatable spindle for selectively rotating the spindle and the platform. The apparatus of claim 1, further comprising a vacuum rotary feedthrough sealingly coupled with the spindle to provide a vacuum seal between the spindle and the reaction chamber. The epitaxial layer of claim 1, wherein the opening extending through the spindle, the central opening of the rotatable platform and the hollow space of the lower surface of the wafer carrier are substantially aligned with each other. Device. 8. The apparatus of claim 7, wherein the lower end of the spindle is connected to a vacuum pump such that the pressure level in the hollow space of the wafer carrier is lower than the pressure level in the reaction chamber. The apparatus of claim 1, wherein the wafer carrier has a top surface comprising one or more cavities for receiving one or more wafers. 10. The apparatus of claim 9, wherein the top surface of the wafer carrier surrounding one or more wafer receiving cavities is covered by a nonporous layer. 10. The apparatus of claim 9, wherein the diameter of each cavity is at least the diameter of one of the wafers. 12. The apparatus of claim 11, wherein the diameter of each cavity is one to 1.25 times the diameter of each wafer. The apparatus of claim 1, wherein the wafer carrier comprises one or more channels in communication with the hollow space and extending outwardly from the hollow space. 10. The apparatus of claim 9, wherein the wafer carrier comprises one or more channels in communication with the hollow space and extending outwardly from the hollow space toward the outer periphery of the wafer carrier. 15. The apparatus of claim 14, wherein at least one of the channels passes under at least one of the cavities of the wafer carrier. The epitaxial layer of claim 1, wherein the wafer carrier has an outer circumference comprising a sealing arrangement for isolating a relatively low pressure in the hollow space of the wafer carrier from a relatively high pressure in the deposition chamber. Device. 17. The apparatus of claim 16, wherein the sealing arrangement comprises an outer flange portion of the wafer carrier extending beyond the outer periphery of the platform. An apparatus for supporting a wafer in a deposition chamber, A rotatable spindle including an upper end disposed inside the deposition chamber, a lower end disposed outside the deposition chamber, and an opening extending between the upper end and the lower end; A rotatable mounted on an upper end of the spindle, the upper surface including a lower surface in contact with the upper end of the spindle and a central opening extending between the upper and lower surfaces and substantially aligned with the opening of the spindle; Platform, Substantially porous wafer carrier comprising a bottom surface removably disposed over the top surface of the platform and having a hollow space in substantial alignment with the central opening of the platform and in fluid communication with the opening of the spindle. Wherein the opening of the spindle is connected to a low pressure source such that the pressure level in the hollow space of the wafer carrier is lower than the pressure level around the wafer carrier. 19. The apparatus of claim 18, wherein the wafer carrier has a top surface comprising one or more cavities for receiving the one or more wafers. 20. The apparatus of claim 19, wherein the diameter of the cavity on the top surface of the wafer carrier is greater than or equal to the diameter of the wafer. 20. The apparatus of claim 19, wherein the wafer carrier comprises one or more channels in fluid communication with the hollow space and extending outwardly from the hollow space. 22. The apparatus of claim 21, wherein at least one of the channels passes below at least one of the cavities of the wafer carrier. A method of growing an epitaxial layer on a wafer, Providing at least one wafer over a substantially porous wafer carrier removably disposed on a rotatable platform having an opening therein in the deposition chamber; Maintaining a first pressure level in the deposition chamber; Drawing a vacuum through the opening of the rotatable platform and the substantially porous wafer carrier such that an interface between the wafer and the wafer carrier has a second pressure level lower than a first pressure level in the deposition chamber. The epitaxial layer growing on the wafer, wherein the wafer is maintained in a substantially flat orientation. 24. The method of claim 23, further comprising rotating the platform and the substantially porous wafer carrier. 25. The method of claim 24, further comprising injecting one or more reactants into the deposition chamber during introducing the vacuum. 24. The method of claim 23, further comprising heating the wafer carrier. 24. The method of claim 23, wherein the substantially porous wafer carrier is made of a material selected from the group consisting of graphite, SiC, and molybdenum.

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