KR100563536B1 - Probe sheet and reproducing method of the same - Google Patents

Abstract

An object of the present invention is to enable regeneration of a defective probe sheet.

A method for regenerating a probe sheet including a substrate and a probe conductor disposed on the substrate and in contact with an electrode of a specimen includes a removing step of removing the tip portion of the probe conductor together with the substrate.

Probe sheet, board, tip, fixing jig, elastic member, protective layer, support plate

Description

PROBE SHEET AND REPRODUCING METHOD OF THE SAME}

Figures 1 (a), (b) and (c) are a plan view, a front view and a side view of a probe sheet.

2 (a), 2 (b) and 2 (c) are a plan view, a front view and a side view showing an inspection of a specimen using a probe sheet.

Fig. 3 (a), (b), (c) and (d) are schematic side views showing examples of defects in the probe sheet.

4A, 4B, 4C, and 4D are side views showing the reproduction of the probe sheet;

5A and 5B are side views showing an example of a method of removing the tip 8 of the probe conductor 6;

6A, 6B, and 6C are side views illustrating regeneration of the probe sheet.

Figures 7 (a) and 7 (b) are side views showing another type of probe set and its use.

8A, 8B, and 8C are side views showing the reproduction of the probe set shown in FIGS. 7A and 7B.

9 (a) and 9 (b) are side views showing another type of probe set and its use form;

10A, 10B, 10C and 10D are side views showing the reproduction of the probe set shown in FIGS. 9A, 9B, and 9B.

11 (a) and 11 (b) are plan views showing probe sheets of another form;

12A and 12B are plan views showing probe sheets of another form;

13A and 13B are plan views showing probe sheets of another form;

14A, 14B, and 14C are a plan view, a front view, and a side view showing a probe sheet of another form;

15A and 15B are a side view and a front view showing a usage form of the probe sheet shown in FIG. 14 and an example of a form of defect generation;

Figures 16 (a), (b), (c) and (d) are front and side views showing the reproduction of the probe set shown in Figures 15 (a) and (b).

17A, 17B, and 17C are a plan view, front view and side view showing a probe sheet of another form;

18A, 18B, and 18C are a plan view, a front view and a side view showing a probe sheet of another form;

19A, 19B, 19C, 19D are side views illustrating regeneration of a probe sheet having a defect in a substrate;

20A, 20B, and 20C are side views illustrating another embodiment of ablation in reproducing a probe sheet;

21A, 21B, and 21C are side views illustrating another embodiment of ablation in reproducing a probe sheet;

22 (a) and 22 (b) are side views showing another form of ablation in reproducing the probe sheet.

23A and 23B are side views showing another form of ablation in reproducing the probe sheet.

Figures 24 (a) and (b) are side views showing the form of grinding in the ashes of the probe sheet;

25 is a plan view showing another embodiment of the probe sheet;

26A and 26B are a plan view and a side view showing an example of use of the probe sheet shown in FIG.

27A and 27B are a plan view and a side view showing the reproduction of the probe sheet shown in FIG.

Fig. 28 is a plan view showing another form of the probe sheet.

29A and 29B are a plan view and a side view showing a usage form of the probe sheet shown in FIG.

30A and 30B are a plan view and a side view showing the regeneration of the probe unit shown in FIGS. 29A and 29B.

<Explanation of symbols for the main parts of the drawings>

1, 40, 42, 44, 46, 48, 50, 52, 54: probe sheet

2: substrate

6: probe conductor

8: Tip

12: fixed jig

14: elastic body

26: protective layer

28: support plate

30: removal mark (mark)

32: mounting hole (positioning part)

36 length hole

The present invention relates to a probe sheet and a regeneration method thereof.

Background Art Conventionally, a probe sheet is known in which a plurality of probes arranged in parallel protrude from a substrate, and a tip portion thereof contacts an electrode of a specimen. In the probe sheet described in Patent Document 1, since the fine probe protrudes from the substrate, the probe sheet can be overdriven without applying a large force to the electrode of the specimen, so that the plurality of probes and the plurality of electrodes can be reliably connected.

However, if irremovable dust adheres to the tip of the probe, or if the tip of the probe is broken or worn out, only the probe can be replaced and the entire probe sheet must be replaced.

[Patent Document 1] Japanese Patent Application Laid-Open No. 08-015318

An object of the present invention is to enable regeneration of a defective probe sheet.

According to an aspect of the present invention, there is provided a reproducing method of a probe sheet having a substrate and a probe conductor having a contact portion extending to an end of the substrate and disposed on the substrate and in contact with an electrode of the specimen, wherein the contact portion is an electrode of the specimen. A reproducing method of a probe sheet is provided, which includes an inspection step of contacting a specimen to inspect a specimen and a removal step of removing the tip portion of the probe conductor together with the substrate.

According to another aspect of the present invention, there is provided a probe sheet having a substrate and a probe conductor having a contact portion which extends to an end of the substrate and is disposed on the substrate and which is in contact with an electrode of a specimen for inspection.

By removing the tip of the probe conductor that is worn, broken, or contaminated and not functioning normally, a new tip can be formed to regenerate the probe sheet.

Hereinafter, embodiments of the present invention will be described with reference to the drawings. In each figure, the same code | symbol shows the same component.

1A, 1B, and 3C are a plan view, a front view, and a side view of a probe sheet to be reproduced. 2 (a), 2 (b) and 2 (c) are a plan view, a front view and a side view showing a state in which a probe sheet is placed on a specimen and subjected to inspection.

The probe sheet 1 is used for inspecting electrical characteristics of a specimen such as a liquid crystal panel. The probe sheet 1 has a flexible substrate 2 and a probe conductor 6 formed on the surface thereof and extending to the end of the substrate. In this configuration, the ends of the plurality of wired probe conductors extending in parallel to the end of the substrate constitute a contact portion for making electrical contact with the electrode of the specimen. The plurality of wires are disposed almost perpendicular to the substrate end. When the substrate end is cut at a predetermined width with the wiring, the same probe conductor end as before the cut can be formed.

The substrate 2 is made of inorganic materials such as ceramics, glass ceramics, glass, silicon, a metal plate with an insulating film, a polymer film such as polyimide, or an organic material. As ceramics, for example, zirconia, alumina, mullite, aluminum nitride, silicon nitride, zirconia-added alumina, MACOR (SiO ₂ .MgO.Al ₂ O ₃ .K ₂ O) and the like are preferable. As for the thickness of the board | substrate 2, 10 micrometers or more and 300 micrometers or less are preferable. As a metal plate with an insulating film, the thing which covered the surface of metal plates, such as stainless steel, hard copper, a beryllium copper, brass, with a polymer insulating film is used.

As a material of the probe conductor 6, nickel, a nickel-iron alloy, a nickel-cobalt alloy, etc. are preferable. The thickness of the probe conductor 6 is preferably 0.5 µm to 300 µm. The probe conductor 6 has a portion arranged according to the pitch of the electrode 90 of the specimen 80.

As shown in Fig. 2 (b), during inspection, the probe sheet 1 is turned upside down, the tip end portion 8 is inclined to be disposed above the specimen 80, and the probe conductor 6 The tip 8 is brought into contact with the electrode 90 of the specimen 80. The tip 8 of the probe conductor 6 extends to the tip surface 102 of the substrate 2 and does not protrude from the tip surface 102. In addition, 100 reference numerals show the end face of the member which the number following 1 shows. For example, reference numeral 102 denotes an end face of the substrate 2.

The probe conductor 6 is formed on the surface of the substrate 2 by a thin film manufacturing process such as plating. For example, a plating base layer is formed over the entire surface of the substrate 2. Only the plating base layer of the part corresponding to the probe conductor 6 to be formed is exposed, the other part is covered with a resist, and the surface of the exposed plating base layer is subjected to metal plating. Finally, the resist and the plating base layer of portions other than the plated conductive film are removed. In addition, by using a known patterning method, such as patterning by photoetching and printing of an electrically conductive paste on a board | substrate, metal plating may be performed after forming a plating base layer in advance in the pattern of a probe conductor.

The probe conductor 6 is connected to the wiring 11 of the flexible printed wiring board 10 at the proximal end. The wiring 11 of the flexible printed wiring board 10 is connected to the printed board of the inspection apparatus main body. Moreover, although the case where the probe conductor 6 was arrange | positioned in parallel over the full length was shown, you may enlarge the space | interval on the printed wiring board 10 side.

As shown in FIGS. 2A and 2B, the probe sheet 1 is fixed to the fixing jig 12 so as to protrude from the end face 112 of the fixing jig 12 by a predetermined length. The probe conductor 6 of the probe sheet 1 elastically deforms with the substrate 2 when an overdrive is applied. By limiting the portion that elastically deforms with the fixing jig, the contact pressure between the probe conductor 6 and the electrode 90 of the specimen 80 can be increased. Therefore, the probe conductor 6 and the electrode 90 can be reliably electrically connected at the time of inspection. In the following, the probe sheet 1 and the fixing jig 12 are collectively referred to as the probe set 201, and the probe conductor 6 of the probe sheet 1 protruding from the end face 112 of the fixing jig 12. And the substrate 2 may be referred to as the protrusion 204. The fixing jig 12 is fixed to the probe sheet at the time of inspection, but is removed from the probe sheet as necessary.

3A, 3B, 3C, and 3D are schematic side views showing a state in which the probe sheet 1 to be reproduced does not function normally.

3 (a) shows a state in which the tip 8 of the probe conductor 6 is contaminated. When the dust 200 which cannot remove particles or the like is attached to the tip portion 8, the tip portion 8 and the electrode 90 of the specimen 80 cannot be reliably connected.

3B shows a state where the tip 8 of the probe conductor 6 is worn. Since the probe conductor 6 is made of a softer material than the substrate 2, the probe conductor 6 is abraded by the friction with the electrode 90 of the specimen 80. When the tip portion 8 is worn, the tip portion 8 and the electrode 90 of the specimen 80 cannot be reliably connected.

FIG. 3C shows a state where the tip 8 of the probe conductor 6 is broken.

3 (d) shows a state in which the substrate 2 is broken. When the substrate 2 is broken, the probe conductor 6 cannot elastically deform together with the substrate 2, so that the tip 8 of the probe conductor 6 and the electrode 90 of the specimen 80 are removed. It cannot be reliably conducted.

4 (a), (b), (c) and (d) are schematic side views illustrating regeneration of a defective probe sheet.

Fig. 4A shows the probe set 201 which is no longer functioning normally. The tip portion 8a of the probe conductor 6 of the probe sheet 1 has a problem such as abrasion or the like and is in a defective state.

As shown in Fig. 4B, the problematic probe sheet 1 is removed from the fixing jig 12. As shown in Figs. As shown in Fig. 4C, the problematic tip 8a is removed by cutting or scraping together with the substrate 2. The remaining end of the probe conductor 6 is in a normal state.

5 (a) and 5 (b) show examples of specific methods of ablation or scraping. For example, as shown in Fig. 5A, the blade 202 is contacted from the substrate 2 side to cut off the troublesome tip 8a together with the substrate 2. Thereby, the tip part 8b after removal of the troublesome tip part 8a can be brought into contact with the electrode 90 of the specimen 80. Since the probe conductors 6 are formed with a uniform thickness on one surface of the substrate 2, even when a force is applied to the probe conductors 6 when removing the tip 8a, the probe conductors 6 Is difficult to deform. As shown in FIG. 5B, the protruding portion 204 may be cut out by contacting the blade 202 from the probe conductor 6 side. In this way, since the blade 202 first cuts the probe conductor 6 and then cuts the substrate 2, no force is applied to the probe conductor 6, so that the probe conductor 6 Deformation and peeling from the substrate 2 hardly occur.

As shown in FIG. 4D, the probe sheet 1 is fixed to the fixing jig 12. At this time, it is preferable to fix the probe sheet 1 to the fixing jig 12 so that the protrusion 204 has the same predetermined length as before regeneration. When the length of the protrusion 204 is the same as before and after regeneration, the probe conductor 6 of the probe sheet 1 undergoes elastic deformation of the same characteristics as before regeneration. Therefore, there is no need to adjust the overdrive after playback.

According to the regeneration of the probe sheet described above, the troublesome tip 8a can be removed together with the substrate 2. In addition, since the probe conductor 6 is cut off or scraped together with the substrate 2 when the troublesome tip 8a is removed, the linear probe conductor 6 is rarely broken or deformed. . The contact between the tip 8b and the electrode 90 of the sample 80 is restored to its normal state by bringing the tip 8b after the removal of the problem tip 8a into contact with the electrode 90 of the sample 80. do. That is, the probe sheet 1 can be reproduced.

6A, 6B, and 6C are cross-sectional views showing modifications of reproducing the probe sheet.

Fig. 6A shows the same state as in Fig. 5A, and shows a state in which a defect occurs in the tip portion 8a of the probe conductor 6 of the probe sheet 1.

FIG. 6B shows a process of forming the new tip 8B by removing the troublesome tip 8a while the probe sheet 1 is attached to the fixing jig 12. The tip portion can be removed as shown in Fig. 5A, for example. If the holding jig is used, the method of Fig. 5B is also possible. It is also possible to grind instead of cutting.

Fig. 6C shows the reproduced state. On the other hand, by removing the troublesome tip 8a in the state where the probe sheet 1 is attached to the fixing jig 12, the length of the protruding portion 204 after regeneration becomes shorter than before regeneration. Then, since the rigidity of the protrusion 204 after regeneration becomes higher than before regeneration, there is a fear that the probe conductor 6 contacts the electrode 90 of the specimen 80 with excessive contact pressure. However, if the length of the portion to be removed together with the troublesome tip 8a is short relative to the length of the protruding portion 204 before reproduction, adjustment of the overdrive, position adjustment, and the like are unnecessary.

7 (a) and 7 (b) are schematic cross-sectional views showing a modification of the fixing method of the probe sheet 1. Fig. 7A shows a state before applying an overdrive, and Fig. 7B shows a state after applying an overdrive.

As shown in Fig. 7A, an elastic body 14 such as an elastomer and a spring is disposed on the attachment surface of the fixing jig 12. The probe sheet 1 is fixed to the fixing jig 12 through the elastic body 14.

As shown in Fig. 7B, when the overdrive is applied, the protrusion 204 elastically deforms together with the elastic body 14.

8A, 8B, and 8C are cross-sectional views showing examples of reproducing a probe sheet when the fixing methods of FIGS. 7A and 7B are used.

Fig. 8A shows a state similar to that of Fig. 7A. The probe sheet 1 is fixed to the fixing jig 12 through the elastic body 14.

As shown in Fig. 8B, in a state where the probe sheet 1 is attached to the fixing jig 12, the tip portion 8a having a problem is removed to form a new tip portion 8b.

Fig. 8C shows the probe sheet after reproduction. If the troublesome tip 8a is removed with the probe sheet 1 attached to the fixing jig 12, the rigidity of the protrusion 204 after regeneration becomes higher than before regeneration. By the way, the protrusion 204 elastically deforms with the elastic body 14 by overdrive as mentioned above. Therefore, even if the troublesome tip 8a is removed in the state where the probe sheet 1 is attached to the fixing jig 12, the probe conductor 6 is excessively large with the electrode 90 of the specimen 80. The contact with one contact pressure does not raise the overall rigidity. Therefore, even if the length of the portion removed together with the troublesome tip 8a becomes long, for example, even if the probe sheet 1 is regenerated a plurality of times, the probe sheet 1 is placed on the fixing jig 12 as described above. The probe sheet 1 can be regenerated in the attached state.

In the case where the probe sheet is formed on a relatively rigid substrate and the configuration is applied to the probe by using the elasticity of the substrate, the substrate is elastically deformed as a whole, but there is little local elastic deformation. If there are irregularities on the surface of the specimen, the probe is hard to contact the electrode of the recess. Even if there are irregularities on the surface of the specimen, a probe sheet in which the probe is in good contact may be required.

9A and 9B illustrate a probe sheet in which the probe conductor 6 is fixed to the fixing jig 12 through an elastic body and used without protruding from the end face 112 of the fixing jig 12 ( 1) is shown.

As shown in Fig. 9A, the probe sheet 1 is provided with a distal end surface 106 of the probe conductor 6 and an end surface 112 of the fixing jig 12 to the fixing jig 12. It is fixed. An elastic body 14 such as an elastomer and a spring is disposed on the attachment surface of the probe sheet 1 of the fixing jig 12. The substrate 2 may be formed of a material having appropriate flexibility, for example, an organic resin.

As shown in Fig. 9B, the probe conductor 6 is elastically deformed together with the elastic body 14 when an overdrive is applied. Therefore, each tip 8 can be followed by the wrinkles of the arrangement of the electrodes 90 of the specimen 80 and the unevenness of the surface of the electrode 90.

10 (a), (b), (c) and (d) are sectional views showing regeneration of a defective probe sheet.

FIG. 10A shows a state where a defect occurs in the tip portion 8a of the probe conductor 6.

As shown in FIG. 10 (b), the probe sheet 1 is removed from the fixing jig 12.

As shown in Fig. 10 (c), the troublesome tip 8a is removed together with the substrate 2 to form a new tip 8b.

As shown in Fig. 10 (d), the probe sheet 1 is fixed to the jig 12 by having the tip end surface 106 of the probe conductor 6 and the end face 112 of the fixing jig 12 mounted thereon. do.

According to the regeneration described above, the position relative to the fixing jig 12 of the tip portion 8 does not change before and after regeneration. Therefore, there is no need to adjust the overdrive after playback.

The configuration of the probe sheet can be modified in various ways. The modification of the structure of a probe sheet is demonstrated below.

11A and 11B are front and side views of the probe sheet 42.

As shown in Fig. 11A, the probe conductor 6 formed on the substrate 2 in the probe sheet 42 is embedded in the insulating film 16, and only its surface is separated from the insulating film 16. As shown in Figs. Exposed

As shown in Fig. 11B, an insulating film 16 is formed outside the end of the probe conductor 6, and the same surface as the probe conductor 6 is formed.

The insulating film 16 is made of resin or the like. After the probe conductor 6 is formed on the substrate 2, the insulating film 16 is formed, and the upper portion is removed to expose the surface of the probe conductor 6. Since the side surface of the probe conductor 6 is fixed by the insulating film 16, the probe conductor 6 is deformed or peeled off from the substrate 2 in the process of removing the tip 8 of the probe conductor 6. Can be suppressed.

12A and 12B are front and side views of the probe sheet 40.

In the probe sheet 40 shown in Figs. 12A and 12B, an insulating film 16 is interposed between the substrate 2 and the probe conductor 6 as well. As indicated by the broken line, first, a lower portion of the insulating film 16 may be formed on the substrate 2, a probe conductor 6 may be formed thereon, and an upper portion of the insulating film 16 may be formed. The material may be changed to the upper part and the lower part. When the adhesiveness between the board | substrate 2 and the probe conductor 6 is weak, adhesiveness can also be improved by the insulating layer 16 below. The insulating film 16 is made of resin or the like. Since the substrate 2 and the probe conductor 6 are fixed by the insulating film 16, in the process of removing the tip 8 of the probe conductor 6, the probe conductor 6 is deformed or the substrate ( Peeling from 2) can be suppressed.

13A and 13B are front and side views of the probe sheet 44, respectively.

In the probe sheet 44 shown in FIGS. 13A and 13B, the probe conductor 6 is formed on the rear surface of the substrate 2 through the plurality of conductive relay portions 18 passing through the substrate 2. Is drawn out, and is electrically connected to the flexible printed wiring board 10 on the back surface of the substrate 2. The printed circuit board does not exist on the side of the probe sheet that faces the specimen, and the degree of freedom of placement can be increased.

14A, 14B, and 14C are plan, front and side views of the probe sheet 46, respectively.

As shown in Figs. 14A and 14C, on the wiring 6b of the probe sheet 46, a plurality of conductive protrusions 20 arranged in the longitudinal direction of the wiring 6b are formed. . The conductive protrusions 20 form contact portions with the specimen. The wiring 6b and the conductive protrusion 20 form a probe conductor.

In Fig. 14B, the case where the projections 20 have the same thickness as that of the wiring 11 of the printed board 10 is shown. However, both thicknesses can be arbitrarily selected according to the purpose.

15A and 15B are side and front views showing the usage form of the probe sheet 46 shown in FIGS. 14A, 14B and 14C, and the generation form of the defect.

As shown in Figs. 9 (a) and 9 (b), the probe sheet 46 is provided with an end portion to the fixing jig 12 through the elastic body 14, and is coupled. Since the conductive protrusion 20 protrudes on the wiring 6b, the conductive protrusion 20 is selectively pressed against the electrode 90 of the specimen 80 even when the probe sheet 46 is not inclined or the rest thereof is inclined. It becomes possible.

If the conductive protrusion 20 is damaged, the damaged protrusion 20a may not be able to contact the electrode 90 of the specimen 80. In the state shown in Fig. 15B, the second conductive protrusion 20 from the right side is missing and cannot be contacted.

Figures 16 (a), (b), (c) and (d) are front and side views showing the reproduction procedure of the probe sheet.

Fig. 16A shows a state where a defect occurs in the conductive protrusions 20 shown in Figs. 15A and 15B. The defect arises in the electroconductive protrusion part 20a. The conductive protrusion 20b is normal.

As shown in Figs. 16B and 16C, the probe sheet is removed from the fixing jig 12, and a single row of conductive protrusions including the damaged conductive protrusions 20a are connected to the wiring 6b and the substrate 2. ) To remove it. The next conductive protrusions 20 in a row of conductive protrusions including the damaged conductive protrusions 20a are arranged at the tip.

As shown in Fig. 16D, the fixing jig 12 is again attached to the regenerated probe sheet.

Since the plurality of conductive protrusions 20 are formed in the longitudinal direction of the wiring 6b, even if one row of conductive protrusions in which defects are removed is removed, the conductive protrusions 20 remaining after removal are removed from the electrodes of the specimen 80 ( 90).

Various deformation | transformation is possible also in the probe sheet which has an electroconductive protrusion part.

17A, 17B, and 17C are a plan view, a front view, and a side view of the modified probe sheet 48.

As shown in Figs. 17B and 17C, in the probe sheet 48, an insulating film 16 filling the wiring 6b and a part of the wiring 6b side of the conductive protrusion 20 is formed. It is. The modification shown in Figs. 11A and 11B corresponds. The wiring 6b and the flexible printed wiring board 10 are electrically connected by the conductive relay part 18 which penetrates the insulating film 16 similar to the electroconductive protrusion part 20. As shown in FIG. Since the board | substrate 2 and the probe conductor 6 are fixed by the insulating film 16, in the process of removing the front-end | tip of the wiring 6b which mounted the electroconductive protrusion part 20, the wiring 6b is deformed or the board | substrate is removed. Peeling from (2) can be suppressed.

18A, 18B, and 18C are a plan view, a front view, and a side view of the modified probe sheet 50.

As shown in Fig. 18B, in the probe sheet 50, the wiring 6b is embedded in the insulating film 16, and the conductive protrusions 20 penetrating through the insulating film 16 each wire 6b. It is formed in plurality). This point is the same as the probe sheet 48 shown in Figs. 17A, 17B, and 17C. In the probe sheet 50, the conductive relay portion 18 penetrating the substrate 2 is further formed, and the wiring 6b is drawn out to the rear surface of the substrate by the conductive relay portion 18. The wiring 11 of the flexible printed wiring board 10 is electrically connected to the conductive relay portion 18 on the back surface of the substrate 2. It is similar to the probe sheet 44 shown in Figs. 13A and 13B.

Although a case where a defect occurs in the probe of the probe sheet has been described above, the probe sheet on which the substrate 2 is damaged can be reproduced in the same manner.

19A, 19B, 19C and 19D are side views showing regeneration of a probe sheet having a defect in a substrate.

Fig. 19A shows a probe set 201 that has not functioned normally. The substrate 2 of the probe sheet 1 has a problem such as a residual amount and the probe does not function normally.

As shown in Fig. 19B, the problematic probe sheet 1 is removed from the fixing jig 12. As shown in Figs.

As shown in Fig. 19C, the tip end of the problematic substrate 2 is removed by cutting or scraping like the probe conductor 6. What is necessary is just to cut or shave to the position which can remove the damaged part of the board | substrate 2. The method of ablation depends on the method shown to FIG. 5 (a), (b), for example.

As shown in FIG. 19D, the regenerated probe sheet 1 is fixed to the fixing jig 12. As shown in FIG.

As described above, the probe sheet can be regenerated by cutting the probe conductor of the probe sheet together with the substrate. When the substrate is formed of a hard material such as ceramic, an excessive load may be applied to the wiring at the time of cutting the substrate.

20A, 20B, and 20C are side views illustrating the ablation that can reduce the load on the probe conductor.

As shown in Fig. 20A, the probe conductor 6 is completely cut by contacting the blade 202 from the probe conductor 6 side. At this time, cutting | disconnection is stopped in the state which does not cut the board | substrate 2 as possible. The time for which the blade 202 is operated is short, and the load supplied to the probe conductor 6 is low.

As shown in Fig. 20B, the blade 202 is moved to the tip end side of the probe sheet 1 to perform the cutting operation again. A gap 22 is formed between the remaining end of the probe conductor 6 and the blade 202, and the probe conductor 6 does not contact the blade 202. The probe conductor 6 is not loaded. By excessive load, it is possible to reduce the deformation of the probe conductor 6 or peeling from the substrate 2.

20C shows the state after cutting. Although the upper side of the board | substrate 2 slightly protrudes, if a protrusion amount is made small, a problem does not arise practically.

21A, 21B, and 21C are side views illustrating another cutting method.

FIG. 21A shows a process of cutting the probe conductor 6 on the substrate 2 with the blade 202a as shown in FIG. 20A.

As shown in Fig. 21B, the substrate 2 is cut by contacting the blade 202b from the side opposite to the probe conductor 6. The cutting grooves 24 formed in the cutting process of Fig. 21A and the position are allowed to polymerize. When the two cutting grooves coincide, the cutting ends. If the blade 202b is wider than the blade 202a, it is also easy to make the upper part of a board | substrate pull in as shown. Even when the same blade is used, the same shape can be realized. The shape of the cut can be changed in various ways. For example, the process of cutting the probe conductor 6 or the process of cutting the substrate 2 may be divided into a plurality of steps, respectively.

When cutting the probe conductor 6, avoid cutting the substrate 2 as much as possible, and when cutting the substrate 2, do not let the blade contact the probe conductor 6 so that the tip of the probe sheet 1 is cut. Remove it. For this reason, the load on the probe conductor 6 in the process of cutting the rigid board | substrate 2 can be reduced. Therefore, it is possible to reduce the deformation or breakage of the probe conductor 6 due to the load generated in the process of cutting the rigid substrate 2. The same advantages can also be obtained with respect to the cutting of the wiring in which the conductive protrusions are formed.

22A and 22B are side views showing another example of reproducing cutting of the probe sheet.

As shown in FIG. 22A, a protective layer 26 covering the probe conductor 6 is formed on the substrate 2. The protective layer 26 is formed by applying organic materials such as resin and wax, or by electroless plating or electroplating with metals such as copper, iron, and lead, or by melting or casting an organic material or metal. Can be formed.

Next, the blade 202 is contacted with the protective layer 26 to start cutting the probe sheet 1. The protective layer 26, the probe conductor 6, and the substrate 2 are cut off, and the tip 8a of the problematic probe conductor 6 is cut off together with the substrate 2 and the protective layer 26. .

As shown in Fig. 22B, the probe sheet 1 may be cut by contacting the blade 202 from the substrate 2 side. The protective layer 26 may be formed so as to cover only the portion to be cut by the blade 202.

After cutting, the protective layer 26 on the probe sheet 1 is removed. By covering the probe conductor 6 with the protective layer 26 before the start of cutting of the probe sheet 1, the probe conductor 6 is deformed or deformed by a force applied to the probe conductor 6 by cutting. Peeling from 2) can be reduced.

23A and 23B are side views of a probe sheet showing a cutting method with enhanced protection.

As shown in Fig. 23A, a supporting plate 28 covering the probe conductor 6 is fixedly attached to the substrate 2 and the probe conductor 6. Specifically, for example, the substrate 2 and the substrate 2 are formed by filling an organic material such as an adhesive and a wax or a metal such as a low melting point alloy to form the fixed adhesive layer 38 between the support plate 28 and the substrate 2. The support plate 28 is fixedly attached to the probe conductor 6.

The probe sheet 1 is cut from the probe conductor 6 side, and the support plate 28 and the substrate 2 are cut like the probe conductor 6. In this manner, the tip portion 8a having the problem is cut off together with the substrate 2 and the protective layer 26.

As shown in Fig. 23B, the probe sheet 1 may be cut from the substrate 2 side.

After the cutting, the solvent is applied or heated to melt the organic material or metal filled between the support plate 28 and the substrate 2 to remove the support plate 28 fixedly attached to the probe sheet 1.

By covering the probe conductor 6 with the support plate 28 before the cutting of the probe sheet 1 starts, the probe conductor 6 is deformed or the substrate 2 is deformed by the force applied to the probe conductor 6 by cutting. Peeling from) can be reduced.

24A and 24B are side views showing a method of regenerating a probe sheet by grinding.

As shown in Fig. 24A, as shown in Figs. 23A and 23B, the support plate 28 covering the probe conductor 6 is made of an organic material such as an adhesive or wax, or a low melting point alloy. It is fixedly attached to the substrate 2 and the probe conductor 6 via a fixed adhesion layer 38 formed of a metal such as the like.

As shown in Fig. 24B, when a force is applied from one direction, the support plate 28 may be fixedly attached to the surface on the side opposite to the probe conductor 6 of the substrate 2.

The tip surface 106 of the probe conductor 6 is scraped together with the tip surface 102 of the substrate 2. For example, the probe conductor 6, the fixed adhesion layer, and the substrate, such as a polishing sheet and a ramp plate, are applied so that frictional force is applied from the probe conductor 6 toward the substrate 2 (the direction of arrow X). Grind (2). The support plate 28 can suppress deformation of the substrate, thereby reducing the separation of the probe conductor 6 from the substrate 2 and the like.

After grinding, the support plate 28 fixed to the probe sheet 1 is removed.

In the step of cutting the tip end surface 106 of the probe conductor 6 together with the support plate 28 and the tip end surfaces 128 and 102 of the substrate 2, the probe conductor 6 is cut onto the substrate 2. Friction is applied only in the pressing direction. Peeling of the probe conductor 6 from the substrate 2 can be reduced.

As for the probe sheet which can be reproduced by cutting off the tip, it is more preferable to take measures against the cutting process.

25 is a plan view of an example of a probe sheet in which measures for regeneration are taken. The probe sheet 52 is provided with a removal mark 30 (general term such as 30a, 30b, etc.) and an attachment hole 32 (general term such as 32a, 32b, etc.) The removal mark 30 and the attachment hole 32 are the same. It is formed at intervals.

26A and 26B are a plan view and a side view showing a state where the fixing jig 12 is attached to the probe sheet 52.

The attachment hole 32 fits the pin 34 for fixing the probe sheet 1 to the fixing jig 12. In the illustrated state, the pin 34 is inserted into the mounting hole 32a below. The distance from the attachment hole 32a to the next attachment hole 32b is equal to the distance from the lower end of the board | substrate 2 to the 1st removal mark 30b.

27A and 27B are a plan view and a side view showing a state in which the probe sheet 52 is regenerated. According to the removal mark 30b-30b, the board | substrate 2 is excised like the probe conductor 6, and the fixing jig 12 is attached using the attachment hole 32b. The relationship between the probe sheet and the fixing jig is maintained as before the ablation. The same is true for other removal marks and attachment holes.

By using the removal mark 30, a troublesome probe conductor 6 is arranged so that the leading end surfaces 106 of the plurality of probe conductors 6 are aligned in a direction perpendicular to the longitudinal direction of the probe conductor 6. Can be removed.

Further, since a plurality of attachment holes 32 are provided in accordance with the distal end surface of the probe sheet 52 after regeneration determined by the removal mark 30, the probe after regeneration so that the characteristics of the probe sheet 52 become the same as before regeneration. The sheet 52 can be attached to the fixing jig 12. For example, when the probe sheet 52 protrudes from the end surface 112 of the fixing jig 12 and is used, the length of the protrusion 204 can be exactly the same before and after regeneration. In addition, when the tip end surface 106 of the probe sheet 52 and the end face 112 of the fixing jig 12 are used and used, the tip end surface 106 and the fixing jig 12 of the probe sheet 52 are still used after regeneration. End face 112).

Cutting of the probe sheet is not only a determined position, but it may be desirable to be able to perform it at any position.

Fig. 28 is a plan view showing the probe sheet 54 reproducible at any position. The probe sheet 54 is provided with a length hole 36 extending along the length direction of the probe conductor 6.

As shown in FIG. 29, the pin 34 is fitted into the length hole 36 to fix the probe sheet 54 to the fixing jig 12. As shown in FIG.

30 is a schematic diagram for explaining the reproduction of the probe sheet 54. As shown in FIG.

By removing the probe sheet 54 to an arbitrary position, the troublesome tip 154 of the probe sheet 54 is removed.

The pin 34 is inserted into the length hole 36 by shifting in the direction of the distal end surface 106 of the probe sheet 54 with respect to the fixing jig 12 by a width equal to the width removed in the process of removing the distal end portion 154. The probe sheet 54 after regeneration is fixed to the fixing jig 12 by fitting.

Since the long hole 36 is provided in the longitudinal direction of the probe conductor 6, the probe sheet 54 after regeneration is made to have the same characteristics as that of the probe sheet 54 which has been removed and regenerated to an arbitrary position. It can be attached to the fixed jig 12.

Moreover, you may form the removal mark of a fixed pitch, and the mark with a pin with a length hole.

Although the present invention has been described in accordance with the above embodiments, the present invention is not limited thereto. For example, it will be apparent to those skilled in the art that various modifications, improvements, substitutions, combinations, and the like are possible.

Hereinafter, the features of the present invention are added.

Before the removing step, a protective layer covering at least a part of the probe conductor may be formed on the substrate. In this case, in the removal step, the tip of the probe conductor can be removed together with the protective layer. By covering the probe conductor in the protective layer before the removal step, it is possible to reduce the deformation of the probe conductor or peeling from the substrate by the force applied to the probe conductor in the removal step.

In addition, the support plate may be fixedly attached to the substrate and the probe conductor before the removal step. In this case, the distal end portion of the probe conductor can be removed together with the support plate. By fixedly attaching the support plate before the removal step, it is possible to reduce the deformation of the probe conductor or peeling from the substrate by the force applied to the probe conductor in the removal step.

In the removal step, the probe conductor may be cut together with the substrate from the conductive film side toward the substrate side. By cutting the probe conductor together with the substrate from the conductive film side toward the substrate side, the peeling of the probe conductor from the substrate can be reduced.

The removal step includes a first step of cutting the probe conductor from the probe conductor side without cutting the substrate, and a second step of cutting the substrate at a position where the base end side of the probe conductor cut in the first step is not cut. You may include it.

Since the blade does not contact the proximal end of the probe conductor cut in the first step when cutting the substrate in the second step, the load generated during the cutting of the rigid substrate and transmitted to the probe conductor can be reduced. . It is possible to reduce the deformation or damage of the probe conductor due to the load generated during the cutting of the rigid substrate.

In the removal step, the tip end surface of the probe conductor may be cut together with the tip end surface of the substrate so that the frictional force in the direction from the conductive film toward the substrate is applied to the probe conductor.

In the process of cutting the front end surface of the probe conductor together with the front end surface of the substrate, frictional force in the direction in which the probe conductor is pressed against the substrate side is applied, so that the probe conductor can be removed from the substrate.

In the removal step, the tip of the probe conductor may be removed in a state where a part fixed to the probe sheet is fixed to the probe sheet at the time of inspection.

For example, when the position of the probe sheet is unnecessary after reproducing the probe conductor, the tip end portion of the probe conductor may be cut off or shaved while the part for positioning the probe sheet is fixed to the probe sheet.

The probe sheet has a substrate, a linear conductor positioned on the substrate and in contact with an electrode of the specimen, the conductive film formed on the substrate, and the tip portion of the probe conductor is excised or cut to a predetermined position. You may be provided with the mark formed on the said board | substrate in order to specify the said predetermined position in a sticking process. By forming a mark at a predetermined position on the substrate, it is possible to easily determine by using the mark how far the tip end of the probe conductor should be removed when reproducing the probe sheet by cutting or scraping the tip end of the probe conductor. It becomes possible.

The substrate may have a positioning section at each position spaced apart by the same distance from the predetermined position specified by the tip end of the probe conductor and the mark in the longitudinal direction of the probe conductor. In the case where the positioning portions are located at respective positions spaced apart from each other by the same distance from the predetermined position specified by the tip of the probe conductor and the longitudinal base end of the probe conductor, the leading end of the probe conductor is removed to the position specified by the mark. The distance from the distal end of the probe conductor before regeneration to the positioning portion and the distance from the distal end of the probe conductor after regeneration to the positioning portion are equal. Therefore, by forming positioning portions at respective positions spaced apart from each other by the same distance from the predetermined position specified by the front end portion of the probe conductor and the mark in the longitudinal direction end portion of the probe conductor, the use form of the probe sheet can be made the same before and after reproduction. Can be.

The substrate of the probe sheet may have a length hole extending in the longitudinal direction of the probe conductor. When using the probe sheet, a positioning member such as a pin can be inserted into a length hole extending in the longitudinal direction of the probe conductor to position and fix the probe sheet to the inspection apparatus main body.

By making the hole used for positioning into the length hole extended in the longitudinal direction of a probe conductor, the position of the probe sheet after regeneration can be arbitrarily adjusted according to the removal amount of a probe conductor.

By providing the above configuration, a method is provided for enabling regeneration of a defective probe sheet.

Claims (23)

A method of reproducing a probe sheet comprising a substrate and a probe conductor having a contact portion extending to an end of the substrate and disposed on the substrate and in contact with an electrode of a specimen, And a removing step of removing the tip portion of the probe conductor together with the substrate. The method of claim 1, further comprising: a defect detecting step of detecting a defect of the probe conductor before the removing step; And a test step of testing the test piece by contacting the contact part with an electrode of the test piece after the removing step. The method of claim 1, further comprising: forming a protective layer on the substrate, the protective layer covering at least a portion of the probe conductors before the removing step; After the removing step further comprises the step of removing the protective layer, In the removing step, the reproducing method of the probe sheet which removes the tip portion of the probe conductor together with the protective layer. The method according to claim 1, further comprising the step of fixedly attaching the support plate to the substrate and the probe conductor before the removal step; After the removing step further comprises the step of separating the support plate from the substrate, The method for reproducing the probe sheet in the removing step, wherein the tip of the probe conductor is removed together with the support plate. The reproducing method of a probe sheet according to claim 1, wherein the probe conductor comprises a plurality of wires formed in parallel on the substrate. The method of reproducing a probe sheet according to claim 5, wherein the probe conductor further has a plurality of protrusions formed on each of the plurality of wirings. The probe sheet regeneration method according to any one of claims 1 to 6, wherein in the removal step, the probe conductor is cut together with the substrate from the conductive film side toward the substrate side. The method of claim 1, wherein the removing step is A first step of cutting the probe conductor at a first position from the probe conductor side; And a second step of cutting the substrate at a second position not in contact with the base portion of the cut probe conductor. 9. The method of reproducing a probe sheet according to claim 8, wherein the second position is a position shifted from the first position on the probe conductor side to the distal end side. 9. The method of reproducing a probe sheet according to claim 8, wherein the second position is a position on the substrate side. The distal end surface of the probe conductor according to any one of claims 1 to 6, wherein in the removal step, the tip end surface of the probe conductor is applied to the probe conductor so that a frictional force in a direction from the conductive film toward the substrate is applied to the probe conductor. A method of reproducing a probe sheet that is scraped off along with the tip surface. The probe sheet regeneration method according to any one of claims 1 to 6, wherein the inspection step is performed by fixing the probe sheet to a jig. The reproducing method of the probe sheet according to claim 12, wherein in the inspection step, the probe sheet is fixed to the jig such that the end side of the substrate protrudes from the jig. The method according to claim 12, wherein in the inspection step, the probe sheet is fixed to the jig through an elastic body. The method according to claim 14, wherein in the inspection step, the probe sheet is fixed to the jig by joining the substrate end with the jig end. The method for reproducing a probe sheet according to claim 12, wherein the removing step is performed while the jig is fixed to the probe sheet. The method for reproducing a probe sheet according to claim 12, wherein the removing step is performed by removing the jig from the probe sheet. Substrate, A probe sheet, comprising: a probe conductor extending to an end of a substrate and disposed on the substrate, the probe conductor having a contact portion in contact with an electrode of a specimen for inspection. 19. The probe sheet of claim 18, wherein the probe conductor comprises a plurality of wires formed in parallel on the substrate. The probe sheet according to claim 19, wherein the probe conductor further has a plurality of protrusions formed on each of the plurality of wirings. The probe sheet according to any one of claims 18 to 20, further comprising a mark formed on the substrate for specifying the predetermined position when the tip portion of the probe conductor is removed to a predetermined position. . The probe sheet according to claim 21, wherein the substrate has a front end portion of the probe conductor and a positioning portion separated from each other by a predetermined distance corresponding to the predetermined position specified by the mark. The probe sheet according to any one of claims 18 to 20, having a length hole extending in the longitudinal direction of the probe conductor.

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