KR100519607B1 - 수직식 핸들러의 트랙구조 - Google Patents
수직식 핸들러의 트랙구조 Download PDFInfo
- Publication number
- KR100519607B1 KR100519607B1 KR10-2003-0052724A KR20030052724A KR100519607B1 KR 100519607 B1 KR100519607 B1 KR 100519607B1 KR 20030052724 A KR20030052724 A KR 20030052724A KR 100519607 B1 KR100519607 B1 KR 100519607B1
- Authority
- KR
- South Korea
- Prior art keywords
- track
- seating surface
- lower rail
- cover
- handler
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000000034 method Methods 0.000 claims description 7
- 238000012360 testing method Methods 0.000 abstract description 15
- 238000004519 manufacturing process Methods 0.000 description 4
- 230000004308 accommodation Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000035939 shock Effects 0.000 description 2
- 101000616556 Homo sapiens SH3 domain-containing protein 19 Proteins 0.000 description 1
- 102100021782 SH3 domain-containing protein 19 Human genes 0.000 description 1
- 239000000725 suspension Substances 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2893—Handling, conveying or loading, e.g. belts, boats, vacuum fingers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/67161—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers
- H01L21/67178—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers vertical arrangement
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67706—Mechanical details, e.g. roller, belt
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Power Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
Abstract
Description
Claims (2)
- 하부레일과 커버로 이루어진 수직식 핸들러의 트랙에 있어서, 하부레일에 디바이스 안착면을 형성함과 함께 상기 안착면의 양측으로 리드가 위치하는 상향돌출턱 및 수용공간을 형성하고 상기 하부레일의 일측으로 설치되는 커버에도 디바이스의 일측면이 접속되는 안착면을 형성함과 동시에 상기 안착면의 양측으로 리드가 위치하는 하향돌출턱 및 수용공간을 형성하여 이들을 서로 마주보게 결합하여서 된 것을 특징으로 하는 수직식 핸들러의 트랙구조.
- 제 1 항에 있어서,상기 하부레일의 연결부로부터 커버의 연결부위가 디바이스 길이의 1/2만큼 어긋나게 위치된 것을 특징으로 하는 수직식 핸들러의 트랙구조.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR10-2003-0052724A KR100519607B1 (ko) | 2003-07-30 | 2003-07-30 | 수직식 핸들러의 트랙구조 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR10-2003-0052724A KR100519607B1 (ko) | 2003-07-30 | 2003-07-30 | 수직식 핸들러의 트랙구조 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20050014210A KR20050014210A (ko) | 2005-02-07 |
KR100519607B1 true KR100519607B1 (ko) | 2005-10-12 |
Family
ID=37225376
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR10-2003-0052724A Expired - Fee Related KR100519607B1 (ko) | 2003-07-30 | 2003-07-30 | 수직식 핸들러의 트랙구조 |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR100519607B1 (ko) |
-
2003
- 2003-07-30 KR KR10-2003-0052724A patent/KR100519607B1/ko not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
KR20050014210A (ko) | 2005-02-07 |
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