KR100494103B1 - 광학적 가스 센서 - Google Patents
광학적 가스 센서 Download PDFInfo
- Publication number
- KR100494103B1 KR100494103B1 KR1020030090539A KR20030090539A KR100494103B1 KR 100494103 B1 KR100494103 B1 KR 100494103B1 KR 1020030090539 A KR1020030090539 A KR 1020030090539A KR 20030090539 A KR20030090539 A KR 20030090539A KR 100494103 B1 KR100494103 B1 KR 100494103B1
- Authority
- KR
- South Korea
- Prior art keywords
- gas
- optical
- gas chamber
- chamber
- sensor
- Prior art date
Links
- 230000003287 optical effect Effects 0.000 title claims abstract description 122
- 238000009792 diffusion process Methods 0.000 claims description 14
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 12
- 229910052737 gold Inorganic materials 0.000 claims description 12
- 239000010931 gold Substances 0.000 claims description 12
- 238000007747 plating Methods 0.000 claims description 4
- 230000008021 deposition Effects 0.000 claims description 3
- 239000007789 gas Substances 0.000 abstract description 160
- 238000005259 measurement Methods 0.000 abstract description 5
- 238000000034 method Methods 0.000 description 10
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 3
- 238000010521 absorption reaction Methods 0.000 description 3
- 230000000295 complement effect Effects 0.000 description 3
- 238000011109 contamination Methods 0.000 description 3
- 229910052802 copper Inorganic materials 0.000 description 3
- 239000010949 copper Substances 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 229910052709 silver Inorganic materials 0.000 description 3
- 239000004332 silver Substances 0.000 description 3
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 229910002092 carbon dioxide Inorganic materials 0.000 description 1
- 239000001569 carbon dioxide Substances 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000004868 gas analysis Methods 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 238000001745 non-dispersive infrared spectroscopy Methods 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N21/03—Cuvette constructions
- G01N21/031—Multipass arrangements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N21/03—Cuvette constructions
- G01N21/0303—Optical path conditioning in cuvettes, e.g. windows; adapted optical elements or systems; path modifying or adjustment
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
- G01N21/3504—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing gases, e.g. multi-gas analysis
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020030090539A KR100494103B1 (ko) | 2003-12-12 | 2003-12-12 | 광학적 가스 센서 |
US10/596,390 US7449694B2 (en) | 2003-12-12 | 2004-12-10 | Gas sensor |
PCT/KR2004/003243 WO2005057188A1 (en) | 2003-12-12 | 2004-12-10 | Gas sensor |
CN200480036879A CN100592075C (zh) | 2003-12-12 | 2004-12-10 | 气体传感器 |
JP2006543744A JP4547385B2 (ja) | 2003-12-12 | 2004-12-10 | ガスセンサ |
EP04808374A EP1695066A4 (en) | 2003-12-12 | 2004-12-10 | GAS SENSOR |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020030090539A KR100494103B1 (ko) | 2003-12-12 | 2003-12-12 | 광학적 가스 센서 |
Publications (1)
Publication Number | Publication Date |
---|---|
KR100494103B1 true KR100494103B1 (ko) | 2005-06-10 |
Family
ID=37302931
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020030090539A KR100494103B1 (ko) | 2003-12-12 | 2003-12-12 | 광학적 가스 센서 |
Country Status (2)
Country | Link |
---|---|
KR (1) | KR100494103B1 (zh) |
CN (1) | CN100592075C (zh) |
Cited By (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100576541B1 (ko) * | 2005-06-16 | 2006-05-03 | (주) 인바이런먼트 리딩 테크놀러지 | 비분산 적외선 가스 센서를 위한 광 공동 |
KR100694636B1 (ko) * | 2006-08-24 | 2007-03-14 | (주)유성씨앤씨 | 광학적 가스 센서의 결합구조 |
KR100732709B1 (ko) | 2006-08-24 | 2007-06-28 | (주)유성씨앤씨 | 집광수단이 구비된 광학적 가스 센서 |
KR101026206B1 (ko) * | 2006-08-22 | 2011-03-31 | (주) 인바이런먼트 리딩 테크놀러지 | 비분산 적외선 방식의 가스 센서의 광 도파관 |
WO2017010581A1 (ko) * | 2015-07-13 | 2017-01-19 | 한국교통대학교 산학협력단 | 복수의 독립된 광 경로를 갖는 광 도파관 및 그를 이용한 광학적 가스센서 |
CN109470644A (zh) * | 2018-12-29 | 2019-03-15 | 汉威科技集团股份有限公司 | 紧凑型红外光学气体吸收池及红外气体传感器 |
KR20200007438A (ko) * | 2018-07-13 | 2020-01-22 | 전자부품연구원 | 비분산 적외선 가스센서 및 그의 제조방법 |
KR102265045B1 (ko) * | 2019-12-05 | 2021-06-15 | 한국광기술원 | 광학식 가스센서 |
WO2021159002A1 (en) * | 2020-02-07 | 2021-08-12 | Lumileds Llc | Gas sensing system having quadric reflective surface |
KR102381817B1 (ko) * | 2021-05-03 | 2022-04-01 | 주식회사 이엘티센서 | 복수의 타원 반사체를 포함하는 광 도파관 |
KR102497757B1 (ko) * | 2021-11-09 | 2023-02-08 | 주식회사 이엘티센서 | 복수의 포물 반사체로 구성된 광 도파관 |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101587068B (zh) * | 2009-05-27 | 2012-03-28 | 陈小英 | 一种多传感器气体分析仪 |
CN102338737A (zh) * | 2010-07-21 | 2012-02-01 | 友丽系统制造股份有限公司 | 光电式气体感测装置及其制造方法 |
CN102778441A (zh) * | 2012-07-12 | 2012-11-14 | 电子科技大学 | 具有弯管光腔气室的高精度红外气体传感器 |
CN103091279A (zh) * | 2013-01-11 | 2013-05-08 | 四川汇源科技发展股份有限公司 | 一种具有弯管气室的气体传感器 |
CN103822893B (zh) * | 2014-02-28 | 2016-07-06 | 江苏物联网研究发展中心 | 一种ndir气体传感器 |
DE102014014557B4 (de) * | 2014-09-30 | 2016-09-29 | Paragon Ag | Sensoranordnung zur Erfassung der CO2-Konzentration in einem Innenraum |
TWI595226B (zh) * | 2016-04-29 | 2017-08-11 | 熱映光電股份有限公司 | 氣體量測裝置 |
CN107356546A (zh) * | 2016-05-10 | 2017-11-17 | 热映光电股份有限公司 | 气体测量装置 |
DE102016010088A1 (de) | 2016-08-23 | 2018-03-01 | Dräger Safety AG & Co. KGaA | Messvorrichtung zur Absorptionsmessung von Gasen |
CN108827898B (zh) * | 2018-04-18 | 2021-04-20 | 北京理工大学 | 一种连续变焦的显微红外光学增强系统及方法 |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
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JPS54130187A (en) * | 1978-03-20 | 1979-10-09 | Coulter Electronics | Method and device for collecting radiant ray |
US4189236A (en) * | 1978-03-20 | 1980-02-19 | Coulter Electronics, Inc. | Ellipsoid-conic radiation collector and method |
US5116120A (en) * | 1989-12-15 | 1992-05-26 | Volkswagen Ag | Gas analyzer having a test chamber traversed by radiation |
US5170064A (en) * | 1989-09-29 | 1992-12-08 | Atomic Energy Of Canada Limited | Infrared-based gas detector using a cavity having elliptical reflecting surface |
WO1999041592A1 (en) * | 1998-02-17 | 1999-08-19 | Martin Hans Goeran Evald | A method of producing a detector belonging to a gas sensor, and a detector produced in accordance with the method |
US5973326A (en) * | 1996-08-10 | 1999-10-26 | Eev Limited | Gas monitors |
US6194735B1 (en) * | 1996-08-28 | 2001-02-27 | Martin Hans Goeran Evald | Gas sensor |
-
2003
- 2003-12-12 KR KR1020030090539A patent/KR100494103B1/ko not_active IP Right Cessation
-
2004
- 2004-12-10 CN CN200480036879A patent/CN100592075C/zh active Active
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
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JPS54130187A (en) * | 1978-03-20 | 1979-10-09 | Coulter Electronics | Method and device for collecting radiant ray |
US4189236A (en) * | 1978-03-20 | 1980-02-19 | Coulter Electronics, Inc. | Ellipsoid-conic radiation collector and method |
US5170064A (en) * | 1989-09-29 | 1992-12-08 | Atomic Energy Of Canada Limited | Infrared-based gas detector using a cavity having elliptical reflecting surface |
US5116120A (en) * | 1989-12-15 | 1992-05-26 | Volkswagen Ag | Gas analyzer having a test chamber traversed by radiation |
US5973326A (en) * | 1996-08-10 | 1999-10-26 | Eev Limited | Gas monitors |
US6194735B1 (en) * | 1996-08-28 | 2001-02-27 | Martin Hans Goeran Evald | Gas sensor |
WO1999041592A1 (en) * | 1998-02-17 | 1999-08-19 | Martin Hans Goeran Evald | A method of producing a detector belonging to a gas sensor, and a detector produced in accordance with the method |
Cited By (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008544247A (ja) * | 2005-06-16 | 2008-12-04 | イーエルティー インコーポレイテッド | ガスセンサーのための光空洞 |
KR100576541B1 (ko) * | 2005-06-16 | 2006-05-03 | (주) 인바이런먼트 리딩 테크놀러지 | 비분산 적외선 가스 센서를 위한 광 공동 |
KR101026206B1 (ko) * | 2006-08-22 | 2011-03-31 | (주) 인바이런먼트 리딩 테크놀러지 | 비분산 적외선 방식의 가스 센서의 광 도파관 |
KR100694636B1 (ko) * | 2006-08-24 | 2007-03-14 | (주)유성씨앤씨 | 광학적 가스 센서의 결합구조 |
KR100732709B1 (ko) | 2006-08-24 | 2007-06-28 | (주)유성씨앤씨 | 집광수단이 구비된 광학적 가스 센서 |
WO2017010581A1 (ko) * | 2015-07-13 | 2017-01-19 | 한국교통대학교 산학협력단 | 복수의 독립된 광 경로를 갖는 광 도파관 및 그를 이용한 광학적 가스센서 |
KR102246452B1 (ko) * | 2018-07-13 | 2021-04-30 | 한국전자기술연구원 | 비분산 적외선 가스센서 및 그의 제조방법 |
KR20200007438A (ko) * | 2018-07-13 | 2020-01-22 | 전자부품연구원 | 비분산 적외선 가스센서 및 그의 제조방법 |
CN109470644A (zh) * | 2018-12-29 | 2019-03-15 | 汉威科技集团股份有限公司 | 紧凑型红外光学气体吸收池及红外气体传感器 |
CN109470644B (zh) * | 2018-12-29 | 2024-05-03 | 汉威科技集团股份有限公司 | 紧凑型红外光学气体吸收池及红外气体传感器 |
KR102265045B1 (ko) * | 2019-12-05 | 2021-06-15 | 한국광기술원 | 광학식 가스센서 |
WO2021159002A1 (en) * | 2020-02-07 | 2021-08-12 | Lumileds Llc | Gas sensing system having quadric reflective surface |
US11740179B2 (en) | 2020-02-07 | 2023-08-29 | Lumileds Llc | Gas sensing system having quadric reflective surface |
KR102381817B1 (ko) * | 2021-05-03 | 2022-04-01 | 주식회사 이엘티센서 | 복수의 타원 반사체를 포함하는 광 도파관 |
KR102497757B1 (ko) * | 2021-11-09 | 2023-02-08 | 주식회사 이엘티센서 | 복수의 포물 반사체로 구성된 광 도파관 |
Also Published As
Publication number | Publication date |
---|---|
CN100592075C (zh) | 2010-02-24 |
CN1890554A (zh) | 2007-01-03 |
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