KR100490833B1 - Piezoelectric ceramic composition for accelerometer and preparation method of the same - Google Patents
Piezoelectric ceramic composition for accelerometer and preparation method of the same Download PDFInfo
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- KR100490833B1 KR100490833B1 KR10-2002-0057015A KR20020057015A KR100490833B1 KR 100490833 B1 KR100490833 B1 KR 100490833B1 KR 20020057015 A KR20020057015 A KR 20020057015A KR 100490833 B1 KR100490833 B1 KR 100490833B1
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Abstract
본 발명은 가속도 센서용 압전 세라믹 조성물 및 그 제조 방법에 관한 것으로서, 더욱 상세하게는 하기 화학식 1로 표시되는 세라믹; 및 상기 세라믹 100 중량부에 대하여 0.1 내지 0.5 중량부의 산화크롬(Cr2O3)을 포함하는 가속도 센서용 압전 세라믹 조성물에 관한 것이다.The present invention relates to a piezoelectric ceramic composition for an acceleration sensor and a method of manufacturing the same, more specifically, a ceramic represented by the following Chemical Formula 1; And 0.1 to 0.5 parts by weight of chromium oxide (Cr 2 O 3 ) based on 100 parts by weight of the ceramic.
(화학식 1)(Formula 1)
xPb(Mn0.5Te0.5)O3-yPbZrO3-zPbTiO3 xPb (Mn 0.5 Te 0.5 ) O 3 -yPbZrO 3 -zPbTiO 3
(상기 화학식 1에서, x, y 및 z은 각각 몰비를 나타내며, 0.10 ≤x ≤0.20, 0.30 ≤y ≤0.60 및 0.30 ≤z ≤0.60이다.)(In Formula 1, x, y and z each represent a molar ratio, and 0.10 ≦ x ≦ 0.20, 0.30 ≦ y ≦ 0.60 and 0.30 ≦ z ≦ 0.60.)
본 발명의 가속도 센서용 압전 세라믹 조성물은 압전전압상수 및 큐리온도가 높아 시효현상이 우수할뿐만 아니라 제조 방법이 간단하고 제조 비용도 저렴하다.The piezoelectric ceramic composition for an acceleration sensor of the present invention has a high piezoelectric voltage constant and a Curie temperature, which is not only excellent in aging but also simple in manufacturing method and low in manufacturing cost.
Description
[산업상 이용 분야][Industrial use]
본 발명은 가속도 센서용 압전 세라믹 조성물 및 그 제조 방법에 관한 것으로서, 더욱 상세하게는 압전전압상수 및 큐리온도가 높아 시효현상이 우수할뿐만 아니라 제조 방법이 간단하고 제조 비용이 저렴한 가속도 센서용 압전 세라믹 조성물 및 그 제조 방법에 관한 것이다.The present invention relates to a piezoelectric ceramic composition for an acceleration sensor and a method of manufacturing the same. More particularly, the piezoelectric ceramic for an acceleration sensor has a high piezoelectric voltage constant and a high Curie temperature, which is not only excellent in aging but also simple in manufacturing and low in manufacturing cost. A composition and a method for producing the same.
[종래 기술][Prior art]
가속도 센서는 물체의 가속도 변화로부터 동적 진동변화를 직접 감지할 수 있는 센서로서, 신호 감지용 핵심소자로 압전 세라믹을 이용하는 가속도 센서는 압전체에 가해지는 기계적 진동신호의 크기에 비례하는 전기적 신호를 발생하므로 이 신호로부터 물체의 진동상태를 알 수 있게 하는 센서이다.Acceleration sensor is a sensor that can directly detect the change of dynamic vibration from the acceleration change of an object.Acceleration sensor using piezoelectric ceramic as a key element for signal detection generates an electrical signal proportional to the magnitude of mechanical vibration signal applied to the piezoelectric body. It is a sensor that can know the vibration state of the object from this signal.
종래 사용되고 있는 가속도 센서용 재료로는 석영 등의 단결정 재료나 PZT(Pb(Zr,Ti)O3)를 기초로 한 3성분계 등을 들 수 있다.Conventionally used materials for acceleration sensors include single-crystal materials such as quartz and three-component systems based on PZT (Pb (Zr, Ti) O 3 ).
일반적으로 가속도 센서용 압전 재료는 압전전압상수(g)가 커서 진동신호에 대한 감도가 크고 압전재료의 압전특성이 사라지는 온도인 큐리온도(Tc)가 높아 가속도 센서의 사용 온도 변화에 큰 영향을 받지 않는 것이 필요하다.In general, the piezoelectric material for acceleration sensors has a large piezoelectric voltage constant (g), which is sensitive to vibration signals and has a high Curie temperature (Tc), a temperature at which piezoelectric properties of piezoelectric materials disappear. It is necessary not to.
석영 등의 단결정 재료는 높은 재현성을 얻을 수 있으나 쵸크라스키법 등의 단결정 육성기술에 의해 제조되므로 제조 단가가 높고 압전전압상수가 낮아 감도가 매우 낮다는 문제점이 있다.Single crystal materials such as quartz can obtain high reproducibility, but are manufactured by single crystal growing techniques such as the Chokraski method, resulting in high sensitivity and low piezoelectric voltage constants.
한편, PZT를 기초로한 3성분계의 경우 실용화된 대표적인 압전 세라믹이며, 높은 압전전압상수를 가지므로 감도가 뛰어나지만 상대적으로 큐리온도가 낮아 온도 변화에 민감하며 압전 세라믹의 특징인 시효현상이 나빠 시간이 지남에 따라 감도가 현저히 떨이진다는 단점이 있다.On the other hand, the PZT-based three-component system is a typical piezoelectric ceramic that is practically used, and has a high piezoelectric voltage constant, which is excellent in sensitivity but relatively low in Curie temperature, which is sensitive to temperature changes, and the aging phenomenon which is a characteristic of the piezoelectric ceramic is poor. There is a disadvantage that the sensitivity is significantly reduced over time.
본 발명은 상술한 문제점을 해결하기 위한 것으로서, 본 발명의 목적은 전전압상수 및 큐리온도가 높아 시효현상이 우수할뿐만 아니라 제조 방법이 간단하고 제조 비용이 저렴한 가속도 센서용 압전 세라믹 조성물을 제공하는 것이다.The present invention is to solve the above-described problems, an object of the present invention is to provide a piezoelectric ceramic composition for an acceleration sensor having a high voltage constant and a Curie temperature not only excellent aging phenomenon but also a simple manufacturing method and low manufacturing cost will be.
본 발명의 목적은 또한 상기 가속도 센서용 압전 세라믹 조성물의 제조 방법을 제공하는 것이다.It is also an object of the present invention to provide a method for producing the piezoelectric ceramic composition for the acceleration sensor.
상기 목적을 달성하기 위하여, 본 발명은 하기 화학식 1로 표시되는 세라믹; 및 상기 세라믹 100 중량부에 대하여 0.1 내지 0.5 중량부의 산화크롬(Cr2O3)을 포함하는 가속도 센서용 압전 세라믹 조성물을 제공한다.(화학식 1)xPb(Mn0.5Te0.5)O3-yPbZrO3-zPbTiO3 (상기 화학식 1에서, x, y 및 z은 각각 몰비를 나타내며, 0.10 ≤x ≤0.20, 0.30 ≤y ≤0.60 및 0.30 ≤z ≤0.60이다.)In order to achieve the above object, the present invention is a ceramic represented by the following formula (1); And it provides a piezoelectric ceramic composition for an acceleration sensor comprising 0.1 to 0.5 parts by weight of chromium oxide (Cr 2 O 3 ) with respect to 100 parts by weight of the ceramic. (Formula 1) x Pb (Mn 0.5 Te 0.5 ) O 3 -yPbZrO 3 -zPbTiO 3 (In Formula 1, x, y and z each represent a molar ratio, and 0.10 ≦ x ≦ 0.20, 0.30 ≦ y ≦ 0.60 and 0.30 ≦ z ≦ 0.60.)
본 발명은 또한 (a) 산화납(Ⅱ)(PbO), 산화티타늄(TiO2), 산화지르코늄(ZrO2), 이산화망간(MnO2), 산화텔루르(TeO2) 및 산화크롬(Cr2O3) 분말을 혼합한 후 하소하는 단계; (b) 하소된 분말을 분쇄하는 단계; (c) 분쇄된 분말을 가압 성형하여 시편을 제조하는 단계; (d) 시편을 소결하는 단계; (e) 소결된 시편 양면에 은을 코팅하여 시편에 형성된 전극을 분극하는 단계; 및 (f) 분극처리된 시편을 열처리하는 단계를 포함하는 하기 화학식 1로 표시되는 세라믹; 및 상기 세라믹 100 중량부에 대하여 0.1 내지 0.5 중량부의 산화크롬(Cr2O3)을 포함하는 가속도 센서용 압전 세라믹 조성물 제조 방법을 제공한다.(화학식 1)xPb(Mn0.5Te0.5)O3-yPbZrO3-zPbTiO3 (상기 화학식 1에서, x, y 및 z은 각각 몰비를 나타내며, 0.10 ≤x ≤0.20, 0.30 ≤y ≤0.60 및 0.30 ≤z ≤0.60이다.)The invention also relates to (a) lead oxide (II) (PbO), titanium oxide (TiO 2 ), zirconium oxide (ZrO 2 ), manganese dioxide (MnO 2 ), tellurium oxide (TeO 2 ) and chromium oxide (Cr 2 O 3). ) Calcining the powder after mixing; (b) grinding the calcined powder; (c) press molding the pulverized powder to prepare a specimen; (d) sintering the specimen; (e) coating silver on both sides of the sintered specimen to polarize the electrode formed on the specimen; And (f) a ceramic represented by the following Chemical Formula 1, comprising the step of heat-treating the polarized specimen; And 0.1 to 0.5 parts by weight of chromium oxide (Cr 2 O 3 ), based on 100 parts by weight of the ceramic, to provide a method of manufacturing a piezoelectric ceramic composition for an acceleration sensor. (Formula 1) xPb (Mn 0.5 Te 0.5 ) O 3 − yPbZrO 3 -zPbTiO 3 (In Formula 1, x, y and z each represent a molar ratio, and 0.10 ≦ x ≦ 0.20, 0.30 ≦ y ≦ 0.60 and 0.30 ≦ z ≦ 0.60.)
이하 본 발명을 더욱 상세하게 설명한다.Hereinafter, the present invention will be described in more detail.
본 발명의 가속도 센서용 압전 세라믹 조성물은 하기 화학식 1로 표시되는 세라믹과 산화크롬(Cr2O3)을 포함한다.(화학식 1)xPb(Mn0.5Te0.5)O3-yPbZrO3-zPbTiO3 (상기 화학식 1에서, x, y 및 z은 각각 몰비를 나타내며, 0.10 ≤x ≤0.20, 0.30 ≤y ≤0.60 및 0.30 ≤z ≤0.60이다.)The piezoelectric ceramic composition for an acceleration sensor of the present invention includes a ceramic represented by the following Chemical Formula 1 and chromium oxide (Cr 2 O 3 ). (Formula 1) xPb (Mn 0.5 Te 0.5 ) O 3 -yPbZrO 3 -zPbTiO 3 ( In Formula 1, x, y and z each represent a molar ratio, and 0.10 ≦ x ≦ 0.20, 0.30 ≦ y ≦ 0.60 and 0.30 ≦ z ≦ 0.60.)
상기 화학식 1로 표시되는 세라믹에 산화크롬을 첨가하면 압전 세라믹 조성물 내의 특정 원소와의 치환 또는 격자 내 침입 등을 통하여 제조된 압전 세라믹 조성물의 압전 특성이 더욱 향상되고 온도안정성이 우수해진다.When chromium oxide is added to the ceramic represented by Chemical Formula 1, the piezoelectric properties of the piezoelectric ceramic composition prepared through substitution with a specific element in the piezoelectric ceramic composition or penetration into the lattice may be further improved and temperature stability may be improved.
상기 산화크롬의 함량은 상기 화학식 1의 세라믹 100 중량부에 대하여 0.1 내지 0.5 중량부가 바람직하다. 산화크롬의 함량이 상기 화학식 1의 세라믹 100 중량부에 대하여 0.1 중량부 미만이면 제조된 압전 세라믹 조성물로부터 압전 특성이 발현되지 않는 문제점이 있고, 산화크롬의 함량이 상기 화학식 1의 세라믹 100 중량부에 대하여 0.5 중량부를 초과하여도 역시 압전 특성을 얻을 수 없다는 문제점이 있다.The content of chromium oxide is preferably 0.1 to 0.5 parts by weight based on 100 parts by weight of the ceramic of Chemical Formula 1. The content of chromium oxide is If less than 0.1 part by weight with respect to 100 parts by weight of ceramic, there is a problem in that the piezoelectric properties are not expressed from the prepared piezoelectric ceramic composition, and the content of chromium oxide is There is also a problem that piezoelectric properties cannot be obtained even if it exceeds 0.5 parts by weight with respect to 100 parts by weight of ceramic.
본 발명은 또한 상기 가속도 센서용 압전 세라믹 조성물 제조 방법을 제공한다.The present invention also provides a method of manufacturing the piezoelectric ceramic composition for the acceleration sensor.
먼저 산화납(Ⅱ)(PbO), 산화티타늄(TiO2), 산화지르코늄(ZrO2), 이산화망간(MnO2), 산화텔루르(TeO2) 및 산화크롬(Cr2O3) 분말을 혼합한 후 하소한다((a) 단계). 이처럼 하소 단계를 거치는 이유는 본 발명의 압전 세라믹 조성물의 단일상(single phase)을 합성함으로써 후공정인 시편 제조 공정시 항상 일정한 압전 특성을 갖는 세라믹 조성물을 얻을 수 있다.First mix lead (II) oxide (PbO), titanium oxide (TiO 2 ), zirconium oxide (ZrO 2 ), manganese dioxide (MnO 2 ), tellurium oxide (TeO2 ) and chromium oxide (Cr 2 O 3 ) powder (Step (a)). The reason for passing through the calcination step is to synthesize a single phase of the piezoelectric ceramic composition of the present invention to obtain a ceramic composition having a constant piezoelectric property at all times during the specimen manufacturing process, which is a post-process.
상기 산화납(Ⅱ)(PbO), 산화티타늄(TiO2), 산화지르코늄(ZrO2), 이산화망간(MnO2), 산화텔루르(TeO2) 및 산화크롬(Cr2O3) 분말의 혼합 방법으로는 볼밀을 사용하여 에탄올 용매 중에서 20 내지 28 시간 혼합하는 것이 바람직하고, 에탄올에 혼합된 분말을 하소하기 전에 700 내지 900 ℃의 고온에서 1 내지 3 시간 건조하는 것이 더욱 바람직하다.As a mixing method of the lead (II) oxide (PbO), titanium oxide (TiO 2 ), zirconium oxide (ZrO 2 ), manganese dioxide (MnO 2 ), tellurium oxide (TeO 2 ) and chromium oxide (Cr 2 O 3 ) powder It is preferable to mix in a ethanol solvent for 20 to 28 hours using a ball mill, and it is more preferable to dry at the high temperature of 700 to 900 degreeC for 1 to 3 hours before calcining the powder mixed with ethanol.
그 다음 상기 (a) 단계에서 하소된 분말을 분쇄한다((b) 단계). 이처럼 하소된 분말을 분쇄하여 일정한 입자 크기 및 분포를 유지함으로써 후공정인 시편 제조 공정시 항상 일정한 압전 특성을 갖는 세라믹 조성물을 얻을 수 있다.Then, the powder calcined in step (a) is pulverized (step (b)). By pulverizing the calcined powder in this way to maintain a constant particle size and distribution it is possible to obtain a ceramic composition having a constant piezoelectric properties at all times during the specimen manufacturing process which is a post-process.
상기 (a) 단계에서 하소된 분말은 X-선 분석을 통하여 관찰하면 페로브스카이트(Perovskite) 단일상임을 알 수 있다. 이 하소된 분말을 20 내지 24 시간동안 습식볼밀을 행하여 평균입도 0.5 내지 1.5 ㎛가 되도록 골고루 분쇄한다.When the powder calcined in step (a) is observed through X-ray analysis, it can be seen that the perovskite single phase. The calcined powder is subjected to a wet ball mill for 20 to 24 hours, and evenly ground to an average particle size of 0.5 to 1.5 m.
그 다음 상기 분쇄된 분말을 가압 성형하여 시편을 제조한다((c) 단계).Then, the powder is press-molded to prepare a specimen (step (c)).
상기에서 분쇄된 분말을 유압프레스를 이용하여 지름 20 ㎜의 성형몰드로 가압 성형하고 냉각정수압프레스(Cold Isostatic Press)로 1.0 내지 3.0 톤/㎠의 압력을 가하여 시편을 제조한다.The pulverized powder is press-molded into a molding mold having a diameter of 20 mm by using a hydraulic press, and a specimen is prepared by applying a pressure of 1.0 to 3.0 ton / cm 2 by a cold isostatic press.
그 다음 상기 (c) 단계에서 제조된 시편을 소결하는 단계를 더욱 실시한다((d) 단계). 소결 단계를 실시하여 시편을 열처리하면 치밀한 구조의 가속도 센서용 소자을 얻을 수 있다.Then, the step of sintering the specimen prepared in step (c) is further performed (step (d)). When the specimen is subjected to heat treatment by performing the sintering step, a device for an acceleration sensor having a compact structure can be obtained.
상기 (c) 단계에서 제조한 시편과 동일한 조성의 분말을 시편에 골고루 덮은 후 산화납 분위기의 밀폐된 알루미나 도가니 속에 넣고 1100 내지 1200 ℃의 고온에서 3 내지 5 시간 동안 소결한다.The powder of the same composition as the specimen prepared in step (c) is uniformly covered in the specimen and placed in a sealed alumina crucible in a lead oxide atmosphere and sintered at a high temperature of 1100 to 1200 ° C. for 3 to 5 hours.
그 다음 상기 (d) 단계에서 소결된 시편 양면에 은을 코팅하여 시편에 형성된 전극을 분극처리한다((e) 단계). Next, silver is coated on both surfaces of the specimen sintered in the step (d) to polarize the electrode formed on the specimen (step (e)).
상기 (d) 단계에서 소결된 시편을 양면 연마기로 두께가 0.5 내지 1.5 ㎜가 되도록 연마한 후 초음파 세척기로 시편에 묻어있는 이물질을 제거하고 시편을 건조한 후 은을 시편 양면에 도포하고 550 내지 650 ℃에서 10 내지 20 분간 열처리하여 시편에 전극을 형성한다.After polishing the specimen sintered in the step (d) to a thickness of 0.5 to 1.5 ㎜ with a double-sided polishing machine, remove foreign substances on the specimen with an ultrasonic cleaner, dry the specimen, apply silver to both sides of the specimen, and apply 550 to 650 ° C. Heat treatment for 10 to 20 minutes to form an electrode on the specimen.
또한 전극이 형성된 시편에 압전성을 부여하기 위하여 시편에 분극처리를 더욱 실시한다. 분극 처리는 전기절연성이 우수하고 비열이 커서 온도편차를 무시할 수 있는 실리콘 오일 속에 시편에 담그고 110 내지 130 ℃의 온도에서 2 내지 4 kV/㎜의 직류전계를 인가하여 실시한다.Further, in order to impart piezoelectricity to the specimen on which the electrode is formed, polarization treatment is further performed on the specimen. The polarization treatment is carried out by immersing the specimen in a silicone oil having excellent electrical insulation and high specific heat so as to ignore the temperature deviation, and applying a DC electric field of 2 to 4 kV / mm at a temperature of 110 to 130 ° C.
그 다음 상기 (e) 단계에서 분극처리된 시편으로부터 시효현상을 제거하기 위하여 100 내지 150 ℃에서 5 내지 10 시간동안 열처리하여 가속도 센서용 압전 세라믹 조성물을 제조한다((f) 단계).Then, in order to remove the aging phenomenon from the polarized specimen in step (e) to heat treatment at 100 to 150 ℃ for 5 to 10 hours to prepare a piezoelectric ceramic composition for the acceleration sensor (step (f)).
이상 일련의 과정으로 하기 화학식 1로 표시되는 세라믹; 및 상기 세라믹 100 중량부에 대하여 0.1 내지 0.5 중량부의 산화크롬(Cr2O3)을 포함하는 가속도 센서용 압전 세라믹 조성물이 제조된다.(화학식 1)xPb(Mn0.5Te0.5)O3-yPbZrO3-zPbTiO3 (상기 화학식 1에서, x, y 및 z은 각각 몰비를 나타내며, 0.10 ≤x ≤0.20, 0.30 ≤y ≤0.60 및 0.30 ≤z ≤0.60이다.)Ceramic represented by the following formula (1) as a series of steps above; And 0.1 to 0.5 parts by weight of chromium oxide (Cr 2 O 3 ) based on 100 parts by weight of the ceramic. A piezoelectric ceramic composition for an acceleration sensor is prepared. (Formula 1) x Pb (Mn 0.5 Te 0.5 ) O 3 -yPbZrO 3 -zPbTiO 3 (In Formula 1, x, y and z each represent a molar ratio, and 0.10 ≦ x ≦ 0.20, 0.30 ≦ y ≦ 0.60 and 0.30 ≦ z ≦ 0.60.)
이상 살펴본 바와 같이, 본 발명의 가속도 센서용 압전 세라믹 조성물은 압전전압상수 및 큐리온도가 높아 시효현상이 우수할뿐만 아니라 제조 방법이 간단하고 제조 비용이 저렴하다.As described above, the piezoelectric ceramic composition for an acceleration sensor according to the present invention has a high piezoelectric voltage constant and a Curie temperature, which is not only excellent in aging but also simple in manufacturing method and low in manufacturing cost.
이하 본 발명의 바람직한 실시예 및 비교예를 기재한다. 하기 실시예 및 비교예는 본 발명을 보다 명확히 표현하기 위한 목적으로 기재될 뿐 본 발명의 내용이 하기 실시예 및 비교예에 한정되는 것은 아니다.Hereinafter, preferred examples and comparative examples of the present invention are described. The following examples and comparative examples are described for the purpose of more clearly expressing the present invention, but the contents of the present invention are not limited to the following examples and comparative examples.
(실시예 1 내지 4)(Examples 1 to 4)
하기 표 1의 조성비로 순도 99.5 % 이상의 산화납(Ⅱ)(PbO), 산화티타늄(TiO2), 산화지르코늄(ZrO2), 이산화망간(MnO2), 산화텔루르(TeO2 ) 및 산화크롬(Cr2O3) 분말을 혼합 건조한 후 800 ℃에서 2 시간 하소하였다.Lead (II) oxide (PbO), titanium oxide (TiO 2 ), zirconium oxide (ZrO 2 ), manganese dioxide (MnO 2 ), tellurium oxide (TeO 2 ) and chromium oxide (Cr 2 ) having a purity of 99.5% or more by the composition ratios of Table 1 below. O 3 ) The powder was mixed and dried and then calcined at 800 ° C. for 2 hours.
하소된 분말은 X-선 분석을 통하여 페로브스카이트(Perovskite) 단일상임을 확인한 후 다시 24 시간 동안 하소된 분말을 평균입도 1.0 ㎛가 되도록 습식볼밀을 행하였다.The calcined powder was confirmed to be a perovskite single phase through X-ray analysis, and then wet ball milled for 24 hours to calcined powder to have an average particle size of 1.0 μm.
그 다음 상기 분쇄된 분말을 유압프레스를 이용하여 지름 20 ㎜의 성형몰드로 가압 성형한 후, 냉각정수압프레스(Cold Isostatic Press)로 2.0 톤/㎠의 압력으로 가압 성형하여 시편을 제조하였다.Then, the pulverized powder was press-molded into a molding mold having a diameter of 20 mm using a hydraulic press, and then press-molded at a pressure of 2.0 ton / cm 2 using a cold isostatic press to prepare a specimen.
제조된 시편을 최초 시편 제조용 분말로 잘 덮은 후 산화납분위기의 밀폐된 알루미나 도가니 속에 넣고 1150 ℃에서 4 시간 동안 소결하였다.The prepared specimen was well covered with powder for preparing the first specimen, and then placed in a sealed alumina crucible in a lead oxide atmosphere and sintered at 1150 ° C. for 4 hours.
소결된 시편을 양면 연마기를 사용하여 두께 1 ㎜가 되도록 연마한 후 초음파 세척기로 이물질을 제거하고 건조한 후 은을 시편 양면에 도포하고 590 ℃에서 15 분간 열처리하여 전극을 형성하였다.The sintered specimens were polished to a thickness of 1 mm using a double-side polisher, and foreign substances were removed by an ultrasonic cleaner, dried, and silver was applied to both sides of the specimens, and heat-treated at 590 ° C. for 15 minutes to form electrodes.
전극이 형성된 시편에 압전성을 부여하기 위하여 분극처리를 더욱 행하였다. 분극처리는 전기절연성이 우수하고 비열이 커서 온도편차를 무시할 수 있는 실리콘 오일 속에 시편음 담그고 120 ℃에서 3 kV/㎜의 직류전계를 10분간 인가하는 방법으로 행하였다.In order to impart piezoelectricity to the specimen on which the electrode was formed, polarization treatment was further performed. The polarization treatment was performed by soaking the specimen sound in a silicone oil having excellent electrical insulation and high specific heat so that the temperature deviation could be ignored, and applying a DC electric field of 3 kV / mm at 120 ° C. for 10 minutes.
분극처리된 시편으로부터 시효현상을 제거하기 위하여 시편을 120 ℃에서 7시간 열처리하여 실시예 1 내지 4의 가속도 센서용 압전 세라믹 조성물을 제조하였다.In order to remove the aging phenomenon from the polarized specimens, the specimens were heat-treated at 120 ° C. for 7 hours to prepare piezoelectric ceramic compositions for acceleration sensors of Examples 1 to 4.
또한, 비교예로는 종래 가속도 센서용 압전 세라믹 조성물로 일반적으로 사용된 PZT를 사용하여 실시예 1 내지 4 및 비교예의 가속도 센서용 압전 세라믹 조성물 및 PZT에 대한 압전전압상수 및 큐리온도를 측정하여 그 결과를 하기 표 2에 나타내었다.In addition, as a comparative example, piezoelectric voltage constants and curie temperatures of the piezoelectric ceramic compositions for acceleration sensors and PZT of Examples 1 to 4 and Comparative Examples were measured using PZT, which is generally used as a piezoelectric ceramic composition for a conventional acceleration sensor. The results are shown in Table 2 below.
상기 표 2에 나타난 바와 같이, 실시예 1 내지 4의 가속도 센서용 압전 세라믹 조성물의 압전전압상수는 비교예의 PZT보다 최소 1, 최대 12나 더 높게 나타났고 또한, 실시예 1 내지 4의 가속도 센서용 압전 세라믹 조성물의 큐리온도는 비교예의 PZT보다 최소 5, 최대 80 ℃가 더 높음을 알 수 있다.As shown in Table 2, the piezoelectric voltage constant of the piezoelectric ceramic composition for the acceleration sensors of Examples 1 to 4 was at least 1, 12 or higher than the PZT of the comparative example, and also for the acceleration sensors of Examples 1 to 4 Curie temperature of the piezoelectric ceramic composition can be seen that the minimum 5, the maximum 80 ℃ higher than the PZT of the comparative example.
본 발명의 가속도 센서용 압전 세라믹 조성물은 압전전압상수 및 큐리온도가 높아 시효현상이 우수할뿐만 아니라 제조 방법이 간단하고 제조 비용이 저렴하다. The piezoelectric ceramic composition for an acceleration sensor of the present invention has a high piezoelectric voltage constant and a Curie temperature, which is not only excellent in aging but also simple in manufacturing method and low in manufacturing cost.
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| KR20010060415A (en) * | 1999-12-21 | 2001-07-07 | 신현준 | Composition of piezoelectric ceramics and method for preparing same |
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| JPH0672717A (en) * | 1992-08-24 | 1994-03-15 | Honda Motor Co Ltd | Piezoelectric electrostrictive material |
| US5378382A (en) * | 1993-12-09 | 1995-01-03 | Mitsubishi Kasei Corporation | Piezoelectric ceramic composition for actuator |
| EP0722918A1 (en) * | 1995-01-20 | 1996-07-24 | Murata Manufacturing Co., Ltd. | Piezoelectric ceramic composition |
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