JP4247936B2 - Piezoelectric ceramic composition - Google Patents

Piezoelectric ceramic composition Download PDF

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Publication number
JP4247936B2
JP4247936B2 JP07991199A JP7991199A JP4247936B2 JP 4247936 B2 JP4247936 B2 JP 4247936B2 JP 07991199 A JP07991199 A JP 07991199A JP 7991199 A JP7991199 A JP 7991199A JP 4247936 B2 JP4247936 B2 JP 4247936B2
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Japan
Prior art keywords
piezoelectric ceramic
ceramic composition
tio
piezoelectric
lead
Prior art date
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JP07991199A
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Japanese (ja)
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JP2000272963A (en
Inventor
淳 佐々木
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Tokin Corp
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NEC Tokin Corp
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Description

【0001】
【発明の属する技術分野】
本発明は、波動デバイス、センサー、アクチュエーター等に用いられる圧電体材料の組成に関するものである。
【0002】
【従来の技術】
従来、圧電セラミックス材料としては、二成分で構成されるPZT(PbTiO−PbZrO)系セラミックスや、三成分で構成されるPCM[PbTiO−PbZrO−Pb(Mg0.5Nb0.5)TiO] 系セラミックスが主に用いられてきた。
【0003】
その理由としては、上記の材料が大きな圧電性を示すこと、更に、それら材料の各成分量の割合を調整することにより、センサー、アクチュエーター、フィルター等、各種用途の要求特性に応えることができるからである。
【0004】
【発明が解決しようとする課題】
しかし、これらの材料は、どれも鉛を主成分とするもので、重量比で約2/3が酸化鉛である。酸化鉛は、低温でも揮発性が高く、仮焼、焼結等の製造時に大気中に洩れることや、産業廃棄物中から溶出することが考えられ、環境を汚染する有害物質として、十分注意する必要がある。また、公害防止設備の設置には、膨大な費用を投じなければならず、経済性の面からも無鉛材料開発の要望は大きい。
【0005】
また、既存の無鉛圧電材料 組成式(Bi0.5Na0.5)TiOでは、機械的品質係数Qmの値が低く、高Qmが必要とされるフィルター、振動子等の用途を考慮すると、この材料を適用することは困難である。
【0006】
即ち、本発明の課題は、酸化鉛を含まず、かつ、フィルター、振動子等の用途に実用可能な、高い機械的品質係数Qmを持つ圧電体磁器組成物を提供することである。
【0007】
【課題を解決するための手段】
本発明は、組成式(1−X)(Bi0.5Na0.5)TiO3−XBiFeO30.1<X≦0.5)であって、鉛を含まず、高い機械的品質係数Qmを有する圧電性磁器組成物である。
【0008】
【発明の実施の形態】
以下、本発明の実施の形態について具体的に説明する。
【0009】
主成分原料として、酸化ビスマス(Bi)、炭酸ナトリウム(NaCO)、酸化チタン(TiO)、酸化鉄(Fe)を用いた。これらを所定量秤量し、ジルコニアボールを用いたボールミルにより、エタノール中で20時間混合した。これを800℃で1時間保持して仮焼し、更に、ボールミルで10時間粉砕を行った。
【0010】
バインダーとしてポリビニールアルコールを用い造粒し、圧力1ton/cmで、直径20mm、厚さ1mmの円板状に加圧成形した。成形した試料は、1050〜1150℃の温度で2時間焼成を行った。
【0011】
この焼結体の両面に銀電極を設け、100℃シリコンオイル中で直流電圧4kV/mmを電極間に加え、厚み方向に分極した。
【0012】
そして、これらの試料について、圧電的、誘電的性質の測定を行った。圧電測定は、LFインピーダンスアナライザーを用い、共振−反共振法により、電気機械結合係数、機械的品質係数を算出した。また、誘電特性は、LCRメータを用いて、測定周波数1MHzで測定を行った。
【0013】
表1に、組成式が(1−X)(Bi0.5Na0.5)TiO−XBiFeOであって、0≦X≦0.6の範囲の圧電性磁器組成物における、電気機械結合係数k33,k,k、機械的品質係数Qm、および比誘電率ε33 /εを示す。
【0014】
【表1】

Figure 0004247936
【0015】
表1より、機械的品質係数Qmは、X=0.3で最大値861を得ており、(Bi0.5Na0.5)TiOに対しQmの改善が計られている。
【0016】
しかし、Xが0.1未満及び0.5を超える範囲では、Qmが300以下と非常に小さく実用化は難しい。また、Xが0.1〜0.5の範囲では、電気機械結合係数も減少しておらず、実用に適している事が判った。
【0017】
以上より、組成式(Bi0.5Na0.5)TiOにBiFeOを10〜50%固溶させることにより、(Bi0.5Na0.5)TiOの電気機械結合係数を劣化させることなく、機械的品質係数Qmを向上させることができる。これにより、フィルター、振動子等の用途への適用が可能となる。
【0018】
【発明の効果】
以上、述べたように、本発明によれば、組成式が(1−X)(Bi0.5Na0.5)TiO3−XBiFeO3であって、Xが0.1<X≦0.5の範囲である無鉛の圧電体磁器組成物を提供することで、酸化鉛による大気汚染がない材料によるフィルター、振動子等の用途への適用が期待できる。[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a composition of a piezoelectric material used for wave devices, sensors, actuators and the like.
[0002]
[Prior art]
Conventionally, piezoelectric As the ceramic material consists of bicomponent PZT (PbTiO 3 -PbZrO 3) ceramics and, PCM consists of three components [PbTiO 3 -PbZrO 3 -Pb (Mg 0.5 Nb 0.5 ) TiO 3 ] based ceramics have been mainly used.
[0003]
The reason for this is that the above materials exhibit large piezoelectricity, and furthermore, by adjusting the proportion of each component amount of these materials, it is possible to meet the required characteristics of various applications such as sensors, actuators, filters, etc. It is.
[0004]
[Problems to be solved by the invention]
However, all of these materials are mainly composed of lead, and about 2/3 by weight is lead oxide. Lead oxide has high volatility even at low temperatures, and may leak into the atmosphere during production such as calcination and sintering, and may be eluted from industrial waste. Be careful as a harmful substance that pollutes the environment. There is a need. Also, enormous costs must be invested in installing pollution prevention equipment, and there is a great demand for lead-free material development from the economical aspect.
[0005]
In addition, in the existing lead-free piezoelectric material composition formula (Bi 0.5 Na 0.5 ) TiO 3 , the value of the mechanical quality factor Qm is low, and considering applications such as filters and vibrators that require high Qm It is difficult to apply this material.
[0006]
That is, an object of the present invention is to provide a piezoelectric ceramic composition that does not contain lead oxide and has a high mechanical quality factor Qm that can be used for applications such as filters and vibrators.
[0007]
[Means for Solving the Problems]
The present invention has a composition formula (1-X) (Bi 0.5 Na 0.5 ) TiO 3 —XBiFeO 3 ( 0.1 <X ≦ 0.5 ), does not contain lead, and has a high mechanical quality factor Qm. It is a piezoelectric ceramic composition.
[0008]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, embodiments of the present invention will be specifically described.
[0009]
Bismuth oxide (Bi 2 O 3 ), sodium carbonate (Na 2 CO 3 ), titanium oxide (TiO 2 ), and iron oxide (Fe 2 O 3 ) were used as the main component materials. A predetermined amount of these were weighed and mixed in ethanol for 20 hours by a ball mill using zirconia balls. This was kept at 800 ° C. for 1 hour and calcined, and further pulverized with a ball mill for 10 hours.
[0010]
It was granulated using polyvinyl alcohol as a binder, and pressure-molded into a disk shape having a diameter of 20 mm and a thickness of 1 mm at a pressure of 1 ton / cm 2 . The molded sample was baked at a temperature of 1050 to 1150 ° C. for 2 hours.
[0011]
Silver electrodes were provided on both surfaces of the sintered body, and a DC voltage of 4 kV / mm was applied between the electrodes in 100 ° C. silicon oil to polarize in the thickness direction.
[0012]
Then, the piezoelectric and dielectric properties of these samples were measured. In the piezoelectric measurement, an electromechanical coupling coefficient and a mechanical quality coefficient were calculated by a resonance-antiresonance method using an LF impedance analyzer. In addition, the dielectric characteristics were measured at a measurement frequency of 1 MHz using an LCR meter.
[0013]
Table 1 shows an electrical machine in a piezoelectric ceramic composition having a composition formula of (1-X) (Bi 0.5 Na 0.5 ) TiO 3 —XBiFeO 3 and having a range of 0 ≦ X ≦ 0.6. coupling coefficient k 33, k p, showing a k t, the mechanical quality factor Qm, and the dielectric constant ε 33 t / ε 0.
[0014]
[Table 1]
Figure 0004247936
[0015]
From Table 1, the mechanical quality factor Qm has a maximum value 861 at X = 0.3, and an improvement in Qm is measured with respect to (Bi 0.5 Na 0.5 ) TiO 3 .
[0016]
However, in the range where X is less than 0.1 and exceeds 0.5, Qm is very small as 300 or less, and practical application is difficult. In addition, it was found that when X is in the range of 0.1 to 0.5, the electromechanical coupling coefficient is not decreased and is suitable for practical use.
[0017]
From the above, the electromechanical coupling coefficient of (Bi 0.5 Na 0.5 ) TiO 3 is deteriorated by dissolving 10-50% of BiFeO 3 in the composition formula (Bi 0.5 Na 0.5 ) TiO 3. The mechanical quality factor Qm can be improved without making it. This makes it possible to apply to uses such as filters and vibrators.
[0018]
【The invention's effect】
As described above, according to the present invention, the composition formula is (1-X) (Bi 0.5 Na 0.5 ) TiO 3 —XBiFeO 3 , and X is in the range of 0.1 <X ≦ 0.5 . By providing a certain lead-free piezoelectric ceramic composition, it can be expected to be applied to applications such as filters and vibrators made of materials free from air pollution by lead oxide.

Claims (1)

組成式が(1−X)(Bi0.5Na0.5)TiO3−XBiFeO3であって、Xが0.1<X≦0.5の範囲であることを特徴とする圧電性磁器組成物。A piezoelectric ceramic composition having a composition formula of (1-X) (Bi 0.5 Na 0.5 ) TiO 3 —XBiFeO 3 , wherein X is in a range of 0.1 <X ≦ 0.5 .
JP07991199A 1999-03-24 1999-03-24 Piezoelectric ceramic composition Expired - Lifetime JP4247936B2 (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102173765A (en) * 2011-01-11 2011-09-07 桂林理工大学 Bismuth ferrite-lead tungstate multiferroic ceramic and preparation method thereof

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JP5118294B2 (en) * 2004-09-29 2013-01-16 日本碍子株式会社 Piezoelectric / electrostrictive porcelain composition, piezoelectric / electrostrictive body, and piezoelectric / electrostrictive film type element
US7959823B2 (en) 2005-10-27 2011-06-14 Kyocera Corporation Piezoelectric ceramic composition and piezoelectric ceramic
JP2008069051A (en) * 2006-09-15 2008-03-27 Hosokawa Funtai Gijutsu Kenkyusho:Kk Piezoelectric ceramic and method of manufacturing the same
JP5293948B2 (en) * 2008-11-28 2013-09-18 セイコーエプソン株式会社 Manufacturing method of ceramics
JP6094168B2 (en) * 2012-01-31 2017-03-15 Tdk株式会社 Piezoelectric composition and piezoelectric element
JP6349738B2 (en) * 2013-03-29 2018-07-04 Tdk株式会社 Piezoelectric composition and piezoelectric element
CN110981469A (en) * 2019-12-31 2020-04-10 西安理工大学 Preparation method of sodium bismuth titanate-based high-temperature piezoelectric ceramic
CN111138177A (en) * 2020-01-09 2020-05-12 桂林电子科技大学 Bismuth ferrite-bismuth zinc titanate high-temperature lead-free piezoelectric ceramic with high-temperature stability and preparation method thereof

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102173765A (en) * 2011-01-11 2011-09-07 桂林理工大学 Bismuth ferrite-lead tungstate multiferroic ceramic and preparation method thereof

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