KR100457977B1 - Process for producing nitrogen trifluoride and use thereof - Google Patents

Abstract

NF ₃ is prepared by reacting F ₂ gas in a gaseous state with NH ₃ gas at 80 ° C. or lower in the presence of diluent gas. Thus, it is possible to produce NF ₃ gas with good safety, efficiency and profitability.

Description

Process for producing nitrogen trifluoride and its use {PROCESS FOR PRODUCING NITROGEN TRIFLUORIDE AND USE THEREOF}

NF ₃ is used, for example, as a dry etching gas in a manufacturing process such as a semiconductor device, and is generally classified into a chemical method and an electrolysis method as a method for producing NF ₃ .

Examples of known chemical methods include the following.

(1) a method of blowing F ₂ gas and NH ₃ gas into fused acidic ammonium fluoride (see Japanese Patent Application Laid-Open No. 55-8926, JP-B-55-8926),

(2) a method of reacting a metal ammonium fluoride complex with F ₂ gas in solid form (see Japanese Patent Application Laid-Open No. 60-71503, JP-B-60-71503), and

(3) A method in which F ₂ gas is directly reacted with NH ₃ gas (see Japanese Laid-Open Patent Publication No. 2-255513, JP-A-2-255513).

On the other hand, known electrolysis methods using fused acidic ammonium fluoride as the electrolyte include:

(4) a method of performing electrolysis using graphite as an anode, and

(5) A method of performing electrolysis using nickel as the anode.

Moreover, Ruff et al. Reported that NF ₃ can be synthesized using a chemical method of reacting F ₂ gas with NH ₃ gas in the gaseous state, although yields are below 5% ( Z. anorg. Allg). chem. , 197 , 395 (1931). Morrow et al. Also reported that NF ₃ is similarly synthesized in the gaseous state (see J. Amer. Chem. Soc. , 82 , 5301 (1960)).

However, in the conventional direct fluoride method using the F ₂ gas as a reaction substrate for synthesis of NF ₃ from the NH _3, since F ₂ gas is a highly reactive size used, an explosion or corrosion between the substrate and the F ₂ gas May occur. Moreover, these reactions result in the generation of a large amount of heat of reaction, which raises the temperature of the reactor, and consequently reduces the yields due to decomposition of the product NF ₃ or production of N ₂ , HF or NH ₄ F by side reactions. . The method disclosed in JP-A-2-255513 is problematic in that NF ₃ is prepared using F ₂ gas 3 to 20 times NH ₃ while maintaining the reactor temperature at 80 to 250 ° C. in a heat medium, Thus, the yield based on F ₂ is low and profitability is low.

In the direct fluorination method using F ₂ gas, a heat of reaction of about −110 kcal / mol is generated when one hydrogen of the substrate is replaced by one fluorine. Therefore, when NF ₃ is prepared by the reaction of F ₂ with NH ₃ , heat of reaction of about -330 kcal / mol is generated when hydrogen is substituted with fluorine, and this heat generation causes breakage or explosion of the NF bond. In addition, yields are reduced and problems arise in manufacturing.

The present invention relates to a process for the production of nitrogen trifluoride (hereinafter referred to as "NF ₃ ") and the use thereof comprising directly reacting fluorine gas (F ₂ ) with ammonia gas (NH ₃ ) in the gas phase.

The present invention has been completed under these conditions, and an object of the present invention is to provide a direct fluorination method for producing NF ₃ by reacting a reaction substrate (NH ₃ ) with F ₂ gas, which has industrially superior profitability, safety and efficiency. ₃ to provide a production method.

In order to solve the above problems, the present inventors have found that in the method of producing NF ₃ by reacting F ₂ gas with NH ₃ , when the reaction is carried out at a temperature of 80 ° C. or lower in the presence of diluent gas, NF It was found that ₃ can be obtained in high yield. The present invention has been completed based on this finding.

Accordingly, the present invention provides a method for producing NF _{3 and} the use of the resulting NF ₃ as described in (1) to (13) below.

(1) A method for producing nitrogen trifluoride comprising reacting fluorine gas with ammonia gas in a gaseous state at a temperature of 80 ° C. or lower in the presence of diluent gas.

(2) The method as described in said (1) whose reaction temperature is 50 degrees C or less.

(3) The method according to the above (1) or (2), wherein the supplied fluorine gas and ammonia gas have a molar ratio of 1: 1 to 1: 2.

(4) The method in any one of said (1)-(3) which supplies fluorine gas and / or ammonia gas in fractions.

(5) The method as described in any one of said (1)-(4) whose density | concentration of fluorine gas supplied is 3 mol% or less.

(6) The method according to any one of (1) to (5) above, wherein the concentration of the supplied ammonia gas is 6 mol% or less.

(7) The method according to any one of the above (1) to (6), wherein the dilution gas is at least one selected from the group consisting of nitrogen, helium, argon, hexafluoroethane and octafluoropropane.

(8) The method according to any one of (1) to (7), wherein the dilution gas is circulated and reused.

(9) The method according to any one of (1) to (8), comprising a step of treating an unreacted fluorine gas in which an unreacted fluorine gas is treated with an aqueous alkali solution and / or ammonia.

(10) The method according to the above (9), wherein the treatment step is performed at 80 ° C or lower.

(11) Nitrogen trifluoride containing nitrogen trifluoride manufactured by the manufacturing method in any one of said (1)-(10).

(12) An etching gas comprising the nitrogen trifluoride product according to (11) above.

(13) A cleaning gas comprising the nitrogen trifluoride product according to (11) above.

That is, the present invention is "a method for producing nitrogen trifluoride comprising reacting a fluorine gas in a gaseous state with a fluorine gas at a temperature of 80 ° C or less in the presence of diluent gas," "trifluoride prepared by the above-described manufacturing method Nitrogen trifluoride products comprising; and "Etching gas and cleaning gas each comprising the above-described nitrogen trifluoride products".

Best way for carrying out the invention

Hereinafter, the present invention will be described in detail.

The present invention can solve the problems of the conventional direct fluorination reaction technology by directly (non-catalytically) reacting fluorine gas in a gaseous state with ammonia gas at a temperature of 80 ° C. or lower in the presence of diluent gas, and excellent safety and efficiency. And a method for producing NF ₃ , which can industrially produce NF ₃ with profitability.

As described above, the direct fluorination method using F ₂ gas generates heat of reaction of about −110 kcal / mol when one hydrogen of the substrate is replaced with one fluorine.

In the case of producing NF ₃ by reacting F ₂ gas with NH ₃ gas, hydrogen is substituted with fluorine to generate heat of reaction of about -330 kcal / mol, and in many cases, the local temperature rises. Under high temperature, the side reaction represented by Scheme 2 below predominantly occurs in the target reaction represented by Scheme 1 below.

4NH ₃ + 3F ₂ → NF ₃ + 3NH ₄ F (Scheme 1)

2NH ₃ + 3F ₂ → N ₂ + 6HF (Scheme 2)

Therefore, it is necessary to control the side reactions (Scheme 2) and to selectively enhance the desired reactions (Scheme 1). As a result of constant research to solve this problem, the present inventors found that there is a close relationship between the reaction temperature and the side reactions. For example, when the reaction temperature is 80 ° C. or higher, such as 110 ° C., the side reaction (Scheme 2) proceeds predominantly, only nitrogen and hydrogen fluoride are generated, and the desired NF ₃ is hardly produced. When the reaction temperature is lowered to 80 ° C. or lower, the target reaction (Scheme 1) proceeds selectively. That is, the reaction temperature in the method of this invention is 80 degrees C or less, Preferably it is 50 degrees C or less. If the reaction system is further cooled, the target reaction (Scheme 1) proceeds more selectively. However, if the reaction temperature is too low, the reaction rate is also excessively reduced, and in some cases, the dilution gas is condensed. Therefore, the lower limit of the temperature may be -30 ° C.

For cooling, a method of circulating the gas, for example using a jacket system or a coil system, is preferred. In some cases, for example, a method such as stirring is used to make the temperature of the reactor uniform. Large amounts of heat of reaction are preferably removed to prevent local temperature rise.

In order to prevent the local temperature rise due to the heat of reaction, when the concentration of the starting material is low, the starting material gas may be supplied in one portion, and when the concentration of the starting material is high, the starting material may be the amount of the F ₂ and NH ₃ is preferably divided supply. In the case of supplying F ₂ and NH ₃ gas as a starting material, for example, the F ₂ gas and NH ₃ gas are passed through the first inlet for supplying the starting material gas, and through the second inlet for gas supply. A method of passing NH ₃ gas may be used. Thus, by supplying a quantity of gas, it is possible to effectively prevent the reaction temperature from rising locally.

In the direct fluorination reaction using F ₂ gas, a large amount of heat generation is involved as described above. In order to prevent such heat generation, a method of diluting F ₂ gas with an inert gas, a method of diluting NH ₃ gas as a substrate with an inert gas, and the like can be used. The diluent gas is preferably at least one inert gas selected from the group consisting of nitrogen, helium, argon, hexafluoroethane and octafluoropropane. In considering the process of separating and purifying the desired NF ₃ (boiling point: -120 ° C.) from an inert gas by distillation, hexafluoroethane (boiling point: -78.1 ° C.) and octafluorine each have a higher boiling point compared to NF _3. The use of ropeophane (boiling point: -36.7 ° C.) is advantageous in terms of separation costs. Of these, octafluoropropane is more preferred.

In introducing the gas into the reactor, one or both of the F ₂ gas and the NH ₃ gas is preferably diluted with the diluent gas and then introduced into the reactor. In view of safety, it is desirable to dilute both the F ₂ gas and the NH ₃ gas with diluent gas to a lower concentration. The diluent gas separated from the produced NF ₃ gas can be recovered and used by circulating. In order to recover diluent gas, distillation separation is generally used. For example, when octafluoropropane is used as the diluent gas, the target NF3 is distilled off at the top of the distillation column with a low boiling fraction, and the diluent gas octafluoropropane is distilled off at the bottom of the distillation column and circulated in the reaction system again. Used,

In carrying out the process of the invention, the concentration of F ₂ gas and NH ₃ gas supplied as starting material is preferably in the range of 1: 1 to 1: 2 in molar ratio. Also in the case of supplying the starting material in a portion, the ratio of the F ₂ gas to the NH ₃ gas used in the total reaction is preferably within the above range. If the ratio of NH ₃ gas to F ₂ gas is more than 2 times, an apparatus for recovering unreacted ammonia gas is required and disadvantageous, and the ratio of NH ₃ gas to F ₂ gas is not 1 times. If not, a large amount of unreacted fluorine gas remains, which is disadvantageous in terms of safety or profitability.

The concentration of F ₂ gas supplied is preferably not more than 3 mol%, the concentration of the NH ₃ gas supplied is less than 6 mol% is preferred. Therefore, the gas composition supplied to the reactor inlet preferably contains 9 mol% or less of the reaction substrate (F ₂ + NH ₃ ) and 91 mol% or more of the diluent gas. In the direct method using a fluoride gas F ₂ as described above, since the F ₂ gas is very reactive size used, NH ₃ containing hydrogen may burn or explode when exposed to fluorine. Therefore, an important point of the present invention is to prevent the explosion of NH ₃ gas and F ₂ gas. As a result of studying the range of the explosion conditions of the NH ₃ gas and the F ₂ gas, it was found that the range of conditions where the explosion of NH ₃ was low was 6 mol% or less, from which the safe reaction range in the method of the present invention was determined. In addition, the gas concentration in the reactor can be adjusted to a safe range by supplying the F ₂ gas and the NH ₃ gas into the reactor from two or more gas inlets.

Unreacted F ₂ gas has safety problems in concentration of distillation process and should be removed as much as possible. Thus, the NH ₃ process of the present invention includes treating the unreacted F ₂ gas. In order to remove the F ₂ gas, it is preferable to use a method for contacting a method of contacting the gas with an aqueous alkali solution such as KOH aqueous solution, or F ₂ gas and the F ₂ gas to remove the ammonia. As for processing temperature, 80 degrees C or less is preferable. If it exceeds 80 DEG C, a part of the target NF ₃ is decomposed and undesirable.

In the method for producing NF ₃ by the direct fluorination reaction of F ₂ gas and NH ₃ gas, NH ₄ F is generated as a by-product as described above (Scheme 1). Therefore, it is preferable to perform the reaction using a method using two reactor units and the like, and to recover and reuse the byproduct NH ₄ F while changing the unit.

NF ₃ produced by the production method of the present invention can be used as the etching gas in the etching step in the manufacture of the semiconductor device. In addition, NF ₃ can be used as a cleaning gas at the cleaning stage in the manufacture of a semiconductor device. In the manufacture of semiconductor devices such as LST and TFT, a thin film or a thick film is formed by CVD, sputtering, vapor deposition, or the like, and then etching is performed to form a circuit pattern. In addition, in the gyro for forming a thin film or a thick film, cleaning is performed to remove unnecessary deposits accumulated on the device inner wall, jig, and the like. This is done because unnecessary deposits cause the generation of particles. In order to produce good quality membranes, cleaning should be performed from time to time.

Etching using NF ₃ can be performed under a variety of dry etching conditions such as plasma etching and microwave etching, and NF ₃ is suitable for inert gases such as He, N ₂ and Ar, or gases such as HCl, O ₂ and H _2. It can use by mixing in a ratio.

Hereinafter, the present invention will be described in more detail with reference to Examples and Comparative Examples, but the present invention is not limited to these Examples.

Example 1

Inconel 600 reactor (approx. Jacketed reactor using a refrigerant circulation cooling system, which is surface stabilized (dynamically treated) at 400 ° C. with F ₂ gas) with an internal diameter of about 40 mm Φ and 500 mm in length The reactor was cooled to 5 ° C. while argon gas was supplied at 29.58 NL / hr (supplied in equal amounts from each NH ₃ feed line and F ₂ feed line). Then, the reaction was performed by supplying NH ₃ gas and F ₂ gas at 0.701 NL / hr and 0.526 NL / hr, respectively. The NH ₃ gas concentration and the F ₂ gas concentration in the reactor were 2.28 mol% and 1.71 mol%, respectively. Two hours after the start of the reaction, the concentration of fluorine gas that did not react with hydrogen fluoride in the reaction product gas was measured using aqueous potassium iodide solution, and the composition was analyzed using gas chromatography. The analytical values are shown in Table 1. The yield of NF ₃ based on F2 was about 69%. "ND" in the table means "not detected".

Reaction product gas Analysis Unreacted NH ₃ ND Unreacted F ₂ 0.033 NL / hr NF ₃ 0.121 NL / hr HF ND

Example 2

An Inconel 600 type reactor (an inner heating method using electric heating; the reactor is surface stabilized at 400 ° C. with F ₂ gas) having an internal diameter of about 40 mm Φ and 500 mm in length, and the reaction temperature is 70 ° C. The reaction and analysis were carried out under the same conditions as in Example 1 except that the reaction was changed to. The analysis results are shown in Table 2. The yield of NF3 based on F ₂ was about 42%.

Reaction product gas Analysis Unreacted NH ₃ ND Unreacted F ₂ 0.112 NL / hr NF ₃ 0.075 NL / hr HF 0.042 NL / hr

Comparative Example 1

The reaction and analysis were carried out under the same conditions as in Example 1, except that the same reactor as in Example 2 was used and the reaction temperature was changed to 150 ° C. The analysis results are shown in Table 3. It can be seen that at high temperatures above 80 ° C., NF ₃ cannot be produced and only the reaction of Scheme 2 proceeds.

Reaction product gas Analysis Unreacted NH ₃ ND Unreacted F ₂ ND NF ₃ ND HF 0.701 NL / hr

Example 3

Inconel 600 type reactor (jacket type reactor using refrigerant circulation cooling method) having an inner diameter of about 40 mm Φ and 500 mm in length is used, and NH is divided into two parts by supplying gas from the central part of the reactor and two parts of the inlet. _The reaction and analysis were carried out under the same conditions as in Example 1 except that ₃ was supplied. The analysis results are shown in Table 4. The yield of NF ₃ based on F ₂ was about 76%.

Reaction product gas Analysis Unreacted NH ₃ ND Unreacted F ₂ 0.011 NL / hr NF ₃ 0.133 NL / hr HF ND

Comparative Example 2

The reaction was carried out under the same conditions as in Example 1, except that NH ₃ was supplied at 0.30 NL / hr, F ₂ gas was supplied at 1.05 NL / hr, and helium gas was supplied at 36.7 NL / hr as the diluent gas. And analysis was performed. The analysis results are shown in Table 5. When supplying the NH ₃ gas in a molar concentration of less than 1-fold based on 1 mol of F ₂ gas, unreacted F ₂ gas is to remain in a large quantity it can be seen that a disadvantage.

Reaction product gas Analysis Unreacted NH ₃ ND Unreacted F ₂ 0.825 NL / hr NF ₃ 0.049 NL / hr HF ND

Comparative Example 3

Reaction and analysis under the same conditions as in Example 1, except that NH3 was supplied at 1.58 NL / hr, F2 gas at 0.526 NL / hr, and helium gas at 36.7 NL / hr as the diluent gas. Was carried out. The analysis results are shown in Table 6. When supplying the NH ₃ gas to the F molar concentration of 2-fold to ₂ based on 1 mol of the gas, the unreacted NH ₃ gas is to remain in a large quantity can be seen that a disadvantage.

Reaction product gas Analysis Unreacted NH ₃ 0.867 Nl / hr Unreacted F ₂ 0.010 NL / hr NF ₃ 0.119 NL / hr HF ND

As described above, according to the present invention, NF ₃ , which has been difficult to produce in high yield until now, can be produced in excellent yield. Moreover, NF ₃ produced by the method of the present invention can be used as an etching gas or a cleaning gas.

Claims (13)

A process for producing nitrogen trifluoride comprising reacting fluorine gas with ammonia gas in a gaseous phase at a temperature of 80 ° C. or lower in the presence of diluent gas, The concentration of fluorine gas supplied is 3 mol% or less, the concentration of ammonia gas supplied is 6 mol% or less, Characterized in that the diluent gas is selected from at least one selected from the group consisting of nitrogen, helium, argon, hexafluoroethane and octafluoropropane, Method for producing nitrogen trifluoride. The process for producing nitrogen trifluoride according to claim 1, wherein the reaction temperature is 50 ° C. or less. The method for producing nitrogen trifluoride according to claim 1 or 2, wherein the concentration of the supplied fluorine gas and the ammonia gas is in a molar ratio of 1: 1 to 1: 2. The method for producing nitrogen trifluoride according to claim 1 or 2, wherein the fluorine gas and / or ammonia gas are supplied in an amount. delete delete delete The method for producing nitrogen trifluoride according to claim 1 or 2, wherein the dilution gas is circulated and reused. The process for producing nitrogen trifluoride according to claim 1 or 2, comprising the step of treating unreacted fluorine gas with an unreacted fluorine gas with an aqueous alkali solution and / or ammonia. The process for producing nitrogen trifluoride according to claim 9, wherein the treating step is performed at 80 ° C or lower. delete delete delete