KR100436628B1 - 유체제어장치 - Google Patents

유체제어장치 Download PDF

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Publication number
KR100436628B1
KR100436628B1 KR1019960019057A KR19960019057A KR100436628B1 KR 100436628 B1 KR100436628 B1 KR 100436628B1 KR 1019960019057 A KR1019960019057 A KR 1019960019057A KR 19960019057 A KR19960019057 A KR 19960019057A KR 100436628 B1 KR100436628 B1 KR 100436628B1
Authority
KR
South Korea
Prior art keywords
regulator
connecting portion
opening
fluid control
gasket
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
KR1019960019057A
Other languages
English (en)
Korean (ko)
Other versions
KR960041763A (ko
Inventor
다다히로 오미
미치토 야마지
노부카즈 이케다
히로시 소로나시
시게루 이토이
데츠야 고지마
Original Assignee
가부시키가이샤 후지킨
다다히로 오미
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 가부시키가이샤 후지킨, 다다히로 오미 filed Critical 가부시키가이샤 후지킨
Publication of KR960041763A publication Critical patent/KR960041763A/ko
Application granted granted Critical
Publication of KR100436628B1 publication Critical patent/KR100436628B1/ko
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F16K27/003—Housing formed from a plurality of the same valve elements
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B11/00—Servomotor systems without provision for follow-up action; Circuits therefor
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B15/00—Fluid-actuated devices for displacing a member from one position to another; Gearing associated therewith
    • F15B15/08—Characterised by the construction of the motor unit
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/877—With flow control means for branched passages
    • Y10T137/87885—Sectional block structure

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Valve Housings (AREA)
  • Fuel Cell (AREA)
  • Feeding And Controlling Fuel (AREA)
KR1019960019057A 1995-05-31 1996-05-31 유체제어장치 Expired - Fee Related KR100436628B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP13370895A JP3661040B2 (ja) 1995-05-31 1995-05-31 流体制御装置
JP95-133708 1995-05-31

Publications (2)

Publication Number Publication Date
KR960041763A KR960041763A (ko) 1996-12-19
KR100436628B1 true KR100436628B1 (ko) 2004-07-31

Family

ID=15111041

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019960019057A Expired - Fee Related KR100436628B1 (ko) 1995-05-31 1996-05-31 유체제어장치

Country Status (8)

Country Link
US (1) US6135155A (cg-RX-API-DMAC7.html)
EP (1) EP0745918B1 (cg-RX-API-DMAC7.html)
JP (1) JP3661040B2 (cg-RX-API-DMAC7.html)
KR (1) KR100436628B1 (cg-RX-API-DMAC7.html)
CA (1) CA2177788A1 (cg-RX-API-DMAC7.html)
DE (1) DE69609017T2 (cg-RX-API-DMAC7.html)
IL (1) IL118437A (cg-RX-API-DMAC7.html)
TW (1) TW305916B (cg-RX-API-DMAC7.html)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3661040B2 (ja) * 1995-05-31 2005-06-15 忠弘 大見 流体制御装置
JP4066004B2 (ja) * 1997-10-13 2008-03-26 忠弘 大見 上段部材取付けの基準となる孔を有する複数の下段部材の固定方法および固定用治具
JP3965512B2 (ja) 1998-03-31 2007-08-29 株式会社フジキン 流体継手および流体継手において使用されるガスケット保持用リテーナ
US7334605B2 (en) * 2002-08-27 2008-02-26 Celerity, Inc. Modular substrate gas panel having manifold connections in a common plane
FR2856809B1 (fr) 2003-06-25 2005-08-05 Air Liquide Bloc robinet-detendeur a commandes de circuits haute et basse tension coordonnees
WO2006131989A1 (ja) 2005-06-09 2006-12-14 Akira Yamada 通路ブロックの結合装置
US7370674B2 (en) * 2004-02-20 2008-05-13 Michael Doyle Modular fluid distribution system
EP1909001A1 (en) * 2005-07-12 2008-04-09 Nippon Pillar Packing Co., Ltd. Connection structure between integrated panel and fluid device
JP4721010B2 (ja) * 2007-02-19 2011-07-13 株式会社フジキン 流体継手および流体継手において使用されるガスケット保持用リテーナ
JP5150628B2 (ja) * 2007-05-31 2013-02-20 東京エレクトロン株式会社 流体制御装置
US20080302426A1 (en) * 2007-06-06 2008-12-11 Greg Patrick Mulligan System and method of securing removable components for distribution of fluids
US8307854B1 (en) 2009-05-14 2012-11-13 Vistadeltek, Inc. Fluid delivery substrates for building removable standard fluid delivery sticks
WO2010144541A2 (en) 2009-06-10 2010-12-16 Vistadeltek, Llc Extreme flow rate and/or high temperature fluid delivery substrates
WO2012151292A2 (en) 2011-05-02 2012-11-08 Advantage Group International Inc. Manifold system for gas and fluid delivery
JP5802532B2 (ja) * 2011-12-05 2015-10-28 株式会社フジキン ダイヤフラム弁およびダイヤフラム弁用シートホルダユニット
US9109732B2 (en) 2012-04-18 2015-08-18 Vistadeltek, Llc EZ-seal gasket for joining fluid pathways
US9454158B2 (en) 2013-03-15 2016-09-27 Bhushan Somani Real time diagnostics for flow controller systems and methods
TWI687611B (zh) 2014-04-17 2020-03-11 美商威士塔戴爾泰克有限責任公司 用於密封地結合相對流體導管端口之環形襯墊及形成一高純度流體接頭之方法
US10983537B2 (en) 2017-02-27 2021-04-20 Flow Devices And Systems Inc. Systems and methods for flow sensor back pressure adjustment for mass flow controller
JP7556744B2 (ja) 2020-10-20 2024-09-26 イハラサイエンス株式会社 接続構造
KR20230062876A (ko) * 2020-10-30 2023-05-09 가부시키가이샤 후지킨 폐지 마개 및 유체 제어 장치

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0333566A (ja) * 1989-06-29 1991-02-13 Hitachi Metals Ltd デジタルバルブ
JPH06307568A (ja) * 1993-04-26 1994-11-01 Tokimec Inc 制御弁とその接続ポートに装着するオリフィス及びチェック弁
EP0745918A2 (en) * 1995-05-31 1996-12-04 Tadahiro Ohmi Fluid control device

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3111139A (en) * 1961-09-29 1963-11-19 Beckett Harcum Co Stack type valves
AT237985B (de) * 1961-10-23 1965-01-25 Festo Maschf Stoll G Ventil-Batterie für pneumatische und hydraulische Druckmedien
US4483365A (en) * 1982-07-27 1984-11-20 Louis G. Basso, Jr. Interlocking modular valve mounting assembly
JP3505589B2 (ja) * 1992-04-20 2004-03-08 清原 まさ子 管継手用リテーナ
US5366261A (en) * 1992-04-27 1994-11-22 Fujikin Incorporated Pipe joint with a gasket retainer
JP2568365B2 (ja) * 1993-02-10 1997-01-08 株式会社東芝 ガス供給装置
JP2695745B2 (ja) * 1993-09-02 1998-01-14 シーケーディ株式会社 ガス供給装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0333566A (ja) * 1989-06-29 1991-02-13 Hitachi Metals Ltd デジタルバルブ
JPH06307568A (ja) * 1993-04-26 1994-11-01 Tokimec Inc 制御弁とその接続ポートに装着するオリフィス及びチェック弁
EP0745918A2 (en) * 1995-05-31 1996-12-04 Tadahiro Ohmi Fluid control device

Also Published As

Publication number Publication date
IL118437A (en) 1998-10-30
TW305916B (cg-RX-API-DMAC7.html) 1997-05-21
DE69609017T2 (de) 2001-03-08
JP3661040B2 (ja) 2005-06-15
CA2177788A1 (en) 1996-12-01
EP0745918B1 (en) 2000-06-28
IL118437A0 (en) 1996-09-12
JPH08326943A (ja) 1996-12-10
US6135155A (en) 2000-10-24
EP0745918A3 (en) 1996-12-11
EP0745918A2 (en) 1996-12-04
KR960041763A (ko) 1996-12-19
DE69609017D1 (de) 2000-08-03

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