CA2177788A1 - Fluid control device - Google Patents

Fluid control device

Info

Publication number
CA2177788A1
CA2177788A1 CA002177788A CA2177788A CA2177788A1 CA 2177788 A1 CA2177788 A1 CA 2177788A1 CA 002177788 A CA002177788 A CA 002177788A CA 2177788 A CA2177788 A CA 2177788A CA 2177788 A1 CA2177788 A1 CA 2177788A1
Authority
CA
Canada
Prior art keywords
regulator
channel
control device
connector
valve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
CA002177788A
Other languages
English (en)
French (fr)
Inventor
Tadahiro Ohmi
Michio Yamaji
Shigeru Itoi
Nobukazu Ikeda
Tetsuya Kojima
Hiroshi Morokoshi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujikin Inc
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of CA2177788A1 publication Critical patent/CA2177788A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F16K27/003—Housing formed from a plurality of the same valve elements
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B11/00—Servomotor systems without provision for follow-up action; Circuits therefor
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B15/00—Fluid-actuated devices for displacing a member from one position to another; Gearing associated therewith
    • F15B15/08—Characterised by the construction of the motor unit
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/877—With flow control means for branched passages
    • Y10T137/87885—Sectional block structure

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Valve Housings (AREA)
  • Fuel Cell (AREA)
  • Feeding And Controlling Fuel (AREA)
CA002177788A 1995-05-31 1996-05-30 Fluid control device Abandoned CA2177788A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP13370895A JP3661040B2 (ja) 1995-05-31 1995-05-31 流体制御装置
JP7-133708 1995-05-31

Publications (1)

Publication Number Publication Date
CA2177788A1 true CA2177788A1 (en) 1996-12-01

Family

ID=15111041

Family Applications (1)

Application Number Title Priority Date Filing Date
CA002177788A Abandoned CA2177788A1 (en) 1995-05-31 1996-05-30 Fluid control device

Country Status (8)

Country Link
US (1) US6135155A (cg-RX-API-DMAC7.html)
EP (1) EP0745918B1 (cg-RX-API-DMAC7.html)
JP (1) JP3661040B2 (cg-RX-API-DMAC7.html)
KR (1) KR100436628B1 (cg-RX-API-DMAC7.html)
CA (1) CA2177788A1 (cg-RX-API-DMAC7.html)
DE (1) DE69609017T2 (cg-RX-API-DMAC7.html)
IL (1) IL118437A (cg-RX-API-DMAC7.html)
TW (1) TW305916B (cg-RX-API-DMAC7.html)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3661040B2 (ja) * 1995-05-31 2005-06-15 忠弘 大見 流体制御装置
JP4066004B2 (ja) * 1997-10-13 2008-03-26 忠弘 大見 上段部材取付けの基準となる孔を有する複数の下段部材の固定方法および固定用治具
JP3965512B2 (ja) 1998-03-31 2007-08-29 株式会社フジキン 流体継手および流体継手において使用されるガスケット保持用リテーナ
US7334605B2 (en) * 2002-08-27 2008-02-26 Celerity, Inc. Modular substrate gas panel having manifold connections in a common plane
FR2856809B1 (fr) 2003-06-25 2005-08-05 Air Liquide Bloc robinet-detendeur a commandes de circuits haute et basse tension coordonnees
WO2006131989A1 (ja) 2005-06-09 2006-12-14 Akira Yamada 通路ブロックの結合装置
US7370674B2 (en) * 2004-02-20 2008-05-13 Michael Doyle Modular fluid distribution system
EP1909001A1 (en) * 2005-07-12 2008-04-09 Nippon Pillar Packing Co., Ltd. Connection structure between integrated panel and fluid device
JP4721010B2 (ja) * 2007-02-19 2011-07-13 株式会社フジキン 流体継手および流体継手において使用されるガスケット保持用リテーナ
JP5150628B2 (ja) * 2007-05-31 2013-02-20 東京エレクトロン株式会社 流体制御装置
US20080302426A1 (en) * 2007-06-06 2008-12-11 Greg Patrick Mulligan System and method of securing removable components for distribution of fluids
US8307854B1 (en) 2009-05-14 2012-11-13 Vistadeltek, Inc. Fluid delivery substrates for building removable standard fluid delivery sticks
WO2010144541A2 (en) 2009-06-10 2010-12-16 Vistadeltek, Llc Extreme flow rate and/or high temperature fluid delivery substrates
WO2012151292A2 (en) 2011-05-02 2012-11-08 Advantage Group International Inc. Manifold system for gas and fluid delivery
JP5802532B2 (ja) * 2011-12-05 2015-10-28 株式会社フジキン ダイヤフラム弁およびダイヤフラム弁用シートホルダユニット
US9109732B2 (en) 2012-04-18 2015-08-18 Vistadeltek, Llc EZ-seal gasket for joining fluid pathways
US9454158B2 (en) 2013-03-15 2016-09-27 Bhushan Somani Real time diagnostics for flow controller systems and methods
TWI687611B (zh) 2014-04-17 2020-03-11 美商威士塔戴爾泰克有限責任公司 用於密封地結合相對流體導管端口之環形襯墊及形成一高純度流體接頭之方法
US10983537B2 (en) 2017-02-27 2021-04-20 Flow Devices And Systems Inc. Systems and methods for flow sensor back pressure adjustment for mass flow controller
JP7556744B2 (ja) 2020-10-20 2024-09-26 イハラサイエンス株式会社 接続構造
KR20230062876A (ko) * 2020-10-30 2023-05-09 가부시키가이샤 후지킨 폐지 마개 및 유체 제어 장치

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3111139A (en) * 1961-09-29 1963-11-19 Beckett Harcum Co Stack type valves
AT237985B (de) * 1961-10-23 1965-01-25 Festo Maschf Stoll G Ventil-Batterie für pneumatische und hydraulische Druckmedien
US4483365A (en) * 1982-07-27 1984-11-20 Louis G. Basso, Jr. Interlocking modular valve mounting assembly
JPH0333566A (ja) * 1989-06-29 1991-02-13 Hitachi Metals Ltd デジタルバルブ
JP3505589B2 (ja) * 1992-04-20 2004-03-08 清原 まさ子 管継手用リテーナ
US5366261A (en) * 1992-04-27 1994-11-22 Fujikin Incorporated Pipe joint with a gasket retainer
JP2568365B2 (ja) * 1993-02-10 1997-01-08 株式会社東芝 ガス供給装置
JPH06307568A (ja) * 1993-04-26 1994-11-01 Tokimec Inc 制御弁とその接続ポートに装着するオリフィス及びチェック弁
JP2695745B2 (ja) * 1993-09-02 1998-01-14 シーケーディ株式会社 ガス供給装置
JP3661040B2 (ja) * 1995-05-31 2005-06-15 忠弘 大見 流体制御装置

Also Published As

Publication number Publication date
IL118437A (en) 1998-10-30
TW305916B (cg-RX-API-DMAC7.html) 1997-05-21
DE69609017T2 (de) 2001-03-08
JP3661040B2 (ja) 2005-06-15
EP0745918B1 (en) 2000-06-28
IL118437A0 (en) 1996-09-12
JPH08326943A (ja) 1996-12-10
US6135155A (en) 2000-10-24
EP0745918A3 (en) 1996-12-11
KR100436628B1 (ko) 2004-07-31
EP0745918A2 (en) 1996-12-04
KR960041763A (ko) 1996-12-19
DE69609017D1 (de) 2000-08-03

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Legal Events

Date Code Title Description
EEER Examination request
FZDE Discontinued