KR100418624B1 - 자이로스코프 및 그 제조 방법 - Google Patents

자이로스코프 및 그 제조 방법 Download PDF

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Publication number
KR100418624B1
KR100418624B1 KR10-2001-0006695A KR20010006695A KR100418624B1 KR 100418624 B1 KR100418624 B1 KR 100418624B1 KR 20010006695 A KR20010006695 A KR 20010006695A KR 100418624 B1 KR100418624 B1 KR 100418624B1
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KR
South Korea
Prior art keywords
electrode
displacement
detection
gyroscope
displacement electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
KR10-2001-0006695A
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English (en)
Korean (ko)
Other versions
KR20020066486A (ko
Inventor
김용권
김성혁
Original Assignee
(주) 인텔리마이크론즈
김용권
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to KR10-2001-0006695A priority Critical patent/KR100418624B1/ko
Application filed by (주) 인텔리마이크론즈, 김용권 filed Critical (주) 인텔리마이크론즈
Priority to JP2002564435A priority patent/JP3713019B2/ja
Priority to CNB028002954A priority patent/CN1242913C/zh
Priority to PCT/KR2002/000135 priority patent/WO2002064497A1/en
Priority to DE60229919T priority patent/DE60229919D1/de
Priority to EP02711501A priority patent/EP1360144B1/en
Priority to AT02711501T priority patent/ATE414674T1/de
Priority to US10/257,532 priority patent/US6845668B2/en
Publication of KR20020066486A publication Critical patent/KR20020066486A/ko
Application granted granted Critical
Publication of KR100418624B1 publication Critical patent/KR100418624B1/ko
Assigned to 서울대학교산학협력단 reassignment 서울대학교산학협력단 권리지분의 전부이전등록 Assignors: 김용권
Assigned to (주)마이크로인피니티 reassignment (주)마이크로인피니티 권리의 전부이전등록 Assignors: (주) 인텔리마이크론즈, 서울대학교산학협력단
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/02—Rotary gyroscopes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0064—Constitution or structural means for improving or controlling the physical properties of a device
    • B81B3/0067—Mechanical properties
    • B81B3/0078—Constitution or structural means for improving mechanical properties not provided for in B81B3/007 - B81B3/0075
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0062—Devices moving in two or more dimensions, i.e. having special features which allow movement in more than one dimension
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5733—Structural details or topology
    • G01C19/5755—Structural details or topology the devices having a single sensing mass
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/02—Sensors
    • B81B2201/0228—Inertial sensors
    • B81B2201/0242—Gyroscopes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/01—Suspended structures, i.e. structures allowing a movement
    • B81B2203/0136—Comb structures
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/04—Electrodes

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)
KR10-2001-0006695A 2001-02-12 2001-02-12 자이로스코프 및 그 제조 방법 Expired - Lifetime KR100418624B1 (ko)

Priority Applications (8)

Application Number Priority Date Filing Date Title
KR10-2001-0006695A KR100418624B1 (ko) 2001-02-12 2001-02-12 자이로스코프 및 그 제조 방법
US10/257,532 US6845668B2 (en) 2001-02-12 2002-01-30 Gyroscope
PCT/KR2002/000135 WO2002064497A1 (en) 2001-02-12 2002-01-30 Gyroscope and fabrication method thereof
DE60229919T DE60229919D1 (https=) 2001-02-12 2002-01-30
EP02711501A EP1360144B1 (en) 2001-02-12 2002-01-30 Gyroscope and fabrication method thereof
AT02711501T ATE414674T1 (de) 2001-02-12 2002-01-30 Kreisel und verfahren zur dessen herstellung
JP2002564435A JP3713019B2 (ja) 2001-02-12 2002-01-30 ジャイロスコープ及びその製造方法
CNB028002954A CN1242913C (zh) 2001-02-12 2002-01-30 陀螺仪及其制造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR10-2001-0006695A KR100418624B1 (ko) 2001-02-12 2001-02-12 자이로스코프 및 그 제조 방법

Publications (2)

Publication Number Publication Date
KR20020066486A KR20020066486A (ko) 2002-08-19
KR100418624B1 true KR100418624B1 (ko) 2004-02-11

Family

ID=19705617

Family Applications (1)

Application Number Title Priority Date Filing Date
KR10-2001-0006695A Expired - Lifetime KR100418624B1 (ko) 2001-02-12 2001-02-12 자이로스코프 및 그 제조 방법

Country Status (8)

Country Link
US (1) US6845668B2 (https=)
EP (1) EP1360144B1 (https=)
JP (1) JP3713019B2 (https=)
KR (1) KR100418624B1 (https=)
CN (1) CN1242913C (https=)
AT (1) ATE414674T1 (https=)
DE (1) DE60229919D1 (https=)
WO (1) WO2002064497A1 (https=)

Families Citing this family (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7037805B2 (en) 2003-05-07 2006-05-02 Honeywell International Inc. Methods and apparatus for attaching a die to a substrate
US6927098B2 (en) * 2003-05-07 2005-08-09 Honeywell International Inc. Methods and apparatus for attaching MEMS devices to housing
SG112898A1 (en) * 2003-12-11 2005-07-28 Singapore Tech Dynamics Pte Sensing apparatus, system and method
JP2005326620A (ja) * 2004-05-14 2005-11-24 Fujitsu Ltd マイクロミラー素子
CN100338470C (zh) * 2005-03-25 2007-09-19 中北大学 单片双惯性参数加速度计陀螺仪
US7491567B2 (en) 2005-11-22 2009-02-17 Honeywell International Inc. MEMS device packaging methods
JP5070778B2 (ja) * 2006-09-20 2012-11-14 株式会社デンソー 力学量センサ
US8061201B2 (en) * 2007-07-13 2011-11-22 Georgia Tech Research Corporation Readout method and electronic bandwidth control for a silicon in-plane tuning fork gyroscope
US8748206B2 (en) 2010-11-23 2014-06-10 Honeywell International Inc. Systems and methods for a four-layer chip-scale MEMS device
US9493344B2 (en) 2010-11-23 2016-11-15 Honeywell International Inc. MEMS vertical comb structure with linear drive/pickoff
US9171964B2 (en) 2010-11-23 2015-10-27 Honeywell International Inc. Systems and methods for a three-layer chip-scale MEMS device
US8776601B2 (en) 2010-11-23 2014-07-15 Honeywell International Inc. MEMS sensor using multi-layer movable combs
CN102507981B (zh) * 2011-11-02 2013-06-05 重庆理工大学 一种带耦合梁结构的单敏感质量元硅微二维加速度传感器
CN102633227B (zh) * 2012-03-16 2014-07-23 中北大学 一种mems惯性传感器结构压膜阻尼可调装置
US9581447B2 (en) * 2014-07-08 2017-02-28 Honeywell International Inc. MEMS gyro motor loop filter
US9903718B2 (en) * 2015-05-28 2018-02-27 Invensense, Inc. MEMS device mechanical amplitude control
US10514259B2 (en) 2016-08-31 2019-12-24 Analog Devices, Inc. Quad proof mass MEMS gyroscope with outer couplers and related methods
US10415968B2 (en) 2016-12-19 2019-09-17 Analog Devices, Inc. Synchronized mass gyroscope
US10697774B2 (en) 2016-12-19 2020-06-30 Analog Devices, Inc. Balanced runners synchronizing motion of masses in micromachined devices
US10627235B2 (en) 2016-12-19 2020-04-21 Analog Devices, Inc. Flexural couplers for microelectromechanical systems (MEMS) devices
FR3065800B1 (fr) * 2017-04-27 2019-08-02 Safran Resonateur configure pour etre integre a un capteur angulaire inertiel
US10948294B2 (en) 2018-04-05 2021-03-16 Analog Devices, Inc. MEMS gyroscopes with in-line springs and related systems and methods
US11193771B1 (en) 2020-06-05 2021-12-07 Analog Devices, Inc. 3-axis gyroscope with rotational vibration rejection
US11686581B2 (en) 2020-06-08 2023-06-27 Analog Devices, Inc. Stress-relief MEMS gyroscope
CN116075728A (zh) 2020-06-08 2023-05-05 美国亚德诺半导体公司 驱动和感测应力释放装置
CN111609844A (zh) * 2020-06-18 2020-09-01 中汽研汽车检验中心（天津）有限公司 一种陀螺仪安装固定装置及应用结构
US11698257B2 (en) 2020-08-24 2023-07-11 Analog Devices, Inc. Isotropic attenuated motion gyroscope
CN113135548B (zh) * 2021-04-20 2024-06-11 广州蜂鸟传感科技有限公司 一种压电微机械执行器

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19530007C2 (de) * 1995-08-16 1998-11-26 Bosch Gmbh Robert Drehratensensor
US5945599A (en) * 1996-12-13 1999-08-31 Kabushiki Kaisha Toyota Chuo Kenkyusho Resonance type angular velocity sensor
US5914521A (en) * 1997-07-30 1999-06-22 Motorola, Inc. Sensor devices having a movable structure
US6122961A (en) * 1997-09-02 2000-09-26 Analog Devices, Inc. Micromachined gyros
KR100231715B1 (ko) 1997-11-25 1999-11-15 정선종 평면 진동형 마이크로 자이로스코프
KR100316774B1 (ko) * 1999-01-15 2001-12-12 이형도 마이크로 관성 센서의 제작 방법
US6481285B1 (en) 1999-04-21 2002-11-19 Andrei M. Shkel Micro-machined angle-measuring gyroscope

Also Published As

Publication number Publication date
KR20020066486A (ko) 2002-08-19
JP3713019B2 (ja) 2005-11-02
CN1242913C (zh) 2006-02-22
JP2004518964A (ja) 2004-06-24
US20030159509A1 (en) 2003-08-28
US6845668B2 (en) 2005-01-25
ATE414674T1 (de) 2008-12-15
DE60229919D1 (https=) 2009-01-02
EP1360144A1 (en) 2003-11-12
WO2002064497A1 (en) 2002-08-22
EP1360144B1 (en) 2008-11-19
CN1457319A (zh) 2003-11-19

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