KR100412076B1 - Integrated Thin Film Battery With High Stability and Fabrication Method Thereof - Google Patents

Abstract

According to the present invention, a unit thin film battery having excellent stability can be manufactured, and stability can be improved to achieve high energy and high amount of electric current having minimum stability by integrating a thin film battery in multiple layers in the horizontal and vertical directions. An integrated thin film battery and a method for manufacturing the same, The present invention comprises: a plurality of battery layers composed of a plurality of unit thin film cells composed of a positive electrode, an electrolyte, a negative electrode; A substrate and an outer wall formed on the bottom and side surfaces of the plurality of battery layers; A plurality of current collectors formed in contact with the positive and negative electrodes of each of the plurality of battery layers to collect currents; A lead wire connecting the plurality of current collectors to each other; An insulating layer formed between the plurality of battery layers to electrically insulate each other; It provides an integrated thin-film battery having improved stability, characterized in that consisting of a protective layer for sealing the top of the battery layer upper surface and the upper end of the outer wall of the plurality of battery layers.

Description

Integrated Thin Film Battery With High Stability and Fabrication Method Thereof}

The present invention relates to an integrated thin film battery having improved stability, and more particularly, to forming a plurality of grooves by etching a portion of a substrate when a thin film battery is formed on a substrate, and simultaneously forming a thin film battery therein. Thereby, the present invention relates to an integrated thin film battery having improved stability while adjusting to have various capacities and desired voltages, and a method of manufacturing the same.

In general, due to the advancement of the semiconductor industry, micro-miniature electric / electronic devices have emerged in various fields such as smart cards, micro-electromechanical systems (MEMS), micro air vehicles (MAVs), and micro-medical devices. Power consumption is also minimizing, and thus, the necessity of a thin film battery as a power supply source is urgently needed.

Most of the elements conventionally take the form of receiving power from an external power supply after each device is manufactured. However, the introduction of a thin film battery makes it possible to have a power supply in the device itself.

On the other hand, the general structure of the thin film battery is a form manufactured by depositing the constituent materials using a variety of semiconductor processes on the substrate, there is a feature that can be produced freely because there is almost no restriction in shape or size.

A typical structure of such a thin film battery is shown in FIG. 1. Referring to FIG. 1, the unit thin film battery includes a Si substrate 10, a positive electrode current collector 11 formed of a Ti (Pt, Au) -based material formed on the Si substrate 10, and the positive electrode current collector 11. A positive electrode 13 formed of LiCoO ₂ and overlaying a part of the Si substrate 10 exposed on the upper and side surfaces and one side of the positive electrode 13, for example, LiPON. An electrolyte 14 made of an electrolyte, and formed on the electrolyte 14, for example, a cathode 15 made of Li, and the cathode 15 and the electrolyte 15 in order to block the reaction with the atmosphere. A negative electrode current collector 12 made of a Cu or Ti-based material covering one side of one side and a part of one side Si substrate 10, the exposed part of the negative electrode 15 and the electrolyte 14, and a positive electrode current. A part of the current collector 11 and a protective layer 16 for protecting the cathode current collector 12 are formed.

The substrate 10 may be made of glass, alumina, sapphire, various semiconductor or polymer materials in addition to Si, and the cathode 15 may be made of SnO ₂ , SnO, SiTON, Li ₄ Ti ₄ O _12, etc. in addition to Li. In addition, the anode 13 may be made of a transition metal oxide such as LiNiO ₂ , LiMn ₂ O ₄ , in addition to LiCoO ₂ . The cathode current collector 12 may be made of a material such as V, Cr, Mn, Fe, Co, Y, Zr, Hf, Ta, etc. in addition to Cu and Ti.

However, since the conventional unit thin film battery formed as described above is deposited on a substrate, there is a problem in that the stability of the battery may be seriously affected due to a physical action due to the substantial exposure to the substrate when stacked in a multilayer. In addition, the lead wires formed in series or in parallel may be damaged by external influences, thereby degrading battery life and stability.

Accordingly, the present invention has been made in view of the problems of the prior art, and its object is to combine the thin film cells in series or parallel in the horizontal direction and the vertical direction to have a high energy, a high amount of current while deteriorating stability and external environment. The present invention provides an integrated thin film battery and a method for manufacturing the same, which have improved stability integrated to have a structure that reduces the number of pixels.

1 is a cross-sectional view showing a conventional general thin film battery structure.

2 is a cross-sectional view for explaining a first embodiment of the present invention.

3 is a cross-sectional view for explaining a second embodiment of the present invention.

Figures 4a to 4m is a process chart for explaining the manufacturing process of the first embodiment of the present invention.

Explanation of symbols on the main parts of the drawings

20: substrate 21a, 21b: first outer wall

21c: first groove 22: first positive current collector

23a, 23b: first inner wall 24 to 26, 32 to 34: unit thin film battery

27: first negative electrode current collector 28: insulating layer

29: first lead wire 30: second positive electrode current collector

31a, 31d: second outer wall 31b, 31c: second inner wall

35: 2nd lead wire 36: 2nd negative electrode current collector

37: protective layer

In order to achieve the above object, the present invention comprises the steps of (a) forming a first groove that can accommodate a plurality of layers of a battery layer consisting of a plurality of thin film cells by etching the surface of the substrate made of an electrically insulating material; (b) forming a plurality of battery layers in the first groove, (b ₁ ) forming a first current collector connecting one electrode of the plurality of unit thin film batteries constituting the battery layer to the first groove; (B ₂ ), depositing an insulating material on the first current collector and then etching to form a plurality of second grooves in which one unit thin film battery is accommodated, respectively, (b ₃ ) Forming a plurality of unit thin film cells by depositing a positive electrode, an electrolyte, and a negative electrode material constituting a thin film battery on each second groove, (b ₄ ) forming a second current collector on the plurality of unit thin film cells And (b ₅ ) forming a plurality of battery layers formed by depositing an insulating layer of an insulating material on the second current collector; (c) forming lead wires connecting the first and second current collectors of different battery layers to each other among the plurality of battery layers; And (d) forming a protective layer of an insulating material on the plurality of battery layers.

The first groove is formed at least deeper than the total thickness of the battery layer formed therein, and the second groove is the same depth as the total thickness of the positive electrode, electrolyte, and negative electrode constituting the unit thin film battery formed therein. Is formed.

The lead wire includes a first lead wire formed to connect each first current collector among the plurality of battery layers, and a second lead wire formed to connect each second current collector, and the plurality of battery layers are connected in parallel. Alternatively, a plurality of battery layers may be connected in series by connecting the first current collector and the second current collector of the battery layers adjacent to each other among the plurality of battery layers.

If the positive electrode material constituting the unit thin film battery is a transition metal oxide, the battery layer is formed in a single layer, and if the positive electrode material constituting the unit thin film battery is vanadium oxide, the battery layer is formed in multiple layers.

The first and second insulating layer and the protective layer is an insulating material having a buffering action and electrical insulation against the volume change caused by the charge and discharge of the thin film battery, the protective layer is composed of an electrical insulating material, a metal, a polymer Protecting the cell from electrical insulation and the external environment, wherein the insulating material is made from any one selected from SiO ₂ , TEOS, SOG, and combinations of these materials.

Each current collector of the plurality of unit thin film batteries constituting the battery layer is formed as one current collector for each positive electrode or negative electrode and is shared with each other, and each positive electrode and electrolyte of the unit thin film battery constituting the battery layer. The negative electrode material is formed of the same material, time and thickness.

In addition, the present invention comprises the steps of: (a) etching a surface of a substrate made of an electrically insulating material to form a first groove capable of accommodating a plurality of layers of battery layers composed of a plurality of thin film cells; (b) forming a first current collector for connecting one electrode of the plurality of unit thin film batteries constituting the battery layer to the first groove; (c) depositing an insulating material on the first current collector and then etching to form a plurality of second grooves in which one unit thin film cell is accommodated; (d) forming a plurality of unit thin film cells by depositing a positive electrode, an electrolyte, and a negative electrode material constituting the thin film battery on each of the second grooves; (e) depositing and forming a second current collector on the plurality of unit thin film cells; And (f) forming a protective layer of an insulating material on the second current collector.

In addition, the present invention includes a plurality of battery layers composed of a plurality of unit thin film cells composed of a positive electrode, an electrolyte, a negative electrode; A substrate and an outer wall formed on the bottom and side surfaces of the plurality of battery layers; A plurality of current collectors formed in contact with the positive and negative electrodes of each of the plurality of battery layers to collect currents; A lead wire connecting the plurality of current collectors to each other; An insulating layer formed between the plurality of battery layers to electrically insulate each other; It provides an integrated thin-film battery having improved stability, characterized in that consisting of a protective layer for sealing the top of the battery layer upper surface and the upper end of the outer wall of the plurality of battery layers.

The plurality of battery layers includes a plurality of inner walls that electrically insulate and separate the plurality of unit thin film cells constituting each battery layer.

As described above, in the present invention, by forming a plurality of grooves on a substrate made of various semiconductor (insulating material) substrates and simultaneously forming a thin film battery, it is possible to simultaneously form a thin film battery of the same capacity and to the external environment. To prevent deterioration.

(Example)

Hereinafter, with reference to the accompanying drawings showing a preferred embodiment of the present invention described above in more detail.

2 is a cross-sectional view illustrating a first embodiment of the present invention, FIG. 3 is a cross-sectional view illustrating a second embodiment of the present invention, and FIGS. 4A to 4M illustrate a first embodiment of the present invention. It is a process chart for demonstrating a process.

The present invention is a method for manufacturing an integrated thin film battery by integrating a plurality of unit thin film batteries (24 to 25, 32 to 34), considering the voltage and current to be output, as shown in Figures 2 and 3, By forming a plurality of unit thin film batteries 24 to 25 and 32 to 34 in one layer, one battery layer is formed, and the battery layer is formed in a plurality of upper and lower layers.

By forming a plurality of battery layers composed of the unit thin film batteries 24 to 25 and 32 to 34 as described above, and connecting each other in series or in parallel, a desired output voltage and current amount can be set and output.

Here, the battery due to the volume occupied by the insulator which separates the plurality of unit thin film cells 24 to 25 and 32 to 34 as in the present invention without forming one unit thin film battery having the largest current capacity per volume of the battery. The reason for producing the battery while causing a volume reduction of is as follows.

In the case of a thin film battery, the output voltage per unit thin film battery is set to about 3 to 4 V (output voltage: 3 V for vanadium oxide, 3.7 V for transition metal oxide, and thus 3 to 4 V). Therefore, when the driving voltage of the electric / electronic device driven by the battery is higher than the output voltage of 3 ~ 4V of the unit thin film battery has a disadvantage that a separate means for adjusting the voltage is required, the current is output from one battery Therefore, there is a problem in that the charge and discharge efficiency is reduced due to a number of charge and discharge.

In order to solve the problems caused by the existing unit thin film battery, the present invention enables a plurality of unit thin film cells to be connected in series or in parallel so that a desired output voltage and current amount can be set at the manufacturing stage and manufactured. The method of constructing a plurality of unit thin film batteries enables high efficiency discharge rather than the case of a battery.

The present invention provides two types of embodiments connected in parallel and in series, and the first embodiment in the case of the parallel connection shown in FIG. 2 will be described in detail.

The first embodiment of the present invention is the first layer battery layer 240 composed of the first to third unit thin film batteries 24 to 25 and the second layer battery composed of the fourth to six unit thin film batteries 32 to 34. The layer 320, the lower surface and the side surface of the first battery layer 240, and the substrate 20 and the first outer walls 21a and 21b surrounding the side surfaces of the second battery layers 240 and 320, and First and second positive / cathode current collectors 22, 27, 30, and 36 formed on upper and lower surfaces of the first and second battery layers 240 and 320, respectively, to collect currents; A first lead wire 29 connecting the first positive electrode current collector 22 and the second positive electrode current collector 30 to each other, and the first negative electrode current collector 27 and the second negative electrode current collector 36 ), A second lead wire 35 connecting each other, an insulating layer 28 that electrically insulates the first battery layer 240 and the second battery layer 320, and the second battery layer 320. ) And a protective layer 37 for sealing the upper ends of the first outer walls 21a and 21b. It is configured.

The first and second battery layers 240 and 320 are the first inner walls 23a and 23b and the fourth to electrically insulate the first to third unit thin film batteries 24 to 25 constituting each battery layer. Second inner walls 31b and 31c which electrically insulate the ˜6 unit thin film batteries 32 to 34 are formed.

The substrate 20 made of an insulating material, ie, silicon oxide, used in a thin film battery is determined in consideration of the capacity of the battery, and an insulating material such as an alumina polymer may be used as the substrate 20 in addition to the silicon oxide. The thickness of the substrate 20 is determined in consideration of the thicknesses of the first and second battery layers 240 and 320 accommodated therein.

A first groove 21c is provided on the substrate 20 to provide a space in which the first and second battery layers 240 and 320 composed of the first to sixth unit thin film batteries 24 to 25 and 32 to 34 are accommodated. In order to form, the remaining portions except for the first outer walls 21a and 21b formed on one surface of the substrate 20 are removed by etching (see FIG. 4A).

The first outer walls 21a and 21b formed by the etching process are edge walls formed at the edges of the upper surface of the substrate 20, and the first grooves 21c formed by the first outer walls 21a and 21b. As described above, the depth of N) is formed in consideration of the thicknesses of the first and second battery layers 240 and 320 accommodated therein.

Here, as an etching method, in the case of silicon oxide, alumina, etc., a physical etching method using plasma, ions, etc., or a chemical etching method using an acidic substance or a liquid chemical substance may be used. In the case of a polymer, a photosensitive agent may be used. Etching may be performed using a photo lithography method.

The first cathode current collector 22 is deposited to occupy the entire bottom area of the first groove 21c formed by the above method (see FIG. 4B). The first positive current collector 22 serves to connect the positive electrodes of the first to third unit thin film batteries 24 to 26 formed thereon in parallel, and available materials include Pt, Ti, V, Al, and the like. In order to facilitate contact with the substrate 20, an additional metal layer such as Ti (for example, Ti + Pt when the anode of the battery is LiCoO _{2 and} V and Al when VO ₂ is introduced) is introduced. It is also possible.

Deposition methods used to deposit the first cathode current collector 22 include DC magnetron sputtering, RF magnetron sputtering, thermal evaporation, and the like.

After the first positive current collector 22 is formed as described above, the first grooves 21c must be separated into a plurality of second grooves 23c to form the first to third unit thin film batteries 24 to 25. In order to form a plurality of second grooves 23c, a first inner wall is formed by depositing an insulator such as silicon oxide on the anode current collector 22 and etching the same as the method of forming the first grooves 21c. 23a and 23b are protruded (refer to FIG. 4C).

In addition, a material constituting the first to third unit thin film batteries 24 to 25 in the second groove 23c formed by the first inner walls 23a and 23b and the first outer walls 21a and 21b. Anodes 24a, 25a, 26a, electrolytes 24b, 25b, 26b, and cathodes 24c, 25c, 26c are deposited in that order (see FIG. 4D). However, the anodes 24a, 25a, 26a, the electrolytes 24b, 25b, 26b and the cathodes 24c, 25c, and 26c constituting the first to third unit thin film batteries 24 to 25 are made of the same material, time and thickness. It must be deposited to improve productivity and to solve problems such as cell reversal, and when using the cell after integration, the individual capacity of the first to sixth unit thin films (24 to 25 and 32 to 34) due to the difference in capacity Deterioration of the unit thin film battery can be prevented.

Each of the anodes 24a, 25a, 26a, 32a, 33a, and 34a constituting the first to sixth unit thin film batteries 24 to 25 and 32 to 34 may be LiCoO ₂ , LiNiO ₂ , LiMn ₂ O ₄ , or LiVO _2. Transition metal oxides or mixtures thereof, and the electrolytes 24b, 25b, 26b, 32b, 33b, 34b use nitrided Li ₃ PO _4, that is, Li _x PO _y N _z , and the negative electrode 24c, 25c, 26c, 32c, 33c, 34c) uses Li, Sn, SnO, SnO ₂ , and the like.

The anodes 24a, 25a, 26a, 32a, 33a, 34a are RF magnetron sputtering, and the electrolytes 24b, 25b, 26b, 32b, 33b, 34b are reactive RF magnetron sputtering. The cathodes 24c, 25c, 26c, 32c, 33c, 34c are deposited by RF magnetron sputtering in the case of thermal evaporation tin (Sn) oxide in the case of lithium (Li).

At this time, when forming the first to third unit thin film batteries 24 to 25, the insulating layer 28 and the lead wire (described below) are formed between one side of the first battery layer 240 and the first outer wall 21b. 29 is formed leaving a first space 23d for accommodating the 29).

In addition, a first cathode current collector 27 is deposited on the first battery layer 240 (see FIG. 4E). The first cathode current collector 27 functions to connect the cathodes of the first to third unit thin film batteries 24 to 25 in parallel, and uses DC, RF, or magnetron sputtering using Cu, Co, Ti, or the like. Deposit by thermal evaporation.

In addition, the remaining portion except the part of the first negative electrode current collector 28 and the sidewall portion of the first battery layer 240 (the portion in contact with the first space 23d) may be formed of an insulator such as silicon oxide or alumina. It deposits to form the insulating layer 28 (refer FIG. 4F). At this time, the first space 23d is partially encroached by the insulating layer 28, and the remaining space is the first lead wire accommodating space 23d 'in which the first lead wire 29, which will be described below, is formed. Is used.

In addition, a second space is formed at the other end of the insulating layer 28 with the first outer wall 21a and a little space to accommodate the second outer wall 31a and the second lead wire 35 to be described below. 28a).

First to third unit thin film batteries 24 to 25 and fourth to six unit thin film batteries 32 to 34 arranged in a horizontal direction on the substrate 20, and first and second battery layers arranged in a vertical direction ( The first and second inner walls 23a, 23b, 31b, and 31c, the insulating layer 28, and the second outer walls 31a and 31d formed between the 240 and 320 may be the first to sixth unit thin film batteries 24 to. 25, 32 ~ 34) should be able to secure mechanical stability while acting as electrical insulation, and should be able to buffer the volume change due to charge and discharge of thin film battery. As a material satisfying these characteristics, one selected from SiO ₂ , TEOS, and SOG is used, or one selected from a combination thereof is formed.

The first lead wire 29 is accommodated among the lead wires required for battery combination (serial or parallel connection) between the first battery layer 240 formed on the second groove 23c and the second battery layer 320 described below. The first lead wire 29 is formed in the first lead wire accommodating space 23d 'by using a material such as Au, Al, Cu, Co, Ti, or the like (see FIG. 4G). Accordingly, one end of the first positive current collector 22 and the lower end of the first lead wire 29 are electrically connected to each other.

Subsequently, in order to form the second battery layer 320, the second cathode current collector 30 is formed on the first battery layer 240 in the same manner as the first cathode current collector 22. See FIG. 4H). At this time, one end of the second positive current collector 30 is connected to an upper end of the first lead wire 29, and the other end thereof is formed to coincide with an end of the insulating layer 28. The second 'space 28a' is formed while maintaining 28a).

A third groove 31e for accommodating the fourth to sixth unit thin film batteries 32 to 34 constituting the second battery layer 320 is formed in the same manner as the method for forming the first groove 23c (FIG. 4I). Reference).

In other words, the second outer walls 31a and 31d are deposited on the second cathode current collector 30 using silicon oxide, alumina, or the like as an insulator, and then etched to inscribe the first outer walls 21a and 21b. ) And the third inner groove 31e formed by the second outer walls 31a and 31d and the second inner walls 31b and 31c by simultaneously forming the second inner walls 31b and 31c therein.

At this time, the second 'space 28a' is partially encroached by the second outer wall 31a, and the remaining part is a second lead wire accommodating space 28a "capable of accommodating the second lead wire 35. The second lead wire 35 is formed in the second lead wire accommodating space 28a ″ in the same manner as the method of forming the first lead wire 29 (see FIG. 4J).

The fourth to sixth unit thin film batteries 32 to 34 constituting the second battery layer 320 are formed in the third groove 31e in the same manner as the first battery layer 240 forming method (see FIG. 4K). ).

A second cathode current collector 36 is formed on the second lead wire 35 and the second battery layer 320 in the same manner as the first cathode current collector 27 is formed (see FIG. 4L). At this time, the second negative electrode current collector 36 includes the negative electrodes 32c, 33c, and 34c of the fourth to sixth unit thin film batteries 24 to 25 and 32 to 34 constituting the second battery layer 320. Connect the upper ends of the and second lead wires 35, respectively.

On the second cathode current collector 36, a deposition process is performed using silicon oxide or alumina, which is an insulator, to deposit a protective layer 37 that protects the battery while electrically insulating the second battery layer 320 (Fig. 4m). At this time, since the protective layer 37 must have a function of protecting the battery from the external environment together with the electrical insulation function of the second cathode current collector 36 of the uppermost layer, silicon or alumina or the like metal or polymer To ensure mechanical stability.

As a result, the thin film battery formed as described above has the first battery layer 240 and the fourth to sixth unit thin film batteries 32 to 34 formed by connecting the first to third unit thin film batteries 24 to 25 in parallel. Has a battery structure in which the second battery layers 320 formed in parallel are connected to each other in parallel.

Therefore, each of the first and second battery layers 240 and 320 may output a current capacity three times larger than that of a unit thin film battery, and since the first and second battery layers 240 and 320 are connected to each other in parallel. As a result, six times the current capacity can be output.

On the other hand, in Figure 3 by stacking a layer battery consisting of three unit thin-film cells four times to connect each layer battery in series, it provides a three times the current capacity and a four times the voltage increase effect on the basis of the unit thin film battery.

To this end, in the second embodiment shown in FIG. 3, the outer walls 110a and 110b are formed on the substrate 109 in the same manner as the first outer walls 21a and 21b, and the first positive current collector 111 is formed. The first layer inner walls 112a and 112b are formed, and the first layer thin film cells 113a to 113c are formed in the grooves thereby formed, and the first cathode current collector 114 is formed to form the first layer. Form a battery.

A first insulating layer 115 is formed on the first layer battery, a first lead wire 116 is formed on the left side thereof, and a second positive current collector 117 and a second layer inner walls 118a and 118b are sequentially formed. The second layer thin film batteries 119a to 119c and the second negative electrode current collector 120 are formed to form a second layer battery.

The second insulating layer 121 is formed on the second layer battery, the second lead wire 122 is formed on the right side thereof, and the third positive current collector 123 and the third layer inner walls 124a and 124b are sequentially formed. The third layer thin film batteries 125a to 125c and the third negative electrode current collector 126 are formed to form a third layer battery.

The third insulating layer 127 is formed on the third layer battery, and the third lead wire 128 is formed on the left side thereof, and the fourth positive current collector 129 and the fourth layer inner wall 130a, 130b), the fourth layer thin film batteries 131a to 131c, and the fourth cathode current collector 132 are formed to form a fourth layer battery, and finally, a protective layer 133 is formed.

Therefore, since the first to fourth layer batteries are connected in series by the first to third lead wires, three times the current capacity and four times the voltage are output based on the unit thin film battery.

In the first and second embodiments, a case in which a parallel or series configuration is performed using three unit thin film cells is described as an example. However, the combination may be changed according to the required voltage and current amount.

In the present invention, as shown in the first and second embodiments, since the unit thin film cells constituting the thin film battery of one layer can be collected as one positive electrode / cathode current collector and output current, respectively. There is a feature of shortening the process that does not require a separate current collector for the unit thin film battery.

On the other hand, the embodiment has been described using a transition metal oxide as an example of a positive electrode material constituting a thin film battery, but after the deposition treatment of the transition metal oxides to be used as a positive active material (positive active matterial) necessarily requires heat treatment When the thin film battery is laminated in multiple layers, it is practically impossible to repeatedly perform the heat treatment.

Heat treatment of the positive electrode material is usually 800 ?? Although the thin film battery can be formed at the same time before and after, the solid electrolyte and the lithium negative electrode are both deteriorated because the electrolyte and the lithium negative electrode of the lower battery layer are affected when heat treatment is performed on the battery layer formed thereafter. It causes a problem that cannot serve as a battery.

Therefore, in the case of forming a thin film battery in a multilayer as in the present invention, a material that can be used as a positive electrode material is limited to vanadium oxide (VO ₂ ) that does not require a heat treatment process.

As a result, if a thin film battery is to be formed in multiple layers, vanadium oxide is used as the anode material of the thin film battery, and when the battery is composed of a single layer, the anode is first deposited and then the electrolyte and the cathode are deposited. The transition metal oxide may be used to construct an integrated thin film battery.

The present invention made as described above, by introducing a plurality of grooves (groove) to a substrate made of a semiconductor substrate, to form a thin film battery integrated in the horizontal direction and vertical direction, it is possible to secure excellent stability compared to the conventional thin film battery And by sharing the positive and negative current collectors, process simplifications can be achieved. In addition, while excellent in stability compared to the existing integrated thin film battery, it is possible to manufacture a thin film battery having a low cost, high capacity, high energy density.

In the above, the present invention has been illustrated and described with reference to specific preferred embodiments, but the present invention is not limited to the above-described embodiments and the general knowledge in the technical field to which the present invention pertains without departing from the spirit of the present invention. Various changes and modifications will be made by those who possess.

Claims (15)

(a) etching a surface of a substrate made of an electrically insulating material to form a first groove capable of accommodating a plurality of layers of a battery layer composed of a plurality of thin film cells; (b) to form a plurality of battery layers in the first groove, (b ₁ ) forming a first current collector for connecting one electrode of the plurality of unit thin film batteries constituting the battery layer to the first groove; (b ₂ ), depositing an insulating material on the first current collector and then etching to form a plurality of second grooves in which one unit thin film battery is accommodated; (b ₃ ) forming a plurality of unit thin film batteries by depositing a positive electrode, an electrolyte, and a negative electrode material constituting the thin film battery on each of the second grooves; (b ₄ ) depositing and forming a second current collector on the plurality of unit thin film cells; (b ₅ ) forming a plurality of battery layers formed by depositing an insulating layer of an insulating material on the second current collector; (c) a first lead wire and a plurality of second currents connecting the plurality of first current collectors to each other among a plurality of first current collectors and second current collectors formed on different battery layers among the plurality of battery layers; Any one of a parallel lead wire comprising a second lead wire connecting the current collectors to each other, and a plurality of series lead wires connecting the respective first current collectors and the second current collectors in series in a plurality of battery layers; Forming a; And and (d) forming a protective layer of an insulating material on the plurality of battery layers. The method of claim 1, wherein the first groove is formed at least deeper than a total thickness of a battery layer formed therein. The method of claim 1, wherein the second groove is formed to have the same depth as the total thickness of the positive electrode, the electrolyte, and the negative electrode constituting the unit thin film battery formed therein. delete delete The method of claim 1, wherein the battery layer is formed as a single layer when the cathode material constituting the unit thin film battery is a transition metal oxide. The method of claim 1, wherein the battery layer is formed in multiple layers when the cathode material constituting the unit thin film battery is vanadium oxide. The integrated thin film battery of claim 1, wherein the first and second insulating layers and the protective layer are insulating materials having a buffering function against electrical volume change and electrical insulating properties. Way. The method of claim 1, wherein the protective layer is composed of an electrical insulating material, a metal, and a polymer to protect the battery from electrical insulation and an external environment. The method of claim 8, wherein the insulating material is any one selected from SiO ₂ , TEOS, SOG, and a combination thereof. The integrated thin film of claim 1, wherein each current collector of the plurality of unit thin film cells constituting the battery layer is formed as one current collector for each positive electrode or negative electrode and is shared with each other. Battery manufacturing method. The method of claim 1, wherein each of the positive electrode, the electrolyte, and the negative electrode of the unit thin film battery constituting the battery layer is formed of the same material, time, and thickness. (a) etching a surface of a substrate made of an electrically insulating material to form a first groove capable of accommodating a plurality of layers of a battery layer composed of a plurality of thin film cells; (b) forming a first current collector for connecting one electrode of the plurality of unit thin film batteries constituting the battery layer to the first groove; (c) depositing an insulating material on the first current collector and then etching to form a plurality of second grooves in which one unit thin film cell is accommodated; (d) forming a plurality of unit thin film cells by depositing a positive electrode, an electrolyte, and a negative electrode material constituting the thin film battery on each of the second grooves; (e) depositing and forming a second current collector on the plurality of unit thin film cells; And and (f) forming a protective layer of an insulating material on the second current collector. A plurality of battery layers including a plurality of unit thin film cells each consisting of a cathode / electrolyte / cathode and a plurality of inner walls electrically insulating the plurality of unit thin film cells; A plurality of positive electrode current collectors and negative electrode current collectors formed in contact with the positive and negative electrodes of the plurality of unit thin film cells constituting the plurality of battery layers to collect currents; An insulating layer electrically insulating the plurality of battery layers and the positive electrode current collector and the negative electrode current collector formed on each of the battery layers from other adjacent battery layers and the positive electrode current collector or the negative electrode current collector; Among the plurality of positive current collectors and the plurality of negative current collectors, parallel lead wires connecting the plurality of positive current collectors to each other and the plurality of negative current collectors to each other; Any one selected from among a plurality of series leads connecting the cathode current collectors in series; A substrate formed on a lower surface of a current collector formed at a lowermost end of a plurality of positive or negative current collectors; An outer wall formed on the outermost surfaces of the plurality of battery layers; An integrated thin film battery having improved stability, comprising a protective layer formed on an upper surface of a current collector formed at the top of a plurality of positive or negative current collectors. delete