KR100346876B1 - 디지탈마이크로-미러장치의제조방법 - Google Patents

디지탈마이크로-미러장치의제조방법 Download PDF

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Publication number
KR100346876B1
KR100346876B1 KR1019950016368A KR19950016368A KR100346876B1 KR 100346876 B1 KR100346876 B1 KR 100346876B1 KR 1019950016368 A KR1019950016368 A KR 1019950016368A KR 19950016368 A KR19950016368 A KR 19950016368A KR 100346876 B1 KR100346876 B1 KR 100346876B1
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South Korea
Prior art keywords
support
photoresist layer
photoresist
substrate
manufacturing
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Expired - Fee Related
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English (en)
Korean (ko)
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KR960002496A (ko
Inventor
제임스시.베이커
스코트에이취.프랭글
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텍사스 인스트루먼츠 인코포레이티드
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Publication of KR960002496A publication Critical patent/KR960002496A/ko
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Publication of KR100346876B1 publication Critical patent/KR100346876B1/ko
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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Micromachines (AREA)
  • Drying Of Semiconductors (AREA)
KR1019950016368A 1994-06-21 1995-06-20 디지탈마이크로-미러장치의제조방법 Expired - Fee Related KR100346876B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/263,208 US5454906A (en) 1994-06-21 1994-06-21 Method of providing sacrificial spacer for micro-mechanical devices
US08/263,208 1994-06-21

Publications (2)

Publication Number Publication Date
KR960002496A KR960002496A (ko) 1996-01-26
KR100346876B1 true KR100346876B1 (ko) 2002-11-18

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KR1019950016368A Expired - Fee Related KR100346876B1 (ko) 1994-06-21 1995-06-20 디지탈마이크로-미러장치의제조방법

Country Status (8)

Country Link
US (1) US5454906A (enExample)
EP (1) EP0689077B1 (enExample)
JP (1) JPH0862517A (enExample)
KR (1) KR100346876B1 (enExample)
CN (1) CN1099614C (enExample)
CA (1) CA2149932A1 (enExample)
DE (1) DE69524816T2 (enExample)
TW (1) TW284862B (enExample)

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US5454906A (en) 1995-10-03
DE69524816T2 (de) 2002-08-29
DE69524816D1 (de) 2002-02-07
CN1099614C (zh) 2003-01-22
TW284862B (enExample) 1996-09-01
CN1117148A (zh) 1996-02-21
KR960002496A (ko) 1996-01-26
EP0689077A3 (en) 1997-05-21
EP0689077B1 (en) 2002-01-02
EP0689077A2 (en) 1995-12-27
CA2149932A1 (en) 1995-12-22

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