KR100322180B1 - 반도체칩 성형프레스의 오일 냉각장치 - Google Patents
반도체칩 성형프레스의 오일 냉각장치 Download PDFInfo
- Publication number
- KR100322180B1 KR100322180B1 KR10-1999-0060813A KR19990060813A KR100322180B1 KR 100322180 B1 KR100322180 B1 KR 100322180B1 KR 19990060813 A KR19990060813 A KR 19990060813A KR 100322180 B1 KR100322180 B1 KR 100322180B1
- Authority
- KR
- South Korea
- Prior art keywords
- oil
- cooler
- cooling device
- cooling
- inlet pipe
- Prior art date
Links
- 238000001816 cooling Methods 0.000 title claims abstract description 43
- 238000000465 moulding Methods 0.000 title claims description 17
- 239000004065 semiconductor Substances 0.000 claims abstract description 13
- 238000007599 discharging Methods 0.000 claims abstract description 4
- 230000003584 silencer Effects 0.000 claims description 5
- 238000009434 installation Methods 0.000 abstract description 6
- 238000010586 diagram Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
Abstract
Description
Claims (1)
- 유압시스템을 이용하여 반도체칩을 성형하는 성형프레스에 있어서, 상기 성형프레스에 오일쿨러와 에어쿨러를 이용하여 오일을 냉각시키는 냉각장치를 형성하되, 이 냉각장치의 내부에는 고온의 오일이 유입되는 오일유입관과 오일유입관을 통해 냉각된 오일을 오일탱크측으로 배출시키는 오일배출관을 갖는 오일쿨러가 내장되고, 이 오일쿨러의 외부에는 에어쿨러에서 발생된 냉공기를 냉각공간으로 안내하는 냉공기유입관이 연결되는 하우징이 형성되며, 이 하우징의 하단에는 냉각공간을 통해 오일을 냉각시킨 공기가 외부로 토출될 때 소음을 차단하는 소음기가 설치되는 것을 특징으로 하는 반도체칩 성형프레스의 오일 냉각장치.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR10-1999-0060813A KR100322180B1 (ko) | 1999-12-23 | 1999-12-23 | 반도체칩 성형프레스의 오일 냉각장치 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR10-1999-0060813A KR100322180B1 (ko) | 1999-12-23 | 1999-12-23 | 반도체칩 성형프레스의 오일 냉각장치 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20010063633A KR20010063633A (ko) | 2001-07-09 |
KR100322180B1 true KR100322180B1 (ko) | 2004-09-07 |
Family
ID=19628513
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR10-1999-0060813A KR100322180B1 (ko) | 1999-12-23 | 1999-12-23 | 반도체칩 성형프레스의 오일 냉각장치 |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR100322180B1 (ko) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR102484757B1 (ko) | 2021-07-07 | 2023-01-04 | 고현경 | 유압 프레스의 작동유 과열방지 시스템 |
-
1999
- 1999-12-23 KR KR10-1999-0060813A patent/KR100322180B1/ko not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
KR20010063633A (ko) | 2001-07-09 |
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