KR100300256B1 - 활성화기체의검출방법 - Google Patents

활성화기체의검출방법 Download PDF

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Publication number
KR100300256B1
KR100300256B1 KR1019940024856A KR19940024856A KR100300256B1 KR 100300256 B1 KR100300256 B1 KR 100300256B1 KR 1019940024856 A KR1019940024856 A KR 1019940024856A KR 19940024856 A KR19940024856 A KR 19940024856A KR 100300256 B1 KR100300256 B1 KR 100300256B1
Authority
KR
South Korea
Prior art keywords
voltage
gas
coating
current
inert
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
KR1019940024856A
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English (en)
Korean (ko)
Inventor
우도씨.퍼나이즈
Original Assignee
맥켈러 로버트 루이스
다우 코닝 코포레이션
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 맥켈러 로버트 루이스, 다우 코닝 코포레이션 filed Critical 맥켈러 로버트 루이스
Application granted granted Critical
Publication of KR100300256B1 publication Critical patent/KR100300256B1/ko
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T436/00Chemistry: analytical and immunological testing
    • Y10T436/17Nitrogen containing
    • Y10T436/173845Amine and quaternary ammonium
    • Y10T436/175383Ammonia
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T436/00Chemistry: analytical and immunological testing
    • Y10T436/17Nitrogen containing
    • Y10T436/177692Oxides of nitrogen
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T436/00Chemistry: analytical and immunological testing
    • Y10T436/20Oxygen containing
    • Y10T436/207497Molecular oxygen

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
KR1019940024856A 1993-10-04 1994-09-30 활성화기체의검출방법 Expired - Fee Related KR100300256B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US131,278 1993-10-04
US08/131,278 US5403748A (en) 1993-10-04 1993-10-04 Detection of reactive gases

Publications (1)

Publication Number Publication Date
KR100300256B1 true KR100300256B1 (ko) 2001-12-28

Family

ID=22448720

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019940024856A Expired - Fee Related KR100300256B1 (ko) 1993-10-04 1994-09-30 활성화기체의검출방법

Country Status (7)

Country Link
US (1) US5403748A (enExample)
EP (1) EP0650047B1 (enExample)
JP (1) JPH07159365A (enExample)
KR (1) KR100300256B1 (enExample)
CA (1) CA2132810A1 (enExample)
DE (1) DE69422878T2 (enExample)
TW (1) TW255045B (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4401570A1 (de) * 1994-01-20 1995-07-27 Rwe Energie Ag Einrichtung für die Messung von Zustandsgrößen in Gasen mit zumindest einem Halbleiter-Gassensor
US6018002A (en) * 1998-02-06 2000-01-25 Dow Corning Corporation Photoluminescent material from hydrogen silsesquioxane resin
US6572974B1 (en) 1999-12-06 2003-06-03 The Regents Of The University Of Michigan Modification of infrared reflectivity using silicon dioxide thin films derived from silsesquioxane resins
KR20070112954A (ko) 2006-05-24 2007-11-28 엘지.필립스 엘시디 주식회사 Tft 어레이 기판 및 그 제조방법
CN103430246B (zh) 2011-02-01 2017-05-17 慧与发展有限责任合伙企业 负微分电阻装置
US9558869B2 (en) 2013-07-30 2017-01-31 Hewlett Packard Enterprise Development Lp Negative differential resistance device

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3149398A (en) * 1961-08-10 1964-09-22 Sprague Electric Co Silicon dioxide solid capacitor
US3271591A (en) * 1963-09-20 1966-09-06 Energy Conversion Devices Inc Symmetrical current controlling device
JPS5311075B2 (enExample) * 1973-02-09 1978-04-19
NL7414775A (nl) * 1974-11-13 1976-05-17 Philips Nv Werkwijze voor de vervaardiging van een span- ningsafhankelijke weerstand en daarmede ver- kregen spanningsafhankelijke weerstand.
US4507394A (en) * 1982-12-24 1985-03-26 Ngk Insulators, Ltd. High electric resistant zirconia and/or hafnia ceramics
US4756977A (en) * 1986-12-03 1988-07-12 Dow Corning Corporation Multilayer ceramics from hydrogen silsesquioxane
GB8816631D0 (en) * 1988-07-13 1988-08-17 Raychem Ltd Circuit protection arrangement
GB8816632D0 (en) * 1988-07-13 1988-08-17 Raychem Ltd Electrical device
US5284569A (en) * 1990-10-18 1994-02-08 Leybold Inficon Inc. Miniature gas sensor
US5312684A (en) * 1991-05-02 1994-05-17 Dow Corning Corporation Threshold switching device

Also Published As

Publication number Publication date
DE69422878T2 (de) 2000-06-15
DE69422878D1 (de) 2000-03-09
EP0650047B1 (en) 2000-02-02
EP0650047A1 (en) 1995-04-26
CA2132810A1 (en) 1995-04-05
JPH07159365A (ja) 1995-06-23
US5403748A (en) 1995-04-04
TW255045B (enExample) 1995-08-21

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