KR100265997B1 - Manufacturing method of semiconductor device - Google Patents

Manufacturing method of semiconductor device Download PDF

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KR100265997B1
KR100265997B1 KR1019970022401A KR19970022401A KR100265997B1 KR 100265997 B1 KR100265997 B1 KR 100265997B1 KR 1019970022401 A KR1019970022401 A KR 1019970022401A KR 19970022401 A KR19970022401 A KR 19970022401A KR 100265997 B1 KR100265997 B1 KR 100265997B1
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layer
gate
silicide
polysilicon layer
silicide layer
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KR1019970022401A
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KR19980086134A (en
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이창재
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김영환
현대반도체주식회사
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    • H01L29/4941—
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
    • H01L21/283—Deposition of conductive or insulating materials for electrodes conducting electric current
    • H01L21/285—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation
    • H01L21/28506—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers
    • H01L21/28512—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers on semiconductor bodies comprising elements of Group IV of the Periodic Table
    • H01L21/2855—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers on semiconductor bodies comprising elements of Group IV of the Periodic Table by physical means, e.g. sputtering, evaporation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
    • H01L21/283—Deposition of conductive or insulating materials for electrodes conducting electric current
    • H01L21/285—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation
    • H01L21/28506—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers
    • H01L21/28512—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers on semiconductor bodies comprising elements of Group IV of the Periodic Table
    • H01L21/28556—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers on semiconductor bodies comprising elements of Group IV of the Periodic Table by chemical means, e.g. CVD, LPCVD, PECVD, laser CVD
    • H01L29/401—

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Insulated Gate Type Field-Effect Transistor (AREA)
  • Electrodes Of Semiconductors (AREA)

Abstract

PURPOSE: A method for fabricating a semiconductor device is to increase the reliability of a device by uniformly maintaining a threshold voltage so that an impurity doped into a polysilicon layer is not diffused into a silicide layer. CONSTITUTION: A field oxide layer(33) is formed on a predetermined part of a semiconductor substrate(31) by a LOCOS(local oxidation of silicon) method. A gate oxide layer(35) is formed by thermal oxidizing the surface of the semiconductor substrate. A polysilicon layer(37) is deposited on the field oxide layer and the gate oxide layer by a CVD(chemical vapor deposition) method. A barrier layer(39) and a silicide layer(41) are deposited on the polysilicon layer by the CVD method and a sputtering method. A gate(43) is formed by patterning the silicide layer, the barrier layer, and the polysilicon layer in this order, using a photolithography method. A low concentration region(45) is formed by ion implanting and annealing N-type impurity ions into the substrate. A sidewall(47) is formed on the side surface of the gate.

Description

반도체장치의 제조방법Manufacturing Method of Semiconductor Device

본 발명은 반도체장치의 제조방법에 관한 것으로서, 특히, 게이트를 금속으로 형성하는 반도체장치의 제조방법에 관한 것이다.BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method of manufacturing a semiconductor device, and more particularly, to a method of manufacturing a semiconductor device in which a gate is formed of a metal.

반도체장치는 양호한 회로 동작 성능과 집적도를 얻기위하여 집적 회로를 구성하는 MOSFET의 크기를 감소시키기 위한 노력의 결과로 반도체장치의 제조기술이 서브미크론(submicron) 단위로 축소(scale down)되었다. 따라서, 집적 회로의 구성 요소인 단일 MOSFET에 있어서 게이트(gate line)의 폭이 좁아지게 되었으며, 그에 딸라 게이트의 선저항이 크게 증가될 뿐만 아니라 인접하는 게이트를 사이의 공간(speace)의 감소에 의한 기생 커패시턴스(parastic capacitance)도 크게 증가되므로 회로의 신호전달 속도가 크게 저하되게 되었다. 즉, 회로의 신호 전달 속도에 영향을 미치는 지연시간(delay time)은 저항(R)과 커패시턴스(C)의 곱인 RC로 표시되는 데, 여기서, 저항(R)은 게이트의 선지항이고, 커패시턴스(C)는 인접하는 게이트 사이의 기생 커패시턴스이다.Semiconductor devices have been scaled down in submicron units as a result of efforts to reduce the size of MOSFETs constituting integrated circuits in order to obtain good circuit operation performance and integration. Therefore, the gate line width becomes narrow in a single MOSFET, which is a component of an integrated circuit, and thus the gate resistance of the gate is greatly increased, and the space between adjacent gates is reduced due to the decrease in the peace between adjacent gates. Parasitic capacitance is also greatly increased, resulting in a significant decrease in the signal transmission speed of the circuit. In other words, the delay time affecting the signal transmission speed of the circuit is represented by RC, which is the product of the resistance R and the capacitance C, where the resistance R is the gate term of the gate, and the capacitance ( C) is the parasitic capacitance between adjacent gates.

그러므로, 집적 회로의 집접도가 증가됨에 따라 인접하는 게이트들 사이의 기생커패시턴스가 증가되므로 회로의 신호전달속도를 향상시키기 위해서는 게이트의 선저항을 낮추어야 한다. 게이트의 선저항을 낮추는 방법은 다결정실리콘 상에 실리사이드를 적층한 폴리사이드(polycide) 구조로 형성하는 것이다.Therefore, as the degree of integration of integrated circuits increases, parasitic capacitance between adjacent gates increases, so the line resistance of the gate must be lowered to improve the signal transfer speed of the circuit. The method of lowering the line resistance of the gate is to form a polycide structure in which silicide is laminated on polycrystalline silicon.

한편, 반도체소자의 집적화가 거듭되면서 단일 소자의 크기가 줄어들어 게이트의 종횡비(aspect ratio : 높이/선폭)가 커지게 된다. 게이트의 종횡비를 감소시키기 위해서는 게이트를 선폭 감소에 비례하여 두께를 감소시켜야 한다. 그러나, 게이트의 선폭 및 두께가 감소되면 저항이 증가되는 데, 게이트의 저항이 증가되는 것을 방지하기 위해서는 다결정실리콘의 두께를 감소시키고 저항이 낮은 실리사이드의 두께를 증가시켜야 한다.On the other hand, as the integration of semiconductor devices is repeated, the size of a single device is reduced, so that the aspect ratio of the gate is increased. In order to reduce the aspect ratio of the gate, the gate should be reduced in proportion to the reduction in line width. However, as the line width and thickness of the gate decrease, the resistance increases. In order to prevent the gate resistance from increasing, the thickness of the polysilicon must be reduced and the thickness of the silicide having low resistance must be increased.

폴리사이드 구조를 갖는 게이트에서 실리사이드로 텅스턴(W), 탄탈륨(Ta), 티타늄(Ti) 및 몰리브덴(Mo) 등의 고융접 금속의 실리사이드가 사용된다.As the silicide in the gate having the polyside structure, silicide of a high-melting metal such as tungsten (W), tantalum (Ta), titanium (Ti) and molybdenum (Mo) is used.

제1a도 내지 d도는 종래 기술에 따른 반도체장치의 제조공정도이다.1A to 1D are manufacturing process diagrams of a semiconductor device according to the prior art.

제1a도를 참조하면, P형의 반도체기판(11) 표면의 소정 부분에 LOCOS (Local Oxidation of Silicon)등의 선택산화방법에 의해 필드산화막(13)을 형성하여 소자의 활성영역과 필드영역을 한정한다. 상기에서, 소자의 활성영역과 필드영역을 한정하는 필드산화막(13)을 반도체기판(11)에 트렌치를 형성하고 산화실리콘을 채워 형성할 수도 있다.Referring to FIG. 1A, a field oxide film 13 is formed on a predetermined portion of a surface of a P-type semiconductor substrate 11 by a selective oxidation method such as LOCOS (Local Oxidation of Silicon) to form an active region and a field region of an element. It is limited. In the above description, a field oxide film 13 defining an active region and a field region of the device may be formed in the semiconductor substrate 11 by filling trenches and filling silicon oxide.

제1b도를 참조하면, 반도체기판(11)의 표면을 열산화하여 게이트산화막(15)을 형성한다. 그리고 필드산화막(13) 및 게이트산화막(15)의 상에 불순물이 고농도로 도핑된 다결정실리콘층(17)을 화학기상증착(Chemical Vapor Deposition : 이하, CVD라 칭함) 방법으로 700~1200Å 정도의 두께로 증착하고, 이 다결정실리콘층(17) 상에 WSi2, TaSi2TiSi2또는 MoSi2등의 고융점 금속의 실리사이드층(19)을 CVD 방법 또는 스퍼터링(sputtering) 방법으로 700~1200Å정도의 두께로 증착하고 열처리하여 형성한다.Referring to FIG. 1B, a gate oxide film 15 is formed by thermally oxidizing the surface of the semiconductor substrate 11. The polysilicon layer 17 doped with a high concentration of impurities on the field oxide film 13 and the gate oxide film 15 is chemically deposited by chemical vapor deposition (hereinafter referred to as CVD). On the polysilicon layer 17, a silicide layer 19 of a high melting point metal such as WSi 2 , TaSi 2 TiSi 2, or MoSi 2 was deposited by a CVD method or a sputtering method to a thickness of about 700 to 1200 kPa. It is formed by vapor deposition and heat treatment.

제1c도를 참조하면, 실리사이드층(19) 및 다뎔정실리콘층(17)을 포토리쏘그래피(photolithography) 방법으로 패터닝하여 폴리사이드 구조의 게이트(20)를 형성한다. 그리고, 게이트(20)을 마스크로 하여 인(P) 또는 아세틱(As) 등의 N형 불순물을 저농도로 이온주입하고 열처리하여 LDD(Lightly Doped Drain) 구조를 형성하는 저농도영역(21)을 형성한다.Referring to FIG. 1C, the silicide layer 19 and the polysilicon layer 17 are patterned by photolithography to form a gate 20 having a polyside structure. Then, using the gate 20 as a mask, a low concentration region 21 is formed in which an N-type impurity such as phosphorus (P) or acetic (As) is implanted at low concentration and heat treated to form a lightly doped drain (LDD) structure. do.

제1d도를 참조하면, 게이트(20)의 측면에 측벽(23)을 형성한다. 측벽(23)은 반도체기판(11) 상에 게이트(20)를 덮도록 산화실리콘을 CVD 방법으로 증착한 후 반응성 이온식각(Reactive Ion Etching : 이하, RIE라 칭함) 방법으로 게이트(20) 및 반도체기판(11)이 노출되도록 에치백(etchback)하므로써 형성된다. 그리고, 게이트(20)와 측벽(23)을 마스크로 사용하여 반도체기판(11)에 인(P) 또는 아세틱(As) 등의 N형의 불순물을 고농도로 이온 주입하고 열처리하여 저농도영역(21)의 소정 부분과 중첩되어 소오스 및 드레인영역으로 이용되는 고농도영역(25)을 형성한다.Referring to FIG. 1D, the sidewall 23 is formed on the side of the gate 20. The side wall 23 is formed by depositing silicon oxide on the semiconductor substrate 11 by the CVD method so as to cover the gate 20 and then the gate 20 and the semiconductor by the reactive ion etching (hereinafter referred to as RIE) method. It is formed by etching back so that the substrate 11 is exposed. Using the gate 20 and the sidewalls 23 as masks, the semiconductor substrate 11 is ion-implanted with an N-type impurity such as phosphorus (P) or acetic (As) at a high concentration, and subjected to heat treatment to obtain a low concentration region 21. A high concentration region 25 is formed which overlaps with a predetermined portion of the < RTI ID = 0.0 >

그러나, 상술한 종래 기술에 따른 반도체장치의 제조방법은 다결정실리콘층에 도핑된 불순물이 실리사이드층으로 확산되어 포화 상태를 유지할 수 없게 되어 드레쉬홀드전압(threshold voltage) 조절이 어려워 신뢰성이 저하되는 문제점이 있었다.However, the above-described method of manufacturing a semiconductor device according to the related art has a problem in that impurities doped in the polysilicon layer are diffused into the silicide layer so that the saturation state cannot be maintained, so that the threshold voltage is difficult to control and reliability is lowered. There was this.

따라서, 본 발명의 목적은 다결정실리콘층에 도핑된 불순불이 실리사이드층으로 확산되지 않도록 하여 드레쉬홀드전압을 일정하게 유지시켜 소자의 신뢰성이 저하되는 것을 방지할 수 있는 반도체장치의 제조방법을 제공함에 있다.Accordingly, an object of the present invention is to provide a method for manufacturing a semiconductor device which can prevent the impurity doped in the polysilicon layer from diffusing into the silicide layer, thereby keeping the threshold voltage constant so that the reliability of the device can be prevented from being lowered. Is in.

상기 목적을 달성하기 위한 본 발명에 따른 반도체장치의 제조방법은 제1도전형의 반도체기판 상에 게이트절연막을 형성하는 공정과, 상기 게이트절연막 상에 불순물이 고농도로 도핑된 다결정실리콘층, 장벽층과 실리사이드층을 순차적으로 증착하는 공정과, 상기 실리사이드층, 상기 장벽층 및 상기 다결정실리콘층을 패터닝하여 게이트를 형성하는 공정을 구비한다.A semiconductor device manufacturing method according to the present invention for achieving the above object is a step of forming a gate insulating film on a semiconductor substrate of the first conductivity type, polycrystalline silicon layer, barrier layer doped with a high concentration of impurities on the gate insulating film And depositing a silicide layer sequentially, and patterning the silicide layer, the barrier layer, and the polysilicon layer to form a gate.

이하, 첨부한 도면을 참조하여 본 발명을 상세히 설명한다.Hereinafter, the present invention will be described in detail with reference to the accompanying drawings.

제1a도 내지 d도는 종래 기술에 따른 반도체장치의 제조공정도.1A to 1D are manufacturing process diagrams of a semiconductor device according to the prior art.

제2a도 내지 d도는 본 발명에 따른 반도체장치의 제조공정도.2a to d are manufacturing process diagrams of a semiconductor device according to the present invention.

* 도면의 주요부분에 대한 부호의 설명* Explanation of symbols for main parts of the drawings

31 : 반도체기판 33 : 필드산화막31: semiconductor substrate 33: field oxide film

35 : 게이트산화막 37 : 다결정실리콘층35 gate oxide film 37 polysilicon layer

39 : 장벽층 41 : 실리사이드층39: barrier layer 41: silicide layer

43 : 게이트 45 : 저농도영역43: gate 45: low concentration region

47 : 측벽 49 : 고농도영역47 side wall 49 high concentration region

제2a도 내지 d도는 본 발명의 일 실시예에 따른 반도체장치의 제조 공정도이다.2A to 2D are manufacturing process diagrams of a semiconductor device according to an embodiment of the present invention.

제2a도를 참조하면, P형의 반도체기판(31) 표면의 소정 부분에 LOCOS 등의 선택산화방법에 의해 필드산화막(33)을 형성하여 소자의 활성영역과 필드영역을 한정한다. 상기에서, 소자의 활성영여고가 필드영역을 한정하는 필드산화막(33)을 반도체기판(31)에 트렌치를 형성하고 산화실리콘을 채워 형성할 수도 있다.Referring to FIG. 2A, the field oxide film 33 is formed on a predetermined portion of the surface of the P-type semiconductor substrate 31 by a selective oxidation method such as LOCOS to define the active region and the field region of the device. In the above, the field oxide film 33 defining the active region of the device may form a trench in the semiconductor substrate 31 and fill the silicon oxide.

제2b도를 참조하면, 반도체기판(31)의 표면을 열산화하여 게이트산화막(35)을 형성한다. 필드산화막(33) 및 게이트산화막(35)의 상에 불순물이 고농도로 도핑된 다결정실리콘층(37)을 CVD 방법으로 700~1200Å 정도의 두께로 증착한다. 그리고, 다결정실리콘층(37) 상에 WN, TaN, TiN 또는 MoN 등을 100~300Å 정도 두께로 증착한 장벽층(39)과 WSi2, TaSi2, TiSi2등을 700~1200Å 정도 두께로 증착한 실리사이드층(41)을 동일한 증착장치에서 CVD 방법으로 연속해서 형성하거나 또는 스퍼터링(sputtering) 방법으로 형성하고 열처리한다. 상기에서 장벽층(39)은 다결정실리콘층(37)에 도핑된 불순물이 실리사이드층(41)으로 확산되는 것을 방지한다. 그러므로, 다결정실리콘층(37)은 도핑된 불순물이 포화상태를 유지하므로 드레쉬홀드 전압을 일정하게 한다.Referring to FIG. 2B, the surface of the semiconductor substrate 31 is thermally oxidized to form a gate oxide film 35. On the field oxide film 33 and the gate oxide film 35, a polysilicon layer 37 doped with a high concentration of impurities is deposited to a thickness of about 700 to 1200 Å by the CVD method. Then, on the polysilicon layer 37, the barrier layer 39 and the WSi 2 , TaSi 2 , TiSi 2, etc., which are WN, TaN, TiN, or MoN, are deposited to a thickness of about 100 to about 300 μs, and about 700 to about 1200 μs on the polysilicon layer 37. One silicide layer 41 is continuously formed by the CVD method in the same vapor deposition apparatus or by the sputtering method and heat treated. The barrier layer 39 prevents impurities doped into the polysilicon layer 37 from diffusing into the silicide layer 41. Therefore, the polysilicon layer 37 keeps the threshold voltage constant because the doped impurities remain saturated.

제2c도를 참조하면, 실리사이드층(41), 장벽층(39) 및 다결정실리콘층(37)을 포토리쏘그래피 방법으로 순차적으로 패터닝하여 게이트(43)를 형성한다. 게이트 (43)는 다결정실리콘층(37), 장벽층(39) 및 실리사이드층(41)으로 이루어진 폴리사이드 구조를 갖는 데, 실리사이드층(41)에 의해 저항이 감소된다.Referring to FIG. 2C, the silicide layer 41, the barrier layer 39, and the polysilicon layer 37 are sequentially patterned by a photolithography method to form the gate 43. The gate 43 has a polyside structure consisting of a polysilicon layer 37, a barrier layer 39 and a silicide layer 41, the resistance of which is reduced by the silicide layer 41.

그리고, 게이트(43)을 마스크로 하여 인(P) 또는 아세닉(As) 등의 N형 불순물을 저농도로 이온주입하고 열처리하여 LDD 구조를 이루는 저농도영역(45)을 형성한다.A low concentration region 45 forming an LDD structure is formed by ion implanting N-type impurities such as phosphorus (P) or asic (As) at low concentration and heat treatment using the gate 43 as a mask.

제2d도를 참조하면, 게이트(43)의 측면에 측벽(47)을 형성한다. 측벽(47)은 반도체기판(31) 상에 게이트(43)를 덮도록 산화실리콘을 CVD 방법으로 증착한 후 RIE 방법으로 게이트(43) 및 반도체기판(31)이 노출되도록 에치백하므로써 형성된다. 그리고, 게이트(43)와 측벽(47)을 마스크로 사용하여 반도체기판(31)에 인(P) 또는 아세닉(As) 등의 N형의 불순물을 고농도로 이온 주입하고 열처리하여 저농도영역(45)의 소정 부분과 중첩되어 소오스 및 드레인영역으로 이용되는 고농도영역 (49)을 형성한다.Referring to FIG. 2D, sidewalls 47 are formed on side surfaces of the gate 43. The side wall 47 is formed by depositing silicon oxide on the semiconductor substrate 31 by CVD to cover the gate 43 and then etching back to expose the gate 43 and the semiconductor substrate 31 by the RIE method. Then, using the gate 43 and the sidewalls 47 as a mask, the semiconductor substrate 31 is ion-implanted with high concentration of N-type impurities such as phosphorus (P) or asic (As), and heat treated to form a low concentration region (45). The high concentration region 49 is formed to overlap the predetermined portion of the < RTI ID = 0.0 >

따라서, 본 발명은 장벽층에 의해 다결정실리콘층에 도핑된 불순물이 실리사이드층으로 확산되지 않도록 하므로 드레쉬홀드전압이 일정하게 소자의 신뢰성이 저하되는 것을 방지할 수 있는 잇점이 있다.Accordingly, the present invention prevents impurities doped in the polysilicon layer from diffusing into the silicide layer, thereby preventing the threshold voltage from deteriorating the reliability of the device.

Claims (4)

제 1 도전형의 반도체기판 상에 게이트절연막을 형성하는 공정과, 상기 게이트절연막 상기 불순물이 고농도로 도핑된 다결정실리콘층과, WN, TaN, TiN 또는 MoN으로 이루어진 장벽층과 실리사이드층을 순차적으로 증착하는 공정과, 상기 실리사이드층, 상기 장벽층 및 상기 다결정실리콘층을 패터닝하여 게이트를 형성하는 공정을 구비하는 반도체장치의 제조방법.Forming a gate insulating film on a first conductive semiconductor substrate, and depositing a polycrystalline silicon layer doped with a high concentration of the impurity, a barrier layer made of WN, TaN, TiN, or MoN, and a silicide layer sequentially And a step of patterning the silicide layer, the barrier layer, and the polysilicon layer to form a gate. 청구항1에 있어서, 상기 장벽층 및 실리사이드층을 동일한 증착장치에서 화학기상증착 방법으로 연속해서 형성하거나 또는 스퍼터링(sputtering) 방법으로 형성하는 반도체장치의 제조방법.The method of claim 1, wherein the barrier layer and the silicide layer are continuously formed by a chemical vapor deposition method in the same deposition apparatus or are formed by a sputtering method. 청구항2에 있어서, 상기 장벽츠어은 100~300Å의 두께로 형성하는 반도체장치의 제조방법.The method according to claim 2, wherein the barrier is formed to a thickness of 100 ~ 300Å. 청구항2에 있어서, 상기 실리사이드층을 WSi2, TaSi2, TiSi2또는 MoSi2을 700~1200Å의 두께로 형성하는 반도체장치의 제조방법.The method of claim 2, wherein the silicide layer is formed of WSi 2 , TaSi 2 , TiSi 2, or MoSi 2 to a thickness of 700 to 1200 kPa.
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