KR100261261B1 - Inline type burn-in test/ sortering apparatus and system structure of the same - Google Patents

Abstract

PURPOSE: An inline-type burn-in test/sortering equipment and a system structure thereof are provided to reduce a system occupying area in a working space and also to prevent the increase of unnecessary workers, by simplifying the whole system with arranging burn-in test chambers and sorters within the same area, and to perform a stable data transmission/reception between the burn-in test chamber and the sorter without constituting a complicated network, by connecting the burn-in test chambers and the sorters directly through a communication cable. CONSTITUTION: A burn-in test chamber(10) tests the performance of a semiconductor device by loading a burn-in board where the semiconductor device is inserted. And, a burn-in board transfer part(20) loads or unloads the burn-in board to/from the burn-in test chamber. And, a transfer tool(40) loads the burn-in board to the burn-in transfer part or unloads the burn-in board whose test is completed from the burn-in transfer part. A sorter(30) extracts the semiconductor device whose test is completed from the burn-in board and classifies it. The burn-in test chamber and the burn-in transfer part and the sorter are assembled in a body. Thus, the semiconductor device can be processed through the burn-in test process and the sortering process without a burn-in board transport process through a handcraft or an AGV(Automatic Guided Vehicle).

Description

In-line burn-in test / sottering device and its system structure

The present invention relates to an inline type burn-in test / sorting equipment and a system structure thereof, and more particularly to a burn-in test chamber and a shooter integrated in the same working area. The present invention relates to an in-line burn-in test / sorting apparatus and a system structure thereof, which can be assembled and arranged to significantly improve the efficiency of the overall burn-in test / sorting process operation.

In general, the burn-in test process refers to a process of improving reliability of a product by applying electrical and thermal stress to a semiconductor device having completed the assembly process for a long time to eliminate its initial defects.

As shown in FIG. 1, the system structure of a conventional burn-in test / sorting apparatus is also characterized by burn-in test chambers 4 arranged in a group in online connection with the server 1, and It includes the sorters (Sorter: 3) arranged in another group in online connection with the server (1).

Here, the burn-in test chambers 4 serve to test their initial failure by applying thermal and electrical stress to the semiconductor device, and the shooters 3 are placed on the burn-in board (not shown). In addition, the semiconductor device extracts and classifies the semiconductor device from the burn-in board according to the burn-in test result of the burn-in test chambers 4 described above.

In this conventional burn-in test / sorting system, the semiconductor device having completed the DC test is inserted into the burn-in boards by the shooters 3, and the burn-in boards are loaded in a rack (not shown). It is then transported to a burn-in test chamber 4 in a certain conveying device such as a cart, an Automatic Guided Vehicle (AGV) 5 or the like. At this time, when operating the AGV (5) through the AGV controller 2, the manual work of the operator is excluded, there is an effect that the work efficiency is improved.

Subsequently, the semiconductor device transferred to the burn-in test chambers 4 by the above-described cart, AGV 5 or the like is loaded into the burn-in test chambers 4 mounted on the burn-in boards. The burn-in test process is performed.

Here, the burn-in test chambers 4 and the shooters 3 are generally arranged separately in group A and group B, which are arranged in the same area by placing equipment performing the same process in the same area, thereby operating the entire equipment. This is to improve the efficiency further.

Meanwhile, the burn-in test chambers 4 having completed the burn-in test upload the test result to the server 1 and then unload the semiconductor device to the outside.

Subsequently, the semiconductor device is mounted on the burn-in board and loaded into the rack described above, and then transferred back to the shooters 3 by the cart, AGV 5 or the like.

Thereafter, the shooters 3 download the above-described test result from the server 1 and extract and classify the semiconductor device from the burn-in board according to the result, thereby performing the conventional burn-in test process and the sorting process. To complete.

However, there are some significant problems with the system architecture of conventional burn-in test / sorting devices that perform this function.

First, the burn-in test chambers and the shooters are generally separated from each other and operated separately. In this case, the burn-in test chambers, the shooters, and the conveying devices are individually operated by a worker who is dedicated to the operation thereof. By being arranged, an unnecessary increase in the number of workers is caused.

Second, as the burn-in test chambers and the shooters are arranged and operated separately, the system occupancy area in the workspace is significantly increased.

Third, a complicated networking system such as a server must be provided to process the burn-in test result data, and unexpected data loss can occur when uploading or downloading data through the server.

Fourth, in order to operate such a networking system, a dedicated worker must be additionally deployed, resulting in an increase in unnecessary workers outside the original area of the process, such as burn-in test / sorting.

Accordingly, an object of the present invention is to simplify the operation of the entire system by integrating the burn-in test chambers and the shooters in the same area, thereby preventing unnecessary workforce increase and significantly reducing the system footprint in the workspace. It is.

Another object of the present invention is to directly connect each burn-in test chamber and the shooter through a predetermined communication cable so that stable data transmission and reception can be achieved between the burn-in test chamber and the shooter without complicated networking configuration. .

1 is a conceptual diagram schematically showing the system structure of a conventional burn-in test / sottering device.

2 is a conceptual diagram schematically showing a system structure of an inline burn-in test / sorting device according to the present invention;

3 is a schematic cross-sectional view of an inline burn-in test / sottering device according to the present invention;

4 is a perspective view of FIG.

The present invention for achieving the above object comprises a burn-in test chamber for testing the performance of the semiconductor device by loading the burn-in board in which the semiconductor device is inserted; A burn-in board transfer unit for loading or unloading the burn-in board into the burn-in test chamber; A transfer tool for loading the burn-in board into which the semiconductor device for performance test is inserted into the burn-in board transfer unit, or unloading the burn-in board on which the test is completed from the burn-in board transfer unit. And a shooter for extracting and classifying the tested semiconductor device from the burn-in board, wherein the burn-in test chamber, the burn-in board transfer part, and the shooter are continuously integrated as one body.

Preferably, the burn-in board transfer unit and the body; A first drive motor provided in the main body; A rotation bar which rotates according to the operation of the first driving motor in a state of being connected to the first driving motor; It includes a lifting plate for loading the burn-in board into the burn-in test chamber or unloading from the burn-in test chamber while the one side is lifted in accordance with the rotation of the rotary bar while being fitted to the rotary bar, The lifting plate is characterized in that the pusher / puller is mounted to push the burn-in board into the burn-in test chamber or to pull it out of the burn-in test chamber.

Preferably, the pusher / puller and the second drive motor; A first conveyance belt wound or unwound according to the operation of the second drive motor in a state of being connected to the second drive motor; An agent attached to the first transfer belt and coupled to the burn-in board to push the burn-in board into or out of the burn-in test chamber in accordance with the operation of the first transfer belt. It characterized in that it comprises a hook.

Preferably, the rotating bar is characterized in that the ball screw.

Preferably, the other side of the elevating plate is characterized in that it is further provided with a guide bar for supporting the elevating plate while supporting the elevating plate in the state in which the elevating plate is fitted.

Preferably, the transfer tool and the transfer plate; A third driving motor provided at one side of the transfer plate; A second conveyance belt wound or unwound according to the operation of the third drive motor in a state of being connected to the third drive motor; Attached to the second transfer belt and coupled to the burn-in board to push the burn-in board into or out of the burn-in board transfer unit according to the operation of the second transfer belt; It characterized in that it comprises two hooks.

Preferably, the burn-in test chamber and the shooter are directly connected by a predetermined communication cable.

Preferably, the communication cable is characterized in that the RS232 communication cable.

Preferably, the burn-in test chamber further comprises a burn-in test controller for computing the predetermined burn-in test result data according to the burn-in test result and transmitting the burn-in test result data to the shooter. Characterized in that.

In addition, the present invention for achieving the above object is to place a plurality of burn-in test chamber, burn-in board transfer unit and the shooter in the same group, each of the burn-in test chamber and the shooter in the same group 1 to 1 through the burn-in board transfer unit, and then integrally assembled to form a unit, characterized in that arranged a plurality of units.

Accordingly, in the present invention, the convenience of the process operation is significantly improved.

Hereinafter, an inline burn-in test / sottering device and a system structure thereof according to the present invention will be described in detail with reference to the accompanying drawings.

First, as shown in Figure 2, according to the system structure of the in-line burn-in test / sorting apparatus according to the present invention, each burn-in test chamber 10, burn-in board transfer section 20 and The shooter 30 is disposed in a plurality of the same group C, and the burn-in test chamber 10 and the shooter 30 correspond to 1: 1 through the burn-in board transfer unit 20 in the same group C. After being assembled, they are assembled together to form a unit, and these units are arranged in plurality. As a result, the occupied area in the workspace of the overall system is significantly reduced.

That is, in the conventional case, the burn-in test chambers and the shooters were separately arranged and operated in Group A and Group B to improve operating efficiency, thus causing a problem of increasing system occupancy in the workspace.

However, in the case of the present invention, the burn-in test chambers 10 are arranged in one-to-one correspondence with the shooters 30 dedicated to them in the same group C, thereby simplifying system operation and improving overall operating efficiency. Significantly improved, the footprint in the workspace can be significantly reduced.

At this time, the burn-in board transfer unit 20 is interposed between the burn-in test chambers 10 and the shooters 30, and the burn-in board transfer unit 20 shoots the burn-in board 30. By repeating the burn-in test chambers 10 from the burn-in test chambers 10, or from the burn-in test chambers 10 to the shooters 30, a rapid burn-in test process and a sorting process can be achieved.

On the other hand, if the present invention has such a simplified system structure, the burn-in test / sorting devices can be managed even by a small number of workers.

That is, in the conventional case, the burn-in test chambers and the shoters are separated and disposed from each other and operated separately, and accordingly, the burn-in test chambers, the shoters, the conveying devices, and the like are operated by a worker dedicated to their operation. The need to be deployed individually has resulted in an unnecessary increase in workforce.

However, in the case of the present invention, the burn-in test chambers 10 and the shoters 30 are integrally arranged and operated simultaneously in the same group C, so that the operator can move away from the conventional management method and require relatively more management. Since only the rotors 30 can be managed intensively, a good system operating efficiency can be achieved, and thus, the number of workers required for system management can be significantly reduced.

On the other hand, as shown in Figure 3, the in-line burn-in test / sorting apparatus of the present invention constituting the system structure described above is a burner to test the performance of the semiconductor device by loading the burn-in board in which the semiconductor device is inserted A burn-in board transfer section 20 for loading or unloading the burn-in board into the burn-in test chamber 10 and a burned-in semiconductor device for performance testing. The semiconductor has been tested with the transfer tool 40 for loading the in-board into the burn-in board transfer unit 20 or unloading the burn-in board that has been tested from the burn-in board transfer unit 20. And a shooter 30 for extracting and classifying the device from the burn-in board, wherein the burn-in test chamber 10, burn-in board transfer section 20 and the shooter 30 are continuously integrated integrally. Accordingly, the semiconductor device can be subjected to a good burn-in test process and a sorting process without burn-in board conveying process through carts, AGVs and the like.

Here, the assembly form of the burn-in test chamber 10, the burn-in board transfer unit 20, the shooter 30 may be variously selected according to the actual process situation, assembling by bolt, assembling by a fixing guide, and the like. Can be.

In this case, as shown in FIG. 4, the burn-in board transfer unit 20 is connected to the main body 21, the first drive motor 22 provided in the main body 21, and the first drive motor 22. With the rotary bar 23 rotating in accordance with the operation of the first drive motor 22 and one side thereof is fitted to the rotary bar 23 while lifting up and down on its outer circumferential surface according to the rotation of the rotary bar 23. A lift plate 26 for loading / unloading the burn-in board 100 into the burn-in test chamber 10, the lift plate 26 having the burn-in board 100 burn-in test chamber A Pusher / Puller 25 is mounted that pushes in or pulls out of the burn-in test chamber 10.

Here, the rotation bar 23 is preferably a ball screw, when the first drive motor 22 is driven, the rotation bar 23 can be quickly rotated to quickly lift the lifting plate 26 fitted to it. .

At this time, preferably, the other side of the elevating plate 26 is further provided with a guide bar 24 for guiding the elevating plate 26 while supporting the elevating plate 26 while the elevating plate 26 is fitted. . Accordingly, the elevating plate 26 can achieve a good shanghaidong without unexpected shaking when the above-mentioned elevating operation proceeds.

On the other hand, as shown in Figure 4, the pusher / puller 25 is wound in accordance with the operation of the second drive motor (25a) and the second drive motor (24a) in connection with the second drive motor (25a) The pulley is attached to the first transfer belt 25b and the first transfer belt 25b and coupled to the burn-in board 100 to burn the burn-in board 100 according to the operation of the first transfer belt 24b. A first hook 25c that pushes into or pulls out of the burn-in test chamber 10. By engagement of the first hook 25c, the burn-in board 100 is quickly loaded from the burn-in board transfer 20 into the burn-in test room 10b, or from the burn-in test room 10b. It can be unloaded quickly into the burn-in board transfer 20.

In addition, as described above, the transfer tool 40 is mounted on the shooter 30, and the transfer tool 40 includes a transfer plate 41 and a third drive motor provided at one side of the transfer plate 41. The second transfer belt 43 and the second transfer belt 43 which are wound or unwound according to the operation of the third drive motor 42 while being connected to the third drive motor 42 are attached to the second transfer belt 43. Coupled to the in-board 100 to push the burn-in board 100 into the burn-in board conveying unit 20 or pull it out of the burn-in board conveying unit 20 according to the operation of the second conveying belt 43. A second hook 44. By engagement with the second hook 44, the burn-in board 100 is quickly loaded from the shooter 30 into the burn-in board transfer 20, or from the burn-in board transfer 20 the shooter 30. Can be unloaded quickly.

On the other hand, according to a feature of the invention, the burn-in test chamber 10 and the shooter 30 are directly connected by a communication cable 50, preferably an RS232 communication cable. Accordingly, the burn-in test chamber 10 and the shooter 30 may quickly transmit / receive the burn-in test result data without a separate networking system.

In the conventional case, a complicated networking system such as a server was provided to process burn-in test result data, which resulted in unexpected data loss, and additional staff for managing this networking system were also deployed. Should be.

However, in the present invention, the burn-in test chamber 10 and the shooter 30 are directly connected through a communication cable 50 without a separate networking system, so that the burn-in test result data is burned without unexpected loss. It can be reliably sent / received from the test-in test chamber to the shooter.

In addition, in the case of the present invention, by further achieving the data transmission / reception via the communication cable 50, it is possible to prevent further arrangement of the working personnel for the management of the networking system.

In this case, as shown in FIG. 3, the burn-in test chamber 10 computes burn-in test result data according to the burn-in test result and transmits the burn-in test result data to the shooter 30 ( 10a) further.

The burn-in test controller 10a quickly transmits the burn-in test result data to the shooter 30 through the above-described communication cable 50, so that the semiconductor device classification operation according to burn-in test quantity / badness is shot. It can be made quickly by (30).

Hereinafter, the operation of the in-line burn-in test / sottering device according to the present invention will be described in detail.

First, the shooter 30 performs a DC test on the semiconductor device having completed the assembly process, and then inserts the semiconductor device determined as a good product into the burn-in board 100 through a pickup tool (not shown). .

The shooter 30 then handles the burn-in board 100 and mounts it on the transfer plate 41 of the transfer tool 40.

Subsequently, in a state where the second hook 44 is engaged with the bottom of the burn-in board 100, the second transfer belt 43 is rotated by driving the third driving motor 42, and the second hook 44 is rotated. By advancing 44 to the burn-in board conveyance part 20, the burn-in board 100 is mounted on the elevating plate 26 of the burn-in board conveyance part 20. As shown in FIG.

Then, the burn-in board transfer unit 20 operates the first drive motor 22 to rotate the rotary bar 23. As a result, the elevating plate 26 fitted to the rotary bar 23 through the first protruding groove 26a quickly moves up and down.

At this time, as described above, the elevating plate 26 is also fitted to the guide bar 24 through the second protruding groove 26b, thereby preventing the flow.

Subsequently, the elevating plate 26 stops at an appropriate position of the burn-in test chamber 10 and burn-in the burn-in board 100 by using the equipped pusher / puller 25. )

That is, the first transfer belt 25b is rotated by driving the second drive motor 25a while the first hook 25c of the pusher / puller 25 is engaged with the bottom of the burn-in board 100. By advancing the first hook 25c toward the burn-in test room 10b, the burn-in board 100 is firmly docked to the connector 10c of the burn-in test room 10b. Accordingly, the semiconductor device inserted into the burn-in board 100 is ready to undergo burn-in test.

This burn-in board 100 loading process is continuously repeated until the appropriate amount of burn-in board 100 is loaded from the shooter 30 into the burn-in test chamber 10.

Then, when the loading of the burn-in board 100 is completed, the burn-in test process is performed by applying electrical stress and thermal stress to the semiconductor device by a preset test program.

Subsequently, when the above-described burn-in test process is completed, the burn-in test controller 10a stores the burn-in test result data, and then burns the burn-in test result data through the communication cable 50. 30) to the shooting controller 30a.

Subsequently, the elevating plate 26 is moved by the above-described elevating action to stop at a certain position of the burn-in test chamber 10, and then burn-in test is completed using the pusher / puller 25 provided. Unload board 100 from burn-in test room 10b.

That is, the first hook 25c of the pusher / puller 25 is engaged with the bottom of the burn-in board 100, and the first transfer belt 25b is rotated by the operation of the second drive motor 25a. By backing the first hook 25c toward the shooter 30, the burn-in board 100 is taken out of the burn-in test room 10b.

Subsequently, the burn-in board conveying unit 20 operates the first drive motor 22 to rotate the rotary bar 23, thereby moving the lifting plate 26 to an appropriate position of the shooter 30, for example, the above-described conveying. Stop in the immediate vicinity of the tool 40.

Even at this time, since the lifting plate 26 is fitted to the guide bar 24 through the second protruding groove 26b, the flow is prevented.

Subsequently, the transfer tool 40 rotates the second transfer belt 43 by driving the third drive motor 42 while the second hook 44 is engaged with the bottom of the burn-in board 100. By retracting the second hook 44 to its rear, the burn-in board 100 is taken out of the elevating plate 26.

Thereafter, the shooter 30 handles the burn-in board 100 from the transfer tool 40 and then extracts the semiconductor device from the burn-in board 100 under the control of the shooter controller 30a and burns it. The sorting process is completed quickly by sorting by phosphorus test quantity / badness.

This burn-in board 100 unloading process is continuously repeated until the appropriate amount of burn-in board 100 is unloaded from burn-in test chamber 10 to the shooter 30.

As described above, in the present invention, the burn-in test chamber and the sorter are integrally assembled and disposed in the same work area, thereby significantly improving the overall burn-in test / sorting process operation efficiency.

This invention is not limited to only the burn-in test / sorting apparatus described above, but has an overall useful effect in various semiconductor fabrication facilities performing similar functions.

And while certain embodiments of the invention have been described and illustrated, it will be apparent that the invention may be embodied in various modifications by those skilled in the art.

Such modified embodiments should not be understood individually from the technical spirit or point of view of the present invention and such modified embodiments should fall within the scope of the appended claims of the present invention.

As described in detail above, the in-line burn-in test / sorting apparatus and its system structure according to the present invention firstly simplify the operation of the entire system by integrally arranging the burn-in test chamber and the shooter in the same area. In addition to preventing unnecessary workforce increase, the system footprint in the workspace can be significantly reduced. Second, burn-in test without complicated networking configuration by directly connecting the burn-in test chamber and the shooter through a predetermined communication cable. Able to achieve stable data transmission and reception between the chamber and the shooter.

Claims (10)

A burn-in test chamber for testing the performance of the semiconductor device by loading the burn-in board into which the semiconductor device is inserted; A burn-in board transfer unit for loading or unloading the burn-in board into the burn-in test chamber; A transfer tool for loading the burn-in board into which the semiconductor device for performance test is inserted into the burn-in board transfer unit, or unloading the burn-in board on which the test is completed from the burn-in board transfer unit. And a shooter for extracting and classifying the tested semiconductor device from the burn-in board, And the burn-in test chamber, burn-in board transfer part and the shooter are continuously assembled in one piece. The apparatus of claim 1, wherein the burn-in board transfer unit comprises: a main body; A first drive motor provided in the main body; A rotation bar which rotates according to the operation of the first driving motor in a state of being connected to the first driving motor; It includes a lifting plate for loading the burn-in board into the burn-in test chamber or unloading from the burn-in test chamber while the one side is lifted in accordance with the rotation of the rotary bar while being fitted to the rotary bar, And said pusher plate is equipped with a pusher / puller which pushes said burn-in board into said burn-in test chamber or pulls it out of said burn-in test chamber. 3. The system of claim 2, wherein the pusher / fuller comprises: a second drive motor; A first conveyance belt wound or unwound according to the operation of the second drive motor in a state of being connected to the second drive motor; An agent attached to the first transfer belt and coupled to the burn-in board to push the burn-in board into or out of the burn-in test chamber in accordance with the operation of the first transfer belt. An inline burn-in test / sottering device comprising one hook. 3. The inline burn-in test / sottering device according to claim 2, wherein the rotating bar is a ball screw. The in-line burn-in test according to claim 2, wherein the other side of the elevating plate is further provided with a guide bar for supporting the elevating plate while supporting the elevating plate with the elevating plate inserted therein. Sorting device. The apparatus of claim 1, wherein the transfer tool comprises: a transfer plate; A third driving motor provided at one side of the transfer plate; A second conveyance belt wound or unwound according to the operation of the third drive motor in a state of being connected to the third drive motor; Attached to the second transfer belt and coupled to the burn-in board to push the burn-in board into or out of the burn-in board transfer unit according to the operation of the second transfer belt; Inline burn-in test / sottering device comprising two hooks. The in-line burn-in test / sorting device of claim 1, wherein the burn-in test chamber and the shooter are directly connected by a communication cable. 8. The inline burn-in test / sottering device according to claim 7, wherein the communication cable is an RS232 communication cable. The burn-in test controller of claim 1, wherein the burn-in test chamber computes the predetermined burn-in test result data according to the burn-in test result and transmits the burn-in test result data to the shooter. Inline burn-in test / sorting device further comprising. Placing the burn-in test chamber, burn-in board transfer part and the shooter according to claim 1 in the same group, In the same group, the burn-in test chamber and the shooter correspond to each other by 1: 1 through the burn-in board transfer unit, and then integrally assembled to form a unit and arrange a plurality of units. System structure of an in-line burn-in test / sottering device.

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