KR0149313B1 - Method for fabrication of lcd wafer - Google Patents

Abstract

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a liquid crystal display substrate in which a repair line is formed using a gate wiring metal and a data wiring metal in order to easily repair a gate line of a liquid crystal display substrate, and a method of manufacturing the same.

When a disconnection occurs in the data line, the repaired data line is shorted with a laser to be electrically connected to the repair line formed in the vertical direction below the data line, and then one repair line near the point that is electrically connected to the repair line. It is possible to easily disconnect a data line through a repair line or a repair line or a repair line.

Description

Liquid crystal display substrate and its manufacturing method

(A)-(b) of FIG. 1 is a top view of the repair line forming step of the conventional liquid crystal display substrate, and sectional drawing of A-A 'part.

(A)-(b) of FIG. 2 is a plan view and a sectional view of A-A 'portion of the conventional liquid crystal display substrate.

(A)-(b) of FIG. 3 is a plan view and a sectional view of A-A 'part of the gate line isolation | separation step of the conventional liquid crystal display substrate.

(A)-(b) of FIG. 4 are a plan view and a cross-sectional view of part A-A 'of a gate line, a repair line, a bottom of an auxiliary repair line, and a shorting bar of the liquid crystal display substrate according to the first embodiment of the present invention. to be.

5A to 5B are a plan view and a cross-sectional view of A-A 'part of the anodizing step of the liquid crystal display substrate according to the first embodiment of the present invention.

6A to 6B are a plan view and a cross-sectional view of part A-A 'of a patterning step of a gate insulating film of a liquid crystal display substrate according to a first embodiment of the present invention.

7A to 7B are a plan view and a cross-sectional view of part A-A 'of a gate pad and data pad forming step of a liquid crystal display substrate according to a first embodiment of the present invention.

8A and 8B are a plan view and a cross-sectional view taken along the line A-A 'of a step of separating the gate line and the auxiliary repair line of the liquid crystal display substrate according to the first embodiment of the present invention.

9A to 9B are a plan view and a cross sectional view taken along the line A-A 'of the liquid crystal display substrate according to the first embodiment of the present invention.

(A)-(b) of FIG. 10 are bottom lines of a gate line, a repair line, and an auxiliary repair line of the liquid crystal display substrate according to the second embodiment of the present invention. A plan view of the step of forming the shorting bar and a plan view of A-A 'part.

11A to 11B are a plan view and a cross-sectional view of part A-A 'of an anodizing step of a liquid crystal display substrate according to a second embodiment of the present invention.

12A to 12B are a plan view and a cross-sectional view of part A-A 'of a patterning step of a gate insulating film of a liquid crystal display substrate according to a second embodiment of the present invention.

13A to 13B are a plan view and a cross-sectional view of part A-A 'of forming a gate pad and a data pad and forming an upper part of an auxiliary repair line of a liquid crystal display substrate according to a second exemplary embodiment of the present invention. to be.

(A)-(b) of FIG. 14 are a plan view and a cross-sectional view of part A-A 'of a step of separating the gate line and the auxiliary repair line of the liquid crystal display substrate according to the second embodiment of the present invention.

(A)-(b) of FIG. 15 are a plan view and a cross-sectional view of part A-A 'of a liquid crystal display substrate according to a second embodiment of the present invention.

The present invention relates to a liquid crystal display substrate and a method of manufacturing the same. More specifically, the present invention relates to a liquid crystal display substrate in which a repair line is formed using a gate wiring metal and a data wiring metal in order to easily repair the gate line of the liquid crystal display substrate, and a method of manufacturing the same.

Hereinafter, a conventional liquid crystal display in which a repair line is formed will be described with reference to the accompanying drawings.

(A)-(b) of FIG. 1 is a plan view and a sectional view of A-A 'part of the conventional repair line formation step of a liquid crystal display substrate.

(A)-(b) of FIG. 2 is a plan view and a sectional view of A-A 'portion of the conventional liquid crystal display substrate.

(A)-(b) of FIG. 3 is a plan view and a sectional view of A-A 'part of the gate line isolation | separation step of the conventional liquid crystal display substrate.

As shown in Figs. 1 and 3, the liquid crystal display substrate on which the conventional repair line is formed includes the following process steps.

First, as shown in FIG. 1, the repair line L1 is formed in a '?' Shape when the gate line 4 is wired with the gate metal.

Next, as shown in FIG. 2, the gate wiring is selectively anodized to form an anodic oxide film 6.

Next, as illustrated in FIG. 3, the repair line L1 and the gate line 4 are selectively separated.

As described above, when the repair line L1 is formed in a 'ㅁ' shape, a separate photolithography process for separating the repair line L1 and the gate line 4 is added in a subsequent process, thereby increasing the cost and There is a disadvantage that yields a decrease.

In addition, another conventional liquid crystal display device in which a repair line is formed is as follows. The technique of U.S. Patent No. 4,807,975 (Patent Date: February 28, 1989) may use a gate wiring metal or a data wiring metal as a repair line, which is shaped like a closed curve, and has no anodic oxide film.

However, in the case where the repair line is formed of a high resistance data wiring metal, since the resistance of the repair line is high, the resistance delay time (RC-Delay Time) is delayed, resulting in deterioration of image quality.

Therefore, the present invention provides a liquid crystal display substrate having a repair line formed by using a gate wiring metal and a data wiring metal in order to easily repair the gate line of the liquid crystal display substrate as a means for solving the above disadvantages, and a method of manufacturing the same. It is for.

The present invention for achieving the above object,

Board,

A gate driver for generating a drive signal,

A data driver that generates data information,

A gate line connected to the gate driver and formed in a row direction on the substrate;

A repair line formed on the substrate and formed in a U shape around the substrate;

A data line connected to the data drive and formed in a column direction on the substrate;

The gate line layer and the data line layer are formed to be parallel to the data line, perpendicular to the gate line, electrically separated from the gate line, and electrically connected to the repair line. And an auxiliary repair line formed in sequence.

The production method of the present invention for achieving the above object,

A first step of simultaneously forming a bottom bar and a shorting bar of a gate line, a repair line, and an auxiliary repair line on the substrate;

A second step of selectively anodizing except a portion of the gate line, a third step of applying an insulating film over the substrate and patterning the entire surface,

A fourth step of forming a gate pad and a data pad by coating a conductive material on the insulating layer and patterning the same, and simultaneously forming an upper part of an auxiliary repair line when the gate pad and the data pad are formed;

In order to completely separate the gate line and the auxiliary repair line, a portion of the gate line formed in the vicinity of the auxiliary repair line is photographed and separated from the auxiliary repair line and the gate line by using the upper part of the auxiliary repair line as a mask. It includes a fifth step.

Another invention for achieving the above object,

Board,

Gate driver for generating a drive signal,

A data driver that generates data information,

A gate line connected to the gate driver and formed in a row direction on the substrate, a repair line formed on the substrate and having a U shape around the substrate;

A data line connected to the data drive and formed in a column direction on the substrate;

When formed in parallel with the data line is formed to cross the gate line perpendicularly and electrically separated from the gate line and electrically connected to the repair line, the gate line film, the insulating film on the substrate in sequence And an auxiliary repair line formed.

The production method of another invention for achieving the above object,

A first step of simultaneously forming a bottom shorting bar of the gate line, the repair line, and the auxiliary repair line on the substrate;

A second step of selectively anodizing except for a portion of the gate line, a third step of forming an upper surface of an auxiliary repair line by applying an insulating film over the substrate and patterning the entire surface;

A fourth step of forming a gate pad and a data pad by coating a conductive material on the insulating layer and then patterning the conductive material;

A fifth photo-etched portion of the data line formed in the vicinity of the auxiliary repair line using the upper part of the auxiliary repair line as a mask to completely separate the lower ends of the gate line and the auxiliary repair line by using the insulating layer as a mask; Steps.

Next, a first embodiment of the present invention will be described in detail with reference to the accompanying drawings so that those skilled in the art may easily implement the present invention.

(A)-(b) of FIG. 4 are a plan view and a cross-sectional view of part A-A 'of a step of forming a gate line, a repair line and a shorting bar of the liquid crystal display substrate according to the first embodiment of the present invention.

5A to 5B are a plan view and a cross-sectional view of part A-A 'of an anodizing step of a liquid crystal display substrate according to a first embodiment of the present invention.

6A to 6B are a plan view and a cross-sectional view of a portion A-A 'of a patterning step of a gate insulating film of a liquid crystal display substrate according to a first embodiment of the present invention.

7A to 7B are a plan view and a cross-sectional view of part A-A 'of a gate pad and data pad forming step of a liquid crystal display substrate according to a first embodiment of the present invention.

8A to 8B are a plan view and a cross-sectional view taken along the line A-A 'of a step of separating the gate line and the repair line of the liquid crystal display substrate according to the first embodiment of the present invention.

9A to 9B are a plan view and a cross sectional view taken along the line A-A 'of the liquid crystal display substrate according to the first embodiment of the present invention.

As shown in FIGS. 4 to 9, the first embodiment of the present invention for achieving this object is as follows.

First, as shown in FIGS. 4A and 4B, the gate line 4, the repair line L1, the auxiliary repair line lower end 4-1, and the shorting bar 18 are disposed on the substrate 2. Are simultaneously formed of aluminum.

Next, as shown in (a)-(b) of FIG. 5, anodic oxidation (6) is selectively performed except for a portion (5) of the gate line (4).

However, the central portion of the portion 5 can be anodized.

Next, as shown in (a)-(b) of FIG. 6, the insulating film 8 is applied to the entire surface of the substrate 2 and then patterned.

Next, as shown in FIGS. 7A and 7B, when the gate pad 10 and the data pad 12 are formed and the gate pad 10 and the data pad 12 are simultaneously formed, the upper part of the auxiliary repair line ( 10-1) to complete the auxiliary repair line L2. In the auxiliary repair line L2, an anode oxide film 6 or an insulating film 8 may be inserted between the upper part of the auxiliary repair line 10-1 and the lower part of the auxiliary repair line 4-1.

Next, as shown in FIGS. 8A to 8B, photolithography is performed to completely separate the gate line 4 and the auxiliary repair line L2 of the liquid crystal display substrate 2.

Next, a second embodiment of the present invention will be described in detail with reference to the accompanying drawings so that those skilled in the art may easily implement the present invention.

(A)-(b) of FIG. 10 are a plan view of a gate line, a repair line, and an auxiliary repair line under the liquid crystal display substrate according to the second embodiment of the present invention, and a shorting bar, and a cross-sectional view taken along line A-A '. to be.

11A to 11B are a plan view and a cross-sectional view of part A-A 'of an anodizing step of a liquid crystal display substrate according to a second embodiment of the present invention.

12A to 12B are a plan view and a cross-sectional view of part A-A 'of a patterning step of a gate insulating film of a liquid crystal display substrate according to a second embodiment of the present invention.

13A to 13B are a plan view and a cross-sectional view of part A-A of forming a gate pad and a data pad and forming an upper part of an auxiliary repair line of a liquid crystal display substrate according to a second embodiment of the present invention.

(A)-(b) of FIG. 14 are a plan view and a cross-sectional view of part A-A 'of a step of separating the gate line and the auxiliary repair line of the liquid crystal display substrate according to the second embodiment of the present invention.

(A)-(b) of FIG. 15 are a plan view and a cross-sectional view of part A-A 'of a liquid crystal display substrate according to a second embodiment of the present invention.

First, as shown in FIGS. 10A to 10B, the gate line 4, the repair line L1, the lower side of the auxiliary repair line, and the shorting bar 18 are simultaneously formed of aluminum on the substrate 2. do.

Next, as shown in (a)-(b) of FIG. 11, anodic oxidation (6) is selectively performed except for a portion of the gate line (4).

Next, as shown in FIGS. 12A and 12B, after the insulating film 8 is applied to the entire surface of the substrate 2, the gate line 4 is separated from the data line 16. The gate line 4 is patterned to be separated from the shorting bar 18.

Next, as shown in FIGS. 13A and 13B, the auxiliary repair line is simultaneously formed when the gate pad 10 and the data pad 12 are formed and the gate pad 10 and the data pad 12 are formed. The insulating film 8 is patterned to form an auxiliary repair line top 8.

Next, as shown in FIGS. 14A and 14B, the liquid crystal display substrate 2 masks the insulating film 16 to completely separate the gate line 4 and the auxiliary repair line L3. The auxiliary repair line L3 is separated from the gate line 4.

As in the first to second embodiments of the present invention, when the disconnection occurs in the data line, the disconnected data line 16 is electrically connected to the repair line L1 formed in the vertical direction under the data line 16. Short-circuit with a laser to be connected.

Next, one repair line L1 is disconnected near the point that is electrically connected to the repair line L1.

At this time, the disconnection position of the repair line (L1) is determined as a point that allows the data information generated in the data drive to be transferred as quickly as possible from the point of electrically connecting the data line 16 and the repair line (L1).

In addition, while the data line is repaired using the auxiliary repair line, the repair may be performed through the repair line at the same time.

In this manner, the disconnected data line 16 can be easily repaired through the repair line L1 or through the auxiliary repair lines L2 and L3.

Therefore, the effect of the present invention is to form a repair line using a gate wiring metal or a data wiring metal, so the number of processes is simple and easy to repair, and the delay time (RC-Delay Time) is not delayed in adjacent repair lines during the repair process. Do not deteriorate.

Claims (8)

A substrate, a gate driver for generating a drive signal, a data driver for generating data information, a gate line connected to the gate driver and formed in a row direction on the substrate, formed on the substrate, and having a U-shape around the substrate. A repair line which is formed to be connected to the data drive and is connected to the data drive in a column direction on the substrate, and is formed to be parallel to the data line and perpendicularly crosses the gate line, And an auxiliary repair line electrically separated from each other and electrically connected to the repair line, the auxiliary repair line having a gate line layer and a data line layer sequentially formed on the substrate. The liquid crystal display substrate of claim 1, wherein the gate line and the repair line are formed of the same conductive material. The liquid crystal display substrate of claim 2, wherein the gate line and the repair line are formed of aluminum. A first step of simultaneously forming a lower end of the gate line, a repair line and an auxiliary repair line, and a shorting bar on the substrate, a second step of selectively anodizing except a portion of the gate line, and applying an insulating film over the substrate A third step of patterning, a fourth step of forming a gate pad and a data pad by coating a conductive material on the insulating layer and patterning the gate pad and the data pad, and simultaneously forming an upper part of an auxiliary repair line when the gate pad and the data pad are formed; A fifth step of photo-etching a portion of the gate line formed in the vicinity of the auxiliary repair line by using an upper end of the auxiliary repair line as a mask to completely separate the auxiliary repair line from the auxiliary repair line and the gate line Liquid crystal di, characterized in that it comprises a The method of playing board. A substrate, a gate driver for generating a drive signal, a data driver for generating data information, a gate line connected to the gate driver and formed in a row direction on the substrate, formed on the substrate, and having a U-shape around the substrate. A repair line which is formed to be connected to the data drive and is connected to the data drive in a column direction on the substrate, and is formed to be parallel to the data line and perpendicularly crosses the gate line, And an auxiliary repair line electrically separated from each other and electrically connected to the repair line, the auxiliary repair line having a gate line layer and a data line layer sequentially formed on the substrate. The liquid crystal display substrate of claim 5, wherein the gate line and the repair line are formed of the same conductive material. The liquid crystal display substrate of claim 5, wherein the gate line and the repair line are formed of aluminum. A first step of simultaneously forming a gate line, a repair line and a bottom of an auxiliary repair line, and a shorting bar at the same time; a second step of selectively anodizing the gate line except for a part thereof; and applying an insulating film over the substrate A third step of forming a top of an auxiliary repair line by patterning the substrate, a fourth step of forming a gate pad and a data pad by coating a conductive material on the insulating layer, and patterning the gate pad and the data pad; And a fifth step of photo-etching a part of the gate line formed in the vicinity of the auxiliary repair line by using the upper part of the auxiliary repair line as a mask to completely separate the lower end of the substrate. .