KR0141985B1 - Automatic connection of chemical hose - Google Patents

Abstract

The present invention relates to an automatic connection device for a high-purity chemical transfer hose. In the related art, a flexible hose is installed at each end of a quick coupling, which is distinguished by a male and female, and takes a form in which a worker directly couples and separates them. Each quick coupling that transfers chemicals that are easily contaminated is combined and separated through separate cleaning and drying processes, which is cumbersome and time-consuming, and moves according to cleaning and drying processes. As a result, contamination from another source of air pollution could not be excluded, and there was a problem that could cause fatal damage due to carelessness of the operator, especially during handling.

The present invention has been researched and developed in order to solve the problems associated with the use of such a conventional quick coupler, automatic connection of high purity chemical transfer hose so that cleaning, drying, connection and separation can be performed sequentially in one device. It provides a device to prevent the contamination of chemicals due to handling and to eliminate the risks and hassles of workers, and to improve workability and safety.

Description

Automatic connection device of high purity chemical transfer hose

1 is a longitudinal cross-sectional view showing the structure of a conventional female, male coupler,

2 is a perspective view showing the appearance of the present invention,

3 is a longitudinal sectional view taken along the line A-A of FIG.

4 is a cross-sectional view taken along line B-B of FIG. 2,

Figure 5 is a partially cutaway exploded perspective view showing the internal structure of the present invention,

Figure 6 is a schematic diagram illustrating a process of cleaning, drying in the operating state of the present invention,

Figure 7 is a system diagram illustrating the inlet position of the drive compressed gas during the operating state of the present invention.

* Explanation of symbols for main parts of the drawings

1: body 2, 4: piston

3: Cover cover 5: Female coupling

6: connecting rod 7: back cover

8: front cover 9: detection unit

10: Male coupling 10 ': Stop ring

11: Male coupling insertion hole 12, 13: sprayer

14,15,41,72: Air inflow hole 16: Drain hole

21: Coupling insert hole 22, 32, 51a, 52a: Groove

23, 33: elastic ring 24, 34, 46: fastener

31: cover insertion hole 44: rod

45,93: Spring 51: Body

52: Cover 71: Connecting rod insertion hole

81: Stop ring insertion hole 82: Fixed lever

91: position detection rod 92: indicator ring

94,95: limit switch

The present invention relates to an automatic connection device of a high purity chemical transfer hose, and in particular, to clean, dry and connect the male and female couplers in a single device to prevent contamination of high clean and high purity chemicals and to handle chemicals. The present invention relates to an automatic connection device for a high purity chemical transfer hose that can improve workability and stability by eliminating risk and troublesome workers.

The high-purity and high-purity chemicals used in the semiconductor manufacturing process and the liquid crystal display manufacturing process, which have been greatly activated in recent years, have increased in size, and therefore, the size of the transport containers has increased from 1 m 3 or more to 1 galloon, 20 l or 200 l drums. Larger tank lorry is becoming larger in size.

As the container becomes larger, the number of chemicals that the manufacturer or producer fills or receives from the container for the quantitative chemicals reduces the number of times the container lid is opened and closed for transporting the chemical from the container. This has the advantage of reducing chemical contamination and handling accidents. Conventional hose joints have abrupt connections (hereinafter referred to as quick couplings) and one-touch couplers made of Teflon material in contact with the liquid contact area. Inteprojarodine quick coupler is mainly used, which is shown in Figure 1 attached to each end of the flexi ball hose is provided with a quick coupling (5) (10) is distinguished by the male and female coupling and separation And take a brief look at its structure,

First, the female coupling 5 has a disk 51b having a plurality of communication holes 51c formed on its outer circumference and is crimped with the seat 51e integrally supported by a spring 51d fitted inside the body 51. Insertion groove (5a) is formed on one side of the male coupling 10 is inserted into a plurality of balls (51f) is inserted from the outside, the movable lid 52 receives the elastic force of the spring (52b) the ball (51f) It is configured not to escape to the outside.

In addition, the male coupling 10 also has a disk 10b formed of a plurality of communication holes 10a is supported by a spring 10c and a protrusion 10e having a groove 10d in the middle thereof protrudes to one side. The ball 51f is fitted into the groove 10d and inserted into the male and male couplings 5 and 10 while being inserted into the male coupling insertion groove 5a of the female coupling 5. The disks 51b and 10b are pushed together to form a chemical transport path. The cover 52 installed at one outer circumference of the arm coupling 5 compresses the spring 52b by an artificial force of an operator. While being pushed to one side to form a clearance distance through which the ball 51f can flow in one side inner surface space of the cover 52, the male coupling 10 can be inserted therein. When the 52 is released, the cover 52 returns to its original position by the elastic force of the spring 52b and is pushed out of the space. The ball 51f is placed in the original position, and the ball 51f is fitted into the groove 10d formed outside the protruding portion 10e of the male coupling 10 to be brought into close contact with and fixed.

On the contrary, in order to separate it, it is pushed to one side and the clearance space in the inner part coincides with the fitted position of the ball 51f as in the case of fixing the cover 52 which pushes the ball 51f. When the 10 is released to the outside, the ball 51f is slid in the groove 10d and pushed out of the clearance space, that is, the outside, so that the ball 51f is separated to the outside of the male coupling 10. do.

As mentioned above, the quick coupler adopting such a configuration and operation method greatly reduces the number of opening and closing of the container lid according to the transfer of chemicals, which greatly reduces the contamination and handling accidents that need to be handled. Although it provided an advantage, it is a separate cleaning device because the process of filling, transporting, transporting, and supplying chemicals, which are highly clean and high-purity chemicals, is exposed from contaminants such as impurities and particles (solid particles such as particles and dust). The drying process of drying using ultrapure gas such as nitrogen gas is required to be connected after being rolled separately. Therefore, the work is cumbersome and thus delays the working time, and moves through the correction and drying process. Contamination from sources was also inevitable.

In particular, the quick coupler has the effect of reducing the frequency of the occurrence of safety accidents by reducing the number of closures of the conventional container lid, but the method of taking the quick coupler by hand while removing the toxic chemicals by hand. Because of this problem, there is a big problem that the chemicals on the wetted parts by hand of the seizure coupler may be inadvertently damaged by workers after transfer.

The present invention has been researched and developed in order to solve the problems associated with the use of such a conventional quick coupler is as follows.

The main object of the present invention is to provide automatic connection device that can be cleaned, dried, and connected sequentially in one device, thereby preventing chemical contamination, and eliminating the risks and hassles of workers in handling. To improve workability and stability.

It is another object of the present invention to provide an automatic connection device for a high purity chemical transfer hose, which enables accurate and perfect connection by actively introducing a conventional Teflon manual quick coupler and using all of its functions.

In order to achieve the above object, more detailed description will be made based on the accompanying drawings.

That is, the present invention is a plurality of injection holes 12 having a predetermined inclination angle before and after the male coupling insertion hole 11 and its inner space portion on one side as shown in Figure 2 to 5 of the accompanying drawings In the main body 1 in which the discharge hole 16 is formed at each of the lower sides and the lower cover side, the cover insertion hole 31 is formed at one side of the piston 2 having the coupling insertion hole 21 formed at the center thereof. A plurality of rods 44 and rods 44 formed by the cover cover 3 constrained to another piston 4 having an air inlet hole 41 to be fluidly fitted to the other side of the piston 2. Are elastically installed by springs 45 respectively fitted in the

The coupling insertion hole 21 of the piston 2 and the cover insertion hole 31 of the cover cover 3 have one side of the connecting rod 6 and the body 51 and cover of the female coupling 5. 520 is inserted and fixed to each other, and the connecting rod 6 is fitted with a rear cover 7 formed with a connecting rod insertion hole 71 and an air inlet hole 72 so that the air inlet hole 72 and the piston 4 are inserted therein. Air inlet hole 41 formed in the) is connected to the hose 973 and the other end of the connecting rod (6) is made by combining the flexibol hose 16 connected to the chemical storage side,

A stop ring insertion hole 81 having an inner diameter larger than that of the male coupling insertion hole 11 is formed outside the main body 1 having the male coupling insertion hole 11 formed therein, and rotatably coupled to both sides of the outer middle portion. The front cover 8 is provided with a fixed lever 82 and a sensing unit 9 communicating with the inside of the upper middle portion thereof is fixed by a conventional fastener 83,

The sensing unit 9 is elastically installed by the spring 93 so that the position detecting rod 91 in which the upper side of the main body 1 penetrates and the indicator ring 92 is integrally formed in the middle portion thereof. A plurality of limit switches 94 and 95 are provided on one side of the main body 1 where the 92 is located at a predetermined interval.

At this time, the body 51 and the cover 52 of the arm coupling 5 to be fixed are recessed in the inner surface of the coupling insertion hole 21 of the piston 2 and the cover insertion hole 31 of the cover cover 3, respectively. (22) and (32) are formed by inserting each of the cut elastic rings (23) and (33), and then fastening and compressing the plurality of fixing bolts (24) (34) from the outside to the elastic rings (23, 33). The grooves 22 and 32 are caught in the grooves 51a and 52a formed in the female coupling 5 so that they can be fixed and fixed to the grooves 22 and 32. The stop ring 10 'is inserted into the stop ring insertion hole 81 of the front cover 8 via a stop ring 10' having an outer diameter larger than that of the ring 10, and one end thereof is a male couple of the main body 1. Ring insertion hole 11 was to be fixed to the outer peripheral surface.

Unexplained reference numeral 17 is an installation hole to the pressure for detecting the internal pressure, 18 is a fixing plate fitted to both shafts of the main body 1, 19 is a fixing bolt for coupling the fixing plate 18, 20 is a limit switch, 25 is a cylinder ( Rod through hole formed in 2), 26, 35, silver spring 45, the receiving groove, 27 is a protrusion formed in the piston (2), the other piston (4) is fitted, 35 is a rod through the cover cover (3) Ball, 42 is a flange 44a insertion hole of the rod 44 formed in the piston 4, 43 is a fastening hole, 44b is a groove of the rod 4, 44c is a C ring for fixing the penetrated rod 4, 45 is a fixing plate for fixing the rod 44 to the piston 4, 45a and 45b are through holes and fastening holes formed in the fixing plate 44, 46 is a fastener for fixing the fixing plate 45 to the piston 4, 62 is a threaded portion of the connecting log 6, 61 'is a flexible hose coupled to the male coupling 10, 74 is an airtight ring fitted to the outer circumference of the rear cover 7, 82' is a fixed lever 82 Formed fixing part, 84 is fixed The burr 83 stopper is respectively shown, and in the system relationship, 12a is a dry air shutoff valve, and 12b is a washing water shutoff valve 16a is a discharge shutoff valve, respectively.

When described in detail the operation and the effect on the device of the present invention made of the structure as described above in the order in which it is operated.

First, when the male coupling 10 in which the stop ring 10 'is described is inserted into the stop ring inserting hole 81 of the front cover 8, the male coupling inserting hole 11 of the main body 1 is inserted into the male coupling inserting hole 11. As the male coupling 10 is fitted, one surface of the rear stop ring 10 ′ is caught by an outer surface of the male coupling insertion hole 11, thereby preventing a further suppression. At this time, the fixing lever 82 on both sides is rotated to fix the fixing portion 82 'so as not to be separated by rubbing the other side of the steel stop ring 10', and then operating the control panel (not shown). When instructed, the discharge shutoff valve 16a connected to the drain hole 16 under the main body 1 opens, and at the same time, the flushing water shutoff valve 12b on one side connected to the injection holes 12 and 13 is opened. Ultrapure water washing water having a certain injection pressure is introduced into and sprayed into the body 91 for a predetermined time. At this time, the sprayed water is refracted and sprayed inside by the injection holes 12 and 13 having a predetermined inclination angle. Sprayed to the protrusion 10e and the male coupling insertion groove 5a of the female coupling 10 and the female coupling 5 at the same time to clean the liquid contact portion of the female coupling 5 and the male coupling 10 and to remove contaminants. The contained washing water is collected into a waste water tank (not shown) through the drain hole 16 and its shield valve 16a. When the washing water aeration valve 12b is blocked by the washing water control panel, the drying air blocking valve 12a is opened with a certain time gap, and the cleaning gas is sprayed with a drying gas made of high purity nitrogen gas or clean compressed air. It is sprayed on the female and male couplings 5 and 10 for a predetermined time along the route to be dried.

After the cleaning and drying process is completed in this manner, the cylinders having different pressures in the air inlet holes 14 and 72 in the upper one side and the rear cover 7 of the main body 1 are also in accordance with the operation instructions of the control panel. 2) (4) Drive compressed air is introduced to operate the cylinders (2) and (4) at the same time. At this time, the cylinder (2) according to the compressed air introduced into the air inlet hole (72) is attached to Fig. 3 and As shown in FIG. 4, the cover 4, which is constrained by the rod 44 and interlocked with the cylinder 4, moves relatively to the left side by the compressed air for moving to the right and driving the cylinder 4 therebetween. The cover 52 is moved to the left in the female coupling 5 fixed to the cover cover 3 while horizontally moving along the left side while compressing the intervening spring 45, and the ball 51f is released to release the male coupling. 10 will remain in the insertable state. Of course, at this time, the body 51 of the female coupling 5 is fixed to the cylinder 92 while being fixed to the connecting rod 6, so that the cover 520 releases the ball 51f, and by the compressed air While the cylinder 2 keeps its state and continues to move horizontally to the right side, one side of the cover cover 3 comes into contact with one end of the position detecting rod 91 of the sensing unit 9 and compresses the spring 93 to the above position. The detection rod 91 is pushed outward.

At this time, when the cylinder 2 moves and the female and male couplings 5 and 10 are coupled to each other, the indication ring 92 integrated with the position detecting rod 91 operates the limit switch 94. As a result, the supply of compressed air into the cylinders (2) and (4) is stopped, and the compressed air that is pushing it is released to the atmosphere.

As a result, the cover 3 is moved to the right by the return force of the spring 45 interposed therebetween and the spring 52b of the female coupling 5 supported by the cover 52 while being moved to the right. 51f) is pushed toward the inner diameter so that the constant ball 51f causes the male coupling 10 to be seated in the groove 10d.

This is because the cover cover (3) is returned by the force of the spring (45) (52b) because the supply of compressed air is interrupted when it enters the piston (2) (4) and at the same time the cylinder (2) to the right The moving force is released. At this time, the indicator ring 92 activates the limit switch 95 so that the system recognizes the complete coupling of the male and female couplings 5 and 910 and displays the lamp as a lighting or sound signal. Or, the worker is notified of the complete coupling of the female, male coupling (5) (10). On the other hand, the position detection rod 91 may check the completion state by the operator visually by checking the degree that the other end protrudes to the outside of the front cover (8).

As this fastening process is completed, the completion signal may be sent and displayed on the control panel, thereby automatically or manually refining the chemical transfer process. When the transfer of the chemical is completed and separated, the piston 4 is engaged by the rod 44 as when the compressed air is drawn in through the air inlet hole 27 and the piston 4 is operated. The lid cover 3 is moved to the left side relative to the body 51 so that the cover 52 of the female coupling 5 coupled thereto is moved to the left side. ) Release the restraint by the ball 51f so that the female and male couplings 5 and 10 are detachable, and block the drain hole, that is, the discharge shielding valve 16a. When the compressed air is introduced into the air inlet hole 15 on the opposite side after closing, the piston 2 moves to the left, and the female and male couplings 5 and 10 are separated. At this time, as the piston 2 moves, the body 51 of the arm coupling 5 coupled thereto and the connecting rod 6 coupled thereto move along and coupled to the end of the connecting rod 96. The flexible hose 61 flows. Here, the flexible hose 61 is free to flow along the left and right horizontal movement direction of the cylinder (2), by adopting the flexible hose 61, the liquid contact portion of the chemical transport path to the cylinder (2) and the connecting rod Because it prevents contraction, expansion (in the case of bellows type) or relative friction (sliding) due to the left and right movement of (6), it has a great effect of preventing the occurrence of particles due to contraction, expansion, or frictional movement of the wetted part. Let's find out.

When the connecting rod 6 continues to move and the outer end moves to the leftmost side, the limit switch 20 is operated, and the discharge shield valve 16a is opened and the internal pressure is detected in accordance with the control panel's instruction. The pressure switch coupled with the pressure gauge mounting hole 17 for detecting the pressure inside the device (if the pressure is above the set value, the process inside the device is stopped at a moment) and the air inlet hole 15 is immediately below the set value. And stopping the supply of the compressor supplied to the 72 and releasing the air by using a direction switching valve such as a solenoid valve (not shown), and at the same time, the washing water blocking valve 12b is opened to open the male and female couplings. (10) The wetted parts are spray-washed with washing water for a predetermined time to wash the chemicals. After the washing water spraying process is completed, after the washing water blocking valve 12b is shut off, the drying air blocking valve 12a is opened with a predetermined time gap to spray the drying air for a preset time to wash the washing water remaining inside. To dry. After the dry process is completed by the control panel to indicate the completion indicator to the lamp lights or sound signal roll operator and the operator to release the male coupling 10 by rotating the fixing lever 82 in the released state.

As described above according to the present invention, the male and female couplings allow the cleaning light to be dried, connected and disconnected sequentially in a single device to prevent contamination of the high clean and high purity chemicals, and Improved workability and stability by eliminating risks and hassles of handling. Especially, it is economical and relatively simple structure by using all of its functions. It is apparent that the invention is a very useful invention that can simultaneously achieve various beneficial effects such as widespread use.

Claims (3)

The male coupling insertion hole 11 on one side, and a plurality of injection holes 12, 13 having a predetermined inclination angle before and after the inner middle portion thereof, air inlet holes 14, 15 on both sides, one side Inside the main body 1 having the discharge holes 16 formed in the lower part, the cover cover 3 having the cover insertion hole 31 formed at one side of the piston 2 having the coupling insertion hole 21 at the center thereof is provided. A plurality of rods 44 constrained and penetrated by other pistons 4 having air inlet holes 41 that are fluidly fitted to the other side of the pistons 2, and springs respectively fitted to the rods 44; One side of the connecting rod (6) is elastically installed by the flexible insertion, the coupling insertion hole 21 of the pigtone (2) and the cover insertion hole (31) of the cover cover (3) The body 51 and the cover 52 of the arm coupling 5 coupled to each other are fitted and fixed, respectively, and the connecting rod 6 has a rear cover in which a connection rod insertion hole 71 and an air inlet hole 72 are formed. 7) is fitted The air inlet hole 72 and the air inlet hole 41 formed in the piston 4 is connected to the hose 73 and the other end of the connecting rod 6, the flexible hose connected to the chemical storage side ( 61 is coupled, but the outer ring of the main body 1 in which the male coupling insertion hole 11 is formed a stop ring insertion hole 81 having an inner diameter larger than the male coupling insertion hole 11 is formed and the outer side The front cover 8 is provided with a plurality of fixing levers 82 rotatably coupled to both sides of the middle portion, and a front cover 8 provided with a sensing portion 9 interlocking with the inside of the upper middle portion thereof. The automatic coupling device of the high purity chemical transfer hose, characterized in that the male coupling insertion hole 11 is inserted into the male coupling (10) interposed therebetween. According to claim 1, wherein the detection unit (9) is passed through the upper side of one side of the main body (1) to the spring (93) so that the position detection rod 91 is integrated with the indicator ring 92 in the middle A high purity and high purity chemical transfer hose, characterized in that a plurality of limit switches 94, 95 are installed at a predetermined interval on the upper side of the main body 1, the elastic ring is installed and the indicator ring 92 is located Auto linkage. According to claim 1, wherein the body 51 and the cover 52 of the female coupling (5) is the coupling insertion hole 21 of the piston (2) and the cover insertion hole 31 of the cover cover (3) The grooves 22 and 32 are formed in the grooves, respectively, and then the cut elastic rings 23 and 33 are respectively inserted and fastened and compressed by a plurality of fixing bolts 24 and 34 from the outside thereof. High purity chemical transfer hose, characterized in that the 23, 33 can be fixed to the groove (51a, 52a) formed in the arm coupling (5) while being caught in the groove (22) (32). Automatic coupling device.