TWM559202U - Dust cleaning device - Google Patents

Abstract

The present invention relates to a dust cleaning device, which is connected to a front end of a gas inlet assembly of a combustion chamber, and mainly comprises: a connecting pipe assembly, an exhaust gas diversion for introducing exhaust gas and outputting exhaust gas to the air inlet assembly. The tube, a three-way valve body, a cleaning assembly, and a pressure measuring joint for providing a pressure sensor, wherein the cleaning assembly comprises at least one scraping member, a linkage rod body and an operating member. With the above structure, the connecting pipe assembly is used to connect the exhaust gas guiding pipe, the three-way valve body and the pressure sensor, in addition to sensing the proper flow direction of the exhaust gas by sensing the gas pressure in the connecting pipe assembly, and more by manual The cleaning component is operated to avoid dust accumulation, which affects the sensing accuracy of the pressure sensor, and also avoids the problem of toxic gas leakage or wafer scrapping caused by the shutdown cleaning dust.

Description

Dust cleaning device

The present invention provides a dust cleaning device, in particular, a dust cleaning device which can be used for the pressure sensor section of an exhaust gas treatment machine for semiconductor related industries, which has dust cleaning, and has the advantages of simple structure and convenient operation.

According to the semiconductor process, the exhaust gas is not only harmful to the human body and the environment, but also flammable, explosive, and corrosive. In terms of protecting the living environment and sustainable operation, the exhaust gas must be specially treated. The harmfulness of the exhaust gas is eliminated before it is discharged into the environment, and the auxiliary machine connected to it, for example, the exhaust gas processor, is used to process the exhaust gas generated by the wafer process. After the exhaust gas treatment machine is used for a period of time, the exhaust gas becomes dust or even builds up deposits, so the removal of the deposit is required to avoid internal blockage of the exhaust gas processor.

Dust accumulation usually occurs in the pressure sensor part, the intake port assembly part, or the combustion chamber part. The function of the pressure sensor is to detect the pipeline pressure, but the pressure of the pressure sensor is changed because the branch pipe is easy to accumulate dust. When the signal is transmitted to the machine, the machine will send a signal to the three-way valve to direct the exhaust gas to another exhaust gas processor. However, if the main unit is still running at this time, the pressure sensor cannot be removed for cleaning. It needs to be cleaned after the main unit stops production and stops normally. Otherwise, the gas will be leaked from the hole of the branch pipe. However, if another exhaust gas processor is also shut down, it will cause the exhaust gas (including toxic gas) to be unprocessed, which will cause the mainframe to be stopped and even cause wafer waste loss.

In other words, all parts of the three-way valve will continue to flow into the standby machine, so it is not possible to shut down any parts before the three-way valve. Therefore, the pressure sensor needs to be kept free of dust and blockage, but the accumulation of large dust cannot easily use the nitrogen purge to keep the branch pipe and the pressure sensor clean.

Therefore, how to solve the above problems and deficiencies in the past, that is, the applicants of the new type and the relevant manufacturers engaged in this industry are eager to study the direction of improvement.

Therefore, in view of the above-mentioned shortcomings, the applicants of the present invention have collected relevant information and evaluated them through multiple parties. Considering and accumulating many years of experience in this industry, through continuous trial and modification, the pressure sensor section of the exhaust gas processor for semiconductor related industries is designed to carry out dust cleaning, and has a simple structure and operation. A new patent holder for the convenience of dust cleaning devices.

The main purpose of the novel is to connect the exhaust pipe, the three-way valve body and the pressure sensor to the connecting pipe assembly, and use the cleaning component to remove the dust, thereby effectively solving the trouble of the pressure sensor dust accumulation.

In order to achieve the above object, the present invention is coupled to a front end of a combustion chamber assembly of a combustion chamber, and mainly includes: a connecting pipe assembly having an exhaust gas guiding pipe connected to the interior thereof at one end thereof for introduction Exhaust gas and output exhaust gas to the air inlet assembly, and a side of the exhaust gas guiding tube is provided with a three-way valve body connected thereto, which selectively blocks the communication path between the exhaust gas guiding tube and the air inlet assembly And a cleaning component is disposed at an end of the connecting pipe assembly facing away from the exhaust gas guiding pipe, the cleaning component comprises at least one scraping member for contacting the inner wall of the connecting pipe assembly, and an activity is disposed on the connecting pipe assembly And a connecting rod body connected to the scraping member and an operating member disposed on a side of the connecting rod body facing away from the scraping member, and a side of the connecting tube assembly is disposed on the exhaust gas guiding tube and the cleaning A pressure measuring connection between the components and the interior of the connecting pipe assembly is provided for providing a pressure sensor.

The user only needs to connect the exhaust gas guiding pipe to the front end of the air inlet port assembly of the combustion chamber, and the gas pressure state of the exhaust gas guiding pipe, the three-way valve body and the pressure sensor can be integrated by the connecting pipe assembly. The pressure sensor can also determine whether the pipeline is blocked by detecting the gas pressure at the exhaust gas guiding pipe, and selectively emit a signal to control the flow direction of the three-way valve body. What is important is that when the dust accumulation causes the gas pressure to increase, or the three-way valve body has switched the exhaust gas to the other exhaust gas treatment device, the user simply pushes and pulls the operating member to make the scraping member in the connecting pipe by interlocking the rod body. Reciprocating motion is performed to scrape the deposits accumulated in the pipe wall to complete the cleaning of the connecting pipe assembly by the cleaning assembly, thereby ensuring the cleanness of the pressure sensor.

According to the above technique, it is possible to break through the problem that the pressure sensor section existing in the exhaust gas processor of the conventional semiconductor device is easy to accumulate dust, and it is impossible to stop the cleaning at will, and the practical advantage of the above advantages is achieved.

1‧‧‧dust cleaning device

2‧‧‧Connecting pipe assembly

21‧‧‧T-shaped tube

3‧‧‧Exhaust gas guiding tube

4‧‧‧Three-way valve body

41‧‧‧Second exhaust gas guiding tube

5‧‧‧Clean components

51‧‧‧Scrapping pieces

511‧‧‧Ring sheet

512‧‧‧Support

513‧‧‧镂空部

52‧‧‧ linkage rod

53‧‧‧Operating parts

54‧‧‧ sealing element

6‧‧‧Measurement pressure joint

61‧‧‧ Pressure sensor

7‧‧‧Auxiliary Linkage

8‧‧‧ combustion chamber

81‧‧‧Air inlet assembly

82, 82a‧‧ ‧ exhaust gas treatment machine

821‧‧‧ outer casing

The first figure is a perspective view of a preferred embodiment of the present invention.

The second drawing is an exploded view of the preferred embodiment of the present invention.

The third figure is a schematic diagram of the positional relationship of the preferred embodiment of the present invention.

The fourth figure is an air flow path diagram (1) of the preferred embodiment of the present invention.

Figure 5 is a flow path diagram (2) of the preferred embodiment of the present invention.

Figure 6 is a schematic view (1) of the operation of the preferred embodiment of the present invention.

Figure 7 is a schematic view of the action of the preferred embodiment of the present invention (2).

In order to achieve the above objects and effects, the technical means and structure adopted by the present invention are described in detail in the preferred embodiment of the present invention, and the features and functions thereof are as follows.

Please refer to the first to third figures, which are schematic diagrams of the perspective view to the positional relationship of the preferred embodiment of the present invention. It can be clearly seen from the figure that the dust cleaning device 1 of the present invention is connected to a combustion chamber. The front end of the intake port assembly 81 of the main assembly 81 includes a connecting pipe assembly 2 that communicates with the exhaust gas guiding pipe 3 or the pressure measuring connecting portion 6 described below to form a T-shaped pipe. The body 21 is provided with an exhaust gas guiding tube 3 disposed at one end of the connecting pipe assembly 2 and communicating with the inside thereof, for introducing the exhaust gas and outputting exhaust gas to the air inlet port assembly 81; one of the connecting pipe assembly 2 is provided The side auxiliary connecting portion 7 is for inputting an explosion-proof gas, and the explosion-proof gas system is one of nitrogen gas or inert gas; a three-way valve body 4 disposed on one side of the exhaust gas guiding pipe 3 and communicating therewith is selected The communication path between the exhaust gas guiding tube 3 and the air inlet assembly 81 is blocked; a cleaning assembly 5 disposed at an end of the connecting tube assembly 2 facing away from the exhaust gas guiding tube 3, the cleaning assembly 5 comprising at least a scraping member 51 for resisting the inner wall of the connecting pipe assembly 2, and an activity disposed on the connecting pipe assembly 2 And an interlocking rod body 52 connecting the scraping member 51, an operating member 53 disposed on a side of the linking rod body 52 facing away from the scraping member 51, and a sealing member 54 disposed at an opening of the connecting tube assembly 2 The scraping member 51 includes an annular sheet body 511, at least one supporting portion 512 formed on the inner side of the annular sheet body 511, and a plurality of forming portions between the annular sheet body 511 and the supporting portion 512. a hollow portion 513; and a pressure measuring joint portion 6 disposed on the side of the connecting pipe assembly 2 between the exhaust gas guiding pipe 3 and the cleaning assembly 5 and communicating with the inside of the connecting pipe assembly 2 A pressure sensor 61 is disposed; an exhaust gas treatment device 82 is disposed in the exhaust gas treatment device 82, and the exhaust gas treatment device 82 includes an outer casing 821, and the dust cleaning device 1 is disposed on the On the outer casing 821; With the above description, the structure of the present technology can be understood, and according to the corresponding cooperation of the structure, the pressure sensor 61 section of the exhaust gas processor 82 for the semiconductor related industry can be dust-cleaned, and has a simple structure. The advantages of operation are convenient, and the detailed explanation will be explained below.

Please refer to the first to seventh figures at the same time, which is a perspective view to a motion diagram (2) of the preferred embodiment of the present invention. When the above components are assembled, it can be clearly seen from the figure. The new type of dust cleaning device 1 is disposed on the outer casing 821 of the exhaust gas treatment machine 82, and is disposed at the front end of the intake port assembly 81 for the exhaust gas flow path, and is cleaned by the three-way valve body 4 as dust cleaning. The device 1 is demarcated from the exhaust gas processor 82. In other words, the present invention is directed to the problem of dust accumulation in the section of the pressure sensor 61 before the three-way valve body 4.

Please refer to the fourth and fifth figures at the same time. Under normal circumstances, the exhaust gas flows from the upper end of the exhaust gas guiding pipe 3, and then directly enters the air inlet assembly 81 through the three-way valve body 4, and finally is introduced into the combustion chamber 8. Exhaust gas treatment, and based on the gas diffusion principle, the exhaust gas will also fill the T-shaped pipe body 21 in the connecting pipe assembly 2, so that the gas pressures of the connecting pipe assembly 2, the exhaust gas guiding pipe 3, and the pressure sensor 61 are the same. The pressure sensor 61 monitors the gas pressure in the connecting pipe assembly 2 and the exhaust gas guiding pipe 3 before the three-way valve body 4. When the connection between the connecting pipe assembly 2, the exhaust gas guiding pipe 3, or the pressure measuring connecting portion 6 where the pressure sensor 61 is provided, dust accumulation occurs, and the gas pressure is abnormally increased. At this time, the pressure sensor 61 transmits The message is sent to the exhaust gas processor 82 to control the three-way valve body 4 to block the communication path between the exhaust gas guiding pipe 3 and the intake port assembly 81, and in turn to communicate with the second exhaust gas guiding pipe 41, and the other exhaust gas treating device 82a. Continue processing.

When the above-mentioned dust accumulation condition occurs, the user can simply use the action of the reverse pumping operation member 53 to drive the linkage rod body 52 so that the scraping member 51 at the other end of the linkage rod body 52 is connected. The tube assembly 2 reciprocates to scrape the deposit accumulated in the tube wall by the annular sheet 511, thereby completing the cleaning of the connecting tube assembly 2 by the cleaning assembly 5, thereby ensuring the cleanness of the pressure sensor 61. . During the movement of the annular piece 511, the scraping member 51 has a plurality of hollow portions 513 between the supporting portions 512 for allowing gas to pass freely without affecting the gas pressure due to the reciprocating motion, and matching the connecting tube The sealing element 54 at the opening of the 2 prevents gas from leaking out.

Please also refer to the seventh figure. In addition, an auxiliary connecting part 7 is provided on the side of the connecting pipe assembly 2, which can be used to input an explosion-proof gas such as nitrogen or an inert gas (because of its chemical nature, it is extremely inactive, even at high temperature and high pressure. It will not explode, so you can use the blowing action to blow the fine dust in the connecting pipe assembly 2 directly. The exhaust gas guiding pipe 3 is naturally dropped into the exhaust gas treating machine 82, so that the user does not have to perform the cleaning operation frequently, and the operation of the cleaning assembly 5 does not affect the operation of the exhaust gas treating machine 82 at all (no need to stop Or the pressure sensor 61) is removed, so the user can clean it at any time.

However, the above description is only the preferred embodiment of the present invention, and thus does not limit the scope of the patent of the present invention. Therefore, the simple modification and equivalent structural changes of the present specification and the drawings should be treated similarly. It is included in the scope of this new patent and is given to Chen Ming.

In summary, the dust cleaning device of the present invention can achieve its efficacy and purpose when used, so the new type is a new type of practicality, which is in line with the application requirements of the new patent, and the application is made according to law. The trial committee will grant this new type as soon as possible to protect the applicant's hard work. If there is any doubt in the audit committee, please do not hesitate to give instructions. The applicant will try his best to cooperate with him.

Claims (9)

A dust cleaning device is connected to a front end of a gas inlet assembly of a combustion chamber, and mainly comprises: a connecting pipe assembly; an exhaust gas guiding pipe disposed at one end of the connecting pipe assembly and communicating with the interior thereof for introducing Exhaust gas and output exhaust gas to the air inlet assembly; a three-way valve body disposed on one side of the exhaust gas guiding tube and communicating therewith selectively blocking communication between the exhaust gas guiding tube and the air inlet assembly a cleaning component disposed on the end of the connecting pipe assembly away from the exhaust gas guiding pipe, the cleaning component comprising at least one scraping member for contacting the inner wall of the connecting pipe assembly, and an activity disposed on the connecting pipe An interlocking rod body which is connected to the scraping member and an operating member disposed on a side of the connecting rod body facing away from the scraping member; and a side disposed on the side of the connecting tube assembly and located in the exhaust gas guiding tube A pressure measuring connection between the cleaning components and the interior of the connecting pipe assembly is provided with a pressure sensor. The dust cleaning device of claim 1, wherein the connecting pipe assembly side is provided with an auxiliary connecting portion for inputting an explosion-proof gas. The dust cleaning device of claim 2, wherein the explosion-proof gas system is one of nitrogen or an inert gas. The dust cleaning device of claim 1, wherein the cleaning assembly comprises a sealing member disposed at an opening of the connecting tube assembly. The dust cleaning device of claim 1, wherein the scraping member comprises an annular sheet body, at least one support portion formed on the inner side of the annular sheet body, and a plurality of annular sheet bodies formed on the inner side of the annular sheet body a hollow portion between the support portion and the support portion. The dust cleaning device of claim 1, wherein the connecting pipe assembly and the exhaust gas guiding pipe or the pressure measuring connecting portion communicate with each other to form a T-shaped pipe body. The dust cleaning device of claim 1, wherein the combustion chamber is disposed in an exhaust gas processor. The dust cleaning device of claim 7, wherein the exhaust gas treatment device comprises an outer casing, and the dust cleaning device is disposed on the outer casing. The dust cleaning device of claim 1, wherein the three-way valve body is different from the side of the exhaust gas guiding tube with a second exhaust gas guiding tube.