JPWO2024252879A5 - - Google Patents

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Publication number
JPWO2024252879A5
JPWO2024252879A5 JP2025526025A JP2025526025A JPWO2024252879A5 JP WO2024252879 A5 JPWO2024252879 A5 JP WO2024252879A5 JP 2025526025 A JP2025526025 A JP 2025526025A JP 2025526025 A JP2025526025 A JP 2025526025A JP WO2024252879 A5 JPWO2024252879 A5 JP WO2024252879A5
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JP
Japan
Prior art keywords
pellicle
outgassing
clip
less
amount
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Pending
Application number
JP2025526025A
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English (en)
Japanese (ja)
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JPWO2024252879A1 (https=
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Application filed filed Critical
Priority claimed from PCT/JP2024/018053 external-priority patent/WO2024252879A1/ja
Publication of JPWO2024252879A1 publication Critical patent/JPWO2024252879A1/ja
Publication of JPWO2024252879A5 publication Critical patent/JPWO2024252879A5/ja
Pending legal-status Critical Current

Links

JP2025526025A 2023-06-09 2024-05-15 Pending JPWO2024252879A1 (https=)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2023095898 2023-06-09
PCT/JP2024/018053 WO2024252879A1 (ja) 2023-06-09 2024-05-15 ペリクル収納容器用クリップ、ペリクル収容体及びペリクル

Publications (2)

Publication Number Publication Date
JPWO2024252879A1 JPWO2024252879A1 (https=) 2024-12-12
JPWO2024252879A5 true JPWO2024252879A5 (https=) 2025-10-31

Family

ID=93795428

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2025526025A Pending JPWO2024252879A1 (https=) 2023-06-09 2024-05-15

Country Status (5)

Country Link
JP (1) JPWO2024252879A1 (https=)
KR (1) KR20260003370A (https=)
CN (1) CN121263370A (https=)
TW (1) TW202500479A (https=)
WO (1) WO2024252879A1 (https=)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5209423B2 (ja) * 2008-09-11 2013-06-12 旭化成イーマテリアルズ株式会社 ペリクル梱包構造体
JP2013197513A (ja) * 2012-03-22 2013-09-30 Tosoh Corp 電子材料の保管・運搬用ケース
JP5767730B2 (ja) * 2014-03-20 2015-08-19 旭化成イーマテリアルズ株式会社 収納容器からの大型ペリクルの取出し方法

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