JPWO2024194995A1 - - Google Patents
Info
- Publication number
- JPWO2024194995A1 JPWO2024194995A1 JP2025507968A JP2025507968A JPWO2024194995A1 JP WO2024194995 A1 JPWO2024194995 A1 JP WO2024194995A1 JP 2025507968 A JP2025507968 A JP 2025507968A JP 2025507968 A JP2025507968 A JP 2025507968A JP WO2024194995 A1 JPWO2024194995 A1 JP WO2024194995A1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/JP2023/010925 WO2024194995A1 (ja) | 2023-03-20 | 2023-03-20 | ワーク回転装置、ｐｖｄ処理装置および被覆工具の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPWO2024194995A1 true JPWO2024194995A1 (https=) | 2024-09-26 |
| JPWO2024194995A5 JPWO2024194995A5 (https=) | 2025-10-03 |
Family
ID=92841352
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2025507968A Pending JPWO2024194995A1 (https=) | 2023-03-20 | 2023-03-20 |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JPWO2024194995A1 (https=) |
| CN (1) | CN120826491A (https=) |
| WO (1) | WO2024194995A1 (https=) |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04110749U (ja) * | 1991-03-04 | 1992-09-25 | 株式会社神戸製鋼所 | アークイオンプレーテイング装置における回転テーブル |
| JP2009280881A (ja) * | 2008-05-26 | 2009-12-03 | Nissin Electric Co Ltd | 膜形成対象物品支持装置及び膜形成装置 |
| JP6135519B2 (ja) * | 2014-01-17 | 2017-05-31 | 株式会社デンソー | 成膜装置 |
| JP6763802B2 (ja) * | 2017-02-21 | 2020-09-30 | 株式会社神戸製鋼所 | ワーク回転装置およびそれを備えた成膜装置 |
-
2023
- 2023-03-20 CN CN202380092623.3A patent/CN120826491A/zh active Pending
- 2023-03-20 JP JP2025507968A patent/JPWO2024194995A1/ja active Pending
- 2023-03-20 WO PCT/JP2023/010925 patent/WO2024194995A1/ja not_active Ceased
Also Published As
| Publication number | Publication date |
|---|---|
| WO2024194995A1 (ja) | 2024-09-26 |
| CN120826491A (zh) | 2025-10-21 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20250724 |
|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20250724 |