CN120826491A - 工件旋转装置、pvd处理装置及涂层刀具的制造方法 - Google Patents

工件旋转装置、pvd处理装置及涂层刀具的制造方法

Info

Publication number
CN120826491A
CN120826491A CN202380092623.3A CN202380092623A CN120826491A CN 120826491 A CN120826491 A CN 120826491A CN 202380092623 A CN202380092623 A CN 202380092623A CN 120826491 A CN120826491 A CN 120826491A
Authority
CN
China
Prior art keywords
workpiece
rotation
revolution
rotating device
workpiece rotating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202380092623.3A
Other languages
English (en)
Chinese (zh)
Inventor
下尾崎大作
城御堂浩美
胁真宏
森聪史
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kyocera Corp
Original Assignee
Kyocera Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kyocera Corp filed Critical Kyocera Corp
Publication of CN120826491A publication Critical patent/CN120826491A/zh
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
CN202380092623.3A 2023-03-20 2023-03-20 工件旋转装置、pvd处理装置及涂层刀具的制造方法 Pending CN120826491A (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2023/010925 WO2024194995A1 (ja) 2023-03-20 2023-03-20 ワーク回転装置、ｐｖｄ処理装置および被覆工具の製造方法

Publications (1)

Publication Number Publication Date
CN120826491A true CN120826491A (zh) 2025-10-21

Family

ID=92841352

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202380092623.3A Pending CN120826491A (zh) 2023-03-20 2023-03-20 工件旋转装置、pvd处理装置及涂层刀具的制造方法

Country Status (3)

Country Link
JP (1) JPWO2024194995A1 (https=)
CN (1) CN120826491A (https=)
WO (1) WO2024194995A1 (https=)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04110749U (ja) * 1991-03-04 1992-09-25 株式会社神戸製鋼所 アークイオンプレーテイング装置における回転テーブル
JP2009280881A (ja) * 2008-05-26 2009-12-03 Nissin Electric Co Ltd 膜形成対象物品支持装置及び膜形成装置
JP6135519B2 (ja) * 2014-01-17 2017-05-31 株式会社デンソー 成膜装置
JP6763802B2 (ja) * 2017-02-21 2020-09-30 株式会社神戸製鋼所 ワーク回転装置およびそれを備えた成膜装置

Also Published As

Publication number Publication date
JPWO2024194995A1 (https=) 2024-09-26
WO2024194995A1 (ja) 2024-09-26

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