JPWO2024194995A5 - - Google Patents

Info

Publication number
JPWO2024194995A5
JPWO2024194995A5 JP2025507968A JP2025507968A JPWO2024194995A5 JP WO2024194995 A5 JPWO2024194995 A5 JP WO2024194995A5 JP 2025507968 A JP2025507968 A JP 2025507968A JP 2025507968 A JP2025507968 A JP 2025507968A JP WO2024194995 A5 JPWO2024194995 A5 JP WO2024194995A5
Authority
JP
Japan
Prior art keywords
workpiece
rotation
rotating device
revolution
axis
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2025507968A
Other languages
English (en)
Japanese (ja)
Other versions
JPWO2024194995A1 (https=
Filing date
Publication date
Application filed filed Critical
Priority claimed from PCT/JP2023/010925 external-priority patent/WO2024194995A1/ja
Publication of JPWO2024194995A1 publication Critical patent/JPWO2024194995A1/ja
Publication of JPWO2024194995A5 publication Critical patent/JPWO2024194995A5/ja
Pending legal-status Critical Current

Links

JP2025507968A 2023-03-20 2023-03-20 Pending JPWO2024194995A1 (https=)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2023/010925 WO2024194995A1 (ja) 2023-03-20 2023-03-20 ワーク回転装置、ｐｖｄ処理装置および被覆工具の製造方法

Publications (2)

Publication Number Publication Date
JPWO2024194995A1 JPWO2024194995A1 (https=) 2024-09-26
JPWO2024194995A5 true JPWO2024194995A5 (https=) 2025-10-03

Family

ID=92841352

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2025507968A Pending JPWO2024194995A1 (https=) 2023-03-20 2023-03-20

Country Status (3)

Country Link
JP (1) JPWO2024194995A1 (https=)
CN (1) CN120826491A (https=)
WO (1) WO2024194995A1 (https=)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04110749U (ja) * 1991-03-04 1992-09-25 株式会社神戸製鋼所 アークイオンプレーテイング装置における回転テーブル
JP2009280881A (ja) * 2008-05-26 2009-12-03 Nissin Electric Co Ltd 膜形成対象物品支持装置及び膜形成装置
JP6135519B2 (ja) * 2014-01-17 2017-05-31 株式会社デンソー 成膜装置
JP6763802B2 (ja) * 2017-02-21 2020-09-30 株式会社神戸製鋼所 ワーク回転装置およびそれを備えた成膜装置

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