JPWO2024189664A1 - - Google Patents
Info
- Publication number
- JPWO2024189664A1 JPWO2024189664A1 JP2025506228A JP2025506228A JPWO2024189664A1 JP WO2024189664 A1 JPWO2024189664 A1 JP WO2024189664A1 JP 2025506228 A JP2025506228 A JP 2025506228A JP 2025506228 A JP2025506228 A JP 2025506228A JP WO2024189664 A1 JPWO2024189664 A1 JP WO2024189664A1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
Landscapes
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/JP2023/009219 WO2024189664A1 (ja) | 2023-03-10 | 2023-03-10 | 検査用光学装置、欠陥検査装置、および基板の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPWO2024189664A1 true JPWO2024189664A1 (https=) | 2024-09-19 |
| JPWO2024189664A5 JPWO2024189664A5 (https=) | 2025-11-21 |
Family
ID=92754513
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2025506228A Pending JPWO2024189664A1 (https=) | 2023-03-10 | 2023-03-10 |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JPWO2024189664A1 (https=) |
| WO (1) | WO2024189664A1 (https=) |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006184303A (ja) * | 2004-12-24 | 2006-07-13 | Olympus Corp | 画像検査装置 |
| JP2008261769A (ja) * | 2007-04-13 | 2008-10-30 | Olympus Corp | 走査型光学装置および観察方法 |
| US20190004300A1 (en) * | 2017-01-27 | 2019-01-03 | Agilent Technologies, Inc. | Three-Dimensional Infrared Imaging of Surfaces Utilizing Laser Displacement Sensor |
| JP2019208039A (ja) * | 2013-04-03 | 2019-12-05 | ケーエルエー コーポレイション | 垂直スタックメモリにおいて欠陥深さを決定するための方法及びシステム |
| JP2020189762A (ja) * | 2019-05-20 | 2020-11-26 | 株式会社サイオクス | 窒化物半導体基板の製造方法、窒化物半導体基板および積層構造体 |
| JP2021516370A (ja) * | 2018-03-14 | 2021-07-01 | ナノトロニクス イメージング インコーポレイテッドＮａｎｏｔｒｏｎｉｃｓ Ｉｍａｇｉｎｇ，Ｉｎｃ． | 顕微鏡自動焦点のシステム、装置、および方法 |
-
2023
- 2023-03-10 JP JP2025506228A patent/JPWO2024189664A1/ja active Pending
- 2023-03-10 WO PCT/JP2023/009219 patent/WO2024189664A1/ja not_active Ceased
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006184303A (ja) * | 2004-12-24 | 2006-07-13 | Olympus Corp | 画像検査装置 |
| JP2008261769A (ja) * | 2007-04-13 | 2008-10-30 | Olympus Corp | 走査型光学装置および観察方法 |
| JP2019208039A (ja) * | 2013-04-03 | 2019-12-05 | ケーエルエー コーポレイション | 垂直スタックメモリにおいて欠陥深さを決定するための方法及びシステム |
| US20190004300A1 (en) * | 2017-01-27 | 2019-01-03 | Agilent Technologies, Inc. | Three-Dimensional Infrared Imaging of Surfaces Utilizing Laser Displacement Sensor |
| JP2021516370A (ja) * | 2018-03-14 | 2021-07-01 | ナノトロニクス イメージング インコーポレイテッドＮａｎｏｔｒｏｎｉｃｓ Ｉｍａｇｉｎｇ，Ｉｎｃ． | 顕微鏡自動焦点のシステム、装置、および方法 |
| JP2020189762A (ja) * | 2019-05-20 | 2020-11-26 | 株式会社サイオクス | 窒化物半導体基板の製造方法、窒化物半導体基板および積層構造体 |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2024189664A1 (ja) | 2024-09-19 |
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